| Patents for G21K 5 - Irradiation devices (9,144) |
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| 07/11/2006 | US7075620 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 07/06/2006 | US20060145097 Optics for generation of high current density patterned charged particle beams |
| 07/06/2006 | US20060145093 Method and device for electron beam irradiation |
| 07/06/2006 | US20060145090 Metal ion emission device and process for producing the same, ion beam irradiation device, processing apparatus and analyzing apparatus provided with emission device |
| 07/06/2006 | US20060145088 High energy polyenergetic ion selection systems, ion beam therapy systems, and ion beam treatment centers |
| 07/06/2006 | DE112004000337T5 Eingekapselte Nanopartikel zur Absorption von elektromagnetischer Energie Encapsulated nanoparticles for the absorption of electromagnetic energy |
| 07/05/2006 | EP1676290A1 Electron gun with a focusing anode, forming a window for said gun and application thereof to irradiation and sterilization |
| 07/04/2006 | US7072447 Device for filtering an x-ray beam |
| 07/04/2006 | US7072439 X-ray tube and method and apparatus for analyzing fluid streams using x-rays |
| 07/04/2006 | US7072438 Reflection type mask |
| 07/04/2006 | US7071479 Particle beam irradiation system and method of adjusting irradiation apparatus |
| 07/04/2006 | US7071476 Illumination system with a plurality of light sources |
| 07/04/2006 | US7070915 Method and system for drying a substrate |
| 07/04/2006 | US7070289 Catoptric projection optical system |
| 06/29/2006 | WO1998027558A8 Method and apparatus for product x-radiation |
| 06/29/2006 | US20060141370 Photomasks and methods of manufacturing the same |
| 06/29/2006 | US20060141367 Lithographic apparatus, device manufacturing method, and optical component |
| 06/29/2006 | US20060138359 Charged-particle beam exposure apparatus and method |
| 06/29/2006 | US20060138358 Lithographic apparatus and device manufacturing method |
| 06/29/2006 | US20060138352 Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shape object |
| 06/29/2006 | US20060138343 Sheet beam-type testing apparatus |
| 06/29/2006 | US20060138311 Irradiation device for testing objects coated with light-sensitive paint |
| 06/29/2006 | DE102004060557A1 Blitzlampenspiegelanordnung Flash lamp mirror assembly |
| 06/29/2006 | DE10157554B4 Anlage zum Strahlungshärten Annex to the radiation hardening |
| 06/28/2006 | EP1675151A1 X-ray apparatus |
| 06/27/2006 | US7068749 Stationary computed tomography system with compact x ray source assembly |
| 06/27/2006 | US7067832 Extreme ultraviolet light source |
| 06/27/2006 | US7067822 Bulk material irradiation system and method |
| 06/22/2006 | WO2006064592A1 Target for extreme ultraviolet light and x-ray source and process for producing the same |
| 06/22/2006 | US20060134531 Mask for electromagnetic radiation and method of fabricating the same |
| 06/22/2006 | US20060133574 Extreme ultraviolet light source and extreme ultraviolet light source target |
| 06/21/2006 | CN1260621C Method for removing shading defects of light mask and semiconductor device manufacturing method thereof |
| 06/21/2006 | CN1260013C Ultraviolet lamp system and method |
| 06/20/2006 | US7065179 Multiple target anode assembly and system of operation |
| 06/20/2006 | US7065175 X-ray diffraction-based scanning system |
| 06/20/2006 | US7063919 Lithographic template having a repaired gap defect method of repair and use |
| 06/20/2006 | CA2389871C Rotatable cylinder dual beam modulator |
| 06/15/2006 | US20060127780 Forming a capping layer for a EUV mask and structures formed thereby |
| 06/15/2006 | US20060124869 Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shaped object |
| 06/14/2006 | DE202006003878U1 Lighting device for cultivating phototropic cell cultures in incubators, comprises controllable light emitting diodes arranged on light elements, which forms a lighting matrix |
| 06/14/2006 | DE102005057069A1 Sample e.g. semiconductor wafer, examining and analyzing device, has ultraviolet radiation unit to irradiate ultraviolet rays into sample chamber before the sample that is in temporarily evacuated state is transported into sample chamber |
| 06/14/2006 | DE102004059892A1 Strahlungsquelle zur Bestrahlung von Innenwänden langgestreckter Hohlräume, sowie Verfahren zum Einbringen einer Strahlungsquelle in einen langgestreckten Hohlraum Radiation source for irradiating inner walls of elongate cavities, as well as methods for introducing a radiation source into an elongated cavity |
| 06/13/2006 | US7062010 Method for adjusting gap between two objects and exposure method using the same, gap adjusting apparatus, and exposure apparatus |
| 06/13/2006 | US7062009 Helical interpolation for an asymmetric multi-slice scanner |
| 06/13/2006 | US7061580 Exposure apparatus and device fabrication method |
| 06/13/2006 | US7061173 Amalgam-doped low mercury low-pressure UV irradiator |
| 06/13/2006 | US7060997 Particle therapy system |
| 06/13/2006 | US7060993 Device, EUV-lithographic device and method for preventing and cleaning contamination on optical elements |
