| Patents for H01J 27 - Ion beam tubes (3,716) |
|---|
| 11/03/2009 | US7612346 Non-axisymmetric charged-particle beam system |
| 10/29/2009 | WO2009131693A1 Ion source with adjustable aperture |
| 10/29/2009 | US20090266997 Ion source with adjustable aperture |
| 10/27/2009 | US7609009 Linear ion accelerator |
| 10/27/2009 | US7609003 Ion implantation system and control method |
| 10/27/2009 | US7608839 Plasma source and applications thereof |
| 10/22/2009 | US20090262482 Ionizer |
| 10/22/2009 | US20090261268 Ionic fluid flow accelerator |
| 10/21/2009 | EP2110843A1 Stable emission gas ion source and method of operation thereof |
| 10/20/2009 | US7605379 Cold-cathode-based ion source element |
| 10/20/2009 | US7604881 diamond-like carbon film contains a glass substrate, a semiconductor, an integrated circuit, a machine tool, an optic, a magnetic recording head, or a magnetic recording media; diamond-like protective coatings; high mechanical hardness, low friction, optical transparency, and chemical resistance |
| 10/13/2009 | US7602111 Plasma accelerating apparatus and plasma processing system including secondary electron amplification coating layer formed at inner wall of channel |
| 10/13/2009 | US7601970 Alternating current negative ion and silver ion generator |
| 10/13/2009 | US7601938 Imaging system, methodology, and applications employing reciprocal space optical design |
| 10/08/2009 | US20090250623 Method for generating a pulsed flux of energetic particles, and a particle source operating accordingly |
| 10/08/2009 | US20090250608 Ion Sources For Improved Ionization |
| 10/06/2009 | US7598500 Ion source and metals used in making components thereof and method of making same |
| 10/01/2009 | WO2009119060A1 Ion source |
| 10/01/2009 | US20090242793 Flexible ion source |
| 10/01/2009 | US20090242749 Mass spectrometer |
| 09/17/2009 | WO2009112667A1 Filament electrical discharge ion source |
| 09/17/2009 | US20090230318 Target design for high-power laser accelerated ions |
| 09/17/2009 | US20090230299 Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample |
| 09/15/2009 | US7589328 Gas field ION source for multiple applications |
| 09/11/2009 | WO2009111149A1 Gas field ion source with coated tip |
| 09/11/2009 | WO2009110506A1 Ion source |
| 09/11/2009 | WO2009109534A1 Improvements relating to mass spectrometry |
| 09/09/2009 | CN100538987C Symmetric beamline and methods for generating a mass-analyzed ribbon ion beam |
| 09/08/2009 | US7586101 Ion sources for ion implantation apparatus |
| 09/08/2009 | US7586099 Vacuum plasma generator |
| 09/08/2009 | US7586098 Ion stripper device made of carbon nanotubes or fullerenes |
| 09/03/2009 | WO2009106389A1 Particle therapy installation |
| 09/02/2009 | CN100536062C A source of liquid metal ions and a method for controlling the source |
| 08/27/2009 | US20090212232 Ion source and ion implantation apparatus |
| 08/26/2009 | EP2092544A2 Closed drift ion source |
| 08/26/2009 | CN100533650C Ion source control system |
| 08/26/2009 | CN100533649C Cathode and counter cathode arrangement in an ion source |
| 08/26/2009 | CN100533642C Ion source with modified gas delivery |
| 08/20/2009 | US20090206281 Vapor delivery system useful with ion sources and vaporizers for use in such system |
| 08/20/2009 | US20090206275 Accelerator particle beam apparatus and method for low contaminate processing |
| 08/20/2009 | US20090206274 Multi-electrode negative ion generator |
| 08/20/2009 | US20090206270 Ion beam apparatus and method for ion implantation |
| 08/20/2009 | US20090206248 Ion energy spread reduction for mass spectrometer |
| 08/19/2009 | EP2091306A1 Spin-polarization ion beam generator, scattering spectroscope using the spin-polarization ion beam, and specimen processing device |
| 08/19/2009 | CN101512716A Method and apparatus for extracting ions from an ion source for use in ion implantation |
| 08/18/2009 | US7574974 Device for production of a plasma sheet |
| 08/13/2009 | US20090203199 Ion beam irradiating apparatus, and method of producing semiconductor device |
| 08/13/2009 | US20090200485 Method and Apparatus For Generating Ion Beam |
| 08/13/2009 | CA2712909A1 Method and apparatus for normalizing performance of an electron source |
