| Patents for G21K 5 - Irradiation devices (9,144) |
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| 07/12/2007 | US20070158591 Method and apparatus for processing a micro sample |
| 07/12/2007 | US20070158583 Disk assembly of ion implanter |
| 07/12/2007 | US20070158577 Method and apparatus for generating laser produced plasma |
| 07/12/2007 | DE202007004266U1 Vorrichtung und Gerät zur Lichthärtung von Dentalmaterial, insbesondere zur lichtinduzierten Polymerisation Apparatus and equipment for light curing of dental materials, particularly for light-induced polymerization |
| 07/05/2007 | WO2005079360A3 Advanced optics for rapidly patterned lasser profiles in analytical spectrometry |
| 07/05/2007 | DE112005002171T5 Teilchenstrahl-Bestrahlungsverfahren und dafür verwendete Teilchenstrahl-Bestrahlungsvorrichtung Particle beam irradiation method and used for this particle beam irradiation apparatus |
| 07/04/2007 | CN1994029A X-ray source |
| 07/04/2007 | CN1992141A X-ray generating mechanism using electron field emission cathode |
| 07/04/2007 | CN1992098A Fully-sealed high vacuum electron beam accelerating and scanning integrated structure |
| 07/04/2007 | CN1992097A Remanent electron beam absorbent radiation device |
| 07/04/2007 | CN1324931C Plasma generation and processing with multiple radiation sources |
| 07/04/2007 | CN1324114C Plasma-assisted joining |
| 07/03/2007 | US7239686 Method and arrangement for producing radiation |
| 07/03/2007 | US7239370 Lithographic apparatus and device manufacturing method |
| 07/03/2007 | US7238952 Metal ion emission device and process for producing the same, ion beam irradiation device, processing apparatus and analyzing apparatus provided with emission device |
| 07/03/2007 | US7238597 Boron ion delivery system |
| 06/28/2007 | WO2006110253A3 Quantitative transmission/emission detector system and methods of detecting concealed radiation sources |
| 06/28/2007 | US20070148559 Phase shift mask and method for fabricating the same |
| 06/28/2007 | US20070145304 Electron gun with a focusing anode, forming a window for said gun and application thereof to irradiation and sterilization |
| 06/28/2007 | US20070145303 Protecting Aperture for Charged Particle Emitter |
| 06/28/2007 | US20070145290 Liquid cell |
| 06/28/2007 | US20070145289 Closed observational device for electron microscope |
| 06/28/2007 | US20070145288 Semi-closed observational environment for electron microscope |
| 06/28/2007 | US20070145287 Specimen box for electron microscope capable of observing general specimen and live cell |
| 06/28/2007 | DE102005060198A1 Vorrichtung zur Durchführung eines Verfahrens zur Modifizierung von Oberflächen strahlenhärtbarer Farben und Lacke durch photochemische Mikrofaltung mittels kurzwelliger monochromatischer UV-Strahlung unter stabilen Bestrahlungs- und Inertisierungsbedingungen Apparatus for performing a method for modifying surfaces of radiation-curable paints and varnishes by photochemical micropleat with shortwave monochromatic UV radiation under stable irradiation and Inertisierungsbedingungen |
| 06/26/2007 | US7236572 X-ray imaging apparatus with continuous, periodic movement of the radiation detector in the exposure plane |
| 06/26/2007 | US7236230 Exposure apparatus and device fabrication method |
| 06/26/2007 | US7235801 Grazing incidence mirror, lithographic apparatus including a grazing incidence mirror, method for providing a grazing incidence mirror, method for enhancing EUV reflection of a grazing incidence mirror, device manufacturing method and device manufactured thereby |
| 06/26/2007 | US7235798 Focused ion beam apparatus |
| 06/26/2007 | US7235794 System and method for inspecting charged particle responsive resist |
| 06/26/2007 | US7235783 Gas blowing nozzle of charged particle beam apparatus and charged particle beam apparatus as well as working method |
| 06/26/2007 | CA2402010C Automated system for radiation treatment of a patient |
| 06/21/2007 | US20070139646 Lithographic apparatus and method |
| 06/21/2007 | US20070138413 Charged particle beam writing method and apparatus |
| 06/19/2007 | US7233647 Radiation window and method of manufacture |
| 06/19/2007 | US7233438 Specimen temperature adjusting apparatus |
| 06/19/2007 | US7233009 Lithographic projection apparatus and reflector assembly for use therein |
| 06/14/2007 | WO2004040588A3 System and method for radioactive waste destruction |
| 06/14/2007 | DE102005058477A1 Ultraviolet lamp module useful in printing machines comprises a set of parallel tubular lamps in a housing with a reflector section and an open section through which leads and a cooling gas can pass |
| 06/13/2007 | EP1673786A4 Method for inactivating cancer cells in a human body and apparatus |
| 06/13/2007 | EP1631968A4 Virus retardation method and apparatus |
| 06/13/2007 | EP0933139B1 Thin film coater, coating method, and method for manufacturing liquid crystal display element |
| 06/13/2007 | CN1981360A X-ray source with nonparallel geometry |
| 06/13/2007 | CN1980709A Particle beam irradiation method and particle beam irradiator for sue therein |
| 06/12/2007 | US7231015 Device for radiation therapy |
| 06/12/2007 | US7230257 Electron beam exposure apparatus |
| 06/12/2007 | US7230254 Movable carriage for a lithographic apparatus and device manufacturing method |
| 06/12/2007 | US7230246 System and method for providing slant-angle collimation for nuclear medical imaging |
| 06/12/2007 | US7230242 Methods for SEM inspection of fluid containing samples |
