| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 04/10/2008 | US20080083884 Mesh and method of observing rubber slice technical field |
| 04/10/2008 | DE202008001362U1 UV-Beleuchtungsvorrichtung UV illuminating device |
| 04/10/2008 | DE112005002154T5 Teilchenstrahlbestrahlungsverfahren und Teilchenstrahlbestrahlungsvorrichtung für ein derartiges Verfahren Teilchenstrahlbestrahlungsverfahren and particle beam irradiation apparatus for such a method |
| 04/09/2008 | EP1664936A4 Forming partial-depth features in polymer film |
| 04/09/2008 | CN101159173A Rotating carriage assembly for use in scanning cargo conveyances transported by a crane |
| 04/09/2008 | CN101156980A A medical radiation therapy apparatus structure |
| 04/09/2008 | CN101156979A A medical radiation therapy apparatus structure |
| 04/09/2008 | CN100379893C Matching box, vacuum device using the same and vacuum processing method |
| 04/03/2008 | WO2008038548A1 Short wavelength ultraviolet discharge lamp and ultraviolet ray irradiator |
| 04/03/2008 | US20080078960 Pattern generation methods and apparatuses |
| 04/03/2008 | US20080078942 Particle therapy system |
| 04/03/2008 | US20080078933 Electron Beam Exposure or System Inspection Or Measurement Apparatus And Its Method And Height Detection Apparatus |
| 04/02/2008 | CN201044186Y Semi-underground irradiation processed protection device |
| 04/01/2008 | US7352842 X-ray generator and exposure apparatus having the same |
| 04/01/2008 | US7351987 Irradiation system with ion beam |
| 04/01/2008 | US7351986 Method and apparatus for reducing cross contamination of species during ion implantation |
| 04/01/2008 | US7351647 Method of irradiating a laser beam, apparatus for irradiating a laser beam and method of fabricating semiconductor devices |
| 03/27/2008 | US20080073589 Method and system for optimizing alignment performance in a fleet of exposure tools |
| 03/27/2008 | US20080073577 Substrate holding apparatus |
| 03/27/2008 | US20080073566 Histology methods |
| 03/27/2008 | US20080073562 Wafer holder and sample producing apparatus using it |
| 03/27/2008 | US20080073561 Lithographic apparatus and device manufacturing method |
| 03/27/2008 | US20080073528 Charged particle beam scanning method and charged particle beam apparatus |
| 03/27/2008 | DE202007017449U1 Mobile, geschlossene Belichtungsvorrichtung für photolumineszierende Gegenstände Mobile, closed exposure apparatus for photoluminescent objects |
| 03/27/2008 | DE102006043789A1 UV irradiation mechanism for the UV lacquer- and printing ink drying process in a printing machine, comprises an irradiation unit consisting of a housing with an UV radiation source, a shutter for screening the radiation and a drive unit |
| 03/27/2008 | DE102005044408B4 Partikeltherapieanlage, Verfahren und Vorrichtung zur Anforderung eines Partikelstrahls Particle therapy system, method and apparatus for requesting a particle beam |
| 03/25/2008 | US7348582 Light source apparatus and exposure apparatus having the same |
| 03/25/2008 | US7348580 Particle beam processing apparatus and materials treatable using the apparatus |
| 03/25/2008 | US7348578 Device and method for electron beam irradiation |
| 03/25/2008 | US7348576 Technique for ion beam angle process control |
| 03/25/2008 | US7348571 Scanning mechanism for scanning probe microscope and scanning probe microscope |
| 03/25/2008 | US7348565 Illumination system particularly for microlithography |
| 03/25/2008 | US7348555 Apparatus and method for irradiating electron beam |
| 03/20/2008 | WO2008032725A1 Beam machining apparatus and beam observing apparatus |
| 03/20/2008 | US20080067447 Standard component for calibration and calibration method using it and electro beam system |
| 03/20/2008 | US20080067431 Pattern writing apparatus using charged particle beam, and program-recorded readable recording medium |
| 03/20/2008 | US20080067425 Apparatus and method for exposing a substrate to uv radiation using asymmetric reflectors |
| 03/20/2008 | US20080067415 Alignment apparatus, exposure apparatus, and device manufacturing method |
| 03/20/2008 | US20080067401 Particle Beam Irradiation Method and Particle Beam Irradiation Apparatus Used for the Same |
| 03/20/2008 | US20080067385 Method and apparatus for processing a micro sample |
| 03/20/2008 | US20080067338 Charged particle beam lithography system and method for evaluating the same |
| 03/19/2008 | EP1638845B1 Device and method for electron beam irradiation |
| 03/18/2008 | US7346148 X-ray generating apparatus |
| 03/18/2008 | US7345292 Particle beam therapy system |
| 03/18/2008 | US7345290 Lens array for electron beam lithography tool |
| 03/18/2008 | US7345274 Method for performing in vivo dosimetry |
| 03/13/2008 | WO2008029696A1 Electron beam dimension measuring device and electron beam dimension measuring method |
| 03/13/2008 | WO2008029012A1 Machine for washing surgical and/or medical instruments |
| 03/13/2008 | US20080061292 Method of Doping Impurities, and Electronic Element Using the Same |
| 03/13/2008 | US20080061251 Ion beams in an ion implanter |
| 03/13/2008 | US20080061248 compositions suitable for use as immersion liquids in immersion lithography, and immersion lithography processes and apparatus for using the compositions with uv radiation |
| 03/13/2008 | DE10024709B4 Vorrichtung zum thermischen Behandeln von Substraten An apparatus for thermal treatment of substrates |
