| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 07/21/2005 | WO2005066658A1 Ion beam measuring method and ion implanting apparatus |
| 07/21/2005 | US20050159903 Radiographic apparatus, and control method and program thereof |
| 07/21/2005 | US20050157282 Optical element, lithographic apparatus comprising such optical element and device manufacturing method |
| 07/21/2005 | US20050157279 Light source unit, exposure apparatus, and device manufacturing method |
| 07/21/2005 | US20050156265 Lithography device for semiconductor circuit pattern generation |
| 07/21/2005 | DE102004063414A1 Röntgenquellenhalterungsanordnung X-ray source mount assembly |
| 07/21/2005 | DE102004059795A1 X-ray beam generating method for medical x-ray imaging, involves directing electron beam from cathode cup through selectable aperture in accelerating electrode and impinging beam at low angle on anode surface to form focal spot |
| 07/20/2005 | EP1554621A1 Optical imaging device designs for solar-powered flight and powergeneration |
| 07/20/2005 | CN1643641A Large-area individually addressable multi-beam x-ray system |
| 07/20/2005 | CN1643371A Systems and methods for imaging large field-of-view objects |
| 07/20/2005 | CN1642479A Exposure control in scanning-based detection of ionizing radiation |
| 07/20/2005 | CN1211806C Article irradation system and method therefor |
| 07/19/2005 | US6919965 Apparatus and method for making and inspecting pre-fastened articles |
| 07/19/2005 | US6919573 Method and apparatus for recycling gases used in a lithography tool |
| 07/19/2005 | US6919572 Compensating for variations in article speeds and characteristics at different article positions during article irradiation |
| 07/19/2005 | US6919563 Defect evaluation apparatus utilizing positrons |
| 07/14/2005 | WO2005031458A3 Forming partial-depth features in polymer film |
| 07/14/2005 | US20050153215 Real-time configurable masking |
| 07/14/2005 | US20050152499 Collimator, X-ray irradiator, and X-ray apparatus |
| 07/14/2005 | US20050151096 Lithographic apparatus and device manufacturing method |
| 07/14/2005 | US20050151092 Manipulator apparatus, manipulating system, image processing apparatus, program, and apparatus controlling process |
| 07/14/2005 | US20050151071 Method for performing in vivo dosimetry |
| 07/13/2005 | CN1639829A X-ray generator |
| 07/13/2005 | CN1639643A Device, EUV-lithographic device and method for preventing and cleaning contamination on optical elements |
| 07/13/2005 | CN1638813A Portable radiant energy sterilizer |
| 07/13/2005 | CN1638015A Improvements relating to ion implantation |
| 07/13/2005 | CN1638013A Ion beam irradiation device |
| 07/13/2005 | CN1637620A Exposure processing system, exposure processing method and method for manufacturing a semiconductor device |
| 07/13/2005 | CN1636511A X-ray source support assembly |
| 07/13/2005 | CN1210756C 法拉第装置 Faraday device |
| 07/12/2005 | US6917046 Positioning apparatus, charged-particle-beam exposure apparatus, and device manufacturing method |
| 07/07/2005 | US20050148210 Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method |
| 07/07/2005 | US20050145804 Particle beam irradiation system and method of adjusting irradiation apparatus |
| 07/07/2005 | DE102004037835A1 Röngtenstrahlerzeugungsvorrichtung, die einen Emitter aufweist, der auf einer Halbleiterstruktur gebildet ist Röngtenstrahlerzeugungsvorrichtung having an emitter formed on a semiconductor structure |
| 07/06/2005 | EP1551209A1 X-ray generating equipment |
| 07/06/2005 | EP1549920A2 Irradiation device for testing objects coated with light-sensitive paint |
| 07/06/2005 | CN1635423A Collimator, X-ray irradiation device and X-ray photography device |
| 07/05/2005 | US6914447 High activity, spatially distributed radiation source for accurately simulating semiconductor device radiation environments |
| 07/05/2005 | US6914253 System for measurement of absorbed doses of electron beams in an irradiated object |
| 06/30/2005 | WO2005024325A3 Method and system for drying a substrate |
| 06/30/2005 | WO2004066027A3 Electron beam processing for mask repair |
| 06/30/2005 | US20050141670 X-ray generating device |
| 06/30/2005 | US20050140885 Optical exposure apparatus and method for aligning a substrate |
| 06/30/2005 | US20050139789 Charged particle beam apparatus, charged particle detection method, and method of manufacturing semiconductor device |
| 06/30/2005 | US20050139787 Particle therapy system |
| 06/30/2005 | DE102004053878A1 Multiple-Target Anodenanordnung und Betriebssystem Multiple-target anode assembly and operating system |
| 06/29/2005 | EP1547116A1 Radiation window and method of manufacture |
| 06/29/2005 | EP1547099A2 Radiation device |
| 06/28/2005 | US6912267 Erosion reduction for EUV laser produced plasma target sources |
| 06/28/2005 | US6911656 Rotational stage for high speed, large area scanning in focused beam systems |
| 06/28/2005 | US6911251 Composite scintillator material and method of manufacture |
| 06/23/2005 | WO2005057738A2 Method of modulating protons for radiation therapy |
