| Patents for H01J 27 - Ion beam tubes (3,716) |
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| 11/14/1995 | CA1337559C Method and apparatus for forming coherent clusters |
| 11/07/1995 | US5465023 Carbon-carbon grid for ion engines |
| 10/24/1995 | US5461235 Mass spectrometry apparatus and method relating thereto |
| 10/19/1995 | WO1995027996A1 Method for high energy implantation using a low or medium current implanter, and devices therefor |
| 09/27/1995 | EP0629313A4 Laser desorption ionization mass monitor (ldim). |
| 09/12/1995 | US5449968 Thermal field emission cathode |
| 09/05/1995 | US5447763 Doped electrodes for semiconductors |
| 08/30/1995 | EP0669461A1 Three grid ion-optical device |
| 08/22/1995 | US5444258 Ion-optics system for a source of ions to be discharged into a gas |
| 08/08/1995 | US5439191 Railgun thruster |
| 08/01/1995 | US5438238 Multiple filament enhanced ion source |
| 08/01/1995 | US5438205 Ion source gaseous discharge initiation impulse valve |
| 08/01/1995 | US5438194 Ultra-sensitive molecular identifier |
| 07/18/1995 | US5434469 Plasma generation, ion extraction and acceleration in glass chamber |
| 07/18/1995 | US5433836 Arc source macroparticle filter |
| 07/13/1995 | WO1995019038A1 Method and apparatus for generating ions |
| 07/05/1995 | EP0311696B1 Method and apparatus for processing with plasma |
| 06/22/1995 | WO1995012894A3 Micromachined mass spectrometer |
| 05/30/1995 | US5420437 Method and apparatus for generation and implantation of ions |
| 05/30/1995 | US5420415 Structure for alignment of an ion source aperture with a predetermined ion beam path |
| 05/26/1995 | WO1995014307A1 Methods and apparatus for altering material using ion beams |
| 05/26/1995 | WO1995014306A1 Pulsed ion beam source |
| 05/26/1995 | CA2176339A1 Methods and apparatus for altering material using ion beams |
| 05/26/1995 | CA2176337A1 Pulsed ion beam source |
| 05/24/1995 | EP0462165B1 Ion gun |
| 05/24/1995 | CN1028501C Electrode for plasma arc torch |
| 05/23/1995 | US5418431 RF plasma source and antenna therefor |
| 05/11/1995 | WO1995012894A2 Micromachined mass spectrometer |
| 05/10/1995 | EP0652585A1 Process and device for etching thin layers, preferably Indium-Tin-Oxide layers |
| 04/19/1995 | EP0648857A1 Confinement of secondary electrons in plasma ion processing |
| 04/04/1995 | US5404017 Ion implantation apparatus |
| 03/29/1995 | EP0645947A1 Neutron tube providing electron magnetic confinement by means of permanent magnets, and manufacturing method thereof |
| 03/29/1995 | EP0645946A1 Burner head for plasma spray guns |
| 03/28/1995 | US5401963 For analyzing a sample |
| 03/21/1995 | US5399865 Liquid metal ion source with high temperature cleaning apparatus for cleaning the emitter and reservoir |
| 03/14/1995 | US5397901 Forming charges in a fluid and generation of a charged beam |
| 03/07/1995 | US5396076 Ion implantation system with protective plates of silicon in mass analyzing region |
| 03/01/1995 | EP0641151A1 RF plasma source and method for plasma cleaning of surfaces in space |
| 02/28/1995 | CA2130309A1 Confinement of secondary electrons in plasma ion processing |
| 02/21/1995 | US5391962 Electron beam driven negative ion source |
| 02/14/1995 | US5389793 Apparatus and methods for ion implantation |
| 02/09/1995 | WO1995004369A1 An ultra-sensitive molecular identifier |
| 02/08/1995 | EP0637689A2 Heat-conducting coating for ceramic materials of ion engines |
| 02/07/1995 | US5387843 Ion source having plasma chamber, an electron source, and a plasma power supply |
| 02/01/1995 | EP0637052A1 Method for producing a stream of ionic aluminum |
| 01/18/1995 | EP0634575A2 Device for distributing a gaseous component in ionization chambers, for space thrusters |
| 01/17/1995 | US5382793 Laser desorption ionization mass monitor (LDIM) |
| 01/10/1995 | US5380420 Arc ion plating system |
| 01/04/1995 | EP0632482A2 Gas phase ion source for high mass resolution, wide mass range time-of-flight mass spectrometer |
| 01/03/1995 | CA2127185A1 Gasphase ion source for time-of-flight mass-spectrometers with high mass resolution and large mass range |
| 12/21/1994 | EP0629313A1 Laser desorption ionization mass monitor (ldim) |
| 12/13/1994 | US5372674 Electrode for use in a plasma assisted chemical etching process |
