| Patents for H01J 27 - Ion beam tubes (3,716) |
|---|
| 01/12/1994 | EP0577667A1 Arc source macroparticle filter |
| 01/05/1994 | EP0576972A1 Ion scattering spectroscope |
| 12/28/1993 | US5274234 Realization of an atomic source of metallic ions producing a surface melting by an applied electric field |
| 12/21/1993 | US5272412 Method for the production of extraction grids for ion generation and grids produced according to said method |
| 12/02/1993 | DE4217684A1 Specific movement path influencing of charged particles within plasma - using potential distribution of plasma and with plasma chamber having facilities for producing plasma, and setting shape of equipotential surface by corresp. chamber shape |
| 11/30/1993 | US5266146 Microwave-powered plasma-generating apparatus and method |
| 11/25/1993 | WO1993023872A1 Method and apparatus for mass analysis using slow monochromatic electrons |
| 11/25/1993 | WO1993023870A1 Apparatus and methods for use in producing ions by gaseous discharge |
| 11/25/1993 | WO1993023869A1 Apparatus for and method of producing ions |
| 11/16/1993 | US5262652 Ion implantation apparatus having increased source lifetime |
| 11/11/1993 | WO1993022789A1 A negative ion beam injection apparatus |
| 10/26/1993 | US5256947 Multiple filament enhanced ion source |
| 10/26/1993 | US5256938 ECR ion source with electron gun |
| 10/26/1993 | US5256930 Cooled plasma source |
| 10/12/1993 | US5252892 Plasma processing apparatus |
| 09/16/1993 | WO1993018537A1 Laser desorption ionization mass monitor (ldim) |
| 09/15/1993 | EP0560742A1 Plasma generator and associated ionization method |
| 09/07/1993 | US5243189 Ion neutralizer |
| 09/07/1993 | US5243169 Multiple torch type plasma generation device and method of generating plasma using the same |
| 08/31/1993 | US5241244 Engine for propelling a vehicle |
| 08/10/1993 | CA1321229C Electron cyclotron resonance ion source |
| 07/22/1993 | WO1993014513A1 Radio-frequency ion source |
| 07/22/1993 | WO1993014250A2 Process for surface treatment with ions |
| 06/16/1993 | EP0349555B1 High-frequency ion source |
| 06/10/1993 | WO1993011554A1 Corona discharge ionisation source |
| 06/09/1993 | EP0545064A2 Device for filtering charged particles, energy filter, analyser using such an energy filter, electron-bombardment ion source and analyser using said electron-bombardment ion source |
| 06/08/1993 | US5217761 Sheet plasma CVD apparatus |
| 06/01/1993 | US5216330 Ion beam gun |
| 06/01/1993 | US5215703 High-flux neutron generator tube |
| 05/27/1993 | WO1993010552A1 Method and device for generation of ion beam |
| 05/11/1993 | CA2010245C Coaxial cavity type, radiofrequency wave, plasma generating apparatus |
| 04/14/1993 | EP0537123A1 Ion generator with ionization chamber constructed from or coated with material with a high coefficient of secondary emission |
| 04/08/1993 | DE4133121A1 Precision focused ion probe for treatment of micro surfaces - has liquid phase emitter located in housing and accurately positioned relative to surface of specimen |
| 03/30/1993 | US5198718 Filamentless ion source for thin film processing and surface modification |
| 03/30/1993 | US5198677 Production of N+ ions from a multicusp ion beam apparatus |
| 03/23/1993 | US5196708 Particle source |
| 03/17/1993 | EP0532411A1 Electron cyclotron resonance ion source with coaxial injection of electromagnetic waves |
| 03/17/1993 | EP0531949A2 Fast atom beam source |
| 03/16/1993 | US5194739 Ions in a reservoir and a liquid metal |
| 03/04/1993 | DE4129264A1 Generating gas discharge for sputter process - extending electron paths using permanent magnet set into cylindrical cathode to generate field cutting field lines of anode |
| 02/23/1993 | US5189341 Electron emitting element |
| 02/23/1993 | US5189303 Ion source having a mass separation device |
| 02/10/1993 | EP0527082A1 Wave guide-type electron cyclotron resonance ion source producing multicharged ions |
| 02/10/1993 | EP0526491A1 Gaseous radical producing apparatus |
| 02/09/1993 | US5185523 Mass spectrometer for analyzing ultra trace element using plasma ion source |
| 02/04/1993 | WO1992020089A3 Forming charges in a fluid and generation of a charged beam |
| 02/03/1993 | EP0526420A1 Method for the production of extraction grids for ion generation and grids produced according to said method |
