| Patents for G21K 5 - Irradiation devices (9,144) |
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| 03/13/2007 | US7189446 Curved honeycomb article, EUV apparatus having a curved honeycomb article, and method of making a curved honeycomb article |
| 03/08/2007 | WO2007026360A2 A method and a system for creating a reference image using unknown quality patterns |
| 03/08/2007 | WO2007025936A1 Patient positioning device |
| 03/08/2007 | US20070054203 Mask, method of producing mask, and method of producing semiconductor device |
| 03/08/2007 | US20070054202 Prevents a drop in pattern alignment accuracy due to the internal stress of the membrane and able to align patterns including complementary patterns at a high accuracy; stencil mask having lattice-shaped struts which are connected to other struts or the silicon wafer around the membrane frame |
| 03/08/2007 | US20070053484 Particle therapy system |
| 03/08/2007 | US20070051905 Charged particle beam irradiation system and method of extracting charged particle beam |
| 03/08/2007 | DE10056936B4 Strahlungsuntersuchungssystem und Verfahren unter Verwendung desselben The same radiation inspection system and method using |
| 03/07/2007 | CN2876995Y Rotary door type plate source stand |
| 03/07/2007 | CN2876994Y Pneumatic cobalt source lifter |
| 03/07/2007 | CN2876993Y Detachable jointed radiation box |
| 03/07/2007 | CN1303616C Apparatus and method for radiation therapy where the collimatorhelmet comprises slidable plates for controlling the collimator openings |
| 03/07/2007 | CN1302843C Plasma-assisted carburizing |
| 03/06/2007 | US7187752 Product irradiator for optimizing dose uniformity in products |
| 03/06/2007 | US7186983 Illumination system particularly for microlithography |
| 03/06/2007 | US7186022 X-ray source and method for more efficiently producing selectable x-ray frequencies |
| 03/01/2007 | WO2006023637A3 In situ surface contaminant removal for ion implanting |
| 03/01/2007 | US20070048631 Mask defect repairing method and semiconductor device manufacturing method |
| 03/01/2007 | US20070045572 Lithographic apparatus and device manufacturing method utilizing a multiple dictionary compression method for FPD |
| 03/01/2007 | US20070045567 Particle Beam Processing Apparatus and Materials Treatable Using the Apparatus |
| 02/28/2007 | EP1476889A4 Large-area individually addressable multi-beam x-ray system |
| 02/28/2007 | EP1247433A4 Enhanced etching/smoothing of dielectric surfaces |
| 02/28/2007 | EP1200980B1 Adaptive gas cluster ion beam for smoothing surfaces |
| 02/28/2007 | CN1922696A 电子射线照射装置 Electron beam irradiation device |
| 02/28/2007 | CN1922695A Target device for producing a radioisotope |
| 02/27/2007 | US7184382 Energy beam irradiating apparatus |
| 02/27/2007 | US7183563 Irradiation apparatus |
| 02/22/2007 | US20070041501 Apparatus and a method for visualizing target objects in a fluid-carrying pipe |
| 02/21/2007 | EP1755131A2 Electron beam irradiating apparatus |
| 02/21/2007 | EP1754397A1 Method of forming composite ceramic targets |
| 02/21/2007 | EP1754242A2 System for forming x-rays and method for using same |
| 02/21/2007 | EP1754241A2 X-ray source with nonparallel geometry |
| 02/21/2007 | EP1753609A2 Light scattering euvl mask |
| 02/21/2007 | EP1753318A1 Irradiation device for fingernails or toenails |
| 02/21/2007 | EP1272261A4 Cluster size measurement instrument and method for cluster ion beam diagnostic |
| 02/21/2007 | CN1918667A Soft x-ray processing device and soft x-ray processing method |
| 02/21/2007 | CN1918484A Beam measuring equipment and beam measuring method using the same |
| 02/20/2007 | US7180981 High quantum energy efficiency X-ray tube and targets |
| 02/20/2007 | US7179568 Microelectronics; coating mask with photoresist containing fluorescent dye; exposure to radiation; development |
| 02/15/2007 | US20070037071 Method for removing defect material of a lithography mask |
| 02/15/2007 | US20070034812 Method of modulating laser-accelerated protons for radiation therapy |
| 02/15/2007 | DE102005034913A1 Radiation therapy system for obtaining e.g. three dimensional image data, has patient positioning unit designed such that patient is brought into space in any desired body position in front of irradiation station |
| 02/14/2007 | EP1155419B1 "x-ray microscope having an x-ray source for soft x-rays |
| 02/14/2007 | CN2870088Y Acceleration-scanning integrated structure of fully-sealed high vacuum electronic beams |
| 02/14/2007 | CN2870087Y Irradiation apparatus capable of absorbing rest electronic beam |
| 02/14/2007 | CN1299781C Device for X-ray therapy |
| 02/13/2007 | US7177076 8-mirror microlithography projection objective |
| 02/13/2007 | US7176472 Radioactive substance container, manufacturing apparatus thereof and manufacturing method thereof |
| 02/13/2007 | US7176471 Electron beam exposure method and electron beam exposure apparatus |
| 02/08/2007 | US20070031741 EUVL reflection device, method of fabricating the same, and mask, projection optics system and EUVL apparatus using the EUVL reflection device |
| 02/08/2007 | US20070030948 Illumination system with field mirrors for producing uniform scanning energy |
| 02/08/2007 | US20070030464 Lithographic apparatus and device manufacturing method |
