| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 10/25/2006 | EP1715362A1 Beam measuring equipment and beam measuring method using the same |
| 10/25/2006 | CN1282400C Method for treating target volume with particle beam and device implementing same |
| 10/24/2006 | US7126671 Lithographic apparatus and device manufacturing method |
| 10/24/2006 | US7126143 Method and device for producing extreme ultraviolet radiation and soft x-ray radiation |
| 10/24/2006 | US7126141 Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method |
| 10/24/2006 | US7126134 Sample manipulator |
| 10/24/2006 | US7126133 Kit for preparing a tem sample holder |
| 10/24/2006 | US7126132 Apparatus for preparing a TEM sample holder |
| 10/19/2006 | WO2006057867A3 Method for eliminating low frequency error sources to critical dimension uniformity in shaped beam writing systems |
| 10/19/2006 | US20060234140 Method and device for checking lithography data |
| 10/19/2006 | US20060234135 Method for repairing mask-blank defects using repair-zone compensation |
| 10/19/2006 | US20060233303 Method at a radiation therapy system |
| 10/19/2006 | US20060233300 Illumination system particularly for microlithography |
| 10/18/2006 | EP1712254A1 Device for limiting field on which raddiation is irradiated |
| 10/18/2006 | CN1849673A Method and apparatus for modifying object with electrons generated from cold cathode electron emitter |
| 10/18/2006 | CN1846809A Particle beam therapeutic apparatus |
| 10/17/2006 | US7123688 X-ray tube |
| 10/17/2006 | US7122978 Charged-particle beam accelerator, particle beam radiation therapy system using the charged-particle beam accelerator, and method of operating the particle beam radiation therapy system |
| 10/17/2006 | US7122816 Method and apparatus for EUV light source target material handling |
| 10/17/2006 | US7122814 Arrangement for the stabilization of the radiation emission of a plasma |
| 10/17/2006 | US7122811 Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method |
| 10/17/2006 | US7122809 Charged beam writing method and writing tool |
| 10/12/2006 | US20060228634 Beam-induced etching |
| 10/11/2006 | CN1279347C Apparatus and method for detecting X-ray impurities |
| 10/10/2006 | US7120895 Evaluating design pattern on photolithographicmask; generating simulated image on wafer using a pixel-based bitmap; computers, data processing |
| 10/10/2006 | US7120231 X-ray system with a beam-gating diaphragm, and method for automatic adjustment thereof |
| 10/10/2006 | US7120222 CT imaging system with multiple peak x-ray source |
| 10/10/2006 | US7119347 Ion implantation apparatus and method |
| 10/10/2006 | US7119346 Lithographic apparatus and device manufacturing method |
| 10/10/2006 | US7119343 Mechanical oscillator for wafer scan with spot beam |
| 10/10/2006 | US7118833 Forming partial-depth features in polymer film |
| 10/05/2006 | US20060222967 Reticle, method for manufacturing magnetic disk medium using reticle, and magnetic disk medium |
| 10/05/2006 | US20060222961 Leaky absorber for extreme ultraviolet mask |
| 10/05/2006 | US20060219954 Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam control |
| 10/05/2006 | US20060219952 Plasma ion implantation systems and methods using solid source of dopant material |
| 10/05/2006 | US20060219950 Lithographic apparatus and device manufacturing method |
| 10/05/2006 | US20060219948 Charged particle therapy apparatus and charged particle therapy system |
| 10/05/2006 | US20060219939 Method and apparatus for low quantity detection of bioparticles in small sample volumes |
| 10/05/2006 | US20060219931 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 10/04/2006 | CN2822585Y Protector for baby radiation heat preserving table |
| 10/03/2006 | US7117478 System and method for lithography simulation |
| 10/03/2006 | US7117477 System and method for lithography simulation |
| 10/03/2006 | US7115882 TEM sample holder |
| 10/03/2006 | US7115342 Preparation of photomasks |
| 10/03/2006 | US7114849 Medical imaging device |
| 09/28/2006 | US20060216651 Method and system for drying a substrate |
| 09/28/2006 | US20060215799 Incineration process for transuranic chemical elements and nuclear reactor implementing this process |
| 09/28/2006 | US20060214520 Voice coil motor apparatus |
| 09/28/2006 | US20060214119 Pattern data creation method, pattern data creation program, computer-readable medium and fabrication process of a semiconductor device |
| 09/28/2006 | DE102006007947A1 Drying process for printed colors on a material uses irradiation for physical drying and to raise the temperature of a drying agent to aid chemical drying |
| 09/28/2006 | DE102005012515A1 Lighting device for cultivating phototropic cell cultures in incubators, comprises controllable light emitting diodes arranged on light elements, which forms a lighting matrix |
| 09/27/2006 | CN1838334A Electron beam irradiation unit |
