| Patents for H01J 27 - Ion beam tubes (3,716) |
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| 02/16/2000 | EP0980088A1 Toroidal filament for plasma generation |
| 02/15/2000 | US6025602 Ion implantation system for implanting workpieces |
| 02/08/2000 | US6022258 ARC chamber for an ion implantation system |
| 02/08/2000 | CA2022782C Electrode for plasma arc torch |
| 02/03/2000 | WO2000005742A1 Ion source |
| 02/03/2000 | WO1999066536A3 An apparatus for reduction of selected ion intensities in confined ion beams |
| 02/02/2000 | EP0975416A1 Apparatus for generating high-activity radiant rays and ions |
| 02/02/2000 | CN1243330A System and method for cleaning ion source in course of using |
| 01/19/2000 | CN1241798A Ion source having wide output current operating range |
| 01/18/2000 | US6016036 Magnetic filter for ion source |
| 12/29/1999 | EP0967628A2 ECR ion source : 2,45GHz |
| 12/23/1999 | WO1999066536A2 An apparatus for reduction of selected ion intensities in confined ion beams |
| 12/23/1999 | CA2335108A1 An apparatus for reduction of selected ion intensities in confined ion beams |
| 12/15/1999 | EP0964425A2 Apparatus for processing a work piece with a uniformly neutralised ion beam |
| 12/15/1999 | CN1238551A Beam generation apparatus |
| 12/14/1999 | US6002208 Universal cold-cathode type ion source with closed-loop electron drifting and adjustable ion-emitting slit |
| 12/14/1999 | US6001172 Apparatus and method for the in-situ generation of dopants |
| 12/02/1999 | WO1999062306A1 Method for modulating a magnetic field configuration |
| 11/24/1999 | EP0959487A2 Multi-cusp ion source |
| 11/24/1999 | CN1236181A Decaborane vaporizer for ion source |
| 11/17/1999 | CN1235695A Cathode arc source and graphite target |
| 11/11/1999 | WO1999034396A3 Installation with an electron-cyclotron resonance ion source for doping stents with radioactive and non-radioactive atoms |
| 11/09/1999 | US5982101 Charged-particle source, control system, and process using gating to extract the ion beam |
| 11/03/1999 | EP0954008A2 Decaborane vaporizer for ion source |
| 11/02/1999 | US5977552 Boron ion sources for ion implantation apparatus |
| 10/26/1999 | US5973329 Ion generating apparatus for semiconductor manufacturing equipment including magnetic field switching apparatus |
| 10/19/1999 | US5969470 Charged particle source |
| 10/07/1999 | DE19801427C1 Arrangement for generating ions by generating a plasma esp. for coating substrates |
| 10/06/1999 | EP0946961A1 Magnetic system, particularly for ecr sources, for producing closed surfaces of equimodule b of any form and dimensions |
| 09/29/1999 | EP0945892A2 System and method for in-process cleaning of an ion source |
| 09/28/1999 | US5959303 Generator of ribbon-shaped ion beam |
| 09/10/1999 | WO1999022396A3 Enhanced macroparticle filter and cathode arc source |
| 09/08/1999 | EP0939968A1 Electronic cyclotron resonance source for the production of ions with multiple charge in a hostile medium |
| 09/08/1999 | CN1227881A Magnetic filter for ion source |
| 09/01/1999 | EP0939423A1 Ion source having wide output current operating range |
| 09/01/1999 | EP0939422A2 Magnetic filter for ion source |
| 08/31/1999 | US5945781 For ionization and acceleration |
| 08/25/1999 | EP0937307A1 Charged particle source |
| 08/24/1999 | US5943594 Method for extended ion implanter source lifetime with control mechanism |
| 08/24/1999 | US5942854 Electron-beam excited plasma generator with side orifices in the discharge chamber |
| 08/18/1999 | CN1226128A Apparatus and method for producing high voltage for gas ionization |
| 08/17/1999 | US5940724 Method for extended ion implanter source lifetime |
| 08/17/1999 | US5939829 Light source |
| 08/12/1999 | WO1999039808A1 Apparatus for generating high-activity radiant rays and ions |
| 08/11/1999 | EP0934600A1 Ion gun |
| 08/10/1999 | US5936251 Liquid metal ion source |
| 08/10/1999 | US5934965 Apertured nonplanar electrodes and forming methods |
| 08/04/1999 | EP0932911A2 Control mechanisms for dosimetry control in ion implantation systems |
| 08/03/1999 | US5932966 Electron sources utilizing patterned negative electron affinity photocathodes |
| 07/21/1999 | EP0929906A1 An arc chamber for an ion implantation system |
