Patents for H01J 27 - Ion beam tubes (3,716)
10/2005
10/13/2005WO2005094389A2 Method and system for desorption electrospray ionization
10/13/2005CA2559847A1 Method and system for desorption electrospray ionization
10/12/2005CN1681579A Multimode ionization source
10/11/2005US6953928 Ion source and methods for MALDI mass spectrometry
10/06/2005WO2005093777A2 Ion sources
10/06/2005WO2005091990A2 Method and apparatus for improved processing with a gas-cluster ion beam
10/06/2005WO2005031788A3 A source of liquid metal ions and a method for controlling the source
10/06/2005US20050218816 High current density ion source
10/05/2005CN1222007C Control system for indirectly heated cathode ion source
09/2005
09/29/2005WO2005089459A2 Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system
09/29/2005US20050211926 Ion beam irradiation apparatus and insulating spacer for the same
09/29/2005US20050211923 Ion sources
09/29/2005US20050211911 Apparatus and method for sensor control and feedback
09/28/2005EP1580794A2 Mass spectrometric apparatus and ion source
09/28/2005EP1580788A2 Cathode and counter-cathode arrangement in an ion source
09/28/2005EP1579481A2 An ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions
09/27/2005US6949735 Beam source
09/22/2005US20050205802 Method and apparatus for improved processing with a gas-cluster ion beam
09/22/2005US20050205801 Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system
09/21/2005CN1672235A Symmetric beamline and methods for generating a mass-analyzed ribbon ion beam
09/21/2005CN1672232A Ion source and coaxial inductive coupler for ion implantation system
09/15/2005WO2005048290A3 Carbon nanotube electron ionization sources
09/15/2005US20050199824 Method and apparatus for generation of molecular beam
09/15/2005US20050199799 Mass spectrometric apparatus and ion source
09/14/2005CN1669108A Capacitively coupled plasma reactor with magnetic plasma control
09/14/2005CN1667156A Non-grid ion plating aide
09/13/2005US6943345 Soft ionization device and applications thereof
09/09/2005WO2005022577A3 Shaped sputter shields for improved ion column operation
09/08/2005US20050194544 Ion source and methods for maldi mass spectrometry
09/07/2005CN1666314A Method and apparatus for non-invasive measurement and analys of semiconductor plasma parameters
09/07/2005CN1666313A Ion source providing ribbon beam with controllable density profile
09/06/2005US6940074 Devices incorporating soft ionization membrane
09/01/2005WO2005081285A1 Steel fiber for increasing a negative ion, non-ozone, and non-nox type negative ion lamp using the steel fiber
09/01/2005US20050191409 Ion beam monitoring arrangement
08/2005
08/31/2005CN1661762A Ion beam irradiation apparatus and insulating spacer for the same
08/31/2005CN1217560C Extreme ultraviolet source based on colliding neutral beams
08/24/2005EP1565928A2 Chemical sensor system
08/18/2005US20050178975 Ionization device for aerosol mass spectrometer and method of ionization
08/18/2005US20050178974 Ion source frequency feedback device and method
08/18/2005DE20321007U1 Fixing mechanism for securing drain grating in gutter, comprises grating web for engaging with recess in gutter edge via opening in edge profile
08/17/2005EP1564780A2 Apparatus for determining molecular weight of polymers
08/17/2005EP1564779A2 Ion source frequency feedback device and method
08/17/2005EP0873573B1 Electron sources utilizing negative electron affinity photocathodes with ultra-small emission areas
08/17/2005CN1215520C Ion source
08/16/2005US6929725 Sputter ions source
08/11/2005US20050173651 Cathode and counter-cathode arrangement in an ion source
08/09/2005US6927148 Ion implantation method and method for manufacturing SOI wafer
08/04/2005WO2005069904A2 Microfabricated device for selectively removing and analyzing airborne particulates
08/04/2005WO2005017943A3 Method and apparatus for plasma generation
08/04/2005CA2553804A1 Capillary-in-ring electrode gas discharge generator for producing a weakly ionized gas and method for using the same