| 06/13/2006 | US7060986 Automated method of correcting aberrations in electron beam, method of visualizing aberrations, and automated aberration corrector |
| 06/13/2006 | US7060985 Multipole field-producing apparatus in charged-particle optical system and aberration corrector |
| 06/13/2006 | US7060978 Detector system for a particle beam apparatus, and particle beam apparatus with such a detector system |
| 06/08/2006 | WO2005094142A3 Particle beam accelerator |
| 06/08/2006 | US20060121361 Reticles and methods of forming reticles |
| 06/08/2006 | US20060120429 Collector optical system, light source unit, illumination optical apparatus, and exposure apparatus |
| 06/08/2006 | US20060118736 Particle beam therapy system |
| 06/08/2006 | DE19954664B4 Vorrichtung zur Bestimmung von kristallinen und polykristallinen Materialien eines Gegenstandes Apparatus for determining of crystalline and polycrystalline materials of an object |
| 06/08/2006 | DE19954663B4 Verfahren und Vorrichtung zur Bestimmung eines Materials eines detektierten Gegenstandes Method and apparatus for determination of a material of a detected object |
| 06/07/2006 | EP1664936A2 Forming partial-depth features in polymer film |
| 06/07/2006 | EP1664752A2 Patient positioning system for radiation therapy system |
| 06/06/2006 | US7057193 Exposure apparatus |
| 06/06/2006 | US7057191 Method of controlling implant dosage and pressure compensation factor in-situ |
| 06/06/2006 | US7056016 X-ray source support assembly |
| 06/02/2006 | CA2487752A1 Hadrontherapy facility |
| 06/01/2006 | WO2006057178A1 Neutron generating method and neutron generating device |
| 06/01/2006 | WO2005119730A3 X-ray source with nonparallel geometry |
| 06/01/2006 | WO2005112041B1 Remote communication method and device using nuclear isomers |
| 06/01/2006 | US20060115043 Rotating carriage assembly for use in scanning cargo conveyances transported by a crane |
| 06/01/2006 | US20060113493 Irradiation system ion beam and method to enhance accuracy of irradiation |
| 06/01/2006 | US20060113470 High resolution atom probe |
| 06/01/2006 | US20060113040 Stage device, exposure apparatus using the unit, and device manufacturing method |
| 05/31/2006 | EP1660945A2 Modulator circuitry |
| 05/31/2006 | EP1660175A2 Modular patient support system |
| 05/31/2006 | EP1412683B1 Irradiation device comprising an air evacuation nozzle |
| 05/31/2006 | CN1780729A Encapsulated nanoparticles for the absorption of electromagnetic energy |
| 05/30/2006 | US7054801 Radiation treatment plan making system and method |
| 05/30/2006 | US7054413 Rotatable multi-element beam shaping device |
| 05/30/2006 | US7053542 Rare-gas low-pressure discharge lamp, method of manufacturing a rare-gas low-pressure discharge lamp, and application of a gas discharge lamp |
| 05/30/2006 | US7053387 Pattern drawing method by scanning beam and pattern drawing apparatus |
| 05/25/2006 | US20060110663 Mask for depositing thin film of flat panel display and method of fabricating the mask |
| 05/25/2006 | US20060108546 Charged beam exposure apparatus, charged beam control method and manufacturing method of semiconductor device |
| 05/25/2006 | US20060108542 Electron beam exposure method and electron beam exposure system |
| 05/25/2006 | US20060108537 Aerosol particle charging equipment |
| 05/24/2006 | EP1658622A2 Method and system for drying a substrate |
| 05/24/2006 | EP1547116A4 Radiation window and method of manufacture |
| 05/24/2006 | CN1778150A X-ray generator employing hemimorphy crystal and ozone generator employing it |
| 05/24/2006 | CN1257524C Ion source, operating method of ion source, and ion source system |
| 05/23/2006 | US7049738 Amalgam low pressure mercury UV lamp |
| 05/23/2006 | US7049613 Particle beam irradiation system and method of adjusting irradiation field forming apparatus |
| 05/23/2006 | US7049612 Electron beam treatment apparatus |
| 05/23/2006 | US7049592 Lithographic apparatus and device manufacturing method |
| 05/23/2006 | US7049539 Method for surface treating a die by electron beam irradiation and a die treated thereby |
| 05/23/2006 | US7049035 electrochemically depositing an additive material on exposed sidewalls of an etched first layer of the mask whose top remains covered by a hardmask used during the etching of the first layer; a second layer beneath the etched first layer is resistant to the electrochemical deposition of the additive |
| 05/23/2006 | CA2407809C Radiation applying apparatus |
| 05/18/2006 | US20060104413 Mask repeater and mask manufacturing method |
| 05/18/2006 | US20060104401 Device and Device and method for producing raioisotopes |
| 05/18/2006 | US20060102856 Particle beam irradiation system |
| 05/18/2006 | US20060102850 Specimen temperature adjusting apparatus |
| 05/18/2006 | US20060102849 Apparatus, method for supporting and/or thermally conditioning a substrate, a support table, and a chuck |
| 05/17/2006 | EP1210029B1 Irradiation unit |
| 05/17/2006 | CN1256628C EUV-transparent interface structure |