| Patents for H01J 27 - Ion beam tubes (3,716) |
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| 10/19/2006 | US20060231759 Uniform broad ion beam deposition |
| 10/12/2006 | WO2006107822A2 Stroboscopic liberation and methods of use |
| 10/05/2006 | WO2006103524A1 High brightness solid state ion beam generator, its use, and method for making such a generator |
| 10/05/2006 | US20060219937 Stroboscopic liberation and methods of use |
| 10/03/2006 | US7116054 High-efficient ion source with improved magnetic field |
| 09/28/2006 | US20060214111 Negative ion generator |
| 09/26/2006 | US7112804 Ion implantation ion source, system and method |
| 09/19/2006 | US7109480 Ion source and methods for MALDI mass spectrometry |
| 09/19/2006 | US7107929 Ion implantation ion source, system and method |
| 09/14/2006 | WO2006096618A1 High conductance ion source |
| 09/14/2006 | US20060202131 Forming a semiconductor device feature using acquired parameters |
| 09/14/2006 | US20060202130 Mass spectrometer and liquid-metal ion source for a mass spectrometer of this type |
| 09/08/2006 | WO2006093076A1 Ion source |
| 09/08/2006 | WO2005089459A3 Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system |
| 09/06/2006 | EP1699067A2 Method of controlling an ion beam |
| 09/06/2006 | CN1828818A Apparatus and method for ion production enhancement |
| 09/06/2006 | CN1828817A Scan type ion gun |
| 08/31/2006 | WO2006055296A3 Ion source with substantially planar design |
| 08/31/2006 | US20060192132 Charged particle beam extraction and formation apparatus |
| 08/30/2006 | EP1696466A2 Apparatus and method for sensor control and feedback |
| 08/30/2006 | EP1695038A2 Controlling the flow of vapors sublimated from solids |
| 08/30/2006 | EP1018140A4 Electron sources having shielded cathodes |
| 08/30/2006 | CN1824475A Ionic punching machine for plaster |
| 08/29/2006 | US7098462 apparatus for ionizing gases and airborne particulates; electrodes of metal, silicon, graphite, electrically conductive liquid, or electrically conductive gas; an insultating material of glass, ceramic, plastic, oil, or gas and a gaseous medium form a miniature corona discharge based ionizer |
| 08/23/2006 | EP1693877A1 High current density ion source |
| 08/23/2006 | CN1271665C Ion source operation method, and ion beam radiation device |
| 08/22/2006 | US7095037 Electron beam lithography system having improved electron gun |
| 08/22/2006 | US7095021 Method, apparatus and system for specimen fabrication by using an ion beam |
| 08/17/2006 | WO2006085576A1 Plasma source, ion source, and ion generating method |
| 08/17/2006 | WO2006042740A3 Process and device for sterilising ambient air |
| 08/17/2006 | DE102005005333A1 Method for aerosol analysis especially concerning particle size and particle mass involves transferring aerosol sample to measuring instrument, whereby aerosol measurement current with reduced aerosol concentration |
| 08/16/2006 | CN1269990C Method and system for icosaborane implatation |
| 08/15/2006 | US7091483 Apparatus and method for sensor control and feedback |
| 08/03/2006 | US20060169915 Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms |
| 08/03/2006 | US20060169914 Ion source using matrix-assisted laser desorption/ionization |
| 08/02/2006 | EP1685582A2 Ion source and methods for maldi mass spectrometry |
| 08/01/2006 | US7084408 Vaporization and ionization of metals for use in semiconductor processing |
| 08/01/2006 | US7084407 Ion beam extractor with counterbore |
| 07/27/2006 | US20060163497 Ion beam device and ion beam processing method |
| 07/27/2006 | US20060163489 Source arc chamber for ion implanter having repeller electrode mounted to external insulator |
| 07/26/2006 | EP1684328A2 Apparatus and method for ion production enhancement |
| 07/26/2006 | EP1683180A2 Carbon nanotube electron ionization sources |
| 07/26/2006 | EP1683163A2 Charged particle extraction device and method of design there for |
| 07/25/2006 | US7081711 pulsed, neutralized ion beam source; pulsed inductive breakdown of neutral gas, magnetic acceleration and control of the resulting plasma, to form a beam; excellent control of ion species, low remittance, high current density, and spatial uniformity |
| 07/20/2006 | WO2006075691A1 Plasma source, ion source and method of ion generation |
| 07/20/2006 | DE102005003806B3 Glow discharge source for analysis of solid sample by means of glow discharge has anode and cathode and by means of direct and indirect cooling of sample and cooling agent provide at least one peltier-element |
| 07/19/2006 | EP1680948A2 Device for controlling the electronic temperature in an ecr plasma |
| 07/19/2006 | CN2798305Y Small diameter neutron tube |
| 07/19/2006 | CN1806309A A hybrid magnetic/electrostatic deflector for ion implantation systems |
