| Patents for H01J 27 - Ion beam tubes (3,716) |
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| 10/07/2004 | US20040195973 Electron impact ion source |
| 10/07/2004 | US20040195972 Plasma generator useful for ion beam generation |
| 10/07/2004 | US20040195524 Ion doping apparatus, and multi-apertured electrode for the same |
| 10/07/2004 | US20040195521 Ion sorces |
| 10/06/2004 | EP1465233A2 A method for reduction of selected ion intensities in confined ion beams |
| 09/30/2004 | US20040188631 Ion implantation ion source, system and method |
| 09/28/2004 | US6798141 Plasma accelarator arrangement |
| 09/28/2004 | US6797969 Multi-column FIB for nanofabrication applications |
| 09/28/2004 | US6797964 Ion source and operation method thereof |
| 09/23/2004 | US20040183470 Power supply for a hot-filament cathode |
| 09/23/2004 | US20040182699 Sputter ions source |
| 09/22/2004 | EP0880798B1 System and method for cooling workpieces processed by an ion implantation system |
| 09/16/2004 | WO2004079765A2 Novel electro ionization source for orthogonal acceleration time-of-flight mass spectrometry |
| 09/16/2004 | US20040178353 Positron source |
| 09/16/2004 | US20040178339 Miniature multinuclide detection system and methods |
| 09/16/2004 | US20040178151 Launching electromagnetic wave into cylindrical chamber to create ionization zone; creating radially oriented electric field |
| 09/15/2004 | EP1458008A2 High frequency wave heated plasma mass filter |
| 09/15/2004 | CN1529898A 射频离子源 RF ion source |
| 09/09/2004 | US20040173758 Ion source and ion beam device |
| 09/08/2004 | CN1166263C Ion source for ion implanter and method for ion formation in ion implanter |
| 09/07/2004 | US6787044 Launching electromagnetic wave into cylindrical chamber to create ionization zone; creating radially oriented electric field |
| 09/02/2004 | DE10241252B4 Sputterionenquelle Sputterionenquelle |
| 09/01/2004 | CN1526154A Ion source filament and method |
| 08/26/2004 | US20040163767 Plasma producing device |
| 08/25/2004 | EP1450389A2 Multimode ion source with a hollow cathode sputter ion source-like structure with radial ion extracion. |
| 08/25/2004 | EP1448769A1 Soft ionization device and applications thereof |
| 08/24/2004 | US6781136 Negative ion emitting method and apparatus therefor |
| 08/19/2004 | US20040161579 Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production |
| 08/17/2004 | US6777699 Methods, apparatus, and systems involving ion beam generation |
| 08/17/2004 | US6777686 Control system for indirectly heated cathode ion source |
| 08/10/2004 | US6774550 Charged particle beam extraction and formation apparatus |
| 08/05/2004 | US20040149927 Method of predicting a lifetime of filament in ion source and ion source device |
| 08/03/2004 | US6770353 Co-deposited films with nano-columnar structures and formation process |
| 08/03/2004 | US6769420 Ionizer |
| 07/29/2004 | US20040146133 Ultra-short ion and neutron pulse production |
| 07/27/2004 | US6768121 Ion source having replaceable and sputterable solid source material |
| 07/27/2004 | US6768120 Focused electron and ion beam systems |
| 07/22/2004 | US20040139916 Applying the particles to be separated on a substrate supported membrane, such that the particles are mobile across the surface of the substrate supported membrane; providing an electrical field; temporarily modifying the electrical field and/or adding a substrate supported membrane |
| 07/15/2004 | DE10225965B4 Hochtemperaturofen zur Festkörperverdampfung in Elektron-Zyklotron-Resonanz-Ionenquellen High-temperature furnace for solid-state evaporation in electron cyclotron resonance ion sources |
| 07/14/2004 | CN1157756C Plasma generator for ion beam radiator |
| 07/13/2004 | US6761805 Cathode arc source with magnetic field generating means positioned above and below the cathode |
| 07/08/2004 | WO2004057643A2 Liquid-metal ion source |
| 07/06/2004 | US6759807 Multi-grid ion beam source for generating a highly collimated ion beam |
| 07/01/2004 | US20040124371 Ion beam irradiation device |
| 06/30/2004 | EP1433192A1 Method and device for producing a plasma |
| 06/29/2004 | US6756600 Ion implantation with improved ion source life expectancy |
