G21K 5 - Irradiation devices

Patents for G21K 5 - Irradiation devices (9,144)
01/2007
01/03/2007	EP1738223A2 Targeted radiation treatment using a spectrally selective radiation emitter
01/03/2007	EP1360550B1 Collimator arrangement
01/03/2007	CN1890776A Umbilical cord facilities connection for an ion beam implanter
01/03/2007	CN1889995A Multiple room radiation treatment system
01/02/2007	US7158607 Methods for assisting recovery of damaged brain and spinal cord using arrays of X-ray microplanar beams
01/02/2007	US7157702 High resolution atom probe
01/02/2007	US7156553 Portable radiation imaging system and a radiation image detection device equipped with an angular signal output means
12/2006
12/28/2006	WO2005018735A3 Modular patient support system
12/28/2006	WO2004109717A3 High energy polyenergetic ion beam systems
12/28/2006	US20060292459 EUV reflection mask and method for producing it
12/28/2006	US20060292457 Reticle includes an area provided with a conductive metal-based compound coating for electrically grounding the reticle; reticle is suitable for use with a lithography apparatus whereby the reticle pattern is imaged using extreme ultra violet radiation
12/28/2006	US20060291623 Inspection system with material identification
12/28/2006	US20060291622 Inspection system with material identification
12/28/2006	US20060291062 Collector with fastening devices for fastening mirror shells
12/28/2006	US20060290291 Mehtod and apparatus for modifying object with electrons generated from cold cathode electron emitter
12/28/2006	US20060289804 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
12/28/2006	US20060289793 Method and apparatus for simultaneously depositing and observing materials on a target
12/28/2006	US20060289783 Microscope stage with flexural axis
12/28/2006	DE102004015540B4 Strahlungsbildaufnahmeeinrichtung Radiation image pickup device
12/27/2006	EP1736205A1 Particle beam irradiation apparatus and treatment planning unit
12/27/2006	EP1736040A2 Particle beam accelerator
12/27/2006	EP1735810A1 A large-area shower electron beam irradiator with field emitters as an electron source
12/27/2006	EP1374273B1 Exit window for electron beam emitter
12/27/2006	CN2852332Y Gamma radiation lead door control device
12/26/2006	US7154108 Particle therapy system
12/26/2006	US7154107 Particle beam irradiation system and method of adjusting irradiation field forming apparatus
12/26/2006	US7154103 Method of providing extended shelf life fresh meat products
12/21/2006	US20060285646 Device, arrangement and method for indicating positions on areas exposed to x-ray radiation sources and light sources
12/21/2006	US20060285645 CT imaging system with multiple peak X-ray source
12/21/2006	US20060284120 Method for correcting electron beam exposure data
12/21/2006	US20060284119 Electron-beam exposure system
12/21/2006	US20060284111 Device and method for electron beam irradiation
12/20/2006	CN1291445C Target disc angle controlling and scanning motion mechanism of ion implantation apparatus
12/19/2006	US7151272 Phosphor read-out device and phosphor read-out process
12/14/2006	WO2006132421A1 Method and device for modifying surface of work by electron beam
12/14/2006	WO2005057738A3 Method of modulating protons for radiation therapy
12/14/2006	US20060281017 a photoresist layer formed on a silicon wafer can be precisely patterned in a shape substantially identical to a pattern formed on a reflection mask
12/14/2006	US20060280291 Radiation window and method of manufacture
12/14/2006	US20060278833 Lithographic apparatus and cleaning method therefor
12/13/2006	EP1732086A1 Soft x-ray processing device and soft x-ray processing method
12/13/2006	CN1289149C Method for sterilizing packaging sheet material for manufacturing sealed packages of pourable food products
12/12/2006	US7148495 Illumination system, particularly for EUV lithography
12/12/2006	US7147370 Light irradiator, lamp assembly, and X-ray apparatus
12/12/2006	CA2405575C Product irradiator for optimizing dose uniformity in products
12/07/2006	US20060277522 Method of identifying an extreme interaction pitch region, methods of designing mask patterns and manufacturing masks, device manufacturing methods and computer programs
12/07/2006	US20060277521 Method, program product and apparatus for performing double exposure lithography
12/07/2006	US20060274889 Method and apparatus for controlling electron beam current
