| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 04/19/2005 | US6882704 For photolithography exposure processes; semiconductor chips with structure widths of less than 50 nm; hot plasma emitting desired radiation is generated in a vacuum chamber; energy monitor unit; beam characteristics reproducible over the long |
| 04/19/2005 | US6882703 Electron source and cable for x-ray tubes |
| 04/19/2005 | US6882095 Electron accelerator having a wide electron beam |
| 04/19/2005 | US6881970 Charged particle beam irradiation equipment and control method thereof |
| 04/19/2005 | US6881969 Electron beam treatment device |
| 04/19/2005 | US6881965 Multi-foil optic |
| 04/14/2005 | US20050078789 X-ray pallet processing |
| 04/14/2005 | US20050078785 Radiation image pick-up device, radiation image pick-up method and program |
| 04/14/2005 | US20050077483 Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 04/14/2005 | US20050077481 Method of constructing chimeric plant by heavy-ion beam irradiation |
| 04/14/2005 | DE102004046035A1 Lichtstrahlervorrichtung, Lampenanordnung und Röntgenvorrichtung Light source unit, lamp assembly and X-ray apparatus |
| 04/13/2005 | EP1523027A2 Method and equipment for charged particle beam lithography |
| 04/13/2005 | EP1522892A1 Lithographic apparatus and device manufacturing method |
| 04/13/2005 | EP1521947A2 Scatter spectra method for x-ray fluorescent analysis with optical components |
| 04/07/2005 | WO2005031458A2 Forming partial-depth features in polymer film |
| 04/07/2005 | US20050074676 Chromium oxide film serves as etching stopper formed on diamond film serving as transmitter, and absorptive tungsten layer |
| 04/07/2005 | US20050074611 Encapsulated nanoparticles for the absorption of electromagnetic energy |
| 04/07/2005 | US20050074094 Method and apparatus for x-ray anode with increased coverage |
| 04/07/2005 | US20050074093 Solid state bracytherapy applicator |
| 04/07/2005 | US20050072942 EUV source |
| 04/07/2005 | US20050072941 Method of charged particle beam lithography and equipment for charged particle beam lithography |
| 04/06/2005 | EP1521119A2 A focusing-device for the radiation from a light source |
| 04/06/2005 | EP1520603A1 Solid state brachytherapy applicator |
| 04/06/2005 | CN1605111A Device for generating x-rays having an integrated anode and bearing member |
| 04/06/2005 | CN1603946A X-ray orifice, X-ray irradiation machine and X-ray apparatus |
| 04/06/2005 | CN1603945A Optical irradiation machine, lamp assembly and X-ray apparatus |
| 04/05/2005 | US6876724 Large-area individually addressable multi-beam x-ray system and method of forming same |
| 04/05/2005 | US6875546 Method of patterning photoresist on a wafer using an attenuated phase shift mask |
| 04/05/2005 | US6875071 Method of manufacturing x-ray tube components |
| 04/05/2005 | US6874899 Apparatus and method for irradiating a substrate |
| 04/03/2005 | CA2462891A1 Solid state brachytherapy applicator |
| 03/31/2005 | US20050069782 Each full-depth producing pattern includes an area of UV light-blocking material on a transparent plate that has a smaller dimension equal to or greater than minimum resolvable size; partial-depth producing pattern has an area of UV light-blocking material with smaller dimension less than minimum size |
| 03/31/2005 | US20050069092 Light irradiator, lamp assembly, and X-ray apparatus |
| 03/31/2005 | US20050069088 X-ray diaphragm, X-ray irradiator, and X-ray apparatus |
| 03/31/2005 | US20050067567 Sample analyzer |
| 03/30/2005 | EP1519400A2 Method and apparatus of vibration isolation, in particular for electron beam metrology tools |
| 03/30/2005 | EP1517727A1 Device for irradiating a target with a hadron-charged beam, use in hadrontherapy |
| 03/30/2005 | CN1602451A Maskless photon-electron spot-grid array printer |
| 03/30/2005 | CN1602416A Dose radiometer |
| 03/29/2005 | US6873683 Axial flux motor driven anode target for X-ray tube |
| 03/29/2005 | US6873682 Exposure control in scanning-based detection of ionizing radiation |
| 03/24/2005 | WO2005001876A3 Electrostatic parallelizing lens for ion beams |
| 03/24/2005 | WO2004090947A3 Ion beam incident angle detector for ion implant systems |
| 03/24/2005 | WO2004064873A3 Static inventor for 360 degree disinfection of workpieces |
| 03/24/2005 | WO2004064097A3 Charged particle beam device for inspecting or structuring a specimen |
| 03/24/2005 | US20050064298 Multilayer coatings for EUV mask substrates |
| 03/24/2005 | US20050063510 Radiotherapy system |
| 03/24/2005 | US20050062950 Modulator circuitry |
| 03/24/2005 | US20050061996 Medical charged particle irradiation apparatus |
| 03/24/2005 | US20050061446 Plasma-assisted joining |
| 03/23/2005 | CN1598399A Microwave powered lamphead having external shutter |
| 03/23/2005 | CN1597087A Ultraviolet irradiating device |
