| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 12/04/2007 | US7304733 Method and device for conducting the spectral differentiating, imaging measurement of fluorescent light |
| 12/04/2007 | US7304318 System and method for maskless lithography using an array of sources and an array of focusing elements |
| 12/04/2007 | US7304313 Low-pressure chamber for scanning electron microscopy in a wet environment |
| 11/29/2007 | WO2007135811A1 X-ray tube and x-ray irradiator employing it |
| 11/29/2007 | WO2007120623A3 Ion beam scanning control methods and systems for ion implantation uniformity |
| 11/29/2007 | WO2007111672A3 Concentric dual drum raster scanning beam system and method |
| 11/29/2007 | WO2007095205A3 Electron beam emitter |
| 11/29/2007 | WO2007021420A3 Method and apparatus for targeting a tumor during radiotherapy using a virtual image |
| 11/29/2007 | US20070276229 Breast restraint |
| 11/29/2007 | US20070275308 photomasks; etch resistance; oxidation resistance |
| 11/29/2007 | DE10240102B4 Handgeführtes Bestrahlungsgerät The hand-held radiation device |
| 11/29/2007 | DE10235831B4 Verfahren zur Kaschierung eines dreidimensional vorgeformten Trägers mit einer Textillage sowie Bestrahlungsvorrichtung zur Durchführung des Verfahrens A method for laminating a three-dimensionally pre-formed support with a textile layer and irradiating apparatus for performing the method |
| 11/29/2007 | DE102007024251A1 Irradiating device for hardening inks in offset printing machines comprises adjustable secondary reflectors arranged outside of a lamp housing and partially surrounding an irradiating chamber |
| 11/29/2007 | DE102007012897A1 Chamber for UV irradiation of lacquered components, e.g. automobile parts, has several UV radiators distributed over base, lid and walls of chamber to provide even irradiation |
| 11/29/2007 | DE102005044409B4 Partikeltherapieanlage und Verfahren zur Ausbildung eines Strahlpfads für einen Bestrahlungsvorgang in einer Partikeltherapieanlage Particle therapy system and method for forming a beam path for a radiation process in a particle therapy system |
| 11/28/2007 | CN200980854Y Radioactive source vibration precision controlling device for blood irradiator |
| 11/28/2007 | CN100351699C Lithographic apparatus and device manufacturing method |
| 11/27/2007 | US7302038 Correction of patient rotation errors in radiotherapy using couch translation |
| 11/27/2007 | US7301162 Particle beam irradiation system |
| 11/27/2007 | US7300724 capping structure may include alternating layers of a capping material, e.g., ruthenium, and a material with a lower EUV absorption coefficient, e.g., silicon |
| 11/22/2007 | US20070268995 Ct scanner with helical path source |
| 11/22/2007 | US20070267582 Substrate edge exposure apparatus |
| 11/22/2007 | US20070267580 Drive stage for scanning probe apparatus, and scanning probe apparatus |
| 11/22/2007 | DE102006022970B3 UV-Lichtquelle UV-light source |
| 11/21/2007 | EP1856654A2 Method and system for a maskless lithography rasterization tecnique based on global optimization |
| 11/20/2007 | US7298826 X-ray generator |
| 11/20/2007 | US7297968 Debris collector for EUV light generator |
| 11/20/2007 | US7297967 Particle beam irradiation system and method of adjusting irradiation apparatus |
| 11/20/2007 | US7297965 Method and apparatus for sample formation and microanalysis in a vacuum chamber |
| 11/20/2007 | US7297944 Ion beam device and ion beam processing method, and holder member |
| 11/15/2007 | WO2007040969A3 Decontamination and sterilaztion system using large area x-ray source |
| 11/15/2007 | US20070262272 Semiconductor mask correcting device and semiconductor mask correcting method |
| 11/15/2007 | DE102006021716A1 UV irradiation arrangement for drying varnishes and printing inks, comprises a radiation shielding arrangement implemented as a global cover body, and a reflector that extends and partially surrounds an UV radiation source |
