Patents
Sitemap › H01 - Basic electric elements › H01J - Electric discharge tubes or discharge lamps › H01J 27 - Ion beam tubes
Patents for H01J 27 - Ion beam tubes (3,716)
02/2004
02/19/2004WO2004015737A1 Symmetric beamline and methods for generating a mass-analyzed ribbon ion beam
02/19/2004WO2004015735A2 Ion source and coaxial inductive coupler for ion implantation system
02/19/2004US20040032574 Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby
02/19/2004US20040032211 Radio frequency ion source
02/12/2004US20040026628 Device and method for moving an ion source
02/10/2004US6688116 Refrigerator electron beam ion trap-source
02/04/2004CN1473349A System and method for removing contaminant particles relative to ion beam
02/04/2004CN1473348A Bulk gas delivery system for ion implanters
02/03/2004US6686599 Ion production device for ion beam irradiation apparatus
02/03/2004US6686595 Electron impact ion source
01/2004
01/29/2004US20040018700 Method and apparatus for nanometer-scale focusing and patterning of ultra-low emittance, multi-MeV proton and ion beams from a laser ion diode
01/28/2004EP1384395A1 Production of nanocrystal beams
01/15/2004WO2004006284A1 Method and apparatus for non-invasive measurement and analys of semiconductor plasma parameters
01/15/2004WO2004006280A2 Method and apparatus for reducing cross contamination of species during ion impl antation
01/08/2004WO2004003973A2 Ion implantation device and method
01/08/2004WO2003088299A3 A method of implanting a substrate and an ion implanter for performing the method
01/08/2004DE10225965A1 Hochtemperaturofen zur Festkörperverdampfung in Elektron-Zyklotron-Resonanz-Ionenquellen High-temperature furnace for solid-state evaporation in electron cyclotron resonance ion sources
01/02/2004EP1374275A2 Ion source filament
01/02/2004EP1374270A2 Device for generating an ion beam
01/01/2004US20040000651 Ion source having replaceable and sputterable solid source material
01/01/2004US20040000647 Electron impact ion source
12/2003
12/30/2003US6670623 Thermal regulation of an ion implantation system
12/25/2003US20030234369 Electron-cyclotron resonance type ion beam source for ion implanter
12/24/2003CN1132219C Cathode arc source and graphite target
12/24/2003CN1132218C Ion filling appts. ion source appts. and method for positioning ion source appts.
12/23/2003USRE38358 Cold cathode ion beam deposition apparatus with segregated gas flow
12/23/2003US6667468 MOS-based image sensor and method of forming black-level signal therefor
12/18/2003US20030230986 Ion implantation ion source, system and method
12/17/2003EP1372183A2 High-temperature oven for solid samples evaporation in an electron-cyclotron-resonance ion source
12/16/2003US6664739 Enhanced electron emissive surfaces for a thin film deposition system using ion sources
12/16/2003US6664548 Ion source and coaxial inductive coupler for ion implantation system
12/16/2003US6664547 Ion source providing ribbon beam with controllable density profile
12/16/2003US6664497 Plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding for dissociation gases
12/11/2003WO2003103003A1 Device for production of a plasma sheet
12/11/2003WO2001088946A8 Cathode assembly for indirectly heated cathode ion source
12/10/2003CN1461036A Ion source, operating method of ion source, and ion source system
12/10/2003CN1130750C Ion source
12/04/2003WO2003100818A1 Capacitively coupled plasma reactor with magnetic plasma control
12/04/2003WO2003100806A1 Indirectly heated cathode ion source
12/03/2003CN1129951C Ion source for ion mixer and cathode structure for ion source to generate ion beam
11/2003
11/27/2003WO2003075305A3 Indirectly heated button cathode for an ion source
11/27/2003US20030218430 Ion source with external RF antenna
11/27/2003US20030218429 Ion source, method of operating the same, and ion source system
11/27/2003US20030218428 Indirectly heated cathode ion source
11/27/2003US20030218427 Capacitively coupled plasma reactor with magnetic plasma control
11/19/2003EP1362185A2 Magnetic field for small closed-drift thruster
11/13/2003WO2003094194A1 Ion source providing ribbon beam with controllable density profile
