| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/06/2004 | EP1416004A1 Polymerizable amine mixtures, amine polymer materials and their use |
| 05/06/2004 | EP1415929A1 Container for storing and transporting of sensitive platelike items |
| 05/06/2004 | EP1415519A1 Welded leadframe |
| 05/06/2004 | EP1415378A1 Voltage limiting protection for high frequency power device |
| 05/06/2004 | EP1415374A2 Separating of optical integrated modules and structures formed thereby |
| 05/06/2004 | EP1415351A1 Electronic device using carbon nanotubes |
| 05/06/2004 | EP1415349A2 Memory cell |
| 05/06/2004 | EP1415348A2 Trench-gate semiconductor devices, and their manufacture |
| 05/06/2004 | EP1415346A2 Floating gate memory array and methods of forming |
| 05/06/2004 | EP1415344A2 Semiconductor structure implementing sacrificial material and methods for making and implementing the same |
| 05/06/2004 | EP1415341A2 Method of fabricating an alloy film on a face of a heat exchanger for an integrated circuit |
| 05/06/2004 | EP1415340A2 Method for the parallel production of an mos transistor and a bipolar transistor |
| 05/06/2004 | EP1415339A2 Method for the parallel production of an mos transistor and a bipolar transistor |
| 05/06/2004 | EP1415338A2 Dual layer hard mask for edram gate etch process |
| 05/06/2004 | EP1415337A2 Dual layer cmos devices |
| 05/06/2004 | EP1415336A2 Methods and systems for positioning substrates using spring force of phase-changeable bumps therebetween |
| 05/06/2004 | EP1415335A1 Use of diverse materials in air-cavity packaging of electronic devices |
| 05/06/2004 | EP1415334A1 Manufacture of semiconductor devices with schottky barriers |
| 05/06/2004 | EP1415333A1 Selective metal oxide removal |
| 05/06/2004 | EP1415332A2 Method and device for the production of thin epiatctic semiconductor layers |
| 05/06/2004 | EP1415331A2 Formation of planar strained layers |
| 05/06/2004 | EP1415330A1 Selective base etching |
| 05/06/2004 | EP1415329A2 Method and apparatus for vacuum pumping a susceptor shaft |
| 05/06/2004 | EP1415328A2 Process and apparatus for mounting semiconductor components to substrates and parts therefor |
| 05/06/2004 | EP1415327A2 Improved lamphead for a rapid thermal processing chamber |
| 05/06/2004 | EP1415320A1 Method of measuring the performance of a scanning electron microscope |
| 05/06/2004 | EP1415303A2 Sense amplifier and architecture for open digit arrays |
| 05/06/2004 | EP1415253A2 Routing method and apparatus |
| 05/06/2004 | EP1415200A1 Method for printing a near-field photoinduced stable structure and optical fibre tip therefor |
| 05/06/2004 | EP1415198A2 Lithographic template |
| 05/06/2004 | EP1415197A2 Optical proximity correction for phase shifting photolithographic masks |
| 05/06/2004 | EP1415168A2 Application-specific testing methods for programmable logic devices |
| 05/06/2004 | EP1415013A1 Rapid cycle chamber having a top vent with nitrogen purge |
| 05/06/2004 | EP1415011A1 A method for reactive sputtering deposition |
| 05/06/2004 | EP1414895A1 Flame retardant molding compositions |
| 05/06/2004 | EP1414722A1 Reticle protection and transport |
| 05/06/2004 | EP1414719A1 Thin wafer carrier |
| 05/06/2004 | EP1414718A1 Protective shipper |
| 05/06/2004 | EP1414609A2 Etching process for micromachining crystalline materials and devices fabricated thereby |
| 05/06/2004 | EP1414587A1 Method of and apparatus for substrate pre-treatment |
| 05/06/2004 | EP1414545A2 Apparatus for and method of trapping products in exhaust gas |
| 05/06/2004 | EP1340249B1 Patterned buried insulator |
| 05/06/2004 | EP1251996B1 Grinding pin for grinding machines comprising resin bonded sections of rough grit and fine grit |
| 05/06/2004 | EP1133652B1 Manifold system of removable components for distribution of fluids |
| 05/06/2004 | EP1061111B1 Abrasive composition for polishing semiconductor device and process for producing semiconductor device with the same |
| 05/06/2004 | EP1012547B1 Miniature semiconductor condenser microphone |
| 05/06/2004 | EP0987218B1 Process for the formation of oxide ceramic thin film |
| 05/06/2004 | EP0981656A4 Low resistivity w using b 2?h 6? |
| 05/06/2004 | EP0954621A4 Method and apparatus for reducing deposition of material in the exhaust pipe of a reaction furnace |
| 05/06/2004 | EP0951057B1 Substrate flattening method |
| 05/06/2004 | EP0944482B1 Apparatus and method for recovering photoresist developers and strippers |
| 05/06/2004 | EP0906637B1 Gas delivery systems for particle beam processing |
| 05/06/2004 | EP0878022B1 Method for forming ultra-thin gate oxides |
| 05/06/2004 | DE19952316B4 Verfahren zum Herstellen einer Gateisolierung und einer Trennisolierung in einem Dünnfilmtransistor A method for forming a gate insulation and a release isolation in a thin film transistor |
| 05/06/2004 | DE19937513B4 Vorrichtungen und Verfahren zur gleichverteilten Gasinjektion bei der Behandlung von Halbleitersubstraten Devices and methods for uniformly distributed gas injection in the treatment of semiconductor substrates, |
| 05/06/2004 | DE19929723B4 Verfahren zur Herstellung einer Elektrode A method for producing an electrode |
| 05/06/2004 | DE19837646B4 Verfahren zum Bearbeiten eines Halbleitersubstrats A method of processing a semiconductor substrate |