| 11/13/2007 | US7295885 Multi-exposure drawing method and apparatus thereof for dividing an exposing area into exposed zones and un-exposed zones based on odd-numbered and even-numbered vector-graphic data |
| 11/13/2007 | US7295282 Exposure apparatus, cooling method, and device manufacturing method |
| 11/08/2007 | US20070259275 Anti-reflection coating for an EUV mask |
| 11/08/2007 | US20070257201 Security systems and monitoring methods using quantum states |
| 11/07/2007 | EP1850911A2 Methods for assisting recovery of damaged brain and spinal cord and for treating various diseases using arrays of x-ray microplanar beams |
| 11/01/2007 | WO2007122025A1 Curved beam-guiding magnet with saddle- and race-track-shaped superconducting coils and irradiation unit with such a magnet |
| 10/31/2007 | EP1325503B1 Radiotherapy apparatus and collimator set therefor |
| 10/31/2007 | EP1305813A4 Plasma focus light source with active and buffer gas control |
| 10/31/2007 | CN100346134C Apparatus for measuring thickness of thin layer |
| 10/30/2007 | US7290242 Pattern generation on a semiconductor surface |
| 10/30/2007 | US7289658 Removal of relatively unimportant shapes from a set of shapes |
| 10/30/2007 | US7289600 Apparatus and process for irradiating product pallets |
| 10/30/2007 | US7288859 Wafer stage operable in a vacuum environment |
| 10/30/2007 | US7288466 Processing method, manufacturing method of semiconductor device, and processing apparatus |
| 10/30/2007 | US7288173 Ion beam processing system and ion beam processing method |
| 10/25/2007 | WO2007119715A1 Soft x-ray generating device, and destaticizer |
| 10/25/2007 | US20070248215 X-Ray Target and Apparatuses Using the Same |
| 10/24/2007 | CN101061552A System and method for radioactive waste destruction |
| 10/23/2007 | US7287240 Designing method and device for phase shift mask |
| 10/23/2007 | US7286645 X-ray device that emits an x-ray beam with a scanning-like movement |
| 10/18/2007 | WO2007117634A2 System, method and apparatus for treating liquids with wave energy from an electrical arc |
| 10/18/2007 | US20070242799 Illumination system |
| 10/18/2007 | US20070240975 System, method and apparatus for treating liquids with wave energy from an electrical arc |
| 10/18/2007 | DE102006016529A1 Semiconductor radiation source of high power output density for hardening adhesives, coatings/sealing compounds, comprises a carrier cooled by a flow of coolant, and temperature sensors contacted with a cooling medium |
| 10/17/2007 | EP0894263B1 Rotatable water-cooled target for emission of resonant gamma rays and gamma ray absorption device |
| 10/16/2007 | US7282726 Apparatus and method for irradiating electron beam |
| 10/16/2007 | US7282706 Advanced optics for rapidly patterned laser profiles in analytical spectrometry |
| 10/16/2007 | US7282307 Providing a mask substrate;forming a lower multilayer reflective stack; forming a first embedded layer over the lower multilayer reflective stack; forming a second embedded layer; forming a top multilayer reflective stack; etching an opening through the top multilayer reflective stack |
| 10/16/2007 | US7282305 Reflective mask blank having a programmed defect and method of producing the same, reflective mask having a programmed defect and method of producing the same, and substrate for use in producing the reflective mask blank or the reflective mask having a programmed defect |
| 10/11/2007 | US20070238033 Photolithography using extreme ultraviolet radiation especially light having wavelength in a soft X-ray region, a reflection type photomask and a reflection type photomask blank |
| 10/11/2007 | US20070237296 Decontamination using planar X-ray sources |
| 10/11/2007 | US20070235665 Charged particle beam system and method for manufacturing and inspecting LCD devices |
| 10/11/2007 | DE10232198B4 Strahlungsquelle für elektromagnetische Strahlung Radiation source of electromagnetic radiation |
