| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 05/16/2006 | US7046767 X-ray generator |
| 05/16/2006 | US7046766 Device for generating X-rays having an integrated anode and bearing member |
| 05/16/2006 | US7045800 Electron beam drawing apparatus |
| 05/11/2006 | WO2006049274A1 Exposure equipment and exposure method |
| 05/11/2006 | US20060098550 Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shaped object |
| 05/11/2006 | US20060097204 Particle beam irradiation system and method of adjusting irradiation apparatus |
| 05/11/2006 | US20060097202 Collector having unused region for illumination systems using a wavelength <193 nm |
| 05/11/2006 | US20060097199 Lithographic apparatus, device manufacturing method and device manufactured therewith |
| 05/11/2006 | US20060097187 Specimen holder for an electron microscope and method for reducing thermal drift in a microscope |
| 05/11/2006 | US20060096199 Shielded structure for radiation treatment equipment and method of assembly |
| 05/10/2006 | CN1771579A Ion beam incident angle detector for ion implant systems |
| 05/09/2006 | US7042981 X-ray tube window and surrounding enclosure cooling apparatuses |
| 05/09/2006 | US7041990 Apparatus for monitoring ion-implantation input parameter in semiconductor fabricating devices and monitoring method thereof |
| 05/09/2006 | US7041988 Electron beam exposure apparatus and electron beam processing apparatus |
| 05/09/2006 | US7041985 Manipulator for microscopy sample preparation and methods for making and use thereof |
| 05/09/2006 | US7041975 Sample analyzer |
| 05/09/2006 | US7041512 Electron beam exposure apparatus, electron beam exposing method, semiconductor element manufacturing method, and pattern error detection method |
| 05/03/2006 | CN1767787A X-ray device with improved efficiency |
| 05/02/2006 | US7039487 Exposure apparatus and exposure method |
| 05/02/2006 | US7039157 X-ray microscope apparatus |
| 05/02/2006 | US7038226 Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method |
| 04/27/2006 | WO2005115743A3 Light scattering euvl mask |
| 04/27/2006 | US20060087726 Catoptric projection optical system |
| 04/27/2006 | DE102004010535B4 Movement drive for use in e.g. ion processing equipment, has pendulum holding devices with axles that intersect at right angles, such that oscillating motion of torque motors, arranged outside vacuum container, is directly realized at axles |
| 04/26/2006 | EP1650786A1 Focusing optical system, light source unit, illumination optical apparatus, and exposure apparatus |
| 04/26/2006 | EP0901869B1 Composite bonding material of beryllium, copper alloy and stainless steel and composite bonding method |
| 04/25/2006 | US7035379 Radiation window and method of manufacture |
| 04/25/2006 | US7035378 X-ray tube with graphite window |
| 04/25/2006 | US7035377 X-ray generator and adjusting method of the same |
| 04/25/2006 | US7035376 X-ray examination apparatus and method |
| 04/25/2006 | US7035056 Piezoelectric actuator and a lithographic apparatus and a device manufacturing method |
| 04/25/2006 | US7034923 Optical element, lithographic apparatus comprising such optical element and device manufacturing method |
| 04/25/2006 | US7034319 Electron beam irradiation apparatus, electron beam irradiation method, original disk, stamper, and recording medium |
| 04/25/2006 | US7034308 Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 04/20/2006 | DE102004005242B4 Verfahren und Vorrichtung zur plasmabasierten Erzeugung intensiver kurzwelliger Strahlung Method and apparatus for plasma-based production of intense short-wave radiation |
| 04/19/2006 | EP1198820B1 X-ray anode |
| 04/19/2006 | CN1252539C Reflector utilizing microimage to make exposure and its production method |
| 04/18/2006 | US7031434 Method of manufacturing, and a collimator mandrel having variable attenuation characteristics for a CT system |
| 04/18/2006 | US7031428 Substrate material for X-ray optical components |
| 04/18/2006 | US7030396 Medical particle irradiation apparatus |
| 04/18/2006 | US7030393 Compact self-shielded irradiation system and method |
| 04/13/2006 | US20060076515 Particle beam irradiation apparatus and particle beam irradiation method |
| 04/13/2006 | US20060076513 Variable rectangle-type electron beam exposure apparatus and pattern exposure-formation method |
| 04/13/2006 | US20060076503 Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner |
| 04/13/2006 | DE102004048005A1 Gasentladungslampe, System und Verfahren zum Härten von durch UV-Licht härtbare Materialien sowie durch UV-Licht gehärtetes Material Gas discharge lamp system and method for hardening of cured by UV light curable materials as well as by UV light material |
| 04/12/2006 | EP1645868A1 Gamma radiation imaging system for non-destructive inspection of the luggage |
| 04/12/2006 | CN1759467A Extreme ultraviolet light source and target for extreme ultraviolet light source |
