Patents for H01J 27 - Ion beam tubes (3,716) |
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06/03/2008 | US7381967 Non-axisymmetric charged-particle beam system |
05/29/2008 | WO2008064021A2 Method and apparatus for selectively performing chemical ionization or electron ionization |
05/29/2008 | US20080121811 Method and apparatus for extending equipment uptime in ion implantation |
05/27/2008 | US7377228 System for and method of gas cluster ion beam processing |
05/22/2008 | US20080116369 Method and apparatus for selectively performing chemical ionization or electron ionization |
05/22/2008 | US20080116366 Laser desorption device, mass spectrometer assembly, and method for ambient liquid mass spectrometry |
05/21/2008 | CN100389476C Scan type ion gun |
05/14/2008 | EP1921657A2 System and Method for Generating Ions and Radicals |
05/13/2008 | US7372195 Electron beam source having an extraction electrode provided with a magnetic disk element |
05/13/2008 | US7372043 Apparatus and method for ion production enhancement |
05/13/2008 | US7372023 Ion source frequency feedback device and method |
05/08/2008 | US20080105828 Techniques for removing molecular fragments from an ion implanter |
05/06/2008 | US7368729 Method, apparatus and system for specimen fabrication by using an ion beam |
04/30/2008 | CN100385605C Ion implantation system and ion source |
04/29/2008 | US7365341 Gas cluster ion beam emitting apparatus and method for ionization of gas cluster |
04/29/2008 | US7365339 Ion source |
04/23/2008 | CN101167154A Ion source for use in an ion implanter |
04/17/2008 | US20080087842 Source Of Generating Multicharged Ions And Charged Particle Beam Apparatus Using Such Ion Generating Source |
04/17/2008 | US20080087631 Ion gun, ion beam etching apparatus, ion beam etching facility, etching method, and method for manufacturing magnetic recording medium |
04/16/2008 | EP1547450A4 Ion thruster grids and methods for making |
04/16/2008 | EP1161309A4 A method for a repetitive ion beam processing with a by carbon containing ion beam |
04/10/2008 | WO2007136722A3 New and improved ion source |
04/10/2008 | US20080083883 Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access |
04/10/2008 | US20080083882 Laser desorption assisted field ionization device and method |
04/09/2008 | EP1290712B1 Atmospheric pressure ion lens for generating a larger and more stable ion flux |
04/09/2008 | CN100379893C Matching box, vacuum device using the same and vacuum processing method |
04/03/2008 | US20080080659 Neutron tubes |
04/02/2008 | CN100378920C Ion mixing device and porous electrode for ion mixing device |
04/01/2008 | US7351986 Method and apparatus for reducing cross contamination of species during ion implantation |
03/27/2008 | WO2008000836A3 Apparatus for accelerating an ion beam |
03/27/2008 | US20080073559 Controlling the flow of vapors sublimated from solids |
03/27/2008 | US20080073558 Heat capacitor for capillary aerosol generator |
03/27/2008 | US20080073557 Methods and apparatuses for directing an ion beam source |
03/27/2008 | US20080073556 Electron beam source device |
03/27/2008 | US20080073555 Electrospray ion source |
03/20/2008 | US20080067412 Ion source |
03/20/2008 | US20080067411 Ion Source |
03/20/2008 | US20080067410 Charged Particle Generator and Accelerator |
03/20/2008 | US20080067409 Method and Apparatus for Generating Ions for Mass Analysis |
03/19/2008 | CN201038119Y Ion implantation apparatus filament breaker |
03/13/2008 | WO2007067311A3 Ion sources, systems and methods |
03/13/2008 | WO2007067310A3 Ion sources, systems and methods |
03/12/2008 | CN100375218C System and method for removing contaminant particles relative to ion beam |
03/06/2008 | WO2007067314A3 Ion sources, systems and methods |
03/05/2008 | EP1894221A1 Ion source with multi-piece outer cathode |
02/28/2008 | WO2007067328A3 Ion sources, systems and methods |
02/28/2008 | US20080048127 Ion source including magnet and magnet yoke assembly |
02/28/2008 | US20080048122 Methods and systems for generating amplified terahertz radiation for analyzing remotely-located objects |
02/28/2008 | US20080048107 Ion source for a mass spectrometer |
