Patents for G21K 5 - Irradiation devices (9,144)
08/2008
08/13/2008EP1955336A1 Irradiating device for fingernails or toenails and method of irradiating photopolymerisable compounds on fingernails or toenails
08/12/2008US7412026 Phase-contrast x-ray imaging systems and methods
08/12/2008US7411709 Beam processing system and beam processing method
08/12/2008US7410265 Focusing-device for the radiation from a light source
08/07/2008WO2008093676A1 E-gun deposition device and film formation method using e-gun deposition device
08/07/2008US20080188046 Method and Apparatus For Manufacturing A Semiconductor
08/07/2008US20080188011 Apparatus and method of temperature conrol during cleaving processes of thick film materials
08/07/2008US20080187097 Path planning and collision avoidance for movement of instruments in a radiation therapy environment
08/07/2008US20080185538 Pattern forming method, charged particle beam writing apparatus, and recording medium on which program is recorded
08/07/2008US20080185519 Charged particle beam apparatus
08/07/2008US20080185517 Method and apparatus for in-situ sample preparation
08/07/2008US20080185286 Semiconductor wafers; rigid copper segment; exterior edge and carbon support film; thinning using ion beams; better adjustment of sample in carrier; transporting with electrically charging glass needle
08/07/2008DE10243577B4 Bestrahlungseinrichtung und Verwendung einer solchen Irradiation device and use of such
08/06/2008EP0895706B2 Method and apparatus for generating x-ray or euv radiation
08/05/2008US7407730 Inspected by disposing dummy inspection patterns having the same pattern as at least a part of the mask pattern portion, inside and/or outside an area of the mask pattern portion and comparing the portion of the mask pattern portion with the dummy inspection pattern portion
07/2008
07/31/2008WO2007146394A3 Ion beam apparatus and method for ion implantation
07/31/2008US20080180655 Mobile terawatt femtosecond laser system (mtfls) for long range spectral sensing and identification of bioaerosols and chemical agents in the atmosphere
07/31/2008US20080179547 Method and structure for fabricating solar cells using a thick layer transfer process
07/31/2008US20080179538 Multifunction electron microscope specimen holder
07/31/2008DE102007002415A1 Vorrichtung zur Licht- oder Bewitterungsprüfung enthaltend ein Probengehäuse mit integriertem UV-Strahlungsfilter Device for light or weathering containing a sample housing with integrated UV radiation filter
07/30/2008EP1949388A2 Unified quality assurance for a radiation treatment delivery system
07/30/2008EP1948249A2 Decontamination and sterilaztion system using large area x-ray source
07/30/2008EP1638845B9 Device and method for electron beam irradiation
07/30/2008CN101231256A X-ray analysis apparatus and x-ray analysis method
07/29/2008US7405414 Method and apparatus for patterning a workpiece
07/29/2008US7405031 Lithographic apparatus and device manufacturing method
07/29/2008US7405024 Lithographic mask, and method for covering a mask layer
07/24/2008US20080177359 Differential photochemical and photomechanical processing
07/24/2008US20080175349 Maskless euv projection optics
07/24/2008US20080175348 Nanometer-scale lithography using extreme ultraviolet/soft x-ray laser interferometry
07/24/2008US20080173814 Electron beam inspection system and inspection method and method of manufacturing devices using the system
07/23/2008EP1946795A1 Radiation irradiation method and radiotherapy apparatus controller
07/23/2008CN101224323A 放射线照射方法和放射治疗装置控制器 The radiation irradiation method and a radiotherapy apparatus controller
07/23/2008CN100405525C X-ray generator
07/22/2008US7404167 Method for improving design window
07/22/2008US7402821 Application of digital frequency and phase synthesis for control of electrode voltage phase in a high-energy ion implantation machine, and a means for accurate calibration of electrode voltage phase
07/17/2008WO2008083721A1 Radiation apparatus
07/17/2008US20080170663 Radiation irradiation method and radiotherapy apparatus controller
07/17/2008US20080169436 Electron beam lithography method and apparatus using a dynamically controlled photocathode
07/17/2008US20080169435 Ion beam monitoring arrangement
07/17/2008US20080169434 Method of scanning a substrate in an ion implanter
07/17/2008DE202008006206U1 UV-Modul mit Montageeinrichtung, Montageeinrichtung und Grundplatte UV module with mounting means mounting device and base plate
07/15/2008US7401319 Method and system for reticle-wide hierarchy management for representational and computational reuse in integrated circuit layout design
07/15/2008US7400709 X-ray inspection system
07/15/2008US7400699 Illumination system with raster elements of different sizes
07/10/2008WO2008082723A2 Method and structure for fabricating solar cells using a thick layer transfer process
