Patents for G21K 5 - Irradiation devices (9,144)
09/2007
09/25/2007US7274772 X-ray source with nonparallel geometry
09/25/2007US7274768 X-ray diffraction-based scanning system
09/25/2007US7274767 Rotating carriage assembly for use in scanning cargo conveyances transported by a crane
09/25/2007US7274435 Exposure apparatus and device fabrication method using the same
09/25/2007US7274029 Lithographic apparatus and device manufacturing method
09/25/2007US7274026 Apparatus and process for irradiating product pallets
09/20/2007WO2007105390A1 Electron beam generating apparatus
09/20/2007WO2007105389A1 Electron gun, energy ray generating device, electron beam generating device, and x-ray generating device
09/20/2007US20070215821 Shielded Irradiation Zone Of Production Line
09/20/2007US20070215820 Methods and systems for thermal-based laser processing a multi-material device
09/19/2007CN100338976C Plasma-assisted process in production line
09/19/2007CN100337592C Radioactive-ray photographic apparatus and radioactive-ray detection signal processing method
09/18/2007US7271400 Methods, apparatus, and systems involving ion beam generation
09/13/2007US20070211850 Cleaning of Multi-Layer Mirrors
09/13/2007US20070210253 Methods for SEM inspection of fluid containing samples
09/12/2007EP1831912A2 Method for eliminating low frequency error sources to critical dimension uniformity in shaped beam writing systems
09/12/2007EP1542792A4 Charging and capture of particles in coronas irradiated by in-situ x-rays
09/12/2007CN101032651A Radiotherapy device control apparatus and radiation irradiation method
09/11/2007US7268358 Method of modulating laser-accelerated protons for radiation therapy
09/06/2007US20070206726 Systems and methods for x-ray imaging and scanning of objects
09/06/2007US20070205381 Electron Beam Irradiation Device
09/06/2007US20070205376 Gas blowing nozzle of charged particle beam apparatus and charged particle beam apparatus as well as working method
09/06/2007US20070205363 Photoelectron Measuring Device
09/05/2007CN101031336A Particle beam irradiation method and device
09/05/2007CN101028555A Applicator attachable to skin treatment device and skin treatment method using the same
09/05/2007CN100336422C X-ray source assembly having enhanced output stability, and method for optimizing the output of the X-ray
09/05/2007CN100336156C Plasma-assisted gas generation
09/05/2007CN100335010C Patient-locating method and device for medical diagnostic or therapeutic equipment
09/04/2007US7266802 Drawing apparatus and drawing method
09/04/2007US7266800 Method and system for designing manufacturable patterns that account for the pattern- and position-dependent nature of patterning processes
09/04/2007US7265363 Microscope examination method, optical stimulation apparatus, and microscope examination apparatus
08/2007
08/28/2007US7263164 Imaging system to compensate for x-ray scatter
08/28/2007US7263162 Sample mounts for microcrystal crystallography
08/28/2007US7262424 Particle beam therapy system
08/28/2007US7261984 Exposure pattern or mask and inspection method and manufacture method for the same
08/23/2007CA2642258A1 Methods and systems for simultaneous real-time monitoring of optical signals from multiple sources
08/22/2007CN101023506A Electrostatic lens for ion beams
08/21/2007US7259381 Methodology for determining electron beam penetration depth
08/21/2007US7259380 Scanning mechanism of an ion implanter
08/16/2007WO2007091657A1 Membrane structure and method for manufacturing the same
08/16/2007US20070189460 Precise x-ray inspection system
08/16/2007US20070187624 Multiple irradiation effect-corrected dose determination technique for charged particle beam lithography
08/15/2007CN1332414C Ion beam irradiation device
08/14/2007US7257196 Radiotherapeutic apparatus
08/14/2007US7256407 Lithographic projection apparatus and reflector assembly for use therein
08/14/2007US7256406 Emitter for electron-beam projection lithography system, and method of manufacturing and operating the emitter
08/14/2007US7256405 Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method
08/09/2007US20070183585 X-ray device that emits an x-ray beam with a scanning-like movement
08/08/2007EP1265673B1 Automated system for radiation treatment of a patient
08/08/2007CN1331022C Method for operating a radiation examination device
08/08/2007CN101015038A Exposure equipment and exposure method
08/08/2007CN101014383A Method of modulating laser-accelerated protons for radiationtherapy
08/08/2007CN101011618A Electromagnetic impulse irradiation system and method for promoting medicament to permeate bloodbrain barrier
08/07/2007US7254215 Systems and methods for reducing radiation dosage
08/07/2007US7253907 Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method
