Patents for H01J 27 - Ion beam tubes (3,716)
06/2008
06/03/2008US7381967 Non-axisymmetric charged-particle beam system
05/2008
05/29/2008WO2008064021A2 Method and apparatus for selectively performing chemical ionization or electron ionization
05/29/2008US20080121811 Method and apparatus for extending equipment uptime in ion implantation
05/27/2008US7377228 System for and method of gas cluster ion beam processing
05/22/2008US20080116369 Method and apparatus for selectively performing chemical ionization or electron ionization
05/22/2008US20080116366 Laser desorption device, mass spectrometer assembly, and method for ambient liquid mass spectrometry
05/21/2008CN100389476C Scan type ion gun
05/14/2008EP1921657A2 System and Method for Generating Ions and Radicals
05/13/2008US7372195 Electron beam source having an extraction electrode provided with a magnetic disk element
05/13/2008US7372043 Apparatus and method for ion production enhancement
05/13/2008US7372023 Ion source frequency feedback device and method
05/08/2008US20080105828 Techniques for removing molecular fragments from an ion implanter
05/06/2008US7368729 Method, apparatus and system for specimen fabrication by using an ion beam
04/2008
04/30/2008CN100385605C Ion implantation system and ion source
04/29/2008US7365341 Gas cluster ion beam emitting apparatus and method for ionization of gas cluster
04/29/2008US7365339 Ion source
04/23/2008CN101167154A Ion source for use in an ion implanter
04/17/2008US20080087842 Source Of Generating Multicharged Ions And Charged Particle Beam Apparatus Using Such Ion Generating Source
04/17/2008US20080087631 Ion gun, ion beam etching apparatus, ion beam etching facility, etching method, and method for manufacturing magnetic recording medium
04/16/2008EP1547450A4 Ion thruster grids and methods for making
04/16/2008EP1161309A4 A method for a repetitive ion beam processing with a by carbon containing ion beam
04/10/2008WO2007136722A3 New and improved ion source
04/10/2008US20080083883 Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access
04/10/2008US20080083882 Laser desorption assisted field ionization device and method
04/09/2008EP1290712B1 Atmospheric pressure ion lens for generating a larger and more stable ion flux
04/09/2008CN100379893C Matching box, vacuum device using the same and vacuum processing method
04/03/2008US20080080659 Neutron tubes
04/02/2008CN100378920C Ion mixing device and porous electrode for ion mixing device
04/01/2008US7351986 Method and apparatus for reducing cross contamination of species during ion implantation
03/2008
03/27/2008WO2008000836A3 Apparatus for accelerating an ion beam
03/27/2008US20080073559 Controlling the flow of vapors sublimated from solids
03/27/2008US20080073558 Heat capacitor for capillary aerosol generator
03/27/2008US20080073557 Methods and apparatuses for directing an ion beam source
03/27/2008US20080073556 Electron beam source device
03/27/2008US20080073555 Electrospray ion source
03/20/2008US20080067412 Ion source
03/20/2008US20080067411 Ion Source
03/20/2008US20080067410 Charged Particle Generator and Accelerator
03/20/2008US20080067409 Method and Apparatus for Generating Ions for Mass Analysis
03/19/2008CN201038119Y Ion implantation apparatus filament breaker
03/13/2008WO2007067311A3 Ion sources, systems and methods
03/13/2008WO2007067310A3 Ion sources, systems and methods
03/12/2008CN100375218C System and method for removing contaminant particles relative to ion beam
03/06/2008WO2007067314A3 Ion sources, systems and methods
03/05/2008EP1894221A1 Ion source with multi-piece outer cathode
02/2008
02/28/2008WO2007067328A3 Ion sources, systems and methods
02/28/2008US20080048127 Ion source including magnet and magnet yoke assembly
02/28/2008US20080048122 Methods and systems for generating amplified terahertz radiation for analyzing remotely-located objects
02/28/2008US20080048107 Ion source for a mass spectrometer
