Patents for H01J 27 - Ion beam tubes (3,716)
12/2008
12/04/2008US20080296510 Ion Implantation System and Ion Implantation System
12/04/2008US20080296483 Magneto-optical trap ion source
12/03/2008CN201160064Y Hall type ion source
12/02/2008US7459858 Hall thruster with shared magnetic structure
11/2008
11/27/2008WO2007149727A3 Method and apparatus for extracting ions from an ion source for use in ion implantation
11/27/2008US20080290289 Mass spectroscopic reaction-monitoring method
11/19/2008CN101308754A Kaufman ion source of novel magnetic circuit structure
11/13/2008WO2008136969A1 Multipole mass filter having improved mass resolution
11/13/2008US20080277593 Ion source
11/13/2008US20080277592 Cold-cathode-based ion source element
11/13/2008CA2678690A1 Multipole mass filter having improved mass resolution
11/12/2008CN101303955A Ion source component
11/05/2008CN100431086C Capacitively coupled plasma reactor with magnetic plasma control
10/2008
10/30/2008US20080265180 Ion beam inspection apparatus, ion beam inspecting method, semiconductor manufacturing apparatus, and ion source apparatus
10/30/2008DE102006034988B4 Ionenquelle zur Erzeugung negativ geladener Ionen Ion source for generating negatively charged ions
10/28/2008US7442941 Ion generator
10/23/2008WO2008103733A9 Gas ionizer
10/23/2008US20080258075 Ionizing Radiation Treatment System on Water-Borne Platform
10/22/2008EP1982345A2 Ion source with removable anode assembly
10/22/2008EP1393340B1 Ion gun
10/21/2008US7439529 High current density ion source
10/16/2008WO2008122205A1 A method of accelerating ions by laser and an ion generating apparatus
10/16/2008US20080253020 Read/Write Tip, Head and Device, and Use Thereof, and Method for Manufacturing Same
10/16/2008US20080251735 High Energy Crystal Generators And Their Applications
10/15/2008CN201134408Y Ion beam source device capable of implanting into vacuum chamber
10/14/2008US7435972 Focused ion beam apparatus and liquid metal ion source
10/14/2008US7435971 Ion source
10/09/2008WO2008121549A1 Techniques for improving the performance and extending the lifetime of an ion source with gas mixing
10/09/2008US20080245969 Method and Apparatus for Creating a Plasma
10/08/2008EP1171901B1 Multi-column fib for nanofabrication applications
10/02/2008WO2008118203A2 Closed drift ion source
10/02/2008US20080238326 Ion acceleration column connection mechanism with integrated shielding electrode and related methods
09/2008
09/25/2008WO2008113942A1 Emitter for ionic thruster
09/25/2008US20080230714 Apparatus and methods of forming a gas cluster ion beam using a low-pressure source
09/25/2008US20080230713 Ion source arc chamber seal
09/24/2008EP1825491B1 Ion source with substantially planar design
09/24/2008CN100421206C Ion beam irradiation apparatus and insulating spacer for the same
09/23/2008US7427864 Ion balance monitor
09/18/2008WO2008092129A3 Method and apparatus for detecting surface and subsurface properties of materials
09/18/2008WO2008091729A3 Technique for improving the performance and extending the lifetime of an ion source with gas dilution
09/18/2008WO2007030819A3 Electron beam source for use in electron gun
09/17/2008EP1658632B1 Mass spectrometer and liquid-metal ion source for a mass spectrometer of this type
09/17/2008EP1269803B1 Plasma accelerator arrangement
09/16/2008US7425710 Anode layer particle beam device
09/16/2008US7425709 Modular ion source
09/12/2008WO2008107705A1 Apparatus
09/11/2008US20080217556 Electronic apparatus
09/11/2008US20080217555 Systems and methods for a gas field ionization source
09/10/2008EP1968094A2 Non-axisymmetric charged-particle beam system
09/04/2008WO2008106448A2 Ion sources and methods of operating an electromagnet of an ion source
