| Patents for H01J 27 - Ion beam tubes (3,716) |
|---|
| 05/06/2009 | CN101427350A Methods of implanting ions and ion sources used for same |
| 05/05/2009 | US7528550 Ion implantation system and control method |
| 04/30/2009 | WO2008136858A3 Techniques for removing molecular fragments from an ion implanter |
| 04/30/2009 | WO2008012094A3 Ion source for generating negatively charged ions |
| 04/29/2009 | CN201229915Y Pressure clamping type cathode construction for metal vapor vacuum arc ionic source |
| 04/28/2009 | US7525105 Laser desorption—electrospray ion (ESI) source for mass spectrometers |
| 04/28/2009 | US7525086 Spray glow discharge ionization method and system |
| 04/23/2009 | WO2009052176A1 Compact pyroelectric sealed electron beam |
| 04/23/2009 | US20090101834 Ion beam extraction assembly in an ion implanter |
| 04/23/2009 | DE19900437B4 Verfahren und Vorrichtung zur Ionenimplantation in Festkörpern und/oder zur Beschichtung von Festkörperoberflächen sowie die Verwendung von Verfahren und Vorrichtung Method and apparatus for ion implantation in solids and / or for the coating of solid surfaces and the use of methods and apparatus |
| 04/22/2009 | EP1347804A4 Ion implantation system and control method |
| 04/22/2009 | EP1245036A4 Ion implantation ion source, system and method |
| 04/22/2009 | CN100481306C Ion source device for low-energy ion beam material preparing method |
| 04/21/2009 | US7521694 Ion source section for ion implantation equipment |
| 04/21/2009 | US7521693 Ion sources, systems and methods |
| 04/16/2009 | WO2008118203A3 Closed drift ion source |
| 04/16/2009 | WO2007106176A3 Air assist for ac ionizers |
| 04/16/2009 | US20090095917 Atmospheric pressure chemical ionization ion source |
| 04/15/2009 | EP2047497A2 Ion source for generating negatively charged ions |
| 04/14/2009 | US7518124 Monatomic dopant ion source and method |
| 04/14/2009 | US7518123 Heat capacitor for capillary aerosol generator |
| 04/14/2009 | US7518122 Ion sources, systems and methods |
| 04/09/2009 | WO2009045642A2 Tritium sensor and method |
| 04/09/2009 | WO2006107390A3 An electrostatic fluid accelerator for and method of controlling a fluid flow |
| 04/09/2009 | US20090090872 Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions |
| 04/08/2009 | EP2044609A1 Ion deposition apparatus |
| 04/08/2009 | EP2044608A1 Ion sources |
| 04/08/2009 | EP2044607A2 Electrospray ion source |
| 04/08/2009 | CN100475466C Ionic punching machine for plaster |
| 04/07/2009 | US7513215 Systems and methods for the production of highly tetrahedral amorphous carbon coatings |
| 04/01/2009 | EP2041756A2 A multi-source plasma focused ion beam system |
| 04/01/2009 | CN101401191A Methods of implanting ions and ion sources used for same |
| 04/01/2009 | CN101401185A Ion source with removable anode assembly |
| 03/31/2009 | US7511280 Ion sources, systems and methods |
| 03/31/2009 | US7511279 Ion sources, systems and methods |
| 03/26/2009 | WO2009038905A2 Tritium sensor and method |
| 03/26/2009 | US20090078890 Ion source, ion implantation apparatus, and ion implantation method |
| 03/25/2009 | EP2038911A2 Device and method for thin film deposition using a vacuum arc in an enclosed cathode-anode assembly |
| 03/24/2009 | US7507972 Compact ionization source |
| 03/24/2009 | CA2438098C Magnetic field for small closed-drift thruster |
| 03/24/2009 | CA2305071C High intensity ion source |
| 03/17/2009 | US7504640 Ionization of desorbed molecules |
| 03/17/2009 | US7504639 Ion sources, systems and methods |
| 03/11/2009 | CN201207370Y Kaufman ion source of novel magnetic circuit structure |
| 03/05/2009 | US20090057566 Gas ion source with high mechanical stability |
| 03/04/2009 | EP2029994A2 Method and device for desorption ionization by liquid jet |
| 03/03/2009 | US7498587 Bi-directional filtered arc plasma source |
| 03/03/2009 | US7498586 Ion source control system |
| 02/25/2009 | EP2027601A2 Method and apparatus for extracting ions from an ion source for use in ion implantation |
| 02/25/2009 | EP2027592A2 Vaporizer |