| 04/12/2006 | CN1759453A Positron source |
| 04/11/2006 | US7027561 Dual-energy scanning-based detection of ionizing radiation |
| 04/11/2006 | US7027559 Method and apparatus for generating x-ray beams |
| 04/11/2006 | US7027128 Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method, and semiconductor manufacturing factory |
| 04/11/2006 | US7026636 Particle beam irradiation system and method of adjusting irradiation apparatus |
| 04/11/2006 | US7026635 Particle beam processing apparatus and materials treatable using the apparatus |
| 04/11/2006 | US7026227 Method of irradiating a laser beam, and method of fabricating semiconductor devices |
| 04/11/2006 | US7026076 Method of patterning photoresist on a wafer using a reflective mask with a multi-layer ARC |
| 04/06/2006 | WO2006035748A1 Euv generator |
| 04/06/2006 | US20060071183 Method of manufacturing semiconductor device, semiconductor manufacturing apparatus, and stencil mask |
| 04/06/2006 | DE102005046233A1 Sheet-shaped substrate radiating unit, has channel system arranged outside of lamp space, so that lamp space remains free from cooling agent flow, and reflector formed with hollow section admitting cooling gas as part of channel system |
| 04/05/2006 | CN1756996A A method of patterning photoresist on a wafer using an attenuated phase shift mask |
| 04/05/2006 | CN1756992A Method of patterning photoresist on a wafer using a reflective mask with a multi-layer ARC |
| 04/05/2006 | CN1756951A Scanning-based detection of ionizing radiation |
| 04/05/2006 | CN1250054C Metod and device for generation of far ultraviolet or soft X-ray radiation |
| 04/04/2006 | US7023962 Collimator, X-ray irradiator, and X-ray apparatus |
| 04/04/2006 | US7023961 Method and apparatus for generating X-ray |
| 04/04/2006 | US7023960 Method of adjusting the emission rate of radiation from a source of radiation |
| 04/04/2006 | US7023953 Illumination system and exposure apparatus and method |
| 03/30/2006 | US20060065855 Particle beam irradiarion system |
| 03/30/2006 | US20060065849 Flash lamp annealing apparatus to generate electromagnetic radiation having selective wavelengths |
| 03/29/2006 | EP1638846A1 Method and device for electron beam irradiation |
| 03/29/2006 | EP1638845A1 Device and method for electron beam irradiation |
| 03/29/2006 | CN1754249A Neutral particle beam lithography |
| 03/28/2006 | US7019908 Modulator circuitry |
| 03/23/2006 | US20060062348 Multilayer film reflector and X-ray exposure system |
| 03/23/2006 | US20060060800 Variably shaped beam EB writing system |
| 03/23/2006 | US20060060799 Lithographic apparatus and device menufacturing method |
| 03/23/2006 | US20060060798 Method and apparatus for multi-beam exposure |
| 03/23/2006 | US20060060791 Bellows with spring anti-gravity device |
| 03/23/2006 | DE10109193B4 Beschleuniger, medizinisches System und Verfahren zum Betreiben desselben Thereof accelerator, medical system and method for operating |
| 03/22/2006 | EP1636821A2 Electrostatic parallelizing lens for ion beams |
| 03/21/2006 | US7016472 X-ray tube window cooling apparatus |
| 03/21/2006 | US7016020 Positioning device |
| 03/21/2006 | US7015489 Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm |
| 03/21/2006 | US7015482 Electron beam writing equipment using plural beams and method |
| 03/21/2006 | US7014360 X-ray examination apparatus |
| 03/21/2006 | CA2399878C An x-ray lithography device |
| 03/16/2006 | US20060057476 Antireflective coating; making semiconductors at lower wavelengths using reflective masks that can be effectively inspected at multiple wavelengths; wide bandwidth inspection contrast for extreme ultra-violet reticles |
| 03/16/2006 | US20060056597 Optical device |
| 03/16/2006 | US20060056596 Electron accelerator and radiotherapy apparatus using same |
| 03/16/2006 | DE102004038592A1 Bestrahlungsaggregat Irradiation unit |
| 03/15/2006 | EP1364231B1 A self-cleaning optic for extreme ultraviolet lithography |
| 03/14/2006 | US7012270 Photolithography system having multiple adjustable light sources |
| 03/14/2006 | US7012267 Particle beam therapy system |
| 03/14/2006 | US7012264 Lithographic apparatus and device manufacturing method |
| 03/14/2006 | US7011927 Electron beam duplication lithography method and apparatus |
| 03/09/2006 | WO2006025372A1 X-ray source |
| 03/09/2006 | WO2005119701A3 System for forming x-rays and method for using same |
| 03/09/2006 | US20060050848 Volumetric imaging on a radiotherapy apparatus |
| 03/09/2006 | US20060050847 Cone beam computed tomography with a flat panel imager |
| 03/09/2006 | DE10352842B4 Bewegungsantrieb für eine Ionenstrahlbearbeitungsanlage Motion drive for an ion beam processing plant |
| 03/09/2006 | DE10155034B4 Lichthärtgerät und Verfahren zum Polymerisieren von polymerisierbaren Massen A light curing apparatus and method for polymerizing polymerizable compositions |