| 07/21/1999 | EP0876677B1 Ion source for an ion beam arrangement |
| 07/20/1999 | US5925886 Ion source and an ion implanting apparatus using it |
| 07/14/1999 | EP0928495A1 Ion source for generating ions of a gas or vapour |
| 07/14/1999 | CN1222981A Apertured nonplanar electrodes and forming methods |
| 07/08/1999 | WO1999034396A2 Installation with an electron-cyclotron resonance ion source for doping stents with radioactive and non-radioactive atoms |
| 07/08/1999 | DE19757852A1 Implantation von radioaktiven ·3··2·P-Atomen Implantation of radioactive · 3 · · 2 · P atoms |
| 07/08/1999 | CA2314953A1 Implantation of radioactive p32 atoms |
| 07/06/1999 | US5920076 Ion beam apparatus |
| 06/22/1999 | US5914494 Arc chamber for an ion implantation system |
| 06/17/1999 | WO1999030348A1 Electron sources utilizing patterned negative electron affinity photocathodes |
| 06/16/1999 | EP0751972A4 Polymer surface treatment with pulsed particle beams |
| 06/09/1999 | EP0687381B1 Ion gun and mass spectrometer employing the same |
| 05/25/1999 | US5907154 Ionization device |
| 05/12/1999 | EP0914670A2 Cathode arc source and graphite target |
| 05/06/1999 | WO1999022396A2 Enhanced macroparticle filter and cathode arc source |
| 05/06/1999 | DE19758512A1 Radioactive ion source for miniature ion mobility spectrometers |
| 05/04/1999 | US5900443 Irradiation with high energy particle beams |
| 05/04/1999 | US5899666 Ion drag vacuum pump |
| 04/28/1999 | EP0769202B1 Liquid metal ion source |
| 04/27/1999 | US5898269 Electron sources having shielded cathodes |
| 04/27/1999 | US5898178 Ion source for generation of radioactive ion beams |
| 04/21/1999 | EP0909445A1 Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production |
| 04/20/1999 | US5896012 Metal ion plasma generator having magnetic field forming device located such that a triggering is between the magnetic field forming device and an anode |
| 04/20/1999 | US5895923 Ion beam shield for implantation systems |
| 04/08/1999 | WO1999016924A1 Ion plating apparatus |
| 04/07/1999 | EP0906636A1 Highly tetrahedral amorphous carbon films and methods for their production |
| 04/07/1999 | EP0906589A1 Apertured nonplanar electrodes and forming methods |
| 04/06/1999 | US5892232 Arc chamber for ion implanter |
| 03/30/1999 | US5889371 Ion source with pole rings having differing inner diameters |
| 03/23/1999 | US5886355 Ion implantation apparatus having increased source lifetime |
| 03/16/1999 | US5883393 Source inner shield for eaton NV-10 high current implanter |
| 03/02/1999 | US5877593 Distorted field radio frequency ion source |
| 02/18/1999 | WO1999007924A1 Apparatus and method for the in-situ generation of dopants |
| 02/18/1999 | WO1999007913A1 Modulated power for ionized metal plasma deposition |
| 02/16/1999 | US5871848 Binary, boron-based alloy as a source for field-emission-type, ion-beam generating devices, carbon substrate, capturing trace impurities of carbon in the form of b4c during heating |
| 02/11/1999 | DE19834291A1 Ionisation arrangement, e.g. for use in a mass spectrometer |
| 02/02/1999 | US5866909 Generator of ribbon-shaped ion beam |
| 02/02/1999 | US5866871 Plasma gun and methods for the use thereof |
| 01/28/1999 | WO1999004608A1 Device for exciting a gas by surface wave plasma |
| 01/28/1999 | WO1999004409A1 Power control apparatus for an ion source having an indirectly heated cathode |
| 01/27/1999 | EP0892983A1 Gas discharge device |
| 01/21/1999 | WO1999003125A1 Method and apparatus for neutralising space charge in an ion beam |
| 01/21/1999 | DE19730899A1 Radioactive ion source for miniature ion mobility spectrometers |
| 01/12/1999 | US5858477 Method for producing recording media having protective overcoats of highly tetrahedral amorphous carbon |
| 01/12/1999 | US5858476 Method and apparatus for making and depositing compounds |
| 01/12/1999 | US5857889 Vacuum depositing a high density boron film on a substrate surface |
| 01/12/1999 | CA2132178C A plasma gun head |
| 01/07/1999 | WO1999000823A1 Toroidal low-field reactive gas source |
| 01/07/1999 | WO1999000821A1 Charged-particle source, control system, and process |
| 12/22/1998 | US5852345 For producing an ion beam from a solid material |