| 06/23/2005 | WO2005057632A1 Umbilical cord facilities connection for an ion beam implanter |
| 06/23/2005 | US20050135565 X-ray source support assembly |
| 06/23/2005 | US20050134204 Apparatus for pre-acceleration of ion beams used in a heavy ion beam application system |
| 06/23/2005 | DE10353798A1 Verfahren zum Erzeugen eines Abbildungsfehler vermeidenden Maskenlayouts für eine Maske A method for generating a mapping error-avoiding mask layout for a mask |
| 06/23/2005 | DE10352334A1 Mikrofocus-Röntgeneinrichtung Microfocus X-ray equipment |
| 06/23/2005 | DE10352184A1 Apparatus for curing or drying coatings on substrates comprises lamp above substrate fitted with curved barrier immediately below it, curved reflection filters behind it and straight filters across part of light outlet |
| 06/23/2005 | CA2547492A1 Method of modulating laser-accelerated protons for radiation therapy |
| 06/22/2005 | EP1542792A2 Charging and capture of particles in coronas irradiated by in-situ x-rays |
| 06/22/2005 | EP1378148B1 Method and apparatus for measuring the position, shape, size and intensity distribution of the effective focal spot of an x-ray tube |
| 06/22/2005 | CN1207730C Scatter screen type electronic beam radiator |
| 06/22/2005 | CN1207729C Built-in ionic pump type scanner |
| 06/21/2005 | US6909774 Apparatus and methods for surficial milling of selected regions on surfaces of multilayer-film reflective mirrors as used in X-ray optical systems |
| 06/21/2005 | US6908713 EUV mask blank defect mitigation |
| 06/16/2005 | WO2005055676A1 Power supply and x-ray generating device including it |
| 06/16/2005 | US20050129177 Method and arrangement for producing radiation |
| 06/16/2005 | US20050129162 Irradiating oxygen-18 gas by proton beam in chamber including component to which 18-fluoride adheres, proton beam converting portion of 18-oxygen into 18-fluoride, the converted 18-fluoride adhering to component, dissolving 18-fluoride |
| 06/16/2005 | US20050128446 Exposure apparatus and device manufacturing method |
| 06/16/2005 | US20050127306 Particle beam irradiation system and method of adjusting irradiation field forming apparatus |
| 06/15/2005 | EP1542238A1 Aerosol particle charging equipment |
| 06/15/2005 | EP1542076A2 Lithographic apparatus and device manufacturing method |
| 06/15/2005 | EP1541194A1 Particle beam irradiation system and method of adjusting irradiation field forming apparatus |
| 06/15/2005 | EP1540999A1 Capillary tubing |
| 06/15/2005 | EP1540668A1 Apparatus and method for radiation therapy where the collimatorhelmet comprises slidable plates for controlling the collimator openings |
| 06/15/2005 | EP1540664A2 Radiation sources and compact radiation scanning systems |
| 06/15/2005 | CN1627192A Lithographic apparatus and device manufacturing method |
| 06/15/2005 | CN1627191A Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation |
| 06/14/2005 | US6906788 Lithographic projection apparatus with multiple suppression meshes |
| 06/14/2005 | US6906787 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 06/14/2005 | US6906453 Method and apparatus for simultaneously depositing and observing materials on a target |
| 06/14/2005 | US6905947 Monatomic boron ion source and method |
| 06/14/2005 | US6905801 Lithography; masking absorber anisotropic etching; reflective multilayer; forming ruthenium layer then absorber |
| 06/09/2005 | WO2005052978A2 Method and apparatus for modifying object with electrons generated from cold cathode electron emitter |
| 06/09/2005 | WO2005052951A2 Product to tailor distributions of energy deposition by a high energy photon beam |
| 06/09/2005 | US20050125764 Method for producing a mask layout avoiding imaging errors for a mask |
| 06/09/2005 | US20050123839 Photo mask capable of improving resolution by utilizing polarization of light and method of manufacturing the same |
| 06/09/2005 | US20050123097 High quantum energy efficiency X-ray tube and targets |
| 06/09/2005 | US20050123095 X-ray generating apparatus having an emitter formed on a semiconductor structure |
| 06/09/2005 | US20050122531 Process for the detection of marked components of a composite article using infrared blockers |
| 06/09/2005 | US20050122490 Lithographic apparatus and device manufacturing method |
| 06/09/2005 | US20050121624 Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation |
| 06/09/2005 | US20050121610 Charged particle beam irradiation method, method of manufacturing semiconductor device and charged particle beam apparatus |
| 06/08/2005 | EP1538484A1 EUV illumination system and lithographic apparatus |
| 06/08/2005 | EP1001661B1 Light source using dielectric barrier discharge lamp, and power supply |
| 06/07/2005 | US6904122 3D stereoscopic X-ray system |
| 06/07/2005 | US6903356 Medical particle irradiation apparatus |
| 06/07/2005 | US6903351 Charged particle beam irradiation equipment having scanning electromagnet power supplies |
| 06/02/2005 | WO2005050694A2 Liquid metal ion source and its production; processing and analyzing devices provided with said source |
| 06/02/2005 | US20050117711 X-ray examination apparatus |