| Patents for G21K 5 - Irradiation devices (9,144) |
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| 03/08/2006 | CN1745435A Radiation scanning of cargo conveyances at seaports and the like |
| 03/07/2006 | US7010094 X-ray inspection using spatially and spectrally tailored beams |
| 03/07/2006 | US7009193 Utilization of an ion gauge in the process chamber of a semiconductor ion implanter |
| 03/07/2006 | US7009188 Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same |
| 03/02/2006 | US20060048091 Method for correcting position-dependent distortions in patterning of integrated circuits |
| 03/02/2006 | US20060048090 Simulation of aerial images |
| 03/02/2006 | US20060048089 System and method for simulating an aerial image |
| 03/02/2006 | US20060043293 Charged particle beam adjustment method and apparatus |
| 03/02/2006 | DE102004005241B4 Verfahren und Einrichtung zur plasmabasierten Erzeugung weicher Röntgenstrahlung Method and apparatus for plasma-based generation of soft X-rays |
| 03/01/2006 | EP1629508A2 High energy polyenergetic ion selection systems, ion beam therapy systems, and ion beam treatment centers |
| 02/28/2006 | US7006599 Radiographic apparatus |
| 02/28/2006 | US7006595 Illumination system particularly for microlithography |
| 02/28/2006 | US7006199 Lithographic positioning device and device manufacturing method |
| 02/28/2006 | US7005660 Surface processing apparatus |
| 02/28/2006 | US7005659 Charged particle beam exposure apparatus, charged particle beam exposure method, and device manufacturing method using the same apparatus |
| 02/28/2006 | US7005658 Charged particle beam exposure apparatus and method |
| 02/23/2006 | US20060040064 Method of forming composite ceramic targets |
| 02/23/2006 | US20060039520 Target for generating deuteron and target apparatus for generating deuteron comprising the same |
| 02/23/2006 | US20060039074 Optical imaging device designs for solar-powered flight and powergeneration |
| 02/23/2006 | US20060038139 Trigger probe for determining the orientation of the power distribution of an electron beam |
| 02/23/2006 | US20060038133 Rotating specimen holder |
| 02/22/2006 | CN1739066A Electron beam processing technology for mask repair |
| 02/22/2006 | CN1738510A X-ray generator |
| 02/22/2006 | CN1242690C Method for degradation of remained chloromycetin on aquatic products by using rays |
| 02/21/2006 | US7003372 Appearance processing method and aspheric lens fabricating method using the same |
| 02/21/2006 | US7003077 Method and apparatus for x-ray anode with increased coverage |
| 02/21/2006 | US7002170 Radiation device |
| 02/21/2006 | US7002138 Flexure assembly for a scanner |
| 02/21/2006 | US7002096 Surface modification process on metal dentures, products produced thereby, and the incorporated system thereof |
| 02/16/2006 | US20060033051 Lithographic apparatus, device manufacturing method, device manufactured thereby, and computer program |
| 02/16/2006 | US20060033050 Electron-beam drawing apparatus and electron-beam drawing method |
| 02/16/2006 | US20060033049 Design pattern data preparing method, mask pattern data preparing method, mask manufacturing method, semiconductor device manufacturing method, and program recording medium |
| 02/16/2006 | US20060033048 Method of generation of charged particle beam exposure data and charged particle beam exposure method using a block mask |
| 02/16/2006 | US20060033038 Device and method for the examination of samples in a non vacuum environment using a scanning electron microscope |
| 02/14/2006 | US6999551 Method for diaphragm regulation in a computed tomography apparatus, and computed tomography apparatus with diaphragm regulation |
| 02/14/2006 | US6998625 Ion implanter having two-stage deceleration beamline |
| 02/14/2006 | US6998621 Cooling of a device for influencing an electron beam |
| 02/14/2006 | US6998620 Stable energy detector for extreme ultraviolet radiation detection |
| 02/09/2006 | WO2006014633A2 Electrostatic lens for ion beams |
| 02/09/2006 | US20060029866 EUV magnetic contrast lithography mask and manufacture thereof |
| 02/09/2006 | US20060027766 Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method |
| 02/09/2006 | US20060027764 Methodology for determining electron beam penetration depth |
| 02/08/2006 | EP1624467A2 Lithographic apparatus and device manufacturing method |
| 02/07/2006 | US6995382 Arrangement for the generation of intensive short-wave radiation based on a plasma |
| 02/02/2006 | US20060022153 Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method |
| 02/02/2006 | US20060022151 System and method for producing Terahertz radiation |
| 02/02/2006 | DE202005018552U1 Bestrahlungsgerät für Finger- oder Fußnägel Irradiation device for the fingernails or toenails |
| 02/02/2006 | DE102005005707B3 Radiation of object surface with melting in radiation active region useful for decontamination of an object with electrically conductive surface and production of high purity compositions, where melt is electrically conductive |
| 01/31/2006 | US6993117 Method and apparatus of modulating the filtering of radiation during radiographic imaging |
| 01/31/2006 | US6992312 Medical charged particle irradiation apparatus |
| 01/31/2006 | US6992300 Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope |
| 01/26/2006 | US20060019175 Method of manufacturing membrane mask, method of manufacturing semiconductor device, and membrane mask |
| 01/26/2006 | US20060018432 Large-area individually addressable multi-beam x-ray system and method of forming same |
| 01/26/2006 | US20060017023 High flux, high energy photon source |