| 02/03/1993 | EP0525927A1 Ion source having a mass separation device |
| 01/27/1993 | EP0524189A1 Optically compensated bipolar transistor |
| 01/21/1993 | WO1993001327A1 Continuous vacuum arc broad beam ion source |
| 01/20/1993 | EP0523695A1 A sputtering apparatus and an ion source |
| 01/19/1993 | US5180477 Thin film deposition apparatus |
| 01/07/1993 | WO1993000701A1 Mass spectrometry apparatus and method relating thereto |
| 01/05/1993 | US5177398 Grid assembly for ion beam sources and method therefor |
| 12/30/1992 | EP0520849A1 Method of enhancing secondary emission from oxydized matrices |
| 12/30/1992 | EP0470209B1 Metal-ion source and process for the generation of metal ions |
| 12/22/1992 | US5173610 Forming charges in liquid and generation of charged clusters |
| 12/22/1992 | CA1311863C Low-voltage source for narrow electron/ion beams |
| 12/16/1992 | EP0517999A1 Apparatus for reactive ion beam etching and plasma-assisted CVD processing |
| 12/08/1992 | CA1311214C Dual plasma microwave apparatus and method for treating a surface |
| 12/01/1992 | US5168197 Ion beam generating apparatus, film-forming apparatus, and method for formation of film |
| 11/25/1992 | EP0515352A1 Ion source |
| 11/25/1992 | EP0263849B1 Liquid metal ion source and alloy |
| 11/19/1992 | EP0514255A1 Electron cyclotron resonance ion source |
| 11/12/1992 | WO1992020089A2 Forming charges in a fluid and generation of a charged beam |
| 11/10/1992 | US5162699 Ion source |
| 11/04/1992 | EP0217951B1 Manufacture of liquid metal ion source |
| 11/03/1992 | CA1309772C Plasma focus apparatus with field distortion elements |
| 10/28/1992 | EP0510581A2 Ion neutralizer |
| 10/06/1992 | US5153440 Method of stabilizing operation for a liquid metal ion source |
| 10/06/1992 | US5152956 Neutron tube comprising an electrostatic ion source |
| 10/01/1992 | WO1992016959A1 Arc source macroparticle filter |
| 10/01/1992 | CA2106598A1 Arc source macroparticle filter |
| 09/30/1992 | EP0506484A1 Ion beam generating apparatus, filmforming apparatus, and method for formation of film |
| 09/29/1992 | US5151605 Method of irradiating an object by means of a charged particle beam, and device for performing the method |
| 09/23/1992 | EP0505327A1 Electron cyclotron resonance ion thruster |
| 09/23/1992 | EP0505309A2 Metal ion source with surface melting by application of an electric field |
| 09/22/1992 | US5150010 Discharge-in-magnetic-field type ion generating apparatus |
| 09/22/1992 | US5149974 Gas delivery for ion beam deposition and etching |
| 09/15/1992 | US5148027 Method of microarea analysis with a focused cesium ion beam |
| 09/01/1992 | US5144196 Particle source, especially for reactive ionic etching and plasma-supported CVD processes |
| 09/01/1992 | US5144143 Device for the ionization of metals having a high melting point, which may be used on ion implanters of the type using ion sources of freeman or similar type |
| 08/12/1992 | CN2112891U Long life metal vapouration vacuum arc ion source |
| 08/04/1992 | CA1306074C Ion source |
| 07/28/1992 | US5134301 Ion implanting apparatus, having ion contacting surfaces made of high purity silicon, for fabricating semiconductor integrated circuit devices |
| 07/14/1992 | US5130607 Cold-cathode, ion-generating and ion-accelerating universal device |
| 06/23/1992 | US5124526 Ion source |
| 06/17/1992 | CN2107714U Column surface ionization device |
| 06/17/1992 | CN1017102B Improved ion source |
| 06/02/1992 | US5118950 Efficient, continuous process |
| 06/02/1992 | US5118938 Rydberg atom impact type ion source |
| 05/20/1992 | EP0486147A2 Ion beam generating apparatus with electronic switching between multiple cathodes |
| 05/19/1992 | US5115135 Ion source |
| 05/06/1992 | EP0483517A2 Gas delivery for ion beam deposition and etching |
| 05/05/1992 | US5111053 Controlling a liquid metal ion source by analog feedback and digital CPU control |
| 04/29/1992 | EP0483004A1 Electron cyclotron resonance ion source for highly charged ions with polarisable probe |
| 04/28/1992 | CA1299773C Plasma processing method and apparatus |
| 04/21/1992 | US5107170 Ion source having auxillary ion chamber |
| 04/21/1992 | US5106570 Intense negative ion source |
| 04/14/1992 | US5104610 Device for perfecting an ion source in a neutron tube |