08/07/2007US7253878 Exposure apparatus and device fabrication method
08/07/2007US7253424 Method of implanting a substrate and an ion implanter for performing the method
08/07/2007US7253420 Scanning microscope system
08/07/2007US7253419 Apertured plate support mechanism and charged-particle beam instrument equipped therewith
08/07/2007US7253418 Device and method for the examination of samples in a non vacuum environment using a scanning electron microscope
08/07/2007US7252911 Implanting ions into a mask substrate with pattern-forming material with light-transmissive exposure regions; ions in the regions dissipate electrostatic charges, thus preventing the buildup of electrostatic charges which could otherwise attract image-distorting particles to the mask or damage the mask
08/07/2007US7252629 Device for effecting radiation therapy in an animal body
08/02/2007US20070178402 Laser irradiation device and method of fabricating organic light emitting display device using the same
08/02/2007US20070178393 photomask may include a projecting pattern selectively formed on a substrate and a reflective layer on the substrate and the projecting pattern; for extreme ultra-violet light; photolithography
08/02/2007US20070176699 Particle beam accelerator
08/02/2007US20070176121 Pressure sensor
08/02/2007US20070176078 Fast particle generating apparatus
08/02/2007DE202007005752U1 Wärmestrahler Radiant heaters
07/2007
07/31/2007US7250621 Method and arrangement for the plasma-based generation of intensive short-wavelength radiation
07/31/2007US7250618 Radiantly heated cathode for an electron gun and heating assembly
07/31/2007US7250617 Ion beam neutral detection
07/26/2007WO2007083662A1 X-ray generator employing hemimorphic crystal
07/26/2007US20070172031 Concentric Dual Drum Raster Scanning Beam System and Method
07/26/2007US20070170154 Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device
07/26/2007DE202007007003U1 Gerät zur UV-Behandlung eines Wafers oder Substrats Device for the UV treatment of a wafer or substrate
07/26/2007DE202006019968U1 Bestrahlungsgerät zum Bestrahlen von fotopolymerisierbaren Verbindungen auf Finger- oder Fußnägeln Irradiation device for irradiating the photopolymerizable compounds on finger or toenails
07/26/2007DE102006003057A1 Drucker mit einem Belichtungskopf Printer with an exposure head
07/26/2007DE102006002946A1 Strahleranordnung und Anlage zur Behandlung von Pulverschichten auf Objekten Radiator assembly and installation for the treatment of powder coatings on objects
07/25/2007EP1811545A1 Exposure equipment and exposure method
07/25/2007EP1810299A2 Integrated sub-nanometer-scale electron beam systems
07/25/2007EP1525590B1 Screened chamber for ion therapy with protection against neutrons having energy up to gev
07/25/2007CN1328694C Method and apparatus for emission computed tomography using temporal signatures
07/25/2007CN101006541A High energy polyenergetic ion selection systems, ion beam therapy systems, and ion beam treatment centers
07/25/2007CN101006198A In situ surface contaminant removal for ion implanting
07/25/2007CN101002978A Particle-beam exposure apparatus and particle-beam therapeutic apparatus
07/24/2007US7248667 Illumination system with a grating element
07/24/2007US7248360 Polychronic laser scanning system and method of use
07/24/2007US7247869 Particle therapy system
07/24/2007US7247866 Contamination barrier with expandable lamellas
07/24/2007US7247865 System and method of detecting, neutralizing, and containing suspected contaminated articles
07/19/2007US20070165782 Soft x-ray processing device and soft x-ray processing method
07/19/2007US20070165778 Methods for assisting recovery of damaged brain and spinal cord using arrays of X-Ray microplanar beams
07/19/2007US20070164680 Plasma generation and processing with multiple radiation sources
07/19/2007US20070164230 Patient alignment system with external measurement and object coordination for radiation therapy system
07/18/2007EP1602007A4 A method of patterning photoresist on a wafer using a reflective mask with a multi-layer arc
07/18/2007CN101002305A Laser plasma EUV light source, target material, tape material, a method of producing target material, a method of providing targets, and an EUV exposure device
07/17/2007US7244954 Collector having unused region for illumination systems using a wavelength ≦193 nm
07/17/2007US7244949 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
07/12/2007US20070162887 Method of fabricating photo mask
07/12/2007US20070160916 reflective layer formed over front surface of substrate and chucking layer formed over rear surface positioned to chuck substrate to electrostatic chuck
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