| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 06/05/2008 | US20080130076 Illumination system particularly for microlithography |
| 06/05/2008 | US20080128642 Lithographic apparatus and device manufacturing method |
| 06/05/2008 | US20080128641 Apparatus and method for introducing particles using a radio frequency quadrupole linear accelerator for semiconductor materials |
| 06/05/2008 | US20080128638 Multi-Beam Modulator For a Particle Beam and Use of the Multi-Beam Modulator for the Maskless Structuring of a Substrate |
| 06/05/2008 | US20080128637 Method and system for logic design for cell projection particle beam lithography |
| 06/05/2008 | US20080128634 Method and apparatus for surface potential reflection electron mask lithography |
| 06/04/2008 | CN100391406C X-ray generating apparatus |
| 06/03/2008 | US7382859 X-ray imaging apparatus and method |
| 06/03/2008 | US7381970 Specimen stage for charged-particle scanning microscopy |
| 06/03/2008 | US7381968 Charged particle beam apparatus and specimen holder |
| 06/03/2008 | US7381949 Method and apparatus for simultaneously depositing and observing materials on a target |
| 05/29/2008 | WO2008064220A2 Method and system for wide-field multi-photon microscopy having a confocal excitation plane |
| 05/29/2008 | WO2008064178A2 Method and system for proximity effect and dose correction for a particle beam writing device |
| 05/29/2008 | WO2008064176A2 Method and system for improving particle beam lithography |
| 05/29/2008 | WO2008064155A2 Stencil design and method for cell projection particle beam lithography |
| 05/29/2008 | WO2008062756A1 Imaging device |
| 05/29/2008 | WO2008062670A1 Electron beam irradiation system |
| 05/29/2008 | WO2008062669A1 Electron beam irradiation system |
| 05/29/2008 | WO2008062668A1 Electron beam irradiating device |
| 05/29/2008 | WO2008062667A1 Electron beam irradiation apparatus |
| 05/29/2008 | WO2008062666A1 Electron beam irradiation device |
| 05/29/2008 | US20080123807 Illumination optics for projection microlithography |
| 05/29/2008 | US20080121822 Ion implantation apparatus |
| 05/29/2008 | US20080121821 Techniques for low-temperature ion implantation |
| 05/29/2008 | US20080121813 Method and apparatus of compensating for position shift |
| 05/29/2008 | US20080121799 Sample analyzing apparatus |
| 05/29/2008 | CA2670002A1 Device and method for immobilizing patients for breast radiation therapy |
| 05/28/2008 | EP1925001A2 Method and apparatus for targeting a tumor during radiotherapy using a virtual image |
| 05/28/2008 | CN101187459A Quasimolecule light irradiator |
| 05/27/2008 | US7378670 Shielding assembly for a semiconductor manufacturing apparatus and method of using the same |
| 05/27/2008 | US7378666 Irradiation device for testing objects coated with light-sensitive paint |
| 05/27/2008 | US7378197 Antireflective coating; making semiconductors at lower wavelengths using reflective masks that can be effectively inspected at multiple wavelengths; wide bandwidth inspection contrast for extreme ultra-violet reticles |
| 05/22/2008 | WO2007076491A3 Single nanoparticle tracking spectroscopic microscope |
| 05/22/2008 | US20080117512 Mirror unit, method of producing the same, and exposure apparatus and method using the mirror unit |
| 05/22/2008 | US20080116399 Method and system for improving particle beam lithography |
| 05/22/2008 | US20080116398 Method and system for proximity effect and dose correction for a particle beam writing device |
| 05/22/2008 | US20080116397 Stencil design and method for cell projection particle beam lithography |
| 05/22/2008 | US20080116396 Exposure apparatus and exposure method |
| 05/22/2008 | US20080116392 Method and system for wide-field multi-photon microscopy having a confocal excitation plane |
| 05/21/2008 | CN101183083A X-ray source assembly having enhanced output stability, and fluid stream analysis applications thereof |
| 05/21/2008 | CN101183082A Ship radiation image-forming detecting system |
| 05/15/2008 | WO2008058248A2 Apparatus and method for introducing particles using a radio frequency quadrupole linear accelerator for semiconductor materials |
| 05/15/2008 | US20080113303 Multilayer Coatings For EUV Mask Substrates |
| 05/15/2008 | US20080110852 Medical Containers and Treating Method for Producing Medical Containers |
| 05/15/2008 | DE10222828B4 Bestrahlungsgerät Irradiation device |
| 05/15/2008 | DE10211492B4 Lamelle,Lamellenkollimator, Vorrichtung zur Strahlenbegrenzung und Bestrahlungsgerät Lamella, multileaf collimator, apparatus for limiting radiation and irradiation apparatus |
| 05/15/2008 | DE102006052743A1 Verfahren und Vorrichtung zum Strahlungshärten Method and apparatus for curing radiation |
| 05/14/2008 | EP1919364A1 Patient positioning device |
| 05/14/2008 | EP1508152A4 Particle beam processing apparatus and materials treatable using the apparatus |
| 05/14/2008 | EP1428554A4 Device for x-ray therapy |
| 05/14/2008 | CN201058045Y Three-dimensional irradiation device of heavy ion beam to tumour target region |
