| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 06/02/2005 | US20050117683 Multiple energy x-ray source for security applications |
| 06/02/2005 | US20050117233 X-ray total reflection mirror and X-ray exposure apparatus |
| 06/02/2005 | US20050117168 Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method |
| 06/02/2005 | US20050116175 Method and device for controlling a beam extraction raster scan irradiation device for heavy ions or protons |
| 06/02/2005 | DE102004054885A1 Kollimator, Röntgenbestrahlungsquelle und Röntgeneinrichtung Collimator, X-ray radiation source and X-ray equipment |
| 06/01/2005 | EP1535307A2 Discharge radiation source, in particular uv radiation |
| 06/01/2005 | CN1204591C Plasma focus light source with improved pulse power system |
| 05/31/2005 | US6901133 X-ray exposure method and semiconductor device manufactured using this X-ray exposure method as well as X-ray mask, X-ray exposure unit and resist material |
| 05/31/2005 | US6900450 Method and apparatus for inferring item position based on multiple data |
| 05/31/2005 | US6900446 Charged particle beam irradiation equipment and control method thereof |
| 05/31/2005 | US6900445 Irradiation apparatus |
| 05/31/2005 | US6900443 Charged particle beam device for inspecting or structuring a specimen |
| 05/26/2005 | WO2005008850A3 Spatial and temporal selective laser assisted fault localization |
| 05/26/2005 | WO2004100173A3 Compensating for variations in article speeds and characteristics at different article positions during article irradiation |
| 05/26/2005 | US20050112475 Monitoring pattern configured to obtain information required for adjusting optical system; asymmetrical diffraction grating generates positive first order diffracted light and negative first order diffracted light; probing phase shifters |
| 05/26/2005 | US20050111626 Collimator, X-ray irradiator, and X-ray apparatus |
| 05/26/2005 | US20050111080 Mirror for use in a lithographic apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 05/25/2005 | EP1532639A2 Optical device for high energy radiation |
| 05/25/2005 | DE102004052089A1 Systeme und Verfahren zur Reduzierung der Strahlungsdosierung Systems and methods for reducing radiation dosage |
| 05/25/2005 | CN1619414A Collimator, x-raying apparatus and x-ray photographing device |
| 05/25/2005 | CN1618402A Systems and methods for reducing radiation dosage |
| 05/24/2005 | US6898779 Such as trace lines with fewer subsequent fabrication steps; allows a thinner, more planar deposition of an interlayer dielectric layer with a more uniform thickness. |
| 05/24/2005 | US6897456 Differential pumping system and exposure apparatus |
| 05/24/2005 | US6897451 Isokinetic gantry arrangement for the isocentric guidance of a particle beam and a method for constructing same |
| 05/19/2005 | WO2004064873A9 Static inventor for 360 degree disinfection of workpieces |
| 05/19/2005 | US20050106475 Mask substrate on which the patterned mask layer is arranged, has a protective layer to protect the mask layer from contact with impurity particles |
| 05/19/2005 | US20050106474 Method for controlling linewidth in advanced lithography masks using electrochemistry |
| 05/19/2005 | US20050105066 Lithographic apparatus and device manufacturing method |
| 05/19/2005 | US20050104015 Device, euv-lithographic device and method for preventing and cleaning contamination on optical elements |
| 05/19/2005 | US20050104014 Ion printer |
| 05/19/2005 | US20050104012 Ion implanting apparatus |
| 05/19/2005 | US20050104006 Chromatic aberration corrector for charged particles and charged-particle optical apparatus using the corrector |
| 05/19/2005 | DE102004049642A1 X-ray tube window cooling assembly for multi-slice computed tomography imaging system, has thermal exchange devices coupled to coolant circuit whose outlet directs coolant at window surface to impinge upon and cool window |
| 05/18/2005 | CN1618258A X-ray source assembly having enhanced output stability, and fluid stream analysis applications thereof |
| 05/18/2005 | CN1617650A Microfocus X-ray apparatus and its using method |
| 05/17/2005 | US6895064 Target for forming hollow particle beams; hermetic sealing partitions |
| 05/17/2005 | US6894300 Ion beam facility |
| 05/17/2005 | US6894298 Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge |
| 05/17/2005 | US6894295 Emission collimation beams; masking patterns |
| 05/17/2005 | US6894292 System and method for maskless lithography using an array of sources and an array of focusing elements |
| 05/17/2005 | US6894291 Apparatus and methods for blocking highly scattered charged particles in a patterned beam in a charged-particle-beam microlithography system |
| 05/17/2005 | US6893145 Light system |
| 05/12/2005 | WO2004084262A3 Method and device for lateral adjustment of image |
