| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 10/23/2008 | US20080258073 Method and apparatus for simultaneously depositing and observing materials on a target |
| 10/23/2008 | DE102008016055A1 Lampenanordnung Lamp assembly |
| 10/22/2008 | CN201138579Y Ultraviolet irradiation apparatus for irradiating lubricating material |
| 10/21/2008 | US7439528 Particle therapy system and method |
| 10/21/2008 | US7439527 Ion beam irradiation apparatus |
| 10/21/2008 | US7439525 Demagnification measurement method for charged particle beam exposure apparatus, stage phase measurement method for charged particle beam exposure apparatus, control method for charged particle beam exposure apparatus, and charged particle beam exposure apparatus |
| 10/21/2008 | US7439503 Charged particle beam irradiation method, method of manufacturing semiconductor device and charged particle beam apparatus |
| 10/16/2008 | WO2008123301A1 X-ray generator employing hemimorphic crystal |
| 10/16/2008 | WO2006093675A3 Process and apparatus for treating biological organisms |
| 10/16/2008 | US20080253517 Method and device of irradiation of logs with x-ray as a phytosanitary treatment |
| 10/16/2008 | US20080251737 Ion implantation apparatus |
| 10/16/2008 | US20080251713 Ion implantation apparatus and ion implantation method |
| 10/14/2008 | US7436490 Exposure apparatus using blaze type diffraction grating to diffract EUV light and device manufacturing method using the exposure apparatus |
| 10/14/2008 | US7435980 Electron beam irradiation device |
| 10/14/2008 | US7435979 Optical device and method of manufacture |
| 10/14/2008 | US7435972 Focused ion beam apparatus and liquid metal ion source |
| 10/09/2008 | WO2008100330A3 Surface modification of polymer surface using ion beam irradiation |
| 10/09/2008 | US20080245957 Tuning an ion implanter for optimal performance |
| 10/09/2008 | DE102004019049B4 Verfahren zur Stimulation des Pfanzenwachstums A method for stimulating the Pfanzenwachstums |
| 10/08/2008 | EP1470447B1 Photolithographic critical dimension control using reticle measurements |
| 10/08/2008 | CN100425106C Plasma-assisted decrystallization |
| 10/07/2008 | US7433503 Method and arrangement for positioning a patient in a medical diagnosis or therapy device |
| 10/07/2008 | US7432514 Method and apparatus for surface potential reflection electron mask lithography |
| 10/07/2008 | US7432511 Method of operating liquid in the vacuum or low-pressure environment and observing the operation and device for the operation and observation |
| 10/07/2008 | US7432022 Photo mask capable of improving resolution by utilizing polarization of light and method of manufacturing the same |
| 10/07/2008 | US7431813 Multi-chambered substrate processing equipment having sealing structure between chambers thereof, and method of assembling such equipment |
| 10/02/2008 | WO2008117641A1 Electron beam sterilizer |
| 10/02/2008 | US20080242065 Control of ion angular distribution function at wafer surface |
| 10/02/2008 | US20080240350 Method and device for delivering radiotherapy |
| 10/02/2008 | US20080237497 Pixelated modulation of illumination pupil image |
| 10/02/2008 | US20080237496 Techniques for Improving the Performance and Extending the Lifetime of an Ion Source with Gas Mixing |
| 10/02/2008 | US20080237492 Methods and processing systems for using a gas cluster ion beam to offset systematic non-uniformities in workpieces processed in a process tool |
| 10/02/2008 | US20080237491 Apparatus and methods for systematic non-uniformity correction using a gas cluster ion beam |
| 10/02/2008 | US20080237460 Method for maskless particle-beam exposure |
| 10/02/2008 | DE102008013312A1 Laser treatment of printed substrate, to dry or harden printing ink, includes addition of soluble, infrared absorbing cyanine compound as laser radiation absorber to accelerate drying |
| 10/02/2008 | DE102007015264A1 Two/ three-dimensionally formed object's coated surface hardening device for use during industrial production process, has controller serving for influence of movement of object carrier along path provided by linear guide |
| 10/01/2008 | EP1975983A2 Collector optical system, light source unit, illumination optical apparatus, and exposure apparatus |
| 10/01/2008 | EP1974753A1 Portable electron beam sterilisation device |
| 10/01/2008 | EP0962020B1 Method and apparatus for product x-radiation |
| 10/01/2008 | CN101278361A Method and apparatus for targeting a tumor during radiotherapy using a virtual image |
| 10/01/2008 | CN100423183C Umbilical cord facilities connection for an ion beam implanter |
| 09/30/2008 | US7430731 Method for electrochemically fabricating three-dimensional structures including pseudo-rasterization of data |
| 09/25/2008 | WO2008116190A2 Beam control assembly for ribbon beam of ions for ion implantation |
| 09/25/2008 | WO2008114422A1 Beam drawing device |
| 09/25/2008 | US20080235651 Method and apparatus for determining an optical model that models the effects of optical proximity correction |
| 09/25/2008 | US20080234865 Patient Positioning Device |
