| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 10/27/2005 | DE102004017131A1 Lithographiemaske für die Herstellung von Halbleiterbauelementen Lithography mask for the manufacture of semiconductor devices |
| 10/26/2005 | EP1589792A2 Light source apparatus and exposure apparatus having the same |
| 10/20/2005 | WO2005098871A1 X-ray-use target and device using it |
| 10/20/2005 | WO2005018734A3 Patient positioning system for radiation therapy system |
| 10/20/2005 | WO2005018437A3 X-ray diffraction-based scanning system |
| 10/20/2005 | US20050233224 Method of improving polysilicon film crystallinity |
| 10/20/2005 | US20050232397 Medical imaging device |
| 10/20/2005 | US20050231138 Charged-particle beam accelerator, particle beam radiation therapy system using the charged-particle beam accelerator, and method of operating the particle beam radiation therapy system |
| 10/20/2005 | US20050230645 Extreme ultraviolet light source |
| 10/20/2005 | US20050230640 Compact self-shielded irradiation system and method |
| 10/20/2005 | US20050230636 Charged particle beam apparatus and specimen holder |
| 10/19/2005 | EP1586949A2 Exposure apparatus and exposure method using EUV light |
| 10/19/2005 | EP1586007A2 Electron beam processing for mask repair |
| 10/19/2005 | CN1685446A Transportable manufacturing facility for radioactive materials |
| 10/18/2005 | US6956885 Electromagnetic radiation generation using a laser produced plasma |
| 10/18/2005 | US6956706 Composite diamond window |
| 10/18/2005 | CA2346569C Cartridge product irradiator |
| 10/13/2005 | WO2005096680A1 Light source unit, illumination optical device and exposing method |
| 10/13/2005 | US20050225739 Exposure apparatus and device fabrication method using the same |
| 10/13/2005 | US20050224724 Lithographic apparatus, device manufacturing method and device manufactured thereby |
| 10/12/2005 | EP1584353A1 A system for delivery of proton therapy |
| 10/12/2005 | CN1682334A Radiation window and method of manufacture |
| 10/12/2005 | CN1682074A UV-ray irradiator |
| 10/12/2005 | CN1222829C Lithography device which uses source of radiation in the extreme ultraviolet range and multi-layered mirrors with broad spectral band in this range |
| 10/12/2005 | CN1222322C Ultra-violet radiation system for material with selective attenuation ray |
| 10/11/2005 | US6954257 includes a silicon/molybdenum multilayer structure, an outer capping layer and an interlayer positioned between them; has acceptable reflectivity while exhibiting improved resistance to oxidation over the long term |
| 10/11/2005 | US6953943 Medical charged particle irradiation apparatus |
| 10/06/2005 | WO2005094142A2 Particle beam accelerator |
| 10/06/2005 | WO2005052951A3 Product to tailor distributions of energy deposition by a high energy photon beam |
| 10/06/2005 | US20050220248 Spallation device for producing neutrons |
| 10/06/2005 | US20050218345 Ion implantation apparatus and method |
| 10/06/2005 | DE102004013174A1 Particle, X ray or light radiation unit has patient table positioned by arm of three axis industrial robot drive |
| 10/05/2005 | CN2731643Y Guard board of radiating box |
| 10/04/2005 | US6952264 Dose radiometer |
| 09/29/2005 | WO2005090952A1 Online analysis device |
| 09/29/2005 | WO2004102587A3 Compact self-shielded irradiation system and method |
| 09/29/2005 | US20050214654 ESD-resistant photomask and method of preventing mask ESD damage |
| 09/29/2005 | US20050213711 X-ray generating apparatus |
| 09/29/2005 | US20050211926 Ion beam irradiation apparatus and insulating spacer for the same |
| 09/29/2005 | US20050211925 Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method |
| 09/29/2005 | DE102004012128A1 Ultraviolet lamp esp. for setting or hardening coated surfaces e.g. painted car body parts using pressure differential to activate the lamp |
| 09/29/2005 | DE102004010535A1 Movement drive for use in e.g. ion processing equipment, has pendulum holding devices with axles that intersect at right angles, such that oscillating motion of torque motors, arranged outside vacuum container, is directly realized at axles |
| 09/29/2005 | CA2560145A1 Online analysis device |
| 09/28/2005 | EP1580788A2 Cathode and counter-cathode arrangement in an ion source |
| 09/28/2005 | EP1580787A2 X-ray generating apparatus |
| 09/28/2005 | EP1580546A1 Methods for X-ray reflectance measurement |
| 09/28/2005 | CN2729869Y Irradition device of thermal shrinking pipe |
| 09/28/2005 | CN1674205A Plasma focus light source with impoved pulse power system |
| 09/28/2005 | CN1672635A X-ray generating apparatus |
| 09/22/2005 | WO2005088284A1 Photoelectron measuring device |
| 09/22/2005 | US20050207537 X-ray generating equipment |
| 09/22/2005 | US20050207532 Method for X-ray reflectance measurement |
| 09/22/2005 | US20050205806 Particle therapy system |
| 09/22/2005 | US20050205772 Particle accelerator having wide energy control range |
| 09/22/2005 | DE102005002537A1 System für geladene Teilchen und Verfahren zum Messen der Abbildungsvergrösserung System for charged particles and methods for measuring the imaging magnification |