| 08/12/2009 | EP2088613A1 Dual mode gas field ion source |
| 08/06/2009 | US20090194704 Method and device of ion source generation |
| 08/04/2009 | US7569837 Ion source |
| 07/30/2009 | US20090189083 Ion-beam source |
| 07/22/2009 | CN101490789A Ion sources |
| 07/16/2009 | US20090181527 Graphite Member for Beam-Line Internal Member of Ion Implantation Apparatus |
| 07/16/2009 | US20090179161 Ion sources, systems and methods |
| 07/16/2009 | US20090179158 In-vacuum protective liners |
| 07/16/2009 | US20090179157 Vapor delivery to devices under vacuum |
| 07/16/2009 | US20090179140 Ion generating light assembly |
| 07/15/2009 | EP2079096A1 Ion source with filament electric discharge |
| 07/14/2009 | US7560870 Power supply apparatus for ion accelerator |
| 07/09/2009 | US20090173888 Gas field ion source, charged particle microscope, and apparatus |
| 07/08/2009 | EP1738388A4 Method and apparatus for improved processing with a gas-cluster ion beam |
| 07/08/2009 | EP1550144A4 System for and method of gas cluster ion beam processing |
| 07/07/2009 | US7557361 Ion sources, systems and methods |
| 07/07/2009 | US7557360 Ion sources, systems and methods |
| 07/07/2009 | US7557359 Ion sources, systems and methods |
| 07/07/2009 | US7557358 Ion sources, systems and methods |
| 07/02/2009 | US20090166555 RF electron source for ionizing gas clusters |
| 07/02/2009 | US20090166554 Techniques for providing a multimode ion source |
| 06/30/2009 | US7554097 Ion sources, systems and methods |
| 06/30/2009 | US7554096 Ion sources, systems and methods |
| 06/25/2009 | US20090162572 Systems and Methods for the Production of Highly Tetrahedral Amorphous Carbon Coatings |
| 06/25/2009 | DE102008060270A1 Gasfeldionisations-Ionenquelle, Rasterladungsteilchenmikroskop, Einstellverfahren für die optische Achse und Probenbetrachtungsverfahren Gasfeldionisations ion source Rasterladungsteilchenmikroskop, for adjusting the optical axis and sample observation method |
| 06/24/2009 | CN201262942Y Ion source ball tube for circular accelerator |
| 06/23/2009 | US7550753 Charged particle generator and accelerator |
| 06/18/2009 | US20090152473 Photon source comprising an ecr source with pressure gradient |
| 06/18/2009 | US20090152462 Gas field ionization ion source, scanning charged particle microscope, optical axis adjustment method and specimen observation method |
| 06/17/2009 | EP1665319A4 Shaped sputter shields for improved ion column operation |
| 06/17/2009 | CN101461025A Vaporizer |
| 06/17/2009 | CN100500930C Non-grid ion plating aid |
| 06/16/2009 | US7547891 Ion sampling apparatuses in fast polarity-switching ion sources |
| 06/11/2009 | WO2008088971A3 Techniques for providing ion source feed materials |
| 06/11/2009 | US20090145554 Procedure and device for the production of a plasma |
| 06/10/2009 | EP2068343A1 Charged particle source with automated tip formation |
| 06/10/2009 | EP1617440B1 High-speed particle generator |
| 06/09/2009 | US7544952 Multivalent ion generating source and charged particle beam apparatus using such ion generating source |
| 06/09/2009 | US7544397 Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production |
| 06/04/2009 | WO2008150336A3 A portable/mobile fissible material detector and methods for making and using same |
| 06/04/2009 | WO2008103733A3 Gas ionizer |
| 06/04/2009 | WO2006086273A3 Apparatus and method for positioning a discharge tube with respect to an orifice |
| 06/04/2009 | US20090140164 Induction electrode, ion generation element, ion generation apparatus, and electric equipment |
| 06/02/2009 | US7541597 Automatic cleaning of ion sources |
| 05/27/2009 | CN100492584C Ion beam incident angle detector for ion implant systems |
| 05/21/2009 | US20090127452 Method and apparatus for self calibrating meter movement for ionization power supplies |
| 05/14/2009 | WO2009027596A3 Ionic emission micronic source |
| 05/14/2009 | US20090121148 High Brightness Solid State Ion Beam Generator, its use, and Method for Making such a Generator |
| 05/13/2009 | EP2057300A2 Ion source with recess in electrode |
| 05/07/2009 | US20090114841 Double plasma ion source |
| 05/07/2009 | US20090114838 Focused ion beam field source |