| 09/25/2008 | US20080230724 Contamination reduction during ion implantation |
| 09/25/2008 | US20080230723 Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device |
| 09/25/2008 | US20080230722 Integrated circuit and method including a patterning method |
| 09/25/2008 | US20080230721 Uv light irradiating apparatus with liquid filter |
| 09/25/2008 | US20080230712 Beam control assembly for ribbon beam of ions for ion implantation |
| 09/25/2008 | US20080230711 Charged-Particle Exposure Apparatus With Electrostatic Zone Plate |
| 09/25/2008 | DE102007013424A1 Lichthärtgerät A light curing |
| 09/25/2008 | DE102006038504B4 Zahnärztliche Behandlungsleuchte Dental treatment light |
| 09/24/2008 | CN100421206C Ion beam irradiation apparatus and insulating spacer for the same |
| 09/23/2008 | CA2331211C Method for producing ac-225 by irradiation of ra-226 with protons |
| 09/18/2008 | US20080225259 Illumination system with variable adjustment of the illumination |
| 09/18/2008 | DE202008008577U1 Vorrichtung zur Verhinderung des Strahlungsaustritts bei UV-Bestrahlungsanlagen Device for preventing radiation leakage during UV irradiation facilities |
| 09/18/2008 | DE102008014378A1 Belichtungskammer für die Aushärtung von Lacken auf Bauteilen Exposure chamber for the curing of coatings on components |
| 09/18/2008 | DE102005002537B4 Vorrichtung für einen Strahl geladener Teilchen zum Messen eines Abbildungsvergrösserungsfehlers Device for a charged particle beam for measuring an imaging magnification error |
| 09/17/2008 | EP1609165B1 Ion beam incident angle detector for ion implant systems |
| 09/17/2008 | CN100419917C Device and method for producing radioisotopes |
| 09/16/2008 | US7425717 Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method |
| 09/16/2008 | US7425715 Digital parallel electron beam lithography stamp |
| 09/16/2008 | US7425714 Measurement method of electron beam current, electron beam writing system and electron beam detector |
| 09/16/2008 | US7425713 Synchronous raster scanning lithographic system |
| 09/11/2008 | US20080221442 Imaging for use with moving organs |
| 09/10/2008 | EP1967284A2 Method and device for UV-ray hardening of substrate layers |
| 09/10/2008 | CN201113205Y Laser radiation device |
| 09/10/2008 | CN101262734A A Ti window cooling system for electric curtain accelerator |
| 09/09/2008 | US7424094 Gamma radiation imaging system for non-destructive inspection of the luggage |
| 09/09/2008 | US7423276 Irradiation system with ion beam/charged particle beam |
| 09/04/2008 | WO2008064271A3 Device and method for immobilizing patients for breast radiation therapy |
| 09/04/2008 | US20080210886 Laser processing method and laser processing apparatus |
| 09/04/2008 | DE102007008964A1 UV irradiation device for hardening materials for e.g. UV hardening optical data medium, has UV light source arranged within housing, where light source is formed of UV-gas discharge emitter and UV-LED arrangement |
| 09/03/2008 | CN101256850A Low energy electron accelerator reactor under beam |
| 09/03/2008 | CN100417307C Microfocus X-ray apparatus and its using method |
| 09/03/2008 | CN100416232C Light scattering EUVL mask |
| 09/02/2008 | US7420191 Discharge radiation source, in particular UV radiation |
| 09/02/2008 | US7420189 Ultra precise polishing method and ultra precise polishing apparatus |
| 09/02/2008 | US7420181 Liquid metal ion gun |
| 08/28/2008 | WO2007124248A3 System and method for high resolution radiation field shaping |
| 08/28/2008 | US20080203324 Method and system for improvement of dose correction for particle beam writers |
| 08/28/2008 | US20080203299 Charged Particle Beam Apparatus |
| 08/27/2008 | CN100413762C Method and device for electron beam irradiation |
| 08/26/2008 | US7418694 Method for generating test patterns utilized in manufacturing semiconductor device |
| 08/26/2008 | US7417241 Ion implantation method and method for manufacturing semiconductor device |
| 08/26/2008 | US7417239 Method and device for electron beam irradiation |
| 08/21/2008 | WO2008100330A2 Surface modification of polymer surface using ion beam irradiation |
| 08/21/2008 | WO2008061173A3 Generation, acceleration, focusing and collection of a high-brightness, space-charge-dominated circular charged-particle beam |
| 08/21/2008 | US20080200998 Lithographic apparatus and device manufacturing method |
| 08/21/2008 | US20080197299 Extreme ultra violet light source apparatus |
| 08/21/2008 | US20080197295 Device And Method For Producing Resist Profiled Elements |
| 08/19/2008 | US7414250 Cryogenic variable temperature vacuum scanning tunneling microscope |
| 08/14/2008 | US20080192218 Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus |
| 08/14/2008 | US20080191154 Ion implanting apparatus and method for implanting ions |
| 08/14/2008 | US20080191152 Treatment Station For Particle Therapy |
| 08/14/2008 | US20080191141 Apparatus for performing in vivo dosimetry |
| 08/14/2008 | US20080191121 Focused laser beam processing |
| 08/13/2008 | EP1956608A1 Electron beam application method, electron beam application device, electron beam application device for opening-equipped vessel |