07/10/2008WO2008081672A1 Sterility keeping method and apparatus for sterilization electron beam irradiating device
07/10/2008US20080166033 Method, system and apparatus for processing radiographic images of scanned objects
07/10/2008US20080165925 Double-facetted illumination system with attenuator elements on the pupil facet mirror
07/10/2008US20080164427 Ion implanters
07/10/2008US20080164418 Method, apparatus, and system of reducing polarization in radiation detectors
07/10/2008DE202008005252U1 Lampenvorrichtung sowie Heizstrecke für die Erwärmung von Vorformlingen für die Herstellung von Behältnissen Lamp device as well as heating section for heating preforms for the production of containers
07/08/2008US7397892 Security entrance system
07/08/2008US7397531 Lithographic apparatus and device manufacturing method
07/08/2008US7397049 Determining ion beam parallelism using refraction method
07/08/2008US7397046 Method for implanter angle verification and calibration
07/08/2008US7397042 Optical detection apparatus and method thereof
07/03/2008WO2008078477A1 X-ray generating apparatus
07/03/2008WO2007106419A3 Bench-top image-guided conformal irradiation system for laboratory animals
07/03/2008US20080160789 Laser patterning of encapsulated organic light emitting diodes
07/03/2008US20080159471 Debris mitigation system and lithographic apparatus
07/03/2008US20080157008 Laser irradiation apparatus and method of manufacturing semiconductor device
07/02/2008CN100399013C Radiation testing device and radiation testing method
07/02/2008CN100398221C Ultraviolet irradiating device
07/01/2008US7394081 Radioisotope production apparatus and radiopharmaceutical production apparatus
07/01/2008US7394080 Mask superposition for multiple exposures
07/01/2008US7394078 Technique for ion beam angle spread control for advanced applications
07/01/2008US7394070 Method and apparatus for inspecting patterns
06/2008
06/26/2008WO2008076035A1 Collimator
06/26/2008US20080151208 Real-Time Configurable Masking
06/26/2008US20080149859 Irradiation Pattern Data Generation Method, Mask Fabrication Method, and Plotting System
06/26/2008US20080149858 Irradiation with high energy ions for surface structuring and treatment of surface proximal sections of optical elements
06/26/2008US20080149857 System and method for two-dimensional beam scan across a workpiece of an ion implanter
06/26/2008US20080149830 Ameliorating charge trap in inspecting samples using scanning electron microscope
06/26/2008DE102007060380A1 Portable exposure device for photo luminescence objects, comprises a foldable casing for reception of objects, and a light element, which is arranged inside of the casing to reach an anti-dazzle
06/25/2008CN100397572C Electronic beam focusing equipment and electronic beam projection micro shadow system using the same equipment
06/24/2008US7391852 X-ray apparatus
06/24/2008US7391034 Electron imaging beam with reduced space charge defocusing
06/19/2008US20080143981 Optical arrangement and euv lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element
06/19/2008US20080143001 Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit system
06/19/2008US20080142741 Radiation system and lithographic apparatus
06/19/2008US20080142740 Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method
06/19/2008US20080142737 Microwave solvent stripping process
06/19/2008US20080142736 Radiation system and lithographic apparatus
06/18/2008CN101199923A Excimer light irradiation apparatus
06/17/2008US7388943 Method for adjusting gap between two objects and exposure method using the same, gap adjusting apparatus, and exposure apparatus
06/17/2008US7388216 Pattern writing and forming method
06/17/2008US7388215 Pattern drawing method, stamper manufacturing method, and pattern drawing apparatus
06/17/2008US7388214 Charged-particle beam exposure apparatus and method
06/12/2008WO2007065134A3 Method and apparatus for scanning a workpiece through an ion beam
06/12/2008US20080137050 Plasma radiation source for a lithographic apparatus
06/12/2008US20080135785 Method of and apparatus for manufacturing semiconductor thin film, and method of manufacturing thin film transistor
06/12/2008US20080135784 Patterning compositions, masks, and methods
06/12/2008US20080135779 Ion Beam System And Machining method
06/12/2008US20080135754 Charged-Particle Beam System
06/11/2008EP1658622A4 Method and system for drying a substrate
06/11/2008CN100394529C Radiation window and method of manufacture
06/10/2008US7385835 Membrane 3D IC fabrication
06/10/2008US7385212 Collector optical system, light source unit, illumination optical apparatus, and exposure apparatus
06/10/2008US7384710 Method of forming exposure mask pattern, exposure mask pattern, and method of producing semiconductor device
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