| 09/27/2006 | CN1277152C Original negative, exposure method and original negative making method |
| 09/26/2006 | US7114145 System and method for lithography simulation |
| 09/26/2006 | US7112809 Electrostatic lens for ion beams |
| 09/26/2006 | US7112808 Wafer 2D scan mechanism |
| 09/21/2006 | WO2006097916A2 Optical mask for all-optical extended depth-of-field for imaging systems under incoherent illumination |
| 09/21/2006 | US20060210888 Semiconductors; liquid crystal displays; birefringence |
| 09/21/2006 | US20060210008 Method for isomeric change in radioactive isotope |
| 09/21/2006 | US20060208205 Method, program product and apparatus for improving calibration of resist models used in critical dimension calculation |
| 09/20/2006 | EP1703302A1 Ion beam measuring method and ion implanting apparatus |
| 09/20/2006 | CN1276306C Processing method, and mfg. method for semiconductor |
| 09/19/2006 | US7111277 System and method for lithography simulation |
| 09/19/2006 | US7110506 Method and device for cooling and electrically insulating a high-voltage, heat-generating component such as an x-ray tube for analyzing fluid streams |
| 09/19/2006 | US7110503 X-ray measuring and testing system |
| 09/19/2006 | US7109502 Device for irradiating a target with a hadron-charged beam, use in hadrontherapy |
| 09/19/2006 | US7109497 Illumination system particularly for microlithography |
| 09/19/2006 | US7109495 Fluorometer with low heat-generating light source |
| 09/19/2006 | US7108960 detector to detection intensity of luminescence radiation from reflector |
| 09/19/2006 | US7108421 Systems and methods for imaging large field-of-view objects |
| 09/14/2006 | US20060204861 Optical mask for all-optical extended depth-of-field for imaging systems under incoherent illumination |
| 09/13/2006 | EP1701375A1 X-ray apparatus |
| 09/13/2006 | EP1119870A4 X-ray scanning method and apparatus |
| 09/13/2006 | CN1275099C Method and device for recovering gas used in offset tool |
| 09/13/2006 | CN1275091C Photolithographic critical dimension control using reticle measurements |
| 09/12/2006 | US7106831 X-ray diaphragm, X-ray irradiator, and X-ray apparatus |
| 09/12/2006 | US7106830 3D x-ray system adapted for high speed scanning of large articles |
| 09/12/2006 | US7106413 Cooling mechanism |
| 09/12/2006 | US7105844 Method for eliminating low frequency error sources to critical dimension uniformity in shaped beam writing systems |
| 09/12/2006 | US7105842 Method of charged particle beam lithography and equipment for charged particle beam lithography |
| 09/12/2006 | US7105840 Ion source for use in an ion implanter |
| 09/12/2006 | US7105837 Lithographic apparatus, device manufacturing method and radiation system |
| 09/12/2006 | US7105255 EUV reflection mask and lithographic process using the same |
| 09/12/2006 | US7105199 Depositing a drug onto a surface of a medical device;forming a gas cluster ion beam in a vacuum chamber, irradiating the deposited drug and the surface of the medical device with the beam to adhere the drug to the surface of the medical device; coronary stents, implantable prostheses |
| 09/08/2006 | WO2006093687A1 Method and apparatus for euv light source target material handling |
| 09/07/2006 | DE20221621U1 Ultraviolet illumination system for use in printing industry has strip light in focus of two-dimensional parabolic fixed reflector and has movable flat mirror to deflect light away from absorber |
| 09/06/2006 | CN1830039A Method and system for drying a substrate |
| 09/06/2006 | CN1829945A Modulator circuitry |
| 09/05/2006 | US7102732 Method of manufacturing a device by employing a lithographic apparatus including a sliding electron-optical element |
| 09/05/2006 | US7102146 Dose cup located near bend in final energy filter of serial implanter for closed loop dose control |
| 09/05/2006 | US7102144 Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method |
| 09/05/2006 | US7102141 Flash lamp annealing apparatus to generate electromagnetic radiation having selective wavelengths |
| 09/05/2006 | US7101645 Reflective mask for short wavelength lithography |
| 08/31/2006 | WO2006091888A1 Locating sub-resolution assist features in semiconductor device fabrication |
| 08/31/2006 | US20060195815 Exposure data generator and method thereof |
| 08/31/2006 | US20060194125 Used for exposure of a resist film in a fabrication process of a semiconductor device; liquid immersion lithography technique which achieves a high resolution |
| 08/31/2006 | US20060193440 Method and device for cooling and electrically insulating a high voltage, heat-generating component such as an x-ray tube for analyzing fluid streams |
| 08/31/2006 | US20060193434 X-ray diffraction-based scanning system |
| 08/31/2006 | US20060193432 Method for adjusting gap between two objects and exposure method using the same, gap adjusting apparatus, and exposure apparatus |
| 08/31/2006 | US20060192504 Apparatus for generating focused electromagnetic radiation |