09/04/2008US20080210883 Liquid metal ion gun
09/02/2008US7420182 Combined radio frequency and hall effect ion source and plasma accelerator system
09/02/2008US7420181 Liquid metal ion gun
08/2008
08/28/2008WO2008103733A2 Gas ionizer
08/21/2008WO2008061173A3 Generation, acceleration, focusing and collection of a high-brightness, space-charge-dominated circular charged-particle beam
08/21/2008US20080197275 Ion sampling apparatuses in fast polarity-switching ion sources
08/19/2008US7414355 Charged particle beam extraction and formation apparatus
08/14/2008US20080191629 Focused anode layer ion source with converging and charge compensated beam (falcon)
08/14/2008US20080191146 Ion generator and neutralizer
08/14/2008US20080191145 Alternating Current Negative Ion And Silver Ion Generator
08/14/2008US20080191144 Non-axisymmetric charged-particle beam system
08/13/2008EP1956630A1 Achromatic mass separator
08/13/2008EP1955354A2 Ion sources, systems and methods
08/13/2008EP1955350A2 Ion sources, systems and methods
08/13/2008EP1955348A2 Ion sources, systems and methods
08/12/2008US7411183 User customizable plate handling for MALDI mass spectrometry
08/07/2008WO2008011263A3 Electrospray ion source
07/2008
07/31/2008WO2008091729A2 Technique for improving the performance and extending the lifetime of an ion source with gas dilution
07/31/2008US20080179537 Gas cluster ion beam emitting apparatus and method for ionization of gas cluster
07/31/2008DE102005005333B4 Verfahren zur Probennahme und Aerosol-Analyse Methods for sampling and analysis of aerosol
07/24/2008WO2008088971A2 Techniques for providing ion source feed materials
07/24/2008US20080173829 Ultra - bright pulsed electron beam with low longitudinal emittance
07/23/2008EP0995345B1 Gas excitation device with surface wave plasma
07/22/2008US7402350 Highly tetrahedral amorphous carbon coatings and systems and methods for their production
07/17/2008WO2008067563A3 Adaptive controller for ion source
07/17/2008WO2007067318A3 Ion sources, systems and methods
07/17/2008DE112006002412T5 Ionenquelle und Plasma-Bearbeitungsvorrichtung Ion source and plasma processing apparatus
07/16/2008CN101223624A Ion source and plasma processing device
07/15/2008US7399961 High throughput ion source with multiple ion sprayers and ion lenses
07/10/2008US20080164421 Linear ion accelerator
07/09/2008EP1941527A2 Electron beam source for use in electron gun
07/09/2008EP1719147A4 Fluid-cooled ion source
07/09/2008CN100401449C A method of implanting a substrate and an ion implanter for performing the method
07/03/2008WO2008058246A3 Ion implantation device with a dual pumping mode and method thereof
07/02/2008EP1938335A1 Reading/writing tip, head and device, and use thereof, and method for making same
07/01/2008US7394202 Ion implantation system and control method
06/2008
06/26/2008US20080149826 Techniques for providing a ribbon-shaped gas cluster ion beam
06/25/2008EP1936653A1 Gas field ion source for multiple applications
06/25/2008EP1934999A2 Compact ionization source
06/24/2008US7391019 Electrospray ion source
06/19/2008WO2007149738A3 Vaporizer
06/19/2008US20080142702 Gas field ion source for multiple applications
06/12/2008WO2008069110A1 Spin-polarization ion beam generator, scattering spectroscope using the spin-polarization ion beam, and specimen processing device
06/12/2008WO2007146904A3 Vaporizer
06/11/2008CN101197239A Hall type ion source
06/05/2008WO2008067563A2 Adaptive controller for ion source
06/05/2008US20080129209 Adaptive controller for ion source
06/05/2008US20080129180 Ion sources for ion implantation apparatus
06/04/2008CN101192497A Ion source
06/03/2008US7382087 Ozone generator system and ozone generating method
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