| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 08/30/2005 | US6936832 Particle therapy system |
| 08/30/2005 | US6936809 Method and device for lateral adjustment of image |
| 08/30/2005 | US6936797 Thermal processing method and thermal processing apparatus for substrate employing photoirradiation |
| 08/30/2005 | US6935269 Apparatus for treating the surface with neutral particle beams |
| 08/25/2005 | WO2005078738A1 Soft x-ray processing device and soft x-ray processing method |
| 08/25/2005 | US20050186326 High activity, spatially distributed radiation source for accurately simulating semiconductor device radiation environments |
| 08/25/2005 | US20050185764 X-ray generator and adjusting method of the same |
| 08/25/2005 | US20050185165 Illumination apparatus and exposure apparatus |
| 08/25/2005 | DE102005004966A1 Konfiguration von Emitteranordnungen für ein stationäres CT-System Configuration of a stationary emitter arrays for CT system |
| 08/25/2005 | DE102004005242A1 Process for the generation of intensive short wavelength plasma emissions for EUV lithography |
| 08/25/2005 | DE102004005241A1 Verfahren und Einrichtung zur plasmabasierten Erzeugung weicher Röntgenstrahlung Method and apparatus for plasma-based generation of soft X-rays |
| 08/25/2005 | DE102004004630A1 Röntgeneinrichtung X-ray equipment |
| 08/24/2005 | EP1565275A1 Chemical functionalization of material surfaces using optical energy and chemicals |
| 08/24/2005 | CN1659444A Sensor and method for measuring a current of charged particles |
| 08/23/2005 | US6933683 Microwave powered lamphead having external shutter |
| 08/23/2005 | US6933515 Laser-produced plasma EUV light source with isolated plasma |
| 08/23/2005 | US6933511 Ion implanting apparatus |
| 08/23/2005 | US6933510 Radiation source, lithographic apparatus, and device manufacturing method |
| 08/23/2005 | US6933503 Imaging X-ray detector based on direct conversion |
| 08/23/2005 | US6932599 Irradiation unit |
| 08/18/2005 | WO2005076039A1 Beam measuring equipment and beam measuring method using the same |
| 08/18/2005 | US20050181584 Ion implantation |
| 08/18/2005 | US20050181314 Light emitting diodes; semiconductor lasers |
| 08/18/2005 | US20050180877 Apparatus and method for irradiating electron beam |
| 08/18/2005 | US20050180543 Aerosol particle classification apparatus |
| 08/18/2005 | US20050178983 Electron beam lithography device and drawing method using electron beams |
| 08/18/2005 | US20050178981 Ion beam neutral detection |
| 08/18/2005 | US20050178979 Light generator and exposure apparatus |
| 08/18/2005 | US20050178977 Irradiation system and method |
| 08/17/2005 | EP1564756A2 An integral lens for a particle flux of high energies, a method of producing such lenses and their usage in analytical devices, devices for radiotherapy and lithography |
| 08/16/2005 | US6931099 High-energy X-ray imaging device and method therefor |
| 08/16/2005 | US6931097 Extreme ultraviolet soft x-ray projection lithographic method system and lithographic elements |
| 08/16/2005 | US6931095 System and method for irradiating large articles |
| 08/16/2005 | US6931049 Laser plasma generation method and system |
| 08/11/2005 | US20050176225 Method of manufacturing electronic device capable of controlling threshold voltage and ion implanter controller and system that perform the method |
| 08/11/2005 | US20050176174 Methodof making an integrated circuit |
| 08/11/2005 | US20050175151 Emitter array configurations for a stationary ct system |
| 08/11/2005 | US20050175149 Capillary tubing |
| 08/11/2005 | US20050175145 Masks of semiconductor devices and methods of forming patterns thereof |
| 08/11/2005 | US20050173654 Apparatus and method for irradiating electron beam |
| 08/11/2005 | US20050173651 Cathode and counter-cathode arrangement in an ion source |
| 08/11/2005 | US20050173632 Methods for sem inspection of fluid containing samples |
| 08/10/2005 | EP1561491A1 Device and method for adapting the size of an ion beam spot in the domain of tumor irradiation |
| 08/10/2005 | EP1561490A2 System and method for optimizing radiation treatment with an intensity modulating multi-leaf collimator while minimizing junctions |
| 08/10/2005 | CN1653870A Plasma-assisted joining |
| 08/10/2005 | CN1653869A Plasma-assisted decrystallization |
| 08/10/2005 | CN1653868A 等离子体催化剂 Plasma catalyst |
| 08/10/2005 | CN1653867A Plasma-assisted coating |
| 08/10/2005 | CN1653866A Plasma generation and processing with multiple radiation sources |
| 08/10/2005 | CN1653864A X-ray generator |
| 08/10/2005 | CN1653851A Plasma-assisted heat treatment |