| 05/13/2008 | US7373254 Disinfestation of medical implants with radiation |
| 05/13/2008 | US7372945 Method and device for the recording of objects |
| 05/13/2008 | US7372624 8-mirror microlithography projection objective |
| 05/13/2008 | US7372047 Charged particle system and a method for measuring image magnification |
| 05/08/2008 | US20080107976 Hardware and software for directing a beam through a mask onto a wafer surface to outline a circuit pattern; photolithography system including an exposure tool, a mask, array of micromechanical mirrors capable of real time configurable imaging, and addressing circuitry |
| 05/08/2008 | US20080105879 Process and system for laser annealing and laser-annealed semiconductor film |
| 05/08/2008 | US20080105834 Ion implanter with function of compensating wafer cut angle and ion implantation method using the same |
| 05/08/2008 | US20080105825 Laser scanning apparatus and method using diffractive optical elements |
| 05/08/2008 | DE202008002033U1 Mobile Vorrichtung zum Testen von Photovoltaik-Wafern Mobile apparatus for testing photovoltaic wafers |
| 05/08/2008 | DE102006051738A1 Packstoff-Entkeimungsanlage Packaging material disinfection |
| 05/06/2008 | US7368744 Photon sieve for optical systems in micro-lithography |
| 05/06/2008 | US7368741 Extreme ultraviolet light source |
| 05/06/2008 | US7368738 Advanced pattern definition for particle-beam exposure |
| 05/06/2008 | US7368735 Charged beam drawing data creation method, charged beam drawing method, charged beam drawing apparatus and semiconductor device manufacturing method |
| 05/06/2008 | US7368734 Ion beam measuring method and ion implanting apparatus |
| 05/01/2008 | US20080099697 Charged particle beam apparatus, method of adjusting astigmatism using same and method of manufacturing device using same |
| 05/01/2008 | US20080099693 Charged-particle exposure apparatus |
| 05/01/2008 | US20080099675 Inspection apparatus and an inspection method |
| 05/01/2008 | US20080099674 Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof |
| 05/01/2008 | US20080099673 Electron Beam Apparatus and Electron Beam Inspection Method |
| 04/30/2008 | CN100384376C Thermoelectric controlled x-ray detector array |
| 04/29/2008 | US7366280 Integrated arc anode x-ray source for a computed tomography system |
| 04/24/2008 | WO2008047529A1 Neutron moderator, neutron irradiation method, and hazardous substance detector |
| 04/24/2008 | WO2006110253A8 Quantitative transmission/emission detector system and methods of detecting concealed radiation sources |
| 04/24/2008 | US20080095319 Two-Stage X-Ray Concentrator |
| 04/24/2008 | US20080093562 Beam Recording Method and Device |
| 04/24/2008 | US20080093550 Method For Adhering Nanostructures to End of Probe of Microscope and Microscope Having Probe Made By the Same Method |
| 04/24/2008 | DE202006019307U1 Bestrahlungsvorrichtung Irradiation apparatus |
| 04/23/2008 | CN100382752C Exposure control in scanning-based detection of ionizing radiation |
| 04/22/2008 | US7361915 Beam current stabilization utilizing gas feed control loop |
| 04/22/2008 | US7361914 Means to establish orientation of ion beam to wafer and correct angle errors |
| 04/22/2008 | US7361913 Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam control |
| 04/22/2008 | US7361910 Movable stage apparatus |
| 04/22/2008 | US7361457 Hardware and software for directing a beam through a mask onto a wafer surface to outline a circuit pattern; photolithography system including an exposure tool, a mask, array of micromechanical mirrors capable of real time configurable imaging, and addressing circuitry |
| 04/17/2008 | WO2008044319A1 Euv light generating apparatus and euv exposure apparatus |
| 04/17/2008 | WO2007095119A3 Methods and systems for simultaneous real-time monitoring of optical signals from multiple sources |
| 04/17/2008 | US20080090396 Light exposure apparatus and method for making semiconductor device formed using the same |
| 04/17/2008 | US20080089470 Alignment for contact lithography |
| 04/17/2008 | US20080087845 Central dryer for electron beam curing |
| 04/17/2008 | US20080087821 Electron Beam System and Method of Operating the Same |
| 04/17/2008 | US20080087808 Method and system for controlling beam scanning in an ion implantation device |
| 04/17/2008 | DE112006001346T5 Vorrichtung und Verfahren zum Bestrahlen mit einem Energiestrahl Apparatus and method for irradiating with an energy beam |
| 04/16/2008 | EP1810299A4 Integrated sub-nanometer-scale electron beam systems |
| 04/16/2008 | CN101164070A Locating sub-resolution assist features in semiconductor device fabrication |
| 04/15/2008 | US7358511 Plasma doping method and plasma doping apparatus |
| 04/15/2008 | US7358508 Ion implanter with contaminant collecting surface |
| 04/10/2008 | WO2007146395A3 Ion beam apparatus and method employing magnetic scanning |
| 04/10/2008 | US20080084963 Rotating carriage assembly for use in scanning cargo conveyances transported by a crane |
| 04/10/2008 | US20080083885 Lithographic apparatus, and device manufacturing method |