Patents for H01J 27 - Ion beam tubes (3,716)
03/1992
03/31/1992US5101110 Ion generator
03/31/1992CA1298417C Portable radiography system using a relativistic electron beam
03/25/1992EP0476900A1 Microwave-powered plasma-generating apparatus and method
03/17/1992US5097179 Ion generating apparatus
03/04/1992EP0473233A1 High-flux neutron tube
02/1992
02/18/1992US5089747 Electron beam excitation ion source
02/18/1992US5089746 Production of ion beams by chemically enhanced sputtering of solids
02/18/1992US5089707 Ion beam generating apparatus with electronic switching between multiple cathodes
02/04/1992US5086256 External resonance circuit type radio frequency quadrupole accelerator
02/04/1992CA1295428C Ion source
01/1992
01/21/1992US5083061 Electron beam excited ion source
01/15/1992EP0270667B1 Dual plasma microwave apparatus and method for treating a surface
01/07/1992US5078950 Multihole anode structure to enlarge ion beam extraction
12/1991
12/27/1991EP0462377A2 Ion source
12/27/1991EP0462165A1 Ion gun.
12/27/1991EP0237559B1 Radiation source
12/17/1991US5073913 For producing X-rays by electron synchrotron radiation
12/03/1991US5070275 Ion implantation device
10/1991
10/31/1991WO1991016723A1 Gaseous radical producing apparatus
10/16/1991EP0451907A1 Method of irradiating an object by means of a charged particle beam, and device for performing the method
10/16/1991EP0451432A1 Thermionic emitter and method of manufacture thereof
10/02/1991EP0449740A1 Charged particle beam focussing device
10/01/1991US5053678 Microwave ion source
09/1991
09/24/1991US5051582 Method for the production of size, structure and composition of specific-cluster ions
09/17/1991US5049784 Electron generating apparatus
09/17/1991US5049753 Optically powered charged particle accelerator
09/05/1991WO1991013459A1 Optically compensated bipolar transistor
09/04/1991EP0444935A2 Ion beam control system
08/1991
08/20/1991US5041732 Charged particle beam generating apparatus
07/1991
07/31/1991EP0439220A2 Device for the ionization of metals having a high melting point, which may be used on ion implanters of the type using ion sources of Freeman or similar type
07/31/1991CN1053380A Electrode for plasma arc torch
07/30/1991US5036252 Radio frequency ion beam source
07/24/1991EP0437915A2 Electrode for plasma ARC torch
07/23/1991US5034612 Ion source method and apparatus
07/09/1991US5030885 Charged particle control device
07/02/1991US5029277 Optically compensated bipolar transistor
07/02/1991US5028791 Electron beam excitation ion source
06/1991
06/25/1991US5026997 Elliptical ion beam distribution method and apparatus
06/18/1991US5025194 Vapor and ion source
06/11/1991US5023458 Ion beam control system
06/11/1991US5023425 Alloy with high thermoconductivity, oxidation resistance, melting point and work function
06/11/1991US5022977 Ion generation apparatus and thin film forming apparatus and ion source utilizing the ion generation apparatus
06/05/1991EP0430081A2 Fast atom beam source
06/04/1991US5021919 Device for the generation of electrically charged and/or uncharged particles
05/1991
05/28/1991US5019705 High brilliance negative ion and neutral beam source
05/22/1991EP0428319A2 Elliptical ion beam distribution method and apparatus
05/21/1991US5017835 High-frequency ion source
05/16/1991WO1991006969A1 Metal-ion source and process for the generation of metal ions
05/15/1991EP0427194A2 Multiple torch type plasma generation device and method of generating plasma using the same
05/14/1991US5015862 Laser modulation of LMI sources
05/08/1991EP0425489A1 Method and apparatus for forming coherent clusters
05/07/1991US5013969 Protective device for neutron tubes
05/07/1991US5013578 Apparatus for coating a surface with a metal utilizing a plasma source
04/1991
04/25/1991DE3935408A1 Metallionenquelle Metal ion source
04/25/1991DE3934814A1 Controlled ionisation tube for switches and amplifiers - has ions in solution in water and na and oh solution
04/24/1991EP0423454A2 Multimode ionization source
04/16/1991US5008585 Vacuum arc sources of ions
04/16/1991US5008537 Composite apparatus with secondary ion mass spectrometry instrument and scanning electron microscope
04/09/1991US5006715 Ion evaporation source for tin
03/1991
03/26/1991US5003152 Microwave transforming method and plasma processing
03/19/1991US5001349 Charged-particle beam apparatus
03/07/1991WO1991003143A1 Special ion emitter tip materials and coatings
03/07/1991DE3928390A1 Plasma supporting source for charged particles - produces beams of desired current amplitude, thickness, cross=section and duration
02/1991
02/27/1991EP0140979B1 Alloy containing liquid metal ion species
02/19/1991US4994711 High brightness solid electrolyte ion source
02/19/1991US4994164 Metal ion implantation apparatus
02/12/1991US4992746 Apparatus for acceleration and application of negative ions and electrons
02/12/1991US4992665 Filamentless magnetron-ion source and a process using it
01/1991
01/29/1991US4988879 Apparatus and method for laser desorption of molecules for quantitation
01/29/1991CA1279691C Dynamic electron emitter
01/22/1991US4987345 Charged particle source of large current with high energy
01/16/1991EP0277203B1 System for controlling the respective emission currents from a plurality of cathodes of an ion source device and ion propulsion motor
01/15/1991US4985657 High flux ion gun apparatus and method for enhancing ion flux therefrom
01/08/1991US4983845 Apparatus operating with contact ionization for the production of a beam of accelerated ions
01/02/1991EP0405855A2 Ion implanting apparatus and process for fabricating semiconductor integrated circuit device by using the same apparatus
12/1990
12/25/1990US4980557 Method and apparatus surface ionization particulate detectors
12/25/1990US4980556 Apparatus for generating high currents of negative ions
11/1990
11/28/1990EP0399374A1 Ion source method and apparatus
11/13/1990CA1276319C Vaporizer system for ion source
10/1990
10/23/1990US4965491 Plasma generator
10/18/1990WO1990010303A3 Production of ion beams by chemically enhanced sputtering of solids
10/10/1990EP0391156A2 Improved coaxial cavity type, radiofrequency wave, plasma generating apparatus
10/02/1990US4960991 Multimode ionization source
09/1990
09/20/1990WO1990010945A1 Ion gun
09/18/1990USRE33344 Apparatus and method for detecting negative ions
09/07/1990WO1990010303A2 Production of ion beams by chemically enhanced sputtering of solids
09/04/1990US4954751 Radio frequency hollow cathode
09/04/1990US4954750 Flexible ion emitter
09/04/1990US4954711 Low-voltage source for narrow electron/ion beams
09/04/1990CA1273497A1 Emission current control system for multiple hollow cathode devices
08/1990
08/29/1990EP0384684A2 Charged particle beam generating apparatus
08/28/1990US4952843 High current ion source
08/16/1990DE3903322A1 Method for producing ions
07/1990
07/25/1990EP0378970A2 Cold-cathode, ion-generating and ion-accelerating universal device
07/17/1990US4942304 Ion implantation
07/11/1990EP0377445A2 Method and device for generating ion beams with a large beam cross-section
07/10/1990US4941068 Portable ion generator
07/10/1990US4940893 Method and apparatus for forming coherent clusters
07/03/1990US4939425 Four-electrode ion source
06/1990
06/28/1990DE3843023A1 Hollow cathode of a plasma electron and ion source
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