08/03/2005CN1650492A Ion generator
08/03/2005CN1649077A Long life ionic source of ion injection machine
08/03/2005CN1649071A External magnetic insulation ion diode for prdoucing large area strong flow pulse ionic beam
08/02/2005US6924455 Integrated plasma chamber and inductively-coupled toroidal plasma source
07/2005
07/27/2005EP1556879A2 Method of cleaning ion source, and corresponding apparatus/system
07/27/2005CN1647236A A method of implanting a substrate and an ion implanter for performing the method
07/26/2005US6922019 Microwave ion source
07/26/2005US6921906 Mass spectrometer
07/21/2005US20050156118 Microfabricated device for selectively removing and analyzing airborne particulates from an air stream
07/20/2005EP1554412A2 Beam plasma source
07/14/2005WO2004057643A3 Liquid-metal ion source
07/14/2005US20050153341 Apparatus for determining molecular weight
07/13/2005CN1638014A Ion beam monitoring arrangement
07/13/2005CN1638013A Ion beam irradiation device
07/13/2005CN1210750C Magnetic filter for ion source
07/06/2005EP1550144A1 System for and method of gas cluster ion beam processing
07/06/2005CN1636076A Magnetron negative ion sputter source
07/05/2005US6914386 Source of liquid metal ions and a method for controlling the source
06/2005
06/30/2005US20050139779 User customizable plate handling for MALDI mass spectrometry
06/30/2005US20050139778 User customizable plate handling for MALDI mass spectrometry
06/29/2005EP1547450A2 Ion thruster grids and methods for making
06/29/2005CN1632906A Ion source device for low-energy ion beam material preparing method
06/29/2005CN1208802C Ion source evaporator
06/28/2005US6911789 Power supply for a hot-filament cathode
06/23/2005US20050133738 Ion source and ion implanter having the same
06/16/2005US20050127304 Liquid metal ion gun
06/15/2005EP1539332A1 Multimode ionization source
06/15/2005CN1627065A Device for determining polymer molecular weight
06/14/2005US6906469 Radio frequency ion source with maneuverable electrode(s)
06/14/2005US6906323 Method and apparatus for generation of molecular beam
06/09/2005WO2004079765A3 Novel electro ionization source for orthogonal acceleration time-of-flight mass spectrometry
06/02/2005WO2005050694A2 Liquid metal ion source and its production; processing and analyzing devices provided with said source
06/01/2005EP1123641B1 Gas-filled particle accelerator with a pulsed plasma source
05/2005
05/26/2005WO2005048290A2 Carbon nanotube electron ionization sources
05/26/2005WO2005048286A1 Ion beam source
05/25/2005EP0906636B1 Highly tetrahedral amorphous carbon films and methods and ion-beam source for their production
05/19/2005WO2005046296A2 Device for controlling the electronic temperature in an ecr plasma
05/19/2005WO2005045877A1 Dual filament ion source
05/19/2005WO2005045874A1 Ion source control system
05/19/2005WO2005045419A2 Ion source and methods for maldi mass spectrometry
05/19/2005WO2004038754A8 Method of cleaning ion source, and corresponding apparatus/system
05/19/2005US20050104007 Ion source with electrode kept at potential(s) other than ground by zener diode(s), thyristor(s) and/or the like
05/12/2005US20050098720 Carbon nanotube electron ionization sources
05/12/2005US20050098118 Apparatus for deposition of diamond like carbon
05/05/2005US20050092916 Ion source and methods for MALDI mass spectrometry
05/04/2005EP1527474A1 Symmetric beamline and methods for generating a mass-analyzed ribbon ion beam
05/04/2005EP1527473A2 Ion source and coaxial inductive coupler for ion implantation system
05/04/2005DE10218913B4 Vorrichtung und Verfahren zur Bewegung einer Elektronenquelle in einem Magnetfeld Apparatus and method for moving an electron source in a magnetic field
04/2005
04/28/2005WO2005038849A1 Ion source with modified gas delivery
04/28/2005US20050088101 Inductively generated streaming plasma ion source
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