12/05/2006	US7145157 Kinematic ion implanter electrode mounting
11/2006
11/30/2006	WO2006126390A1 Energy beam irradiator and irradiating method
11/30/2006	WO2006057867B1 Method for eliminating low frequency error sources to critical dimension uniformity in shaped beam writing systems
11/29/2006	EP1725858A1 Online analysis device
11/29/2006	EP1481276B1 Lighting system comprising a nested collector for annularly illuminating an exit pupil
11/29/2006	CN1871555A Forming partial-depth features in polymer film
11/28/2006	US7142285 Illumination system particularly for microlithography
11/28/2006	US7141810 Particle beam irradiation system
11/28/2006	US7141790 Defect inspection instrument and positron beam apparatus
11/23/2006	US20060261284 Method of operating liquid in the vacuum or low-pressure environment and observing the operation and device for the operation and observation
11/23/2006	DE10125341B4 Bestrahlungsvorrichtung und Lichthärtgerät Irradiation apparatus and light curing device
11/22/2006	EP1724571A1 Photoelectron measuring device
11/22/2006	CN1868028A Ion implanter electrodes
11/22/2006	CN1868027A X射线装置 X-ray device
11/22/2006	CN1868026A X射线装置 X-ray device
11/22/2006	CN1868025A X射线装置 X-ray device
11/22/2006	CN1868024A X射线装置 X-ray device
11/21/2006	US7139009 Ion printer
11/21/2006	US7138771 Apparatus for pre-acceleration of ion beams used in a heavy ion beam application system
11/16/2006	WO2006121126A1 Multi-color x-ray generator
11/16/2006	WO2006121125A1 Device for switching/generating x-rays for diagnosis and curing
11/16/2006	US20060257753 Photomask and method thereof
11/16/2006	US20060255896 Constant power and temperature coil
11/16/2006	US20060255289 Sample handling mechanisms and methods for mass spectometry
11/15/2006	CN1861356A Lowenergy electron beam radiation apparatus for realizing radiation vulcanization
11/15/2006	CN1285072C Energy ray radiator
11/15/2006	CN1284978C Optical element and method for its manufacture as well as lightography apparatus and method for manufacturing a semiconductor device
11/14/2006	US7136453 Apparatus for imaging objects on the remote side of a barrier using radiation
11/14/2006	US7136141 Lithographic apparatus with debris suppression, and device manufacturing method
11/14/2006	US7135693 Method and apparatus for recycling gases used in a lithography tool
11/14/2006	US7135692 Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation
11/14/2006	US7135687 Thermoelectrically controlled X-ray detector array statement regarding federally sponsored research
11/09/2006	US20060251973 Reflective-type mask blank for EUV lithography and method for producing the same
11/09/2006	US20060251211 Modular gantry system for x-ray inspection
11/09/2006	US20060250599 Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method
11/09/2006	US20060249698 Debris collector for euv light generator
11/09/2006	US20060249367 Plasma catalyst
11/08/2006	EP1397812B1 Process and apparatus for production of f-18 fluoride
11/08/2006	CN1860381A Ion beam measuring method and ion implanting apparatus
11/08/2006	CN1284188C Radiographic exposuring appts. and its method
11/08/2006	CN1284048C Photoetching apparatus and device manufacturing method
11/07/2006	US7133495 X-ray generator
11/07/2006	US7133493 X-ray irradiation apparatus
11/07/2006	US7133489 X-ray illumination optical system and X-ray reduction exposure apparatus
11/07/2006	US7132621 Plasma catalyst
11/02/2006	US20060245540 Illumination system particularly for microlithography
11/02/2006	US20060243922 Raster Frame Beam System For Electron Beam Lithography
11/02/2006	US20060243921 Electron beam exposure apparatus, electron beam exposure method and method of manufacturing semiconductor device
11/02/2006	EP1716576A2 Target device for producing a radioisotope
11/02/2006	EP1715962A2 Arrangement and method for coating a thread-type material with paint in a multi-layer manner
10/2006
10/31/2006	US7130370 Method and apparatus for producing an image of the internal structure of an object
10/26/2006	US20060240334 forming a 180 degrees phase-shift region by etching a first portion of reflective region, changing the physical structure of a second portion of the reflective region such that the second portion reflects extreme ultra-violet (EUV) light with the same intensity as the first portion
10/26/2006	DE10257432B4 Luftgekühlte Bestrahlungsanordnung Air-cooled irradiation arrangement

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