Patents for H01J 27 - Ion beam tubes (3,716) |
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03/31/1992 | US5101110 Ion generator |
03/31/1992 | CA1298417C Portable radiography system using a relativistic electron beam |
03/25/1992 | EP0476900A1 Microwave-powered plasma-generating apparatus and method |
03/17/1992 | US5097179 Ion generating apparatus |
03/04/1992 | EP0473233A1 High-flux neutron tube |
02/18/1992 | US5089747 Electron beam excitation ion source |
02/18/1992 | US5089746 Production of ion beams by chemically enhanced sputtering of solids |
02/18/1992 | US5089707 Ion beam generating apparatus with electronic switching between multiple cathodes |
02/04/1992 | US5086256 External resonance circuit type radio frequency quadrupole accelerator |
02/04/1992 | CA1295428C Ion source |
01/21/1992 | US5083061 Electron beam excited ion source |
01/15/1992 | EP0270667B1 Dual plasma microwave apparatus and method for treating a surface |
01/07/1992 | US5078950 Multihole anode structure to enlarge ion beam extraction |
12/27/1991 | EP0462377A2 Ion source |
12/27/1991 | EP0462165A1 Ion gun. |
12/27/1991 | EP0237559B1 Radiation source |
12/17/1991 | US5073913 For producing X-rays by electron synchrotron radiation |
12/03/1991 | US5070275 Ion implantation device |
10/31/1991 | WO1991016723A1 Gaseous radical producing apparatus |
10/16/1991 | EP0451907A1 Method of irradiating an object by means of a charged particle beam, and device for performing the method |
10/16/1991 | EP0451432A1 Thermionic emitter and method of manufacture thereof |
10/02/1991 | EP0449740A1 Charged particle beam focussing device |
10/01/1991 | US5053678 Microwave ion source |
09/24/1991 | US5051582 Method for the production of size, structure and composition of specific-cluster ions |
09/17/1991 | US5049784 Electron generating apparatus |
09/17/1991 | US5049753 Optically powered charged particle accelerator |
09/05/1991 | WO1991013459A1 Optically compensated bipolar transistor |
09/04/1991 | EP0444935A2 Ion beam control system |
08/20/1991 | US5041732 Charged particle beam generating apparatus |
07/31/1991 | EP0439220A2 Device for the ionization of metals having a high melting point, which may be used on ion implanters of the type using ion sources of Freeman or similar type |
07/31/1991 | CN1053380A Electrode for plasma arc torch |
07/30/1991 | US5036252 Radio frequency ion beam source |
07/24/1991 | EP0437915A2 Electrode for plasma ARC torch |
07/23/1991 | US5034612 Ion source method and apparatus |
07/09/1991 | US5030885 Charged particle control device |
07/02/1991 | US5029277 Optically compensated bipolar transistor |
07/02/1991 | US5028791 Electron beam excitation ion source |
06/25/1991 | US5026997 Elliptical ion beam distribution method and apparatus |
06/18/1991 | US5025194 Vapor and ion source |
06/11/1991 | US5023458 Ion beam control system |
06/11/1991 | US5023425 Alloy with high thermoconductivity, oxidation resistance, melting point and work function |
06/11/1991 | US5022977 Ion generation apparatus and thin film forming apparatus and ion source utilizing the ion generation apparatus |
06/05/1991 | EP0430081A2 Fast atom beam source |
06/04/1991 | US5021919 Device for the generation of electrically charged and/or uncharged particles |
05/28/1991 | US5019705 High brilliance negative ion and neutral beam source |
05/22/1991 | EP0428319A2 Elliptical ion beam distribution method and apparatus |
05/21/1991 | US5017835 High-frequency ion source |
05/16/1991 | WO1991006969A1 Metal-ion source and process for the generation of metal ions |
05/15/1991 | EP0427194A2 Multiple torch type plasma generation device and method of generating plasma using the same |
05/14/1991 | US5015862 Laser modulation of LMI sources |
05/08/1991 | EP0425489A1 Method and apparatus for forming coherent clusters |