02/27/2008EP1579481A4 An ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions
02/27/2008CN100372048C Ion source providing ribbon beam with controllable density profile
02/26/2008US7335897 Method and system for desorption electrospray ionization
02/26/2008US7335896 Emitter for an ion source
02/21/2008WO2008020855A1 Technique for improving performance and extending lifetime of inductively heated cathode ion sources
02/12/2008US7329856 Image sensor having integrated infrared-filtering optical device and related method
02/05/2008US7326937 Plasma ion implantation systems and methods using solid source of dopant material
02/05/2008CA2411820C Method and apparatus for generation of molecular beam
01/2008
01/31/2008DE102006034988A1 Ionenquelle zur Erzeugung negativ geladener Ionen Ion source for generating negatively charged ions
01/24/2008WO2008011263A2 Electrospray ion source
01/24/2008WO2008009898A1 Ion sources
01/24/2008WO2008009889A1 Ion deposition apparatus
01/24/2008WO2007044379A3 Compact ionization source
01/24/2008US20080017319 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system
01/24/2008DE102007032071A1 Wanderfeldröhre mit integrierter Ionenfallen-Energieversorgung Traveling-wave tube with integrated ion trap energy supply
01/24/2008CA2657389A1 Electrospray ion source
01/23/2008CN100364035C Procedure and device for the production of a plasma
01/22/2008US7321198 Ion source with uniformity of radial distribution of ion beam intensity
01/17/2008WO2007138371A3 Method and device for desorption ionization by liquid jet
01/15/2008CA2355659C Electrostatic fluid accelerator
01/10/2008WO2008004240A2 Device and method for thin film deposition using a vacuum arc in an enclosed cathode-anode assembly
01/09/2008EP1874442A2 Atmospheric pressure ion source for mass spectrometry
12/2007
12/13/2007WO2007142296A1 Ion generating device, and neutron generating apparatus
12/13/2007WO2006107831A3 Atmospheric pressure ion source for mass spectrometry
12/13/2007US20070284539 Fast atom bombardment source, fast atom beam emission method, and surface modification apparatus
12/06/2007WO2007139425A1 Tape ioniser for the ion source of a mass-spectrometer
12/06/2007WO2007138371A2 Method and device for desorption ionization by liquid jet
12/06/2007WO2007087213A3 Methods of implanting ions and ion sources used for same
12/06/2007WO2007067315A3 Ion sources, systems and methods
12/06/2007US20070278417 Ion implantation ion source, system and method
12/04/2007US7304299 Super alloy ionization chamber for reactive samples
11/2007
11/27/2007US7301160 Ion sources
11/22/2007WO2007132922A1 Ion source and method for operating same
11/22/2007WO2007084880A3 Ion source with removable anode assembly
11/22/2007WO2007018575A3 Ion generation by the temporal control of gaseous dielectric breakdown
11/22/2007US20070266948 Device for Controlling Electron Temperature in an Ecr Plasma
11/15/2007US20070262263 Particle-optical apparatus equipped with a gas ion source
11/15/2007US20070262262 Ion implantation ion source, system and method
11/14/2007CN101073137A Method and system for desorption electrospray ionization
11/14/2007CN100349249C Cold cathode Penning ion source capable of extracting low smelting point metallic ion
11/13/2007US7294841 Mass spectrometer
11/08/2007US20070257200 Liquid metal ion gun
11/06/2007US7291845 Method for controlling space charge-driven ion instabilities in electron impact ion sources
10/2007
10/24/2007EP1847049A2 Apparatus and method for positioning a discharge tube with respect to an orifice
10/23/2007US7285788 Ion beam extractor
10/18/2007US20070241287 Vacuum plasma generator
10/11/2007US20070235661 Self-Cleaning Ionization System
10/11/2007US20070235660 Tunable uniformity in a plasma processing system
10/04/2007US20070228301 Target supplier
10/04/2007US20070228288 Laser-driven light source
10/04/2007US20070228287 Systems and methods for a gas field ionization source
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