| 05/12/2005 | WO2004079780A3 A method of patterning photoresist on a wafer using a reflective mask with a multi-layer arc |
| 05/12/2005 | US20050100133 Microfocus x-ray apparatus |
| 05/12/2005 | US20050100132 Multiple target anode assembly and system of operation |
| 05/12/2005 | US20050100071 Electromagnetic radiation generation using a laser produced plasma |
| 05/12/2005 | US20050099145 Particle therapy system |
| 05/11/2005 | EP1530410A2 Particle therapy system |
| 05/11/2005 | EP1530408A2 Microfocus x-ray system |
| 05/11/2005 | EP1478408B1 Apparatus and process for irradiating product pallets |
| 05/10/2005 | US6891927 Light generation apparatus, exposure apparatus, and device manufacturing method |
| 05/10/2005 | US6891177 Ion beam scanner system and operating method |
| 05/10/2005 | US6890099 Portable radiation imaging system and a radiation image detection device equipped with an angular signal output means |
| 05/06/2005 | WO2005041241A1 Electron gun with a focusing anode, forming a window for said gun and application thereof to irradiation and sterilization |
| 05/06/2005 | WO2002097828A3 Radiation device |
| 05/05/2005 | US20050094762 Method and apparatus for z-axis tracking and collimation |
| 05/05/2005 | US20050093041 Illumination system having a nested collector for annular illumination of an exit pupil |
| 05/05/2005 | US20050092943 Phosphor read-out device and phosphor read-out process |
| 05/05/2005 | US20050092940 Method of controlling implant dosage and pressure compensation factor in-situ |
| 05/05/2005 | US20050092432 Ion beam processing system and ion beam processing method |
| 05/04/2005 | EP1528846A2 EUV source |
| 05/04/2005 | EP1528412A1 Photostimulable phosphor read-out method and apparatus |
| 05/04/2005 | EP1527473A2 Ion source and coaxial inductive coupler for ion implantation system |
| 05/04/2005 | EP1335778B1 Device for adapting the size of an ion beam spot in the domain of tumor irradiation |
| 05/04/2005 | CN1612039A Method and apparatus for Z-axis tracking and collimation |
| 05/03/2005 | US6888921 Laser plasma X-ray generating apparatus |
| 05/03/2005 | US6888143 Apparatus and method for inspecting pre-fastened articles |
| 04/28/2005 | WO2005038855A2 Ion implanter electrodes |
| 04/28/2005 | WO2005038854A1 X-ray apparatus |
| 04/28/2005 | WO2005038853A1 X-ray apparatus |
| 04/28/2005 | WO2005038851A1 X-ray apparatus |
| 04/28/2005 | WO2005010618A3 Modulator circuitry |
| 04/28/2005 | US20050089145 Systems and methods for reducing radiation dosage |
| 04/28/2005 | US20050088760 Illumination system particularly for microlithography |
| 04/28/2005 | US20050087700 Particle therapy system |
| 04/27/2005 | EP1526550A1 Mirror for use in a lithographic apparatus, lithographic apparatus comprising such a mirror and device manufacturing method |
| 04/27/2005 | EP1525901A1 Particle therapy system |
| 04/27/2005 | EP1525590A1 Screened chamber for ion therapy with neutrons having energy up to gev |
| 04/27/2005 | EP1525512A2 Method of forming and repairing a lithographic template having a gap defect |
| 04/27/2005 | CN1611065A 3D stereoscopic X-ray system with two different target track |
| 04/27/2005 | CN1610051A Cathode and counter cathode arrangement in an ion source |
| 04/27/2005 | CN1609715A Top layer of a mirror for use in a lithographic apparatus, mirror for use in a lithographic apparatus, lithographic apparatus comprising such a mirror and device manufacturing method |
| 04/27/2005 | CN1199042C Radiation testing system and method |
| 04/26/2005 | US6885451 Infrared detection of composite article components |
| 04/26/2005 | US6885013 System for, and method of, irradiating articles |
| 04/26/2005 | US6885011 Irradiation system and method |
| 04/26/2005 | CA2148703C Industrial material processing electron linear accelerator |
| 04/21/2005 | WO2005036561A2 X-ray pallet processing |
| 04/21/2005 | WO2005010612A3 Defect inspection of extreme ultraviolet lithography masks and the like |
| 04/21/2005 | WO2003091699A3 Gas-target neutron generation and applications |
| 04/21/2005 | US20050084768 Attenuated phase shift mask for extreme ultraviolet lithography and method therefore |
| 04/21/2005 | US20050084070 Method of adjusting the emission rate of radiation from a source of radiation |
| 04/21/2005 | US20050082641 Flexible and elastic dielectric integrated circuit |
| 04/21/2005 | US20050082626 Membrane 3D IC fabrication |
| 04/21/2005 | US20050082497 Ion implanter electrodes |
| 04/20/2005 | EP1524681A2 Angular aperture shaped beam system and method |
| 04/20/2005 | EP1524012A1 Device for positioning a patient with a tumor in the head or neck region in a heavy-ion therapy chamber |
| 04/20/2005 | EP1523699A2 Projection objective for a projection exposure apparatus |
| 04/20/2005 | CN1607640A Method of charged particle beam lithography and equipment for charged particle beam lithography |