| 07/18/2006 | US7078862 plasma generating chamber, an antenna for generating plasma, a first and second electrode in the chamber, both antenna and second electrode facing first electrode; power supply for applying a voltage between the first electrode and the second electrode to extract particles from the generated plasma |
| 07/18/2006 | US7078681 Multimode ionization source |
| 07/13/2006 | US20060151786 Ion doping system, ion doping method and semiconductor device |
| 07/06/2006 | WO2006070744A1 Charged particle generator and accelerator |
| 07/06/2006 | WO2005059514A3 High aspect ratio tip atomic force microscopy cantilevers and method of manufacture |
| 07/06/2006 | US20060145090 Metal ion emission device and process for producing the same, ion beam irradiation device, processing apparatus and analyzing apparatus provided with emission device |
| 07/06/2006 | US20060145071 Apparatus for delivering ions from a grounded electrospray assembly to a vacuum chamber |
| 07/05/2006 | CN1799124A Ion doping device, ion doping method and semiconductor device |
| 07/05/2006 | CN1263080C 离子源 Ion source |
| 06/29/2006 | US20060138342 Anode layer particle beam device |
| 06/28/2006 | EP1675154A2 Ion implantation ion source |
| 06/27/2006 | US7066107 Shielding system for plasma chamber |
| 06/22/2006 | WO2006065520A2 Atmospheric pressure ionization with optimized drying gas flow |
| 06/22/2006 | DE202005020746U1 Glow discharge source for analysis of solid sample by means of glow discharge has anode and cathode and by means of direct and indirect cooling of sample and cooling agent provide at least one peltier-element |
| 06/21/2006 | EP1672670A2 Ion source apparatus and method of making the ion source apparatus |
| 06/21/2006 | EP1015161B1 Plasma gun and method using the latter |
| 06/20/2006 | US7064491 Ion implantation system and control method |
| 06/20/2006 | US7064049 Ion implantation method, SOI wafer manufacturing method and ion implantation system |
| 06/15/2006 | US20060124859 Multimode ionization mode separator |
| 06/14/2006 | CN2788509Y Ion source discharge current self-stabilization controller |
| 06/14/2006 | CN1787162A Cold cathode Penning ion source capable of extracting low smelting point metallic ion |
| 06/14/2006 | CN1787161A 离子源 Ion source |
| 06/13/2006 | US7060989 Method and apparatus for improved processing with a gas-cluster ion beam |
| 06/13/2006 | US7060988 Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system |
| 06/13/2006 | US7060987 Electron ionization source for othogonal acceleration time-of-flight mass spectrometry |
| 06/08/2006 | US20060118731 Gas cluster ion beam emitting apparatus and method for ionization of gas cluster |
| 06/08/2006 | US20060118714 Ion source frequency feedback device and method |
| 06/07/2006 | EP1665319A2 Shaped sputter shields for improved ion column operation |
| 06/07/2006 | EP1261752A4 Method and apparatus for repairing lithography masks using a charged particle beam system |
| 05/26/2006 | WO2006055296A2 Ion source with substantially planar design |
| 05/25/2006 | US20060108538 Method of analyzing protein using laser ablation |
| 05/25/2006 | US20060108537 Aerosol particle charging equipment |
| 05/24/2006 | EP1658632A2 Mass spectrometer and liquid-metal ion source for a mass spectrometer of this type |
| 05/24/2006 | EP1374270B1 Device for generating an ion beam |
| 05/24/2006 | CN1257524C Ion source, operating method of ion source, and ion source system |
| 05/18/2006 | WO2005069904A3 Microfabricated device for selectively removing and analyzing airborne particulates |
| 05/17/2006 | EP1656688A2 Method and apparatus for plasma generation |
| 05/16/2006 | US7045795 Apparatus for activating a product by applying plasma particles in a magnetic field |
| 05/16/2006 | US7045793 Multi-grid ion beam source for generating a highly collimated ion beam |
| 05/11/2006 | US20060097193 Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions |
| 05/11/2006 | US20060097186 Liquid metal ion gun |
| 05/11/2006 | US20060097185 Ionizer and method for gas-cluster ion-beam formation |
| 05/10/2006 | EP1099235A4 Ion source |
| 05/10/2006 | CN2779600Y Ion source heating electron gun apparatus |
| 05/10/2006 | CN2779595Y Lon source magnetic field generating apparatus |
| 05/10/2006 | CN1771579A Ion beam incident angle detector for ion implant systems |
| 05/09/2006 | US7041984 Replaceable anode liner for ion source |
| 05/09/2006 | US7041966 Apparatus for delivering ions from a grounded electrospray assembly to a vacuum chamber |
| 05/04/2006 | WO2006047609A2 Ionizer and method for gas-cluster ion-beam formation |
| 05/02/2006 | US7038217 Method and apparatus for generation of molecular beam |
| 05/02/2006 | US7038216 Electrostatic shape-shifting ion optics |