| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 05/08/2007 | US7215801 Method, system and apparatus for processing radiographic images of scanned objects |
| 05/08/2007 | US7215741 X-ray generating apparatus |
| 05/08/2007 | US7214280 Plasma-assisted decrystallization |
| 05/03/2007 | US20070101310 Model of sensitivity of a simulated layout to a change in original layout, and use of model in proximity correction |
| 05/03/2007 | US20070101303 Method and apparatus for integrated circuit layout optimization |
| 05/03/2007 | US20070100233 Apparatus and method for radiosurgery |
| 05/03/2007 | DE10305813B4 Röntgenmonochromator und Röntgenfluoreszenzspektrometer, in dem der Röntgenmonochromator verwendet wird Röntgenmonochromator and X-ray fluorescence spectrometer in which the Röntgenmonochromator is used |
| 05/02/2007 | CN1314300C Star pinch x-ray and extreme ultraviolet photon source |
| 05/01/2007 | US7212612 X-ray device |
| 05/01/2007 | US7212603 Device for capturing structural data of an object |
| 05/01/2007 | US7211811 Method for preventing wafer surface from bombardment by micro-dust particles during the ion implantation process |
| 05/01/2007 | US7211804 Chromatic aberration corrector for charged particles and charged-particle optical apparatus using the corrector |
| 04/26/2007 | WO2007046213A1 Electron beam application method, electron beam application device, electron beam application device for opening-equipped vessel |
| 04/24/2007 | US7209545 X-ray source assembly having enhanced output stability, and fluid stream analysis applications thereof |
| 04/24/2007 | US7208889 Particle accelerator having wide energy control range |
| 04/24/2007 | US7208395 Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device |
| 04/19/2007 | WO2007044827A2 Fast systems and methods for calculating electromagnetic fields near photomasks |
| 04/19/2007 | US20070086566 Systems and methods for imaging large field-of-view objects |
| 04/19/2007 | US20070085022 Scanning mechanism for scanning probe microscope |
| 04/18/2007 | EP1775755A1 Euv light source, euv exposure system, and production method for semiconductor device |
| 04/18/2007 | EP1774559A2 Electrostatic lens for ion beams |
| 04/18/2007 | CN1950680A 光散射euvl掩模 Light scattering euvl mask |
| 04/18/2007 | CN1311716C Method and device for producing extreme ultraviolet radiation and soft X-radiation |
| 04/17/2007 | US7206383 Collimator, X-ray irradiator, and X-ray apparatus |
| 04/17/2007 | US7206380 X-ray apparatus |
| 04/17/2007 | US7205558 Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shaped object |
| 04/17/2007 | US7205552 Monatomic boron ion source and method |
| 04/17/2007 | US7205541 Charged particle beam apparatus |
| 04/17/2007 | US7204921 Vacuum apparatus and vacuum processing method |
| 04/12/2007 | WO2007040969A2 Decontamination and sterilaztion system using large area x-ray source |
| 04/12/2007 | WO2007040024A1 Apparatus for producing radioisotope and method of recycling target |
| 04/12/2007 | WO2006130630A3 X-ray pixel beam array systems and methods for electronically shaping radiation fields and modulating radiation field intensity patterns for radiotherapy |
| 04/12/2007 | WO2006083754A3 Radiantly heated cathode for an electron gun and heating assembly |
| 04/12/2007 | US20070082278 For use in short-wavelength exposure light source/excimer laser; silicon oxynitrides film can be etched by dry etching (RIE: Reactive Ion Etching) using CHF3, or cl2; improving contrast at a boundary portion of an exposure pattern |
| 04/12/2007 | US20070082273 Photomask and image device manufacturing method |
| 04/12/2007 | US20070082272 Masks, lithography device and semiconductor component |
| 04/12/2007 | US20070080305 Device and process for luminescence imaging |
| 04/12/2007 | DE102006041874A1 Device for continuous modification of polymers in fluid condition by electron radiation, comprises device component for transforming the polymers into fluid condition, radiation screen for electron irradiation and cooling mechanisms |
| 04/11/2007 | CN1943806A A kind of medical use irradiation device |
| 04/11/2007 | CN1310279C Method and apparatus for improved ion bunching in an ion implantation system |
| 04/10/2007 | US7203280 X-ray apparatus |
| 04/10/2007 | US7203268 X-ray CT system and X-ray apparatus |
| 04/10/2007 | US7202953 Scanning microscopic method having high axial resolution |
| 04/05/2007 | WO2006020080A3 Systems and methods for reducing the influence of plasma-generated debris on the internal components of an euv light source |
| 04/05/2007 | WO2005069805A3 Targeted radiation treatment using a spectrally selective radiation emitter |
| 04/05/2007 | US20070076843 Method for adjusting gap between two objects and exposure method using the same, gap adjusting apparatus, and exposure apparatus |
| 04/05/2007 | DE112005000798T5 Röntgenstrahlen-Target und Vorrichtungen, die es verwenden X-ray target and devices that use it |
| 04/05/2007 | DE10342876B4 UV-Lampenanordnung und deren Verwendung UV lamp assembly and their use |
| 04/05/2007 | DE102006000474A1 Vorrichtung zur Führung von einem Strahlbündel und Bestrahlungsdetektionssystem mit einer solchen Vorrichtung An apparatus for guiding a radiation beam and detection system comprising such a device |
| 04/05/2007 | DE102006000473A1 Protective screen door arrangement for radiation detection system comprises drive unit for moving door along guide |
| 04/04/2007 | EP1517727B1 Device for irradiating a target with a hadron-charged beam, use in hadrontherapy |
| 04/04/2007 | EP1358656B1 Apparatus for generating and selecting ions used in a heavy ion cancer therapy facility |
