Patents
Sitemap › H01 - Basic electric elements › H01J - Electric discharge tubes or discharge lamps › H01J 27 - Ion beam tubes
Patents for H01J 27 - Ion beam tubes (3,716)
07/2003
07/15/2003US6593580 Ion source vaporizer
07/08/2003US6590324 Charged particle beam extraction and formation apparatus
07/08/2003US6590206 System for ionization and selective detection in mass spectrometers
07/03/2003US20030122085 Field ionization ion source
07/02/2003CN1428001A Control system for indirectly heated cathode ion source
07/01/2003US6586731 High intensity ion source apparatus for mass spectrometry
06/2003
06/24/2003US6583544 Ion source having replaceable and sputterable solid source material
06/24/2003US6583064 Low contamination high density plasma etch chambers and methods for making the same
06/12/2003WO2003049135A1 Ion optics with shallow dished grids
06/10/2003US6577479 Arc suppression circuit
06/10/2003US6576909 Ion generation chamber
06/04/2003EP1316104A2 Bulk gas delivery system for ion implanters
06/03/2003US6573510 Charge exchange molecular ion source
05/2003
05/30/2003WO2002033725A3 System and method for rapidly controlling the output of an ion source for ion implantation
05/28/2003EP1314180A2 System and method for removing contaminant particles relative to an ion beam
05/28/2003CN1420521A 离子源 Ion source
05/27/2003US6570172 Magnetron negative ion sputter source
05/27/2003US6570166 Operation method of ion source and ion beam irradiation apparatus
05/22/2003US20030094902 Ion source
05/21/2003EP1313132A1 Toroidal low-field reactive gas source
05/21/2003EP1313131A1 Toroidal low-field reactive gas source
05/21/2003EP1313130A1 Toroidal low-field reactive gas source
05/21/2003EP1313129A1 Toroidal low-field reactive gas source
05/21/2003EP1313128A1 Toroidal low-field reactive gas source
05/14/2003EP1310981A1 Toroidal low-field reactive gas source
05/14/2003EP1310980A1 Toroidal low-field reactive gas source
05/14/2003CN1418453A Plasma accelerator arrangement
05/08/2003WO2003038086A1 Soft ionization device and applications thereof
05/06/2003US6559454 Ion beam generation apparatus
05/06/2003US6559408 Toroidal low-field reactive gas source
05/01/2003US20030080290 Method and apparatus for cooling and focusing ions
05/01/2003US20030079834 Shielding system for plasma chamber
04/2003
04/24/2003US20030077402 System for deposition of diamond like carbon
04/24/2003US20030075522 Procedure and device for the production of a plasma
04/23/2003EP1303866A2 System and method for improving thin films by gas cluster ion be am processing
04/22/2003US6552296 Plasma ignition within wider range of conditions; power efficiency; converting hazardous gases into scrubbable materials
04/17/2003US20030071223 Field ionizing elements and applications thereof
04/16/2003EP0932911B1 Control mechanisms for dosimetry control in ion implantation systems
04/16/2003CN1105945C Apertured nonplanar electrodes and forming methods
04/10/2003WO2003030207A1 Method and device for producing a plasma
04/10/2003WO2003001219A3 Field ionizing elements and applications thereof
04/09/2003EP1299895A1 Cathode assembly for indirectly heated cathode ion source
04/08/2003US6545419 Double chamber ion implantation system
04/08/2003US6545269 Ion source for time-of-flight mass spectrometers for analyzing gas samples
04/08/2003US6544627 Method of producing recording media having protective overcoats of highly tetrahedral amorphous carbon
03/2003
03/27/2003WO2003025973A1 Method and apparatus for cooling and focusing ions
03/27/2003WO2002082489A3 Ion source filament
03/27/2003US20030057846 Plasma accelarator arrangement
03/27/2003US20030057378 Ion source for time-of-flight mass spectrometers for analyzing gas samples
03/26/2003EP1050064B1 Implantation of radioactive ?32 p atoms
03/25/2003US6537668 Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production
03/25/2003US6537606 System and method for improving thin films by gas cluster ion beam processing
03/13/2003WO2003021644A1 Chamber shields for a plasma chamber
03/13/2003WO2002093987A3 Ion sorces
03/13/2003WO2002037521A3 Hall effect ion source at high current density
03/13/2003WO2002019366A3 Cold cathode ion beam deposition apparatus with segregated gas flow
03/12/2003EP1290925A2 Extreme ultraviolet source based on colliding neutral beams
03/11/2003US6531811 Liquid metal ion source and method for producing the same
03/11/2003US6531031 Plasma etching installation
03/05/2003EP1287549A1 An apparatus and a method for forming a pattern using a crystal structure of material
02/2003
02/27/2003WO2002069364A3 Magnetic field for small closed-drift thruster
02/27/2003US20030038246 Helium ion generation method and apparatus
02/27/2003US20030038245 Field ionizing elements and applications thereof
02/26/2003EP1285452A1 Control system for indirectly heated cathode ion source
02/25/2003US6525482 Ion source and operation method thereof
02/20/2003WO2003015119A2 Decaborane vaporizer
02/19/2003EP0992059B1 Toroidal low-field reactive gas source
02/18/2003US6521897 Ion beam collimating grid to reduce added defects
02/13/2003US20030030010 Decaborane vaporizer having improved vapor flow
02/13/2003US20030030009 Ion beam processing apparatus and method of operating ion source therefor
02/12/2003EP1282909A1 Enhanced electron emissive surfaces for a thin film deposition system using ion sources
02/11/2003US6518692 Discharge device having cathode with micro hollow array
02/04/2003US6515426 Ion beam processing apparatus and method of operating ion source therefor
02/04/2003US6515290 Bulk gas delivery system for ion implanters
01/2003
01/29/2003EP0914670B1 Cathode arc source
01/28/2003US6511585 Enhanced macroparticle filter and cathode arc source
01/21/2003US6509570 Gallium ion source
01/14/2003US6507149 Plasma cell
01/09/2003US20030006708 Microwave ion source
01/03/2003WO2003001219A2 Field ionizing elements and applications thereof
01/02/2003EP1269803A2 Plasma accelerator arrangement
12/2002
12/31/2002US6501078 Ion extraction assembly
12/25/2002CN1097301C Method and apparatus for in situ removal of contaminants from ion beam neutralization and implantation apparatuses
12/24/2002US6497744 Apparatus and method for generating indium ion beam
12/19/2002WO2002078040A3 Neutral particle beam processing apparatus
12/18/2002EP1267384A2 Graphite target
12/18/2002EP1027482A4 Apparatus and method for the in-situ generation of dopants
12/18/2002CN1385872A Method for preparing solid strong acid by intermediate hole molecular sieve
12/17/2002US6495842 Implantation of the radioactive 32P atoms
12/12/2002US20020185607 Ion source filament and method
12/05/2002WO2002097850A2 Uniform broad ion beam deposition
12/04/2002EP1261982A1 Hollow cathode sputter ion source for generating high-intensity ion beams
12/04/2002EP1261752A1 Method and apparatus for repairing lithography masks using a charged particle beam system
12/04/2002CN1383179A 离子源蒸发器 Ion source evaporator
11/2002
11/26/2002US6486478 Gas cluster ion beam smoother apparatus
11/26/2002US6486431 Toroidal low-field reactive gas source
11/21/2002WO2002093987A2 Ion sorces
11/20/2002EP1258903A2 Ion source
11/14/2002WO2002078036A3 Device for generating an ion beam
11/14/2002WO2002071816A3 Improved double chamber ion implantation system
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