| 10/11/2007 | DE102006016500A1 Method for hardening the surfaces of workpieces comprises placing the workpieces in hermetically sealed holders, feeding into a radiating unit and flushing the holders containing the workpieces with inert gas |
| 10/11/2007 | DE102006015377A1 Halbleiter-Strahlungsquelle sowie Lichthärtgerät Semiconductor radiation source and light curing device |
| 10/11/2007 | DE102006015336A1 Halbleiter-Strahlungsquelle Semiconductor radiation source |
| 10/11/2007 | DE102006015335A1 Halbleiter-Strahlungsquelle sowie Lichthärtgerät Semiconductor radiation source and light curing device |
| 10/11/2007 | DE102006014689A1 Infrarot Bestrahlungseinheit Infrared irradiation unit |
| 10/10/2007 | EP1470447A4 Photolithographic critical dimension control using reticle measurements |
| 10/10/2007 | CN100342759C Method of generating extreme ultraviolet radiation |
| 10/10/2007 | CN100342758C X-ray generator |
| 10/09/2007 | US7280633 Path planning and collision avoidance for movement of instruments in a radiation therapy environment |
| 10/09/2007 | US7279252 Substrate for the micro-lithography and process of manufacturing thereof |
| 10/04/2007 | WO2007111672A2 Concentric dual drum raster scanning beam system and method |
| 10/04/2007 | US20070228525 Substrate earthing mechanism for use in charged-particle beam writing apparatus |
| 10/04/2007 | US20070228297 Charged beam drawing apparatus |
| 10/04/2007 | US20070228296 Parallel Electron Beam Lithography stamp (PEBLS) |
| 10/04/2007 | US20070228295 Lithographic Apparatus, Support, Device Manufacturing Method, and a Method of Supporting |
| 10/04/2007 | US20070228294 Charge Neutralizing Device |
| 10/04/2007 | US20070228292 Adjusting device of an apparatus for generating a beam of charged particles |
| 10/04/2007 | DE202007006430U1 Mobile Infrarot Kabine Mobile infrared cabin |
| 10/04/2007 | DE102005034912B4 Partikeltherapieanlage, Verfahren zum Bestimmen von Steuerparametern einer derartigen Therapieanlage, Strahlentherapieplanungsvorrichtung und Bestrahlungsverfahren Particle therapy system, method for determining control parameters of such a therapy facility, radiotherapy planning device and irradiation method |
| 10/03/2007 | EP1392167B1 Computed tomography apparatus |
| 10/03/2007 | CN100341106C Method and device for aligning a charged particle beam column |
| 10/02/2007 | US7276714 Advanced pattern definition for particle-beam processing |
| 09/27/2007 | WO2007108320A1 Apparatus and method for measuring profile of electronic beam and laser beam |
| 09/27/2007 | US20070225603 Antiproton production and delivery for imaging and termination of undersirable cells |
| 09/27/2007 | US20070224523 a substrate, a reflective layer formed on the substrate, an absorption pattern formed on the reflective layer and over a first portion of the substrate, a compensatory portion which is thinner than pattern, formed over the second portion of the substrate, second portion is adjacent to the first portion |
| 09/27/2007 | US20070224522 Substrate including deformed portions and method of adjusting a curvature of a substrate |
| 09/27/2007 | US20070223656 X-ray inspection system |
| 09/27/2007 | US20070222956 Contamination barrier with expandable lamellas |
| 09/27/2007 | US20070221871 Determining ion beam parallelism using refraction method |
| 09/27/2007 | DE10348796B4 Vorrichtung zur räumlichen Modulation eines Röntgenstrahlbündels und Röntgenbildsystem Apparatus for spatial modulation of an x-ray beam and X-ray imaging system |
| 09/27/2007 | DE10201617B4 Amalgamdotierter Quecksilberniederdruck-UV-Strahler Amalgam mercury-doped low-pressure UV lamps |
| 09/26/2007 | CN101041102A Low-frequency stage microwave pulse irradiation system for improving the permeation of medicine in the blood brain barrier and the method thereof |
| 09/26/2007 | CN100339967C Ion irradiating device |
| 09/26/2007 | CN100339763C X-ray imaging apparatus and method |