| 02/24/2009 | US7495241 Ion beam irradiation apparatus and insulating spacer for the same |
| 02/24/2009 | US7495232 Ion sources, systems and methods |
| 02/24/2009 | US7495231 MALDI sample plate imaging workstation |
| 02/19/2009 | US20090045333 Electrospray emitter and method of using same |
| 02/18/2009 | CN101371326A Ion sources, systems and methods |
| 02/18/2009 | CN100463099C Ion source |
| 02/17/2009 | US7491953 Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions |
| 02/17/2009 | US7491947 Technique for improving performance and extending lifetime of indirectly heated cathode ion source |
| 02/12/2009 | US20090039790 Pulsed plasma device and method for generating pulsed plasma |
| 02/12/2009 | US20090039283 Ionization of desorbed molecules |
| 02/12/2009 | US20090039282 Matrix-assisted laser desorption with high ionization yield |
| 02/11/2009 | CN101366095A Ion sources, systems and methods |
| 02/10/2009 | US7488953 Multimode ionization source |
| 02/10/2009 | US7488952 Ion sources, systems and methods |
| 02/05/2009 | WO2009016264A1 Hall effect ion ejection device |
| 02/05/2009 | WO2008150822A3 Charge transport materials for luminescent applications |
| 02/05/2009 | US20090032728 Hybrid ion source/multimode ion source |
| 02/05/2009 | US20090032727 Elevated temperature rf ion source |
| 02/05/2009 | CA2695238A1 Hall effect ion ejection device |
| 02/04/2009 | EP2020672A2 High frequency generator for ion and electron sources |
| 02/04/2009 | CN101361158A Ion sources, systems and methods |
| 02/04/2009 | CN101361157A Ion sources, systems and methods |
| 02/04/2009 | CN101361153A Ion sources, systems and methods |
| 02/03/2009 | US7485873 Ion sources, systems and methods |
| 01/29/2009 | WO2008106448A3 Ion sources and methods of operating an electromagnet of an ion source |
| 01/29/2009 | US20090027825 Neutralization Apparatus Having Minute Electrode Ion Generation Element |
| 01/28/2009 | EP2019412A2 Gas field ion source for multiple applications |
| 01/27/2009 | CA2499235C Method of cleaning ion source, and corresponding apparatus/system |
| 01/22/2009 | US20090020708 Modular gas ion source |
| 01/20/2009 | US7479643 Ion implantation ion source, system and method |
| 01/13/2009 | US7476852 Ionization-based detection |
| 01/13/2009 | US7476301 Procedure and device for the production of a plasma |
| 01/08/2009 | WO2009005908A2 Triodes using nanofabric articles and methods of making the same |
| 01/08/2009 | WO2008014332A3 Methods and apparatuses for directing an ion beam source |
| 01/08/2009 | US20090008571 Ionizing Device |
| 01/08/2009 | US20090008570 Arc chamber for an ion implantation system |
| 01/08/2009 | US20090008569 High speed combination multi-mode ionization source for mass spectrometers |
| 01/07/2009 | EP2012341A1 Modular gas ion source |
| 01/01/2009 | US20090001282 Methods and apparatus for assigning a beam intensity profile to a gas cluster ion beam used to process workpieces |
| 01/01/2009 | US20090001281 Cathode having electron production and focusing grooves, ion source and related method |
| 01/01/2009 | US20090001280 Ion generating element, charging device and image forming apparatus |
| 12/31/2008 | CN100447952C Ion doping device, ion doping method and semiconductor device |
| 12/25/2008 | US20080315114 High voltage insulator for preventing instability in an ion implanter due to triple-junction breakdown |
| 12/24/2008 | CN100446168C Mounting mechanism for plasma extraction aperture |
| 12/18/2008 | WO2008151602A1 Liquid metal ion source for generating lithium ion beams |
| 12/18/2008 | US20080311728 Method for recovering damage of low dielectric insulating film and method for manufacturing semiconductor device |
| 12/17/2008 | EP1238406B1 Gas cluster ion beam smoother apparatus |
| 12/11/2008 | WO2008150336A2 A portable/mobile fissible material detector and methods for making and using same |
| 12/09/2008 | US7462978 Apparatus and method for generating ultraviolet radiation |
| 12/04/2008 | WO2008147846A1 Method and system for extracting ion beams composed of molecular ions (cluster ion beam extraction system) |