| 03/22/2005 | US6870603 Lithographic apparatus and method to determine beam characteristics |
| 03/22/2005 | US6870174 Electron beam tube and window for electron beam extraction |
| 03/22/2005 | US6870173 Electron-beam focusing apparatus and electron-beam projection lithography system employing the same |
| 03/22/2005 | US6870124 Plasma-assisted joining |
| 03/17/2005 | WO2005024325A2 Method and system for drying a substrate |
| 03/17/2005 | WO2005023415A1 Dual-step process of industrial enterprise stack gas decontamination containing electron beam irradiation and treatment by gas discharge |
| 03/17/2005 | US20050058246 Process and apparatus for irradiating product pallets |
| 03/17/2005 | US20050058244 Portable radiation imaging system and a radiation image detection device equipped with an angular signal output means |
| 03/17/2005 | DE10337935A1 Vorrichtung für die Aufnahme von Strukturdaten eines Objekts Apparatus for recording an object data structure |
| 03/17/2005 | DE10235116B4 Abgeschirmter Raum für die Ionentherapie für Neutronen bis in den Energiebereich GeV Shielded room for ion therapy for neutrons in the energy range up to GeV |
| 03/16/2005 | EP1514458A1 X-ray tube |
| 03/16/2005 | EP1514126A1 Sensor and method for measuring a current of charged particles |
| 03/16/2005 | CN1596140A Optically driven therapeutic radiation source |
| 03/16/2005 | CN1595599A Target disc angle controlling and scanning motion mechanism of ion implantation apparatus |
| 03/10/2005 | WO2005022555A1 Tissue irradiation system and apparatus |
| 03/10/2005 | WO2004086439A3 Method and apparatus for controlling electron beam current |
| 03/10/2005 | WO2004003964A3 Discharge radiation source, in particular uv radiation |
| 03/10/2005 | US20050053197 X-ray source assembly having enhanced output stability, and fluid stream analysis applications thereof |
| 03/10/2005 | US20050053194 Method and apparatus for X-ray irradiation having improved throughput and dose uniformity ratio |
| 03/10/2005 | US20050051841 Stress-controlled dielectric integrated circuit |
| 03/09/2005 | EP1513163A2 Method and apparatus for X-ray irridiation having improved throughput and dose uniformity ratio |
| 03/09/2005 | EP1511535A1 Inverse planning for intensity-modulated radiotherapy |
| 03/09/2005 | CN1590957A Original negative, exposure method and original negative making method |
| 03/08/2005 | US6865251 Device for x-ray lithography |
| 03/08/2005 | US6864988 Optical system with isolated measuring structure |
| 03/08/2005 | US6864953 Exposure apparatus, device manufacturing method, semiconductor manufacturing plant and method of maintaining exposure apparatus |
| 03/08/2005 | US6864487 Environmental sampler for mass spectrometer |
| 03/08/2005 | US6863658 Automated system for the radiation treatment of a desired area within the body of a patient |
| 03/08/2005 | US6863531 Surface modification process on metal dentures, products produced thereby, and the incorporated system thereof |
| 03/08/2005 | US6863409 Apparatus for generating parallel beam with high flux |
| 03/03/2005 | WO2005018735A2 Modular patient support system |
| 03/03/2005 | WO2005018734A2 Patient positioning system for radiation therapy system |
| 03/03/2005 | WO2005018437A2 X-ray diffraction-based scanning system |
| 03/03/2005 | US20050046934 Method and system for drying a substrate |
| 03/03/2005 | US20050045614 Tissue irradiation system and apparatus |
| 03/03/2005 | CA2535121A1 Patient positioning system for radiation therapy system |
| 03/03/2005 | CA2533680A1 Modular patient support system |
| 03/02/2005 | EP1509761A2 Methods for sem inspection of fluid containing samples |
| 03/02/2005 | EP1165182B1 Megavoltage computed tomography during radiotherapy |
| 03/02/2005 | CN1589490A Method and device for aligning a charged particle beam column |
| 03/02/2005 | CN1586670A Rotary closing type gamma ray radiator |
| 03/02/2005 | CN1191741C Plasma source and ion injector using same |
| 03/01/2005 | US6862337 Linear track based digital tomosynthesis system and method |
| 03/01/2005 | US6861656 High-luminosity EUV-source devices for use in extreme ultraviolet (soft X-ray) lithography systems and other EUV optical systems |
| 03/01/2005 | US6861653 Equipment and method for inline infrared and ultraviolet irradiation of recording media |
| 03/01/2005 | US6861643 Generating a highly directional and highly dense neutral particle beam from a high-density plasma by neutralizing an ion beam generated by the ion extracting portion; etching of electrical thin films; semiconductors |
| 03/01/2005 | US6861036 Charging and capture of particles in coronas irradiated by in-situ X-rays |
| 02/24/2005 | US20050041773 Detection apparatus for x-ray analysis, including semiconductor detectors having uncooled active areas |