| 01/26/2006 | US20060017022 Patient alignment system with external measurement and object coordination for radiation therapy system |
| 01/26/2006 | US20060017021 Multi-electron beam exposure method and apparatus |
| 01/26/2006 | US20060017020 Electron beam lithography method, patterned master carrier for magnetic transfer, lithography method for patterned master carrier for magnetic transfer, and method for producing performatted magnetic recording media |
| 01/26/2006 | US20060017019 Charged particle beam exposure apparatus, charged particle beam exposure method and device manufacturing method |
| 01/25/2006 | CN1726563A Device and method for producing radioisotopes |
| 01/25/2006 | CN1726431A Nanometer-scale engineered structures, methods and apparatus for fabrication thereof, and applications to mask repair, enhancement, and fabrications |
| 01/24/2006 | US6990173 Positioning apparatus, atmosphere substituting method, exposure apparatus, and device manufacturing method |
| 01/24/2006 | US6989542 Device and method for the examination of samples in a non vacuum environment using a scanning electron microscope |
| 01/24/2006 | US6988811 Optical exposure apparatus and method for aligning a substrate |
| 01/19/2006 | US20060012459 Sensor and method for measuring a current of charged particles |
| 01/19/2006 | US20060011869 Measurement method of electron beam current, electron beam lithography method and system |
| 01/19/2006 | US20060011868 Method and apparatus for sample formation and microanalysis in a vacuum chamber |
| 01/19/2006 | US20060011855 Movable carriage for a lithographic apparatus and device manufacturing method |
| 01/19/2006 | DE202005018015U1 Irradiation device for hardening photo-polymerisable compounds on nails of fingers or toes, has arrangement of LEDs that radiate blue or UV-A-light of certain wavelength for irradiation, and control unit controls light output from LEDs |
| 01/19/2006 | DE10232676B4 Verfahren und Vorrichtung zur Positionierung eines Patienten in einem medizinischen Diagnose- oder Therapiegerät Method and apparatus for positioning a patient in a medical diagnostic or therapeutic device |
| 01/19/2006 | DE102004031079A1 Reflexionsmaske, Verwendung der Reflexionsmaske und Verfahren zur Herstellung der Reflexionsmaske Reflection mask, use of the reflection mask and method of manufacturing the reflection mask |
| 01/19/2006 | DE102004030674A1 Vorrichtung und Verfahren zum Härten mit energiereicher Strahlung unter Inertgasatmosphäre Apparatus and method for curing with high-energy radiation under an inert gas atmosphere |
| 01/18/2006 | EP1617440A1 High-speed particle generator |
| 01/18/2006 | EP1265673A4 Automated system for radiation treatment of a patient |
| 01/17/2006 | US6987830 Radiation generating apparatus, radiation generating method, exposure apparatus, and exposure method |
| 01/17/2006 | US6987279 Light source device and exposure equipment using the same |
| 01/17/2006 | US6987275 Lithographic apparatus and device manufacturing method |
| 01/17/2006 | US6987271 Chamber sensor port, chamber and electron beam processor |
| 01/17/2006 | US6986974 Attenuated phase shift mask for extreme ultraviolet lithography and method therefore |
| 01/17/2006 | US6986971 Reflective mask useful for transferring a pattern using extreme ultraviolet (EUV) radiation and method of making the same |
| 01/12/2006 | US20060007413 Esposure apparatus, cooling method, and device manufacturing method |
| 01/12/2006 | US20060006350 Lithographic projection apparatus and reflector assembly for use therein |
| 01/12/2006 | US20060006349 Optical switching in lithography system |
| 01/12/2006 | US20060006348 Apparatus and method for doping |
| 01/12/2006 | US20060006347 Method for preventing wafer surface from bombardment by micro-dust particles during the ion implantation process |
| 01/12/2006 | US20060006346 Device and method for measurement of beam angle and divergence normal to plane of scanned beam or ribbon beam |
| 01/12/2006 | DE102004028350A1 Activation and/or curing of UV curable molding materials, in particular on electrical components is effected by UV radiation from LED |
| 01/12/2006 | DE102004015540A1 Strahlungsbildaufnahmeeinrichtung Radiation image pickup device |
| 01/11/2006 | EP1615482A1 Laser plasma producing method and device |
| 01/10/2006 | US6985557 X-ray apparatus with field emission current stabilization and method of providing x-ray radiation therapy |
| 01/10/2006 | US6985211 photolithography apparatus comprising reflection multilayer stacks of molybdenum, rhodium, palladium, platinum, ruthenium, silicon and/or yttrium, and light sources, used for focussing patterned radiation beams on target substrates |
| 01/10/2006 | US6984941 Extreme UV radiation source and semiconductor exposure device |
| 01/10/2006 | US6984835 Irradiation apparatus and irradiation method |
| 01/05/2006 | WO2005112041A3 Remote communication method and device using nuclear isomers |
| 01/05/2006 | US20060002511 Modular patient support system |
| 01/05/2006 | DE102004028727A1 Verfahren zur Härtung radikalisch härtbarer Massen unter einer Schutzgasatmosphäre und Vorrichtung zu seiner Durchführung A process for curing free radical curable compositions under an inert gas atmosphere and device for its implementation |
| 01/04/2006 | EP1257325A4 Cone-beam computerized tomography with a flat-panel imager |
| 01/04/2006 | EP1169713B1 X-ray lens system |
| 01/03/2006 | US6983230 Method and apparatus for simulating a radiation dose delivered to an object |
| 01/03/2006 | US6982133 Damage-resistant coatings for EUV lithography components |
| 12/29/2005 | US20050287447 Reflection mask, use of the reflection mask and method for fabricating the reflection mask |