| Patents for H01J 27 - Ion beam tubes (3,716) |
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| 04/27/2005 | CN1610051A Cathode and counter cathode arrangement in an ion source |
| 04/27/2005 | CN1199223C System and method for cleaning ion source in course of using |
| 04/26/2005 | US6885014 Symmetric beamline and methods for generating a mass-analyzed ribbon ion beam |
| 04/26/2005 | US6885010 Carbon nanotube electron ionization sources |
| 04/21/2005 | US20050082493 Floating mode ion source |
| 04/19/2005 | US6881966 Hybrid magnetic/electrostatic deflector for ion implantation systems |
| 04/14/2005 | DE10339346A1 Massenspektrometer mit einer Flüssigmetall-Ionenquelle A mass spectrometer having a liquid metal ion source |
| 04/12/2005 | US6878946 Indirectly heated button cathode for an ion source |
| 04/12/2005 | US6878945 Vaporizer for ion source |
| 04/07/2005 | WO2005031788A2 A source of liquid metal ions and a method for controlling the source |
| 04/07/2005 | US20050072934 Apparatus for delivering ions from a grounded electrospray assembly to a vacuum chamber |
| 04/05/2005 | US6875986 Ion generation method and filament for ion generation apparatus |
| 03/31/2005 | WO2005029532A2 Mass spectrometer and liquid-metal ion source for a mass spectrometer of this type |
| 03/30/2005 | EP1518256A1 Device for production of a plasma sheet |
| 03/24/2005 | WO2005027191A2 Ion source with biased electrodes |
| 03/24/2005 | US20050062480 Source of liquid metal ions and a method for controlling the source |
| 03/24/2005 | US20050061989 Vaporizer for ion source |
| 03/22/2005 | US6870164 Pulsed operation of hall-current ion sources |
| 03/22/2005 | US6869574 Apparatus and method of generating charged particles |
| 03/17/2005 | WO2005024880A2 Floating mode ion source |
| 03/17/2005 | WO2004114354A3 A hybrid magnetic/electrostatic deflector for ion implantation systems |
| 03/17/2005 | US20050057166 Longitudinal cathode expansion in an ion source |
| 03/17/2005 | US20050057137 Ion source, ion implanting device, and manufacturing method of semiconductor devices |
| 03/10/2005 | WO2005022577A2 Shaped sputter shields for improved ion column operation |
| 03/10/2005 | US20050051096 Ion implantation ion source, system and method |
| 03/08/2005 | US6864495 Device for generating an ion beam |
| 03/08/2005 | US6864486 Ion sources |
| 03/08/2005 | US6864485 Ion optics with shallow dished grids |
| 03/08/2005 | US6863773 Linearly extended device for large-surface microwave treatment and for large surface plasma production |
| 03/03/2005 | US20050045834 Shaped sputter shields for improved ion column operation |
| 03/02/2005 | EP1105908B1 Ion beam generation apparatus |
| 03/01/2005 | US6862075 Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby |
| 02/24/2005 | WO2005017943A2 Method and apparatus for plasma generation |
| 02/24/2005 | CA2533311A1 Method and apparatus for plasma generation |
| 02/22/2005 | US6858838 Neutral particle beam processing apparatus |
| 02/16/2005 | EP1507282A2 Multimode ionization source |
| 02/16/2005 | EP1506563A1 Capacitively coupled plasma reactor with magnetic plasma control |
| 02/16/2005 | EP1506559A1 Indirectly heated cathode ion source |
| 02/15/2005 | US6855481 Apparatus and a method for forming a pattern using a crystal structure of material |
| 02/10/2005 | US20050029954 Plasma processing apparatus and method |
| 02/09/2005 | CN1577703A Electron beam processing apparatus |
| 02/08/2005 | US6853141 Capacitively coupled plasma reactor with magnetic plasma control |
| 02/08/2005 | US6852985 Method and apparatus for nanometer-scale focusing and patterning of ultra-low emittance, multi-MeV proton and ion beams from a laser ion diode |
| 02/03/2005 | WO2005010911A2 Longitudinal cathode expansion in an ion source |
| 02/02/2005 | EP1502278A1 Ion source providing ribbon beam with controllable density profile |
| 02/01/2005 | US6849854 Ion source |
| 02/01/2005 | US6849848 Method and apparatus for cooling and focusing ions |
| 01/27/2005 | US20050017645 Multi-grid ion beam source for generating a highly collimated ion beam |
| 01/27/2005 | US20050017195 Combinations of deflection chopping systems for minimizing energy spreads |
| 01/27/2005 | US20050016838 Ion source apparatus and cleaning optimized method thereof |
| 01/26/2005 | EP0934600B1 Ion gun |