05/07/1991 | US5013969 Protective device for neutron tubes |
05/07/1991 | US5013578 Apparatus for coating a surface with a metal utilizing a plasma source |
04/25/1991 | DE3935408A1 Metallionenquelle Metal ion source |
04/25/1991 | DE3934814A1 Controlled ionisation tube for switches and amplifiers - has ions in solution in water and na and oh solution |
04/24/1991 | EP0423454A2 Multimode ionization source |
04/16/1991 | US5008585 Vacuum arc sources of ions |
04/16/1991 | US5008537 Composite apparatus with secondary ion mass spectrometry instrument and scanning electron microscope |
04/09/1991 | US5006715 Ion evaporation source for tin |
03/26/1991 | US5003152 Microwave transforming method and plasma processing |
03/19/1991 | US5001349 Charged-particle beam apparatus |
03/07/1991 | WO1991003143A1 Special ion emitter tip materials and coatings |
03/07/1991 | DE3928390A1 Plasma supporting source for charged particles - produces beams of desired current amplitude, thickness, cross=section and duration |
02/27/1991 | EP0140979B1 Alloy containing liquid metal ion species |
02/19/1991 | US4994711 High brightness solid electrolyte ion source |
02/19/1991 | US4994164 Metal ion implantation apparatus |
02/12/1991 | US4992746 Apparatus for acceleration and application of negative ions and electrons |
02/12/1991 | US4992665 Filamentless magnetron-ion source and a process using it |
01/29/1991 | US4988879 Apparatus and method for laser desorption of molecules for quantitation |
01/29/1991 | CA1279691C Dynamic electron emitter |
01/22/1991 | US4987345 Charged particle source of large current with high energy |
01/16/1991 | EP0277203B1 System for controlling the respective emission currents from a plurality of cathodes of an ion source device and ion propulsion motor |
01/15/1991 | US4985657 High flux ion gun apparatus and method for enhancing ion flux therefrom |
01/08/1991 | US4983845 Apparatus operating with contact ionization for the production of a beam of accelerated ions |
01/02/1991 | EP0405855A2 Ion implanting apparatus and process for fabricating semiconductor integrated circuit device by using the same apparatus |
12/25/1990 | US4980557 Method and apparatus surface ionization particulate detectors |
12/25/1990 | US4980556 Apparatus for generating high currents of negative ions |
11/28/1990 | EP0399374A1 Ion source method and apparatus |
11/13/1990 | CA1276319C Vaporizer system for ion source |
10/23/1990 | US4965491 Plasma generator |
10/18/1990 | WO1990010303A3 Production of ion beams by chemically enhanced sputtering of solids |
10/10/1990 | EP0391156A2 Improved coaxial cavity type, radiofrequency wave, plasma generating apparatus |
10/02/1990 | US4960991 Multimode ionization source |
09/20/1990 | WO1990010945A1 Ion gun |
09/18/1990 | USRE33344 Apparatus and method for detecting negative ions |
09/07/1990 | WO1990010303A2 Production of ion beams by chemically enhanced sputtering of solids |
09/04/1990 | US4954751 Radio frequency hollow cathode |
09/04/1990 | US4954750 Flexible ion emitter |
09/04/1990 | US4954711 Low-voltage source for narrow electron/ion beams |
09/04/1990 | CA1273497A1 Emission current control system for multiple hollow cathode devices |
08/29/1990 | EP0384684A2 Charged particle beam generating apparatus |
08/28/1990 | US4952843 High current ion source |
08/16/1990 | DE3903322A1 Method for producing ions |
07/25/1990 | EP0378970A2 Cold-cathode, ion-generating and ion-accelerating universal device |
07/17/1990 | US4942304 Ion implantation |
07/11/1990 | EP0377445A2 Method and device for generating ion beams with a large beam cross-section |
07/10/1990 | US4941068 Portable ion generator |
07/10/1990 | US4940893 Method and apparatus for forming coherent clusters |
07/03/1990 | US4939425 Four-electrode ion source |
06/28/1990 | DE3843023A1 Hollow cathode of a plasma electron and ion source |