| 09/21/2005 | EP1577899A1 Target for generating deuteron and target apparatus for generating deuteron comprising the same |
| 09/21/2005 | EP1425697A4 Method and apparatus for simulating a radiation dose delivered to an object |
| 09/21/2005 | CN1672232A Ion source and coaxial inductive coupler for ion implantation system |
| 09/21/2005 | CN1672098A Lithographic template having a repaired gap defect |
| 09/20/2005 | US6947519 X-ray exposure apparatus and method, semiconductor manufacturing apparatus, and microstructure |
| 09/20/2005 | US6947518 X-ray exposure apparatus, X-ray exposure method, X-ray mask, X-ray mirror, synchrotron radiation apparatus, synchrotron radiation method and semiconductor device |
| 09/20/2005 | US6946668 Electron beam lithography device and drawing method using electron beams |
| 09/15/2005 | WO2005086203A1 X-ray tube for high dosing performances, method for producing high dosing performances with x-ray tubes and method for the production of corresponding x-ray devices |
| 09/15/2005 | WO2005086176A1 Electron beam irradiation device |
| 09/15/2005 | US20050202326 creating a photomask layout of spaced integrated circuit shapes for projecting an image of an integrated circuit design; determining bisectors between adjacent ones by creating Voronoi cells; assist features along the bisectors are parallel to the spaced integrated circuit shapes |
| 09/15/2005 | US20050201504 An enclosing chamber containing material which absorbs Fluoride-18 formed by beam irradiation of a Neon conversion substance; adsorbing material is manipulated by an adsorption enhancing/decreasing element; biological imaging; tomography |
| 09/15/2005 | US20050200826 Lithographic positioning device and device manufacturing method |
| 09/15/2005 | US20050200825 Positioning device |
| 09/15/2005 | US20050199827 Charged particle beam apparatus, charged particle beam control method, substrate inspection method and method of manufacturing semiconductor device |
| 09/14/2005 | EP1573749A2 System and method for radioactive waste destruction |
| 09/14/2005 | EP0871972B1 Electron beam device with single crystal window and matching anode |
| 09/13/2005 | US6943351 Multi-column charged particle optics assembly |
| 09/08/2005 | US20050195935 X-ray CT system and X-ray apparatus |
| 09/08/2005 | US20050195932 Irradiating test chemical compound with neutrons generated by target free fusion of concentrically accelerated deuterium ions; measuring the quantity of gamma photon radiation emitted; record photon energy spectrum; software determines characteristic energies to identify elements, isotopes |
| 09/08/2005 | US20050195552 Method and apparatus for triggering of lightning discharge |
| 09/08/2005 | US20050194545 [adjustable collimator and sputtering apparatus with the same] |
| 09/07/2005 | EP1570785A1 X-ray ct system and x-ray apparatus |
| 09/07/2005 | EP1570493A2 Device and method for producing radioisotopes |
| 09/07/2005 | EP1485166B1 X-ray apparatus with field emission current control and method |
| 09/07/2005 | EP1153397B1 Collimator for limiting a bundle of high-energy rays |
| 09/07/2005 | CN1666300A Apparatus and method for radiation therapy where the collimatorhelmet comprises slidable plates for controlling the collimator openings |
| 09/07/2005 | CN1663533A X-ray ct system and x-ray apparatus |
| 09/06/2005 | US6940948 Digital X-ray scanning apparatus |
| 09/06/2005 | US6940944 Method and apparatus for X-ray irradiation having improved throughput and dose uniformity ratio |
| 09/06/2005 | US6940584 Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method, and semiconductor manufacturing factory |
| 09/06/2005 | US6940076 System for, and method of, irradiating articles |
| 09/06/2005 | CA2352861C Article irradiation system in which article transporting conveyor is closely encompassed by shielding material |
| 09/01/2005 | WO2005081263A2 Target device for producing a radioisotope |
| 09/01/2005 | WO2005038855A3 Ion implanter electrodes |
| 09/01/2005 | US20050190882 Multi-spectral x-ray image processing |
| 09/01/2005 | US20050189864 Amalgam low pressure mercury UV lamp |
| 09/01/2005 | US20050189501 Charged particle system and a method for measuring image magnification |
| 09/01/2005 | US20050189498 Irradiation apparatus |
| 08/31/2005 | EP1569243A1 Target device for producing a radioisotope |
| 08/31/2005 | CN1663326A Method and arrangement for producing radiation |
| 08/31/2005 | CN1663012A Particle beam processing apparatus and materials treatable using the apparatus |
| 08/31/2005 | CN1661762A Ion beam irradiation apparatus and insulating spacer for the same |
| 08/31/2005 | CN1217560C Extreme ultraviolet source based on colliding neutral beams |
| 08/30/2005 | US6937698 X-ray generating apparatus having an emitter formed on a semiconductor structure |
| 08/30/2005 | US6937690 Method for computed tomography of a periodically moving object to be examined, and a CT unit for carrying out this method |