| 02/08/2007 | US20070029509 Apparatus for generating a plurality of beamlets |
| 02/08/2007 | DE102005034912A1 Therapy system`s e.g. particle therapy system, control parameter determining method, involves determining patient position or patient holder position as control parameter in sub volumes arranged in scanning area |
| 02/07/2007 | CN1298399C Rotation multielement radiation streaming forming device |
| 02/06/2007 | US7174520 Characterization and verification for integrated circuit designs |
| 02/06/2007 | US7173999 X-ray microscope having an X-ray source for soft X-ray |
| 02/06/2007 | US7173266 Ultraviolet irradiating device |
| 02/06/2007 | US7173265 Modular patient support system |
| 02/06/2007 | US7173264 Particle beam therapy system |
| 02/06/2007 | US7173263 Optical switching in lithography system |
| 02/06/2007 | US7173262 Charged particle beam exposure apparatus, charged particle beam exposure method and device manufacturing method |
| 02/06/2007 | US7173261 Image noise removing method in FIB/SEM complex apparatus |
| 02/06/2007 | US7173249 Nuclear medical diagnostic apparatus and method for detecting radiation |
| 02/06/2007 | US7172788 Optical element and method for its manufacture as well as lithography apparatus and method for manufacturing a semiconductor device |
| 02/06/2007 | CA2281069C Analyzer measuring window and method for installing said window in place |
| 02/01/2007 | US20070026323 silicon nitride antireflective coatings on EUV light absorber layer; defect inspection of mask with DUV light; eliminate the interference effect may cause reflectance oscillation near the absorber edges, increase the defect inspection sensitivity |
| 02/01/2007 | US20070025501 Cast collimators for ct detectors and methods of making same |
| 02/01/2007 | US20070023704 Pattern drawing method, stamper manufacturing method, and pattern drawing apparatus |
| 02/01/2007 | US20070023703 Electron beam writing apparatus and writing method |
| 02/01/2007 | US20070023702 Method for manufacturing a mask and an organic el element and an organic el printer |
| 02/01/2007 | US20070023685 System and method for exposing an object to an electrical discharge |
| 02/01/2007 | US20070023684 System and method for positioning an object |
| 02/01/2007 | US20070023674 Ion beam measuring method and ion implanting apparatus |
| 02/01/2007 | US20070022831 Integrated in situ scanning electronic microscope review station in semiconductor wafers and photomasks optical inspection system |
| 01/30/2007 | US7171257 Apparatus and method for radiosurgery |
| 01/30/2007 | US7170579 Light source unit, exposure apparatus, and device manufacturing method |
| 01/25/2007 | US20070022402 High transport rates of hormones delivered across cell membranes, facilitating more efficient delivery of drugs and diagnostic agents by using a viscous fluid comprising a polysaccharide a form of hydrogel, lipogel or sols; drug delivery to mucous membranes; gastrointesinal systems |
| 01/25/2007 | US20070022401 Method of correcting mask pattern and correcting apparatus thereof |
| 01/24/2007 | EP1745492A1 Multi-column charged particle optics assembly |
| 01/23/2007 | US7167231 Method and apparatus for printing large data flows |
| 01/23/2007 | US7166854 Uniformity control multiple tilt axes, rotating wafer and variable scan velocity |
| 01/18/2007 | US20070012885 Quantified fluorescence microscopy |
| 01/18/2007 | DE19945074B4 Trocknungseinrichtung für beschichtete Substrate Drying apparatus for coated substrates |
| 01/18/2007 | DE102005031691A1 Ultraviolet tunnel unit, used for hardening nail gel, has lamp holder with coded formation fitting only matching, correspondingly-coded lamp base |
| 01/17/2007 | EP1743344A2 Remote communication method and device using nuclear isomers |
| 01/11/2007 | US20070011648 Fast systems and methods for calculating electromagnetic fields near photomasks |
| 01/11/2007 | US20070009090 Process and apparatus for irradiating product pallets or containers |
| 01/11/2007 | DE202006008098U1 Irradiation or illumination unit has radiators, especially infrared (IR), UV or other light sources for heating modules for heat treatment of plastics or metals |
| 01/11/2007 | DE102005031160A1 Printing machine drier for ink, lacquering and similar coating materials comprises radiator(s) and sleeve-shaped insulating retention elements with inner contacts |
| 01/10/2007 | EP1740270A1 A system for the delivery of proton therapy |
| 01/10/2007 | CN2857162Y Gamma radiator |
| 01/09/2007 | US7162010 Method to measure the entrance dose of a radiology apparatus |
| 01/09/2007 | US7162009 X-ray multi-layer mirror and x-ray exposure apparatus |
| 01/09/2007 | US7162005 Radiation sources and compact radiation scanning systems |
| 01/09/2007 | US7161163 Method and arrangement for the plasma-based generation of soft x-radiation |
| 01/09/2007 | US7161161 Uniformity control using multiple fixed wafer orientations and variable scan velocity |
| 01/09/2007 | US7160475 Fabrication of three dimensional structures |
| 01/04/2007 | DE102005029582A1 Apparatus for an ion beam arrangement esp. for processing solid surfaces of optical elements such as lenses and mirrors |
| 01/03/2007 | EP1738776A1 Process and apparatus for irradiating product pallets or containers |