| 03/12/2008 | EP1106038B1 X-ray examination apparatus |
| 03/12/2008 | CN100375238C Exposure apparatus and device fabrication method using the same |
| 03/12/2008 | CN100374622C Lithographic apparatus and method to determine beam size and divergence |
| 03/11/2008 | US7342993 System for dynamic low dose x-ray imaging |
| 03/11/2008 | US7342241 Method and apparatus for electron-beam lithography |
| 03/06/2008 | WO2008026648A1 Rotating irradiation therapy apparatus |
| 03/06/2008 | US20080056746 Surface-potential distribution measuring apparatus, image carrier, and image forming apparatus |
| 03/06/2008 | US20080056448 Soft x-ray radiation for biological pathogen decontamination and medical sterilization applications |
| 03/06/2008 | US20080054195 Substrate cover, and charged particle beam writing apparatus and method |
| 03/06/2008 | US20080054180 Apparatus and method of detecting secondary electrons |
| 03/06/2008 | US20080054171 Target for Laser Desorption/Ionisation Mass Spectrometry |
| 03/05/2008 | EP1269482B1 Method for incinerating transuranian chemical elements and nuclear reactor using same |
| 03/05/2008 | CN100373993C Method for obtaining an extraeme ultraviolet radiation source, radiation source and use in lithography |
| 03/04/2008 | US7340032 System for dynamic low dose x-ray imaging and tomosynthesis |
| 03/04/2008 | US7339181 High flux, high energy photon source |
| 03/04/2008 | US7338820 Laser patterning of encapsulated organic light emitting diodes |
| 02/28/2008 | US20080050848 Charged particle beam irradiation method and semiconductor device manufacturing method |
| 02/28/2008 | US20080050677 Processing method, manufacturing method of semiconductor device, and processing apparatus |
| 02/28/2008 | US20080049902 "X-Ray Tube for High Dose Rates, Method of Generating High Dose Rates wit X-Ray Tubes and a Method of Producing Corresponding X-Ray Devices" |
| 02/28/2008 | US20080048187 Semiconductor thin film, thin film transistor, method of manufacturing the semiconductor thin film, method of manufacturing the thin film transistor, and manufacturing device of semiconductor thin film |
| 02/28/2008 | US20080048132 Apparatus and method for reducing particulate contamination in gas cluster ion beam processing equipment |
| 02/28/2008 | US20080048131 Front plate for an ion source |
| 02/28/2008 | DE202006020199U1 Tunnelgerät zum Aushärten von Nagelgelen Tunnel device for curing nail gels |
| 02/21/2008 | US20080043213 Euv Light Source, Euv Exposure System, and Production Method for Semiconductor Device |
| 02/21/2008 | US20080042079 Collector with fastening devices for fastening mirror shells |
| 02/21/2008 | US20080042077 Process and apparatus for post deposition treatment of low dielectric materials |
| 02/21/2008 | US20080042076 Modular patient support system |
| 02/21/2008 | US20080042060 Inspection system by charged particle beam and method of manufacturing devices using the system |
| 02/21/2008 | DE102006038504A1 Zahnärztliche Behandlungsleuchte und Verfahren zur Erzeugung eines Lichtfelds für eine Behandlung mit einem durch Licht aushärtbaren dentalen Werkstoff Dental treatment lamp and method for generating a light field for a treatment with a photocurable dental material |
| 02/20/2008 | CN201025584Y Under bundle technology control system |
| 02/20/2008 | CN100370576C Device for generating x-rays having an integrated anode and bearing member |
| 02/19/2008 | CA2397070C X-ray measuring and testing complex |
| 02/14/2008 | WO2007111672A9 Concentric dual drum raster scanning beam system and method |
| 02/14/2008 | US20080036304 High performance focusing actuator of a voice coil motor |
| 02/14/2008 | US20080035863 Single scan irradiation for crystallization of thin films |
| 02/14/2008 | US20080035851 Processing method, manufacturing method of semiconductor device, and processing apparatus |
| 02/12/2008 | US7329886 EUV illumination system having a plurality of light sources for illuminating an optical element |
| 02/12/2008 | US7329883 Electron beam lithography device and drawing method using electron beams |
| 02/07/2008 | US20080032206 Photomask registration errors of which have been corrected and method of correcting registration errors of photomask |
| 02/07/2008 | DE102006036064A1 Beleuchtungssystem für eine Projektionsbelichtungsanlage mit Wellenlängen ≦ 193 nm Illumination system for a projection exposure apparatus having wavelengths ≦ 193 nm |
| 02/06/2008 | CN100366223C Radiographic apparatus |
| 02/05/2008 | US7327013 Stencil mask with charge-up prevention and method of manufacturing the same |
| 02/05/2008 | US7326502 Ion beam deposition and atomic layer deposition to form alternating stack of thin films; to smooth surface defects; form extreme ultraviolet reflective mask in semiconductor processing; optical ultraviolet system for making semiconductor wafer |
| 01/31/2008 | WO2008011784A1 A mobile electron beam radiation device |
| 01/31/2008 | US20080026258 Electron beam irradiating method, magnetic recording medium manufactured by using the method and method for manufacturing the medium |
| 01/31/2008 | US20080024126 Beam Measuring Equipment and Beam Measuring Method Using the Same |
| 01/31/2008 | US20080023657 Extreme ultraviolet light source |
| 01/31/2008 | US20080023656 Integrated thermal unit having a shuttle with a temperature controlled surface |