| 06/24/2004 | DE10306936B3 Multi-mode metal ion source, e.g. for workpiece treatment, has magnetic mirror field generator, cooled anodes arranged between cathodes, cooled anti-cathode, sputtering and extraction electrodes and a switching device |
| 06/23/2004 | EP1430508A1 Method and apparatus for cooling and focusing ions |
| 06/17/2004 | WO2004015735A3 Ion source and coaxial inductive coupler for ion implantation system |
| 06/17/2004 | US20040113093 System for and method of gas cluster ion beam processing |
| 06/16/2004 | CN1154150C Beam generation apparatus |
| 06/15/2004 | US6750600 Hall-current ion source |
| 06/10/2004 | WO2004048964A1 Pyro-electric electron source |
| 06/09/2004 | CN1503309A Predicting the lifetime of a filament in an ion source device |
| 06/03/2004 | US20040104683 Negative ion source with external RF antenna |
| 06/03/2004 | US20040104682 Ion implantation system and control method |
| 05/25/2004 | US6740384 Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production |
| 05/20/2004 | US20040094725 Device for generating an ion beam |
| 05/19/2004 | EP0871977B1 A method for reduction of selected ion intensities in confined ion beams |
| 05/19/2004 | CN1497655A Ion source, ion injection equipment, manufacturing method of semiconductor device |
| 05/13/2004 | US20040090185 Waveguide and microwave ion source equipped with the waveguide |
| 05/12/2004 | CN1495858A Ion mixing device and porous electrode for ion mixing device |
| 05/12/2004 | CN1495283A Matching box, vacuum device using the same and vacuum processing method |
| 05/11/2004 | US6734434 Ion source |
| 05/06/2004 | WO2004038754A2 Method of cleaning ion source, and corresponding apparatus/system |
| 05/06/2004 | US20040084422 Plasma source |
| 04/29/2004 | US20040079881 Multimode ionization source |
| 04/29/2004 | US20040079287 Toroidal low-field reactive gas source |
| 04/28/2004 | EP1412061A2 Field ionizing elements and applications thereof |
| 04/22/2004 | US20040075060 Method of cleaning ion source, and corresponding apparatus/system |
| 04/22/2004 | US20040074604 Neutral particle beam processing apparatus |
| 04/22/2004 | US20040074444 Ion beam source with gas introduced directly into deposition/vacuum chamber |
| 04/15/2004 | WO2004006280A3 Method and apparatus for reducing cross contamination of species during ion impl antation |
| 04/15/2004 | DE19730899B4 Ionenmobilitätsspektrometer mit einer radioaktiven β-Strahlungsquelle Ion mobility spectrometer with a radioactive β-radiation source |
| 04/14/2004 | CN1146005C Ion source having wide output current operating range |
| 04/08/2004 | US20040066128 Ion source, ion implanting device, and manufacturing method of semiconductor devices |
| 04/07/2004 | CN2610487Y Strong beam source, large beam spot metal steam vacuum arc ion source |
| 04/06/2004 | US6717155 Electron impact ion source |
| 04/01/2004 | WO2004027813A1 System for and method of gas cluster ion beam processing |
| 04/01/2004 | WO2004026448A1 Multimode ionization source |
| 04/01/2004 | US20040061068 Indirectly heated button cathode for an ion source |
| 04/01/2004 | DE10243406A1 Plasmaquelle Plasma source |
| 03/31/2004 | CN1486502A 离子源 Ion source |
| 03/25/2004 | DE10241252A1 Sputterionenquelle Sputterionenquelle |
| 03/24/2004 | EP1401249A2 Plasma source |
| 03/23/2004 | US6710338 Focused ion beam system |
| 03/23/2004 | US6709554 Method and apparatus for repairing lithography masks using a charged particle beam system |
| 03/17/2004 | EP1398819A2 Matching box, vacuum apparatus using the same, and vacuum processing method |
| 03/10/2004 | EP1396870A2 Sputter ion source |
| 03/10/2004 | EP1395820A1 High throughput ion source with multiple ion sprayers and ion lenses |
| 03/04/2004 | WO2004019462A1 Ion generator |
| 03/04/2004 | WO2003100806A9 Indirectly heated cathode ion source |
| 03/03/2004 | EP1393340A2 Apparatus |
| 02/26/2004 | US20040038505 Ion implantation method, SOI wafer manufacturing method and ion implantation system |
| 02/26/2004 | US20040038504 Ion implantation method and method for manufacturing SOI wafer |
| 02/26/2004 | US20040036032 Focused electron and ion beam systems |
| 02/25/2004 | EP1390964A1 Dipole ion source |
| 02/25/2004 | EP1390558A1 Penning discharge plasma source |
| 02/25/2004 | CN1477984A Ion implantation system and control method |
| 02/24/2004 | US6696793 Ion source |