02/27/2008 | EP1579481A4 An ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions |
02/27/2008 | CN100372048C Ion source providing ribbon beam with controllable density profile |
02/26/2008 | US7335897 Method and system for desorption electrospray ionization |
02/26/2008 | US7335896 Emitter for an ion source |
02/21/2008 | WO2008020855A1 Technique for improving performance and extending lifetime of inductively heated cathode ion sources |
02/12/2008 | US7329856 Image sensor having integrated infrared-filtering optical device and related method |
02/05/2008 | US7326937 Plasma ion implantation systems and methods using solid source of dopant material |
02/05/2008 | CA2411820C Method and apparatus for generation of molecular beam |
01/31/2008 | DE102006034988A1 Ionenquelle zur Erzeugung negativ geladener Ionen Ion source for generating negatively charged ions |
01/24/2008 | WO2008011263A2 Electrospray ion source |
01/24/2008 | WO2008009898A1 Ion sources |
01/24/2008 | WO2008009889A1 Ion deposition apparatus |
01/24/2008 | WO2007044379A3 Compact ionization source |
01/24/2008 | US20080017319 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system |
01/24/2008 | DE102007032071A1 Wanderfeldröhre mit integrierter Ionenfallen-Energieversorgung Traveling-wave tube with integrated ion trap energy supply |
01/24/2008 | CA2657389A1 Electrospray ion source |
01/23/2008 | CN100364035C Procedure and device for the production of a plasma |
01/22/2008 | US7321198 Ion source with uniformity of radial distribution of ion beam intensity |
01/17/2008 | WO2007138371A3 Method and device for desorption ionization by liquid jet |
01/15/2008 | CA2355659C Electrostatic fluid accelerator |
01/10/2008 | WO2008004240A2 Device and method for thin film deposition using a vacuum arc in an enclosed cathode-anode assembly |
01/09/2008 | EP1874442A2 Atmospheric pressure ion source for mass spectrometry |
12/13/2007 | WO2007142296A1 Ion generating device, and neutron generating apparatus |
12/13/2007 | WO2006107831A3 Atmospheric pressure ion source for mass spectrometry |
12/13/2007 | US20070284539 Fast atom bombardment source, fast atom beam emission method, and surface modification apparatus |
12/06/2007 | WO2007139425A1 Tape ioniser for the ion source of a mass-spectrometer |
12/06/2007 | WO2007138371A2 Method and device for desorption ionization by liquid jet |
12/06/2007 | WO2007087213A3 Methods of implanting ions and ion sources used for same |
12/06/2007 | WO2007067315A3 Ion sources, systems and methods |
12/06/2007 | US20070278417 Ion implantation ion source, system and method |
12/04/2007 | US7304299 Super alloy ionization chamber for reactive samples |
11/27/2007 | US7301160 Ion sources |
11/22/2007 | WO2007132922A1 Ion source and method for operating same |
11/22/2007 | WO2007084880A3 Ion source with removable anode assembly |
11/22/2007 | WO2007018575A3 Ion generation by the temporal control of gaseous dielectric breakdown |
11/22/2007 | US20070266948 Device for Controlling Electron Temperature in an Ecr Plasma |
11/15/2007 | US20070262263 Particle-optical apparatus equipped with a gas ion source |
11/15/2007 | US20070262262 Ion implantation ion source, system and method |
11/14/2007 | CN101073137A Method and system for desorption electrospray ionization |
11/14/2007 | CN100349249C Cold cathode Penning ion source capable of extracting low smelting point metallic ion |
11/13/2007 | US7294841 Mass spectrometer |
11/08/2007 | US20070257200 Liquid metal ion gun |
11/06/2007 | US7291845 Method for controlling space charge-driven ion instabilities in electron impact ion sources |
10/24/2007 | EP1847049A2 Apparatus and method for positioning a discharge tube with respect to an orifice |
10/23/2007 | US7285788 Ion beam extractor |
10/18/2007 | US20070241287 Vacuum plasma generator |
10/11/2007 | US20070235661 Self-Cleaning Ionization System |
10/11/2007 | US20070235660 Tunable uniformity in a plasma processing system |
10/04/2007 | US20070228301 Target supplier |
10/04/2007 | US20070228288 Laser-driven light source |
10/04/2007 | US20070228287 Systems and methods for a gas field ionization source |