| 06/12/2007 | CA2320122C Treatment planning method and apparatus for radiation therapy |
| 06/07/2007 | US20070128528 Mask blank and photomask having antireflective properties |
| 06/07/2007 | US20070127622 Unified quality assurance for a radiation treatment delivery system |
| 06/07/2007 | US20070125967 System and method pf electron beam writing |
| 06/07/2007 | US20070125965 Ion implanter with ionization chamber electrode design |
| 06/06/2007 | DE202007004400U1 Strahlungsvorrichtung Radiation device |
| 06/06/2007 | DE112005001853T5 Verfahren zum Erzeugen charakteristischer Röntgenstrahlung A method for generating characteristic X-rays |
| 06/06/2007 | CN1973919A Cesium-137 radioactive source for blood irradiator |
| 06/05/2007 | US7227161 Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method |
| 06/05/2007 | US7227097 Plasma generation and processing with multiple radiation sources |
| 06/05/2007 | US7226177 Catoptric projection optical system |
| 05/31/2007 | WO2007059813A1 Irradiating device for fingernails or toenails and method of irradiating photopolymerisable compounds on fingernails or toenails |
| 05/31/2007 | WO2006083685A3 Method and system for a maskless lithography rasterization tecnique based on global optimization |
| 05/31/2007 | WO2005024881A3 Particle-optical systems, components and arrangements |
| 05/31/2007 | US20070120072 Illumination system particularly for microlithography |
| 05/31/2007 | US20070120067 Means to establish orientation of ion beam to wafer and correct angle errors |
| 05/31/2007 | DE10340617B4 Verfahren und Vorrichtung zur Steuerung einer drehbaren Mehrelement-Strahlformvorrichtung Method and apparatus for controlling a rotating multi-element beam shaping device |
| 05/31/2007 | DE10306328B4 Röntgenmonochromator und Röntgenfluoreszenzspektrometer, in dem der Röntgenmonochromator verwendet wird Röntgenmonochromator and X-ray fluorescence spectrometer in which the Röntgenmonochromator is used |
| 05/31/2007 | DE102005054970A1 Strahlungsquelle zur Bestrahlung von Innenwänden langgestreckter Hohlräume Radiation source for irradiating inner walls of elongate cavities |
| 05/31/2007 | DE102005054969A1 Verfahren zum Betrieb einer Strahlungsquelle mit einer UV-Licht erzeugenden Lampe zur Bestrahlung von Innenwänden langgestreckter Hohlräume sowie Anordnung zur Durchführung des Verfahrens A method for operating a radiation source generating a UV-light lamp for irradiating inner walls of elongate cavities as well as arrangement for carrying out the method |
| 05/30/2007 | EP1212777B1 Ion beam vacuum sputtering apparatus and method |
| 05/30/2007 | CN1973357A EUV light source, EUV exposure system, and production method for semiconductor device |
| 05/29/2007 | US7223990 Ion beam irradiation device |
| 05/24/2007 | WO2007059164A2 Unified quality assurance for a radiation treatment delivery system |
| 05/24/2007 | US20070117029 Exposure pattern or mask and inspection method and manufacture method for the same |
| 05/24/2007 | US20070116178 Control device for exiting of travelers with their luggage |
| 05/24/2007 | US20070114473 Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method |
| 05/24/2007 | US20070114472 Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method |
| 05/24/2007 | US20070114463 Charged particle beam exposure method of character projection system, charged particle beam exposure device of character projection system, program for use in charged particle beam exposure device, and manufacturing method of semiconductor device |
| 05/24/2007 | US20070114462 Charged particle beam irradiation method and charged particle beam apparatus |
| 05/24/2007 | US20070114461 Charged beam drawing apparatus and charged beam drawing method |
| 05/24/2007 | US20070114460 Charged particle beam processing method and charged particle beam apparatus |
| 05/24/2007 | US20070114459 Charged particle beam writing method and apparatus and readable storage medium |
| 05/24/2007 | US20070114455 Ion beam device |
| 05/24/2007 | US20070114440 Multi-chambered substrate processing equipment having sealing structure between chambers thereof, and method of assembling such equipment |
| 05/24/2007 | DE10248476B4 Medizinische Vorrichtung zur Bestrahlung mit geladenen Teilchen A medical device for irradiation with charged particles |
| 05/23/2007 | EP1200980B8 Adaptive gas cluster ion beam for smoothing surfaces |
| 05/23/2007 | CN1969372A EUV light source, EUV exposure equipment and semiconductor device manufacturing method |
| 05/22/2007 | US7221734 Method for X-ray reflectance measurement |
| 05/22/2007 | US7221731 X-ray microscopic inspection apparatus |
| 05/22/2007 | US7220973 Modular manipulation system for manipulating a sample under study with a microscope |
| 05/17/2007 | US20070110217 X-ray generating apparatus |
| 05/17/2007 | US20070110213 Lithographic apparatus |
| 05/16/2007 | CN1962224A Method for curing ultraviolet curable resin, method for preparing flat plate and ultraviolet radiation apparatus |
| 05/16/2007 | CN1315437C Diaphragm regulating method of computer lamination contrast and computer lamination contrast apparatus |
| 05/15/2007 | US7217939 Capillary tubing |
| 05/15/2007 | US7217235 Solid state brachytherapy applicator |
| 05/10/2007 | WO2007053334A2 Euv light source |
| 05/10/2007 | US20070105026 Mask, mask blank, and methods of producing these |
| 05/10/2007 | US20070102653 EUV light source |
| 05/09/2007 | CN1959924A Device for generating X-ray or XUV radiation |