| 08/10/2005 | CN1653574A Plasma-assisted gas generation |
| 08/10/2005 | CN1653481A Method and apparatus for emission computed tomography using temporal signatures |
| 08/10/2005 | CN1653248A Plasma-assisted engine exhausting process |
| 08/10/2005 | CN1653205A Plasma-assisted reinforced coating |
| 08/10/2005 | CN1653204A Plasma-assisted nitrogen surface treatment |
| 08/10/2005 | CN1653161A Plasma-assisted joining |
| 08/10/2005 | CN1652893A Plasma-assisted process in production line |
| 08/10/2005 | CN1652889A Plasma-assisted sintering |
| 08/10/2005 | CN1652867A Plasma-assisted carbon structure forming |
| 08/10/2005 | CN1652866A Plasma-assisted carburizing |
| 08/10/2005 | CN1650807A Method and apparatus for computed tomography of a periodically moving object to be examined |
| 08/09/2005 | US6928143 Deployable fast-response apparatus to recover bio-contaminated materials |
| 08/09/2005 | US6928131 Method for detecting an explosive in an object under investigation |
| 08/09/2005 | US6927857 Process for the detection of marked components of a composite article using infrared blockers |
| 08/09/2005 | US6927405 Method for obtaining an extreme ultraviolet radiation source, radiation source and use in lithography |
| 08/04/2005 | WO2005069805A2 Targeted radiation treatment using a spectrally selective radiation emitter |
| 08/04/2005 | US20050172249 Pattern generation on a semiconductor surface |
| 08/04/2005 | US20050170262 Exposure processing system, exposure processing method and method for manufacturing a semiconductor device |
| 08/04/2005 | US20050169432 X-ray device |
| 08/04/2005 | US20050169429 Method and arrangement for the plasma-based generation of soft x-radiation |
| 08/04/2005 | US20050168076 Wafer stage operable in a vacuum environment |
| 08/04/2005 | US20050167618 Light source device and exposure equipment using the same |
| 08/04/2005 | US20050167616 Particle beam irradiation system and method of adjusting irradiation field forming apparatus |
| 08/04/2005 | US20050167614 Gas blowingnozzle of charged particle beam apparatus and charged particle beam apparatus as well as working method |
| 08/04/2005 | US20050167613 Apparatus and process for irradiating product pallets |
| 08/04/2005 | US20050167607 Multipole field-producing apparatus in charged-particle optical system and aberration corrector |
| 08/04/2005 | DE102004063710A1 Kollimator, Röntgenirradiator und Röntgeneinrichtung Collimator, Röntgenirradiator and X-ray equipment |
| 08/03/2005 | EP1560475A1 Electron accelerator and radiotherapy apparatus using same |
| 08/03/2005 | EP1560071A1 Electron beam exposure method and electron beam exposure system |
| 08/03/2005 | CN1649643A Method for performing in vivo dosimetry |
| 08/03/2005 | CN1649179A Ultraviolet radiator, ultraviolet radiation condition setting method and ultraviolet radiation method |
| 08/03/2005 | CN1648776A Optical element, lithographic apparatus comprising such optical element and device manufacturing method |
| 08/03/2005 | CN1647760A X ray device |
| 08/03/2005 | CN1213455C Electron beam generating device and system |
| 08/02/2005 | US6924600 Laser plasma generation method and structure thereof |
| 07/28/2005 | WO2005068019A1 Device for limiting field on which raddiation is irradiated |
| 07/28/2005 | US20050163915 mixing isotopes with liquid or powder matrices, then curing and annealing, to form test systems that mimic alpha-ray emissions from moldings used to encapsulate electronic or flip chip packages |
| 07/28/2005 | US20050163284 X-ray generator |
| 07/28/2005 | US20050163281 X-ray tube |
| 07/28/2005 | US20050161616 Method and apparatus for simultaneously depositing and observing materials on a target |
| 07/28/2005 | US20050161599 Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shaped object |
| 07/27/2005 | EP1557722A1 Optical element, lithographic apparatus comprising such optical element and device manufacturing method |
| 07/27/2005 | EP1556737A2 Nanometer-scale engineered structures, methods and apparatus for fabrication thereof, and applications to mask repair, enhancement, and fabrication |
| 07/27/2005 | CN1647249A Exposure apparatus and device fabrication method using the same |
| 07/27/2005 | CN1645548A Charged particle beam device, its control method, substrate inspecting method and manufacture of semiconductor device |
| 07/27/2005 | CN1644345A Ultraviolet radiation apparatus |
| 07/26/2005 | US6922458 X-ray exposure method |
| 07/26/2005 | US6922455 Gas-target neutron generation and applications |
| 07/26/2005 | US6921907 Substrate positioning system |