| 05/06/2004 | DE19804004B4 Verfahren zum Herstellen eines CCD-Bildsensors A method of manufacturing a CCD image sensor |
| 05/06/2004 | DE19716690B4 Wärmebehandlungsvorrichtung für Halbleiterkristallscheiben Heat treatment apparatus for semiconductor crystal wafers |
| 05/06/2004 | DE19705302B4 Verfahren zum Bilden von MOS- und Bipolartransistoren A method for forming MOS and bipolar transistors |
| 05/06/2004 | DE19654703B4 Vorrichtung und Verfahren zum Formen von Zuleitungen Apparatus and method for forming leads |
| 05/06/2004 | DE19631133B4 Halbleitervorrichtung mit einer Sicherungsschicht A semiconductor device with a data link layer |
| 05/06/2004 | DE10338088A1 Verfahren zur Herstellung eines Glassubstrats für einen Maskenrohling, Verfahren zur Herstellung eines Maskenrohlings, Verfahren zur Herstellung einer Transfermaske, Verfahren zur Herstllung eines Halbleiterbauelements, Glassubstrat für einen Maskenrohling, Maskenrohling und Transfermaske A process for producing a glass substrate for a mask blank, method of producing a mask blank, method of manufacturing a transfer mask, Herstllung method for a semiconductor device, glass substrate for a mask blank, the mask blank and transfer mask |
| 05/06/2004 | DE10327929A1 Halbleitervorrichtung und Verfahren zu deren Herstellung Semiconductor device and process for their preparation |
| 05/06/2004 | DE10249350A1 Vorrichtung und Verfahren zum anisotropen Plasmaätzen eines Substrates, insbesondere eines Siliziumkörpers Apparatus and method for anisotropic plasma etching of a substrate, in particular a silicon body |
| 05/06/2004 | DE10248980A1 Production of structured silicon dioxide layers on process surfaces comprises preparing a substrate with a relief , forming a starter layer on sections of the process surfaces, and applying tris(tert-butoxy)silanol |
| 05/06/2004 | DE10248723A1 Integrierte Schaltungsanordnung mit Kondensatoren und mit vorzugsweise planaren Transistoren und Herstellungsverfahren Integrated circuit arrangement including capacitors and with preferably planar transistors and methods of manufacture |
| 05/06/2004 | DE10248722A1 Integrierte Schaltungsanordnung mit Kondensator und Herstellungsverfahren Integrated circuit arrangement having a capacitor and manufacturing method |
| 05/06/2004 | DE10248481A1 Process for the wet chemical treatment of silicon, e.g. wafers, comprises using an etching liquid containing water, nitric acid and hydrofluoric acid |
| 05/06/2004 | DE10246728B3 Verfahren zur Herstellung gedünnter Chipstapel zB für den Einsatz in einer Chipkarte A process for producing thinned chip pile, for example, for use in a smart card |
| 05/06/2004 | DE10209115B4 Halbleiterbauelement mit porösen Bereichen A semiconductor device having porous regions |
| 05/06/2004 | CA2502286A1 A method of forming shallow trench isolation structure in a semiconductor device |
| 05/05/2004 | CN1494819A Extreme ultraviolet generating device, exposure device using the same and semiconductor mfg. method |
| 05/05/2004 | CN1494742A Semiconductor device and production method thereof |
| 05/05/2004 | CN1494740A SLurry and method for chemical mechanical polishing of copper |
| 05/05/2004 | CN1494739A Method for making electronic devices including silicon and LTCC and devices produced thereby |
| 05/05/2004 | CN1494738A Heat treating device |
| 05/05/2004 | CN1494737A Plasma processor and plasma processing method |
| 05/05/2004 | CN1494736A Anodization apparatus and method |
| 05/05/2004 | CN1494735A Chemical-mechanical planarization using ozone |
| 05/05/2004 | CN1494734A Polishing element, CMP polishing device and production method for semiconductor device |
| 05/05/2004 | CN1494733A High-pressure treatment method |
| 05/05/2004 | CN1494732A Process for making sub-lithographic photoresist features |
| 05/05/2004 | CN1494604A Method for producing parts and vacuum processing system |
| 05/05/2004 | CN1494602A Assembly of physical vapor deposition target and method for producing same |
| 05/05/2004 | CN1494601A Physical vapor deposition target/backing plate assemblies, and methods of forming same |
| 05/05/2004 | CN1494559A Organic compositions |
| 05/05/2004 | CN1494470A Controlled attenuation capillary |
| 05/05/2004 | CN1494368A Printed cirucitboard and its mfg. method |
| 05/05/2004 | CN1494361A Electroluminescent display device and its mfg. method |
| 05/05/2004 | CN1494227A Input device usable as electronic label |
| 05/05/2004 | CN1494166A Semiconductor device and mfg. method thereof |
| 05/05/2004 | CN1494165A Semiconductor device and mfg. method thereof |
| 05/05/2004 | CN1494164A Semiconductor device and mfg. method thereof |
| 05/05/2004 | CN1494163A Bipolar transistor, oscillating circuit and voltage control type oscillator |
| 05/05/2004 | CN1494162A Semiconductor substrate and its mfg. method, and semiconductor device and its mfg. method |
| 05/05/2004 | CN1494161A Indium tin oxide pn node used on semiconductor device |
| 05/05/2004 | CN1494160A 功率半导体元件 A power semiconductor element |
| 05/05/2004 | CN1494158A Structure of inclosure curtain type read-only storage and its manufacturing method |
| 05/05/2004 | CN1494157A Semiconductor storage device and its controlling method |