11/11/2003US6646268 Ion generation method and filament for ion generation apparatus
11/11/2003US6646257 Multimode ionization source
11/11/2003US6645301 Ion source
11/06/2003WO2003092033A1 Polynuclear metal molecular beam apparatus
11/06/2003US20030205683 Symmetric beamline and methods for generating a mass-analyzed ribbon ion beam
11/06/2003US20030205680 Ion source and coaxial inductive coupler for ion implantation system
11/06/2003US20030205679 Ion source providing ribbon beam with controllable density profile
11/05/2003CN1453818A Ion source
11/04/2003US6642526 Field ionizing elements and applications thereof
10/2003
10/30/2003US20030201389 Soft ionization device with characterization systems and methods of manufacture
10/30/2003US20030201387 Mass spectrometer
10/28/2003US6639229 Using nitrogen trifluoride to ionize solid alumina
10/28/2003US6639223 Gaseous ion source feed for oxygen ion implantation
10/23/2003WO2003088299A2 A method of implanting a substrate and an ion implanter for performing the method
10/23/2003US20030197129 Ion sources for ion implantation apparatus
10/22/2003CN1451169A Control system for indirectly heated cathode ion source
10/21/2003US6635998 Ion beam processing apparatus and method of operating ion source therefor
10/21/2003US6635889 Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereof
10/16/2003WO2003015119A3 Decaborane vaporizer
10/16/2003WO2002097850A3 Uniform broad ion beam deposition
10/16/2003US20030193294 Multi-grid ion beam source for generating a highly collimated ion beam
10/14/2003US6633133 Ion source
10/14/2003US6632482 Very short high voltage, low duty cycle ionization pulses, in conjunction with a synchronously produced electron flow to neutralize positively charged semiconductor wafer surfaces; shallow junction devices
10/07/2003US6629508 Ionizer for gas cluster ion beam formation
10/02/2003US20030184206 Charged particle beam extraction and formation apparatus
10/02/2003US20030184205 Hall effect ion source at high current density
10/02/2003US20030183172 Vaporiser for generating feed gas for an arc chamber
10/01/2003EP1348228A1 Ion source
10/01/2003EP1347804A1 Ion implantation system and control method
10/01/2003EP0892983B1 Gas discharge device
09/2003
09/30/2003US6627886 Secondary electron spectroscopy method and system
09/23/2003US6624584 Particle source for producing excited particles
09/16/2003US6620624 Mass spectrometry interface, a mass spectrometer and a mass spectrometry
09/12/2003WO2003075305A2 Indirectly heated button cathode for an ion source
09/11/2003US20030168609 Indirectly heated button cathode for an ion source
09/11/2003US20030168608 Ion beam extractor with counterbore
09/11/2003US20030168592 Method and apparatus for generation of molecular beam
09/11/2003US20030168588 Ion beam mass separation filter, mass separation method thereof and ion source using the same
09/09/2003US6616417 Spatter ion pump
09/02/2003US6614505 Lithographic projection apparatus, device manufacturing method, and device manufactured thereby
08/2003
08/26/2003US6610986 Soft ionization device and applications thereof
08/21/2003US20030155523 Quantum wells; etching, writing using electron beams; forming semiconductors
08/21/2003US20030155230 Electrolytic cells; filter passageway; controlling plasma using magnetism
08/20/2003EP1336187A2 Radio frequency ion source
08/19/2003US6608318 Interior deactivation coating of metal nitride or sulfide conductive material
08/14/2003US20030152746 Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production
08/07/2003US20030148103 Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production
08/06/2003EP1332509A1 Focused ion beam system
07/2003
07/24/2003WO2003060246A1 Locking device for a covering grate
07/24/2003US20030136918 Soft ionization device and applications thereof
07/23/2003EP1328961A2 A probe assembly for detecting an ion in a plasma generated in an ion source
07/16/2003EP1015161A4 Plasma gun and methods for the use thereof
07/16/2003CN1430865A Extreme ultraviolet source based on colliding neutral beams
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