| 12/06/1994 | US5371366 Ion scattering spectroscope |
| 12/06/1994 | US5370568 Curing of a tungsten filament in an ion implanter |
| 12/06/1994 | US5369953 Three-grid accelerator system for an ion propulsion engine |
| 11/29/1994 | US5369337 DC or HF ion source |
| 11/17/1994 | EP0624897A1 Electrode for use in a plasma assisted chemical etching process |
| 11/15/1994 | US5365070 Negative ion beam injection apparatus with magnetic shield and electron removal means |
| 11/15/1994 | US5365064 Process for filtering electrically charged particles and energy filter |
| 11/10/1994 | DE4315348A1 Device for extraction and initial acceleration of charged particles from a plasma |
| 10/26/1994 | EP0620870A1 Process for surface treatment with ions |
| 10/25/1994 | US5359258 Plasma accelerator with closed electron drift |
| 10/19/1994 | EP0620582A1 Liquid metal ion source for producing cobalt ion beams |
| 10/11/1994 | US5354381 Cold cathode discharging; very short high voltage ionization pulses; synchronously produced electron flow to neutralize positively charged wafer surfaces |
| 10/04/1994 | US5352954 Plasma generator and associated ionization method |
| 10/04/1994 | US5352899 Method and apparatus for fabricating a device/circuit pattern by a converging atomic beam |
| 09/27/1994 | US5350974 Coaxial electromagnetic wave injection and electron cyclotron resonance ion source |
| 09/21/1994 | EP0615655A1 Corona discharge ionisation source. |
| 09/15/1994 | WO1994020978A1 Ion gun and mass spectrometer employing the same |
| 08/25/1994 | DE4305473A1 Charge carrier source |
| 08/24/1994 | EP0611482A1 Ion-optical system for gas discharge ion source. |
| 08/23/1994 | US5340983 Method and apparatus for mass analysis using slow monochromatic electrons |
| 08/09/1994 | US5336961 Source of ions with electronic cyclotronic resonance |
| 07/19/1994 | US5331161 Ion irradiation system and method |
| 07/05/1994 | US5326981 Electron beam excited ion irradiation apparatus |
| 06/23/1994 | DE4242616A1 Accelerated ion or atom beam generator |
| 05/31/1994 | US5317235 Magnetically-filtered cathodic arc plasma apparatus |
| 05/31/1994 | US5317161 Ion source |
| 05/25/1994 | EP0289577B1 Dynamic electron emitter |
| 05/24/1994 | US5315121 Metal ion source and a method of producing metal ions |
| 05/18/1994 | EP0596924A1 Continuous vacuum arc broad beam ion source |
| 05/03/1994 | US5309064 Ion source generator auxiliary device |
| 04/26/1994 | US5306921 Ion implantation system using optimum magnetic field for concentrating ions |
| 04/13/1994 | EP0283519B1 Ion generation apparatus, thin film formation apparatus using the ion generation apparatus, and ion source |
| 04/06/1994 | EP0590042A1 Mass spectrometry apparatus and method relating thereto |
| 03/22/1994 | US5296714 Method and apparatus for ion modification of the inner surface of tubes |
| 03/22/1994 | US5296713 Ion source device |
| 03/09/1994 | EP0312587B1 Plasma focus apparatus with field distortion elements |
| 03/03/1994 | WO1994005033A1 Ion-optical system for gas discharge ion source |
| 03/03/1994 | WO1994005032A1 Ion-optical system for gas-discharge ion source |
| 02/24/1994 | DE4227164A1 Sputter ion source for heavy metal e.g. platinum@ e.g. for implantation of semiconductor lifetime killer - applies same negative potential to filament and reflector located within chamber on opposite sides of ion exit slit, with both reflector and sputter target made of same metal, whose ions are to be produced |
| 02/23/1994 | EP0583473A1 Method and device for treatment of articles in gas-discharge plasma |
| 02/22/1994 | US5289010 Ion purification for plasma ion implantation |
| 02/22/1994 | US5288386 Sputtering apparatus and an ion source |
| 02/17/1994 | WO1994003919A1 Process and device for generating beams of any highly charged ions having low kinetic energy |
| 02/10/1994 | DE4226299A1 Generating beams using electron cyclotron resonance source - producing electron beam concentric to ion beam axis for spatial charge compensation |
| 02/09/1994 | EP0581905A1 Forming charges in a fluid and generation of a charged beam |
| 02/03/1994 | WO1993014250A3 Process for surface treatment with ions |
| 02/01/1994 | US5282944 Ionizing metal vapors used in coating |
| 01/18/1994 | US5279723 Removal mcromolecules using solenoid |