| 01/25/2005 | US6847043 Ion sources for ion implantation apparatus |
| 01/19/2005 | EP1299895B1 Cathode assembly for indirectly heated cathode ion source |
| 01/18/2005 | US6844556 Ion source, method of operating the same, and ion source system |
| 01/13/2005 | US20050006599 Production of nanocrystal beams |
| 01/12/2005 | EP0995214B1 Method and apparatus for neutralising space charge in an ion beam |
| 01/11/2005 | US6841942 Plasma source with reliable ignition |
| 01/05/2005 | EP1493171A2 A method of implanting a substrate and an ion implanter for performing the method |
| 01/05/2005 | CN1560320A Filter apparatus of plasma magnetic field |
| 12/29/2004 | WO2004114354A2 A hybrid magnetic/electrostatic deflector for ion implantation systems |
| 12/29/2004 | CN1559077A Procedure and device for the production of a plasma |
| 12/23/2004 | US20040256555 Method, apparatus and system for specimen fabrication by using an ion beam |
| 12/21/2004 | US6833710 Probe assembly for detecting an ion in a plasma generated in an ion source |
| 12/16/2004 | WO2004109784A1 Ion doping system, ion doping method and semiconductor device |
| 12/16/2004 | US20040251424 Ion source apparatus and electronic energy optimized method therefor |
| 12/16/2004 | US20040251410 Ion source |
| 12/09/2004 | WO2004038754A3 Method of cleaning ion source, and corresponding apparatus/system |
| 12/09/2004 | US20040245476 Ion implantation ion source, system and method |
| 12/07/2004 | US6828552 Soft ionization device with characterization systems and methods of manufacture |
| 12/07/2004 | US6828549 Apparatus and method for moving an electron source |
| 12/02/2004 | US20040238755 Novel electron ionization source for othogonal acceleration time-of-flight mass spectrometry |
| 12/02/2004 | US20040238754 Method and apparatus for cooling and focusing ions |
| 12/01/2004 | EP1481413A2 Indirectly heated button cathode for an ion source |
| 11/30/2004 | US6825597 Ion source, ion implanting device, and manufacturing method of semiconductor devices |
| 11/24/2004 | CN1550031A Shielding system for plasma chamber |
| 11/18/2004 | US20040229104 Fuel cell with ionization membrane |
| 11/18/2004 | US20040227105 Hybrid magnetic/electrostatic deflector for ion implantation systems |
| 11/16/2004 | US6819053 Hall effect ion source at high current density |
| 11/16/2004 | US6818902 Positron source |
| 11/16/2004 | US6818257 Method of providing a material processing ion beam |
| 11/11/2004 | US20040223852 Ion thrusting system |
| 11/11/2004 | US20040222382 Devices incorporating soft ionization membrane |
| 11/11/2004 | US20040222371 Soft ionization device and applications thereof |
| 11/11/2004 | US20040222367 Beam source and beam processing apparatus |
| 11/11/2004 | US20040221815 Beam source and beam processing apparatus |
| 11/09/2004 | US6815633 Dissociating gases, high power plasma with higher operating voltages that has increased dissociation rates and that allow a wider operating pressure range, precise process control, low plasma surface erosion |
| 11/04/2004 | US20040217278 User customizable plate handling for MALDI mass spectrometry |
| 11/02/2004 | US6812648 Method of cleaning ion source, and corresponding apparatus/system |
| 11/02/2004 | US6812647 Plasma generator useful for ion beam generation |
| 11/02/2004 | CA2333721C Pulsed ion source for ion trap mass spectrometer |
| 10/28/2004 | US20040212288 Charged particle beam extraction and formation apparatus |
| 10/28/2004 | DE10316713A1 Production of photomasks used in the production of electronic devices comprises structuring a chromium absorber layer applied on a quartz substrate by etching regions not covered by a photolacquer mask using plasma etching |
| 10/28/2004 | DE10047688B4 Ionenquelle Ion source |
| 10/27/2004 | CN1541401A Decaborane vaporizer having improved vapor flow |
| 10/27/2004 | CN1173608C End cap for indirectly heated cathode of ion source |
| 10/21/2004 | US20040206901 High throughput ion source with multiple ion sprayers and ion lenses |
| 10/20/2004 | EP1468148A1 Locking device for a covering grate |
| 10/19/2004 | US6805891 Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production |
| 10/12/2004 | US6803590 Ion beam mass separation filter, mass separation method thereof and ion source using the same |
| 10/12/2004 | US6803585 Electron-cyclotron resonance type ion beam source for ion implanter |