| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 12/31/2008 | CN201