| 04/04/2007 | EP1308717A4 X-ray measuring and testing system |
| 04/04/2007 | CN1943284A Electron accelerator and radiotherapy apparatus using same |
| 04/04/2007 | CN1939640A Laser welding apparatus and method with correction of a laser beam direction with respect to the programmed predetermined position |
| 04/04/2007 | CN1308773C Surface processing apparatus |
| 04/03/2007 | US7200835 Method of locating sub-resolution assist feature(s) |
| 04/03/2007 | US7200203 Devices and methods for targeting interior cancers with ionizing radiation |
| 04/03/2007 | US7199922 Reflective projection lens for EUV-photolithography |
| 04/03/2007 | US7199382 Patient alignment system with external measurement and object coordination for radiation therapy system |
| 04/03/2007 | US7198872 Light scattering EUVL mask |
| 03/29/2007 | WO2006138593A3 Atom probe component treatments |
| 03/29/2007 | US20070074144 alloy comprising aluminum, titanium, tantalum, niobium, chromium, molybdenum and nickel, used as noncracking turbine engine components having tensile strength |
| 03/29/2007 | US20070074143 Dense OPC |
| 03/29/2007 | US20070071167 X-ray irradiation apparatus |
| 03/29/2007 | US20070069158 Charged particle beam apparatus |
| 03/29/2007 | US20070069152 Electrostatic chuck with temperature sensing unit, exposure equipment having the same, and method of detecting temperature from photomask |
| 03/29/2007 | US20070069139 Nuclear medical diagnostic apparatus and method for detecting radiation |
| 03/29/2007 | DE202005020431U1 Anordnung zur Bestrahlung von Innenwänden langgestreckter Hohlräume mit einer eine UV-Licht erzeugende Metall-Halogenidlampe umfassenden Strahlungsquelle Arrangement for irradiating inner walls of elongate cavities with a UV light generating metal halide lamp radiation source comprising |
| 03/29/2007 | DE10241178B4 Isokinetische Gantry-Anordnung zur isozentrischen Führung eines Teilchenstrahls und Verfahren zu deren Auslegung Isokinetic gantry arrangement for the isocentric guidance of a particle and methods of interpretation |
| 03/29/2007 | DE102005044409A1 Particle therapy system, allocates particle beam to requested irradiation place and adjusts only necessary elements of accelerator and beam transport unit accordingly |
| 03/29/2007 | DE102005044408A1 Therapeutic facility including particle accelerator and high energy beam transport system supplying treatment stations, includes unit co-ordinating, monitoring and assuring specified irradiation beam delivery |
| 03/29/2007 | DE102005043932A1 Ultraviolet sterilization reactor for liquid e.g. water has cavity wall quartz glass vessel around microwave transmitter and antenna |
| 03/28/2007 | CN1937102A Uv-light irradiation device and light cleaning apparatus |
| 03/28/2007 | CN1307649C Device for filtering an x-ray beam |
| 03/28/2007 | CN1307588C Method and apparatus for simulating a radiation dose delivered to an object |
| 03/27/2007 | US7197111 Process and apparatus for irradiating product pallets |
| 03/27/2007 | US7197108 Method of fabricating X-ray mask and method of fabricating semiconductor device using the X-ray mask |
| 03/27/2007 | US7196841 Lighting system, particularly for use in extreme ultraviolet (EUV) lithography |
| 03/22/2007 | US20070067752 Method for verifying optical proximity correction using layer versus layer comparison |
| 03/22/2007 | US20070065732 Photomask providing uniform critical dimension on semiconductor device and method of manufacturing the same |
| 03/22/2007 | US20070064876 Cast collimators for ct detectors and methods of making same |
| 03/22/2007 | US20070063149 Positioning device and method of initializing a positioning device |
| 03/22/2007 | DE10209493B4 Verfahren zur Vermeidung von Kontamination auf optischen Elementen, Vorrichtung zur Regelung von Kontamination auf optischen Elementen und EUV-Lithographievorrichtung Method to prevent contamination on optical elements, means for control of contamination on optical elements and EUV lithography apparatus |
| 03/22/2007 | DE102005045203A1 Modular irradiation apparatus for irradiating substrates with electromagnetic radiation and having a removable holder with a barrier |
| 03/21/2007 | EP1393601A4 Method and system for improving the effectiveness of medical devices by adhering drugs to the surface thereof |
| 03/21/2007 | EP1221167A4 Process for irradiation producing constant depth/dose profile |
| 03/21/2007 | CN1933080A Heat processing device for plasma display panel production |
| 03/21/2007 | CN1306552C X-ray generator |
| 03/20/2007 | US7193956 Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shaped object |
| 03/20/2007 | US7192031 Emitter array configurations for a stationary CT system |
| 03/15/2007 | WO2007030704A2 System and method for mask verification using an individual mask error model |
| 03/15/2007 | US20070061773 Method for selecting and optimizing exposure tool using an individual mask error model |
| 03/15/2007 | US20070061772 System and method for mask verification using an individual mask error model |
| 03/15/2007 | US20070057204 Lithography system, sensor and measuring method |
| 03/14/2007 | CN1930468A Photoelectron measuring device |
| 03/14/2007 | CN1304103C Plasma-assisted carbon structure forming |
| 03/13/2007 | US7190764 Electron accelerator and radiotherapy apparatus using same |
| 03/13/2007 | US7190760 Method for adjusting gap between two objects and exposure method using the same, gap adjusting apparatus, and exposure apparatus |
| 03/13/2007 | US7190436 Illumination apparatus and exposure apparatus |