| Patents for G21K 5 - Irradiation devices (9,144) |
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| 08/31/2006 | US20060192158 Device, EUV lithographic device and method for preventing and cleaning contamination on optical elements |
| 08/31/2006 | US20060192156 Light source apparatus and exposure apparatus having the same |
| 08/31/2006 | US20060192150 Method and apparatus for reducing charge density on a dielectric coated substrate after exposure to a large area electron beam |
| 08/31/2006 | US20060192149 Parameter control in a lithographic apparatus using polarization |
| 08/31/2006 | US20060192148 Electron beam irradiating apparatus and irradiating method |
| 08/31/2006 | US20060192139 Device for irradiating a target with a hadron-charged beam, use in hadrontherapy |
| 08/31/2006 | DE10345476B4 Lithographische Maske und Verfahren zum Bedecken einer Maskenschicht Lithographic mask and method for covering a mask layer |
| 08/31/2006 | DE102005010723A1 UV irradiation device for acting upon biological cellular structures, especially the skin, for medical and therapeutic purposes, has means for matching UV exposure geometries to those areas requiring treatment |
| 08/30/2006 | EP0978137A4 Apparatus and method for a modular electron beam system for the treatment of surfaces |
| 08/30/2006 | CN1825499A Irradiation device for electronic accelerator |
| 08/30/2006 | CN1272989C Method and apparatus for generating X-ray |
| 08/30/2006 | CN1272804C Radiotherapy apparatus |
| 08/29/2006 | US7098468 Raster frame beam system for electron beam lithography |
| 08/29/2006 | US7098046 Alignment method and exposure apparatus using the method |
| 08/24/2006 | WO2006088104A1 X-ray shielding apparatus |
| 08/24/2006 | US20060188069 X-ray apparatus |
| 08/24/2006 | US20060188068 X-ray apparatus |
| 08/24/2006 | US20060186355 Phase-shift masked zone plate array lithography |
| 08/24/2006 | DE102005019715A1 Tube type hardening device for hardening nail gel, has ultraviolet lamp with opening and interfering with base section in recess of lamp holder that is provided with pin, which receives lamp |
| 08/24/2006 | DE102004012128B4 UV-Bestrahlungsvorrichtung, insbesondere UV-Handbestrahlungsvorrichtung UV irradiation device, in particular hand-held UV irradiation device |
| 08/24/2006 | DE10145648B4 Bestrahlungsvorrichtung mit veränderlichem Spektrum Irradiation apparatus with variable spectrum |
| 08/23/2006 | EP1692715A1 Umbilical cord facilities connection for an ion beam implanter |
| 08/23/2006 | EP1691890A1 Multiple room radiation treatment system |
| 08/23/2006 | EP1218796A4 Extreme ultraviolet soft x-ray projection lithographic method and mask devices |
| 08/23/2006 | EP1214718A4 Extreme ultraviolet soft x-ray projection lithographic method system and lithography elements |
| 08/23/2006 | CN1271665C Ion source operation method, and ion beam radiation device |
| 08/22/2006 | US7095699 Detection apparatus, detection method and electron beam irradiation apparatus |
| 08/22/2006 | US7095038 EUV source |
| 08/22/2006 | US7095035 Demagnification measurement method for charged particle beam exposure apparatus, stage phase measurement method for charged particle beam exposure apparatus, control method for charged particle beam exposure apparatus, and charged particle beam exposure apparatus |
| 08/22/2006 | US7095023 Charged particle beam apparatus, charged particle detection method, and method of manufacturing semiconductor device |
| 08/22/2006 | US7094451 Chemical functionalization of material surfaces using optical energy and chemicals |
| 08/22/2006 | CA2433938C System for, and method of, irradiating article with x-ray beam |
| 08/17/2006 | WO2006086791A2 Method for controlling chinch bugs |
| 08/17/2006 | WO2006031537A3 Microplate analysis system and method |
| 08/17/2006 | WO2006014633A3 Electrostatic lens for ion beams |
| 08/17/2006 | US20060182225 System for dynamic low dose x-ray imaging and tomosynthesis |
| 08/17/2006 | US20060182224 System for dynamic low dose x-ray imaging |
| 08/17/2006 | US20060182222 X-ray apparatus |
| 08/17/2006 | US20060182218 Gamma radiation imaging system for non-destructive inspection of the luggage |
| 08/16/2006 | EP1691394A1 X-ray apparatus |
| 08/16/2006 | EP1690323A2 Method of modulating laser-accelerated protons for radiation therapy |
| 08/16/2006 | EP1690264A2 Method and apparatus for modifying object with electrons generated from cold cathode electron emitter |
| 08/15/2006 | US7092487 X-ray pallet processing |
| 08/15/2006 | US7091507 Light generator and exposure apparatus |
| 08/15/2006 | US7091505 Collector with fastening devices for fastening mirror shells |
| 08/15/2006 | US7091498 Rotating specimen holder |
| 08/15/2006 | US7091497 Particle-optical device for irradiating an object |
| 08/15/2006 | US7091478 Method and device for controlling a beam extraction raster scan irradiation device for heavy ions or protons |
| 08/10/2006 | WO2006082651A1 Particle beam irradiation method and particle beam irradiator for use therein |
| 08/10/2006 | WO2006082650A1 Particle beam irradiation method and particle beam irradiator for use therein |
| 08/10/2006 | DE102005005131A1 Method inducing colour change in precious stones, especially topazes, with precious stones located in irradiation container with cooling fluid |
| 08/09/2006 | EP1547099B1 Radiation device and method for its operation |
| 08/08/2006 | US7088432 forming a three-dimensional structure; fabricate 3D complex micro/nano structures by digital light processing using a dynamic mask |
| 08/08/2006 | US7088424 Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method |
| 08/08/2006 | US7087913 Ion implanter electrodes |
| 08/08/2006 | US7086577 Method of manufacturing a miniature X-ray device |
| 08/03/2006 | US20060169927 Aberration adjusting method, device fabrication method, and charged particle beam lithography machine |
| 08/03/2006 | US20060169926 Electron beam lithography apparatus and lithography method |
| 08/03/2006 | US20060169925 Variable rectangle-type electron beam exposure apparatus and pattern exposure-formation method |
| 08/03/2006 | US20060169916 Specimen stage for charged-particle scanning microscopy |
| 08/03/2006 | US20060169898 Aberration measuring apparatus for charged particle beam optical system, charged particle beam lithography machine having the aberration measuring apparatus, and device fabrication method using the apparatus |
| 08/02/2006 | EP1686608A1 X-ray apparatus |
| 08/02/2006 | CN2802661Y Multifunction irradiation device |
| 08/02/2006 | CN1813331A Electrostatic lens for ion beams |
| 08/01/2006 | US7085351 Method and apparatus for controlling electron beam current |
| 08/01/2006 | US7084408 Vaporization and ionization of metals for use in semiconductor processing |
| 07/27/2006 | US20060166470 Method of irradiating a laser beam, apparatus for irradiating a laser beam and method of fabricating semiconductor devices |
| 07/27/2006 | US20060166109 Method to correct EUVL mask substrate non-flatness |
| 07/27/2006 | US20060165555 System, method, and apparatus for an intense ultraviolet radiation source |
| 07/27/2006 | US20060163499 Apparatus and method for irradiating electron beam |
| 07/27/2006 | DE102005001683A1 Verfahren und Vorrichtung zum Trocknen von Lackschichten Method and apparatus for drying varnish layers |
| 07/26/2006 | EP1683176A2 Ion implanter electrodes |
| 07/26/2006 | EP1374274B1 X-ray irradiation apparatus |
| 07/26/2006 | EP1202045A4 Method for obtaining a picture of the internal structure of an object using x-ray radiation and device for the implementation thereof |
| 07/26/2006 | EP1147693B1 Device for treating a target volume with a particle beam |
| 07/26/2006 | CN1809496A Device and method for electron beam irradiation. |
| 07/26/2006 | CN1809495A Method and device for electron beam irradiation |
| 07/26/2006 | CN1265764C X-ray checker |
| 07/25/2006 | US7081635 High activity, spatially distributed radiation source for accurately simulating semiconductor device radiation environments |
| 07/20/2006 | WO2006075535A1 Laser plasma euv light source, target member, production method for target member, target supplying method, and euv exposure system |
| 07/20/2006 | DE102005007943A1 Container for use in a nuclear reactor, comprises a handle with two linkages, tensioning rod and cable, carrier arms and a base closure |
| 07/20/2006 | DE102005001441A1 Radiation unit for minerals has thermal energy developing through neutron radiation in radiation container carried away via cooling gas circuit incorporating heat exchanger |
| 07/19/2006 | CN1265681C X-ray generator |
| 07/18/2006 | US7078994 Constant power and temperature coil |
| 07/18/2006 | US7078852 Method and apparatus for simultaneously depositing and observing materials on a target |
| 07/18/2006 | US7078715 Lithographic apparatus and apparatus adjustment method |
| 07/18/2006 | US7078707 Ion beam scanning control methods and systems for ion implantation uniformity |
| 07/18/2006 | US7078706 Chamber, exposure apparatus, and device manufacturing method |
| 07/18/2006 | US7078134 A protective layer for protecting the wafer from cleaning, without damaging the image structure regions |
| 07/18/2006 | US7078001 Conveyor and guide system which does not require operator adjustments to accommodate various sizes and shapes of objects |
| 07/13/2006 | WO2005081263A3 Target device for producing a radioisotope |
| 07/13/2006 | US20060156270 Injecting collagenase into a fibrous Dupuytren's cord in a patients hand, immobilizing the hand immediately after injection, and for several hours; best results when patient is in residual stage of the disease |
| 07/13/2006 | US20060154154 Mask and method of manufacturing a poly-silicon layer using the same |
| 07/13/2006 | US20060154152 Flare reduction in photolithography |
| 07/13/2006 | US20060153329 Method for irradiating objects and device for carrying out said method |
| 07/13/2006 | US20060151721 Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program |
| 07/13/2006 | US20060151717 Apparatus including a radiation source, a filter system for filtering particles out of radiation emitted by the source, and a processing system for processing the radiation, a lithographic apparatus including such an apparatus, and a method of filtering particles o |
| 07/13/2006 | DE102005000837A1 Thermische Bestrahlungsanordnung zur Erwärmung eines Bestrahlungsgutes Thermal radiation arrangement for heating a material to be irradiated |
| 07/11/2006 | US7076021 Apparatus for measurement of the thickness of thin layers |
| 07/11/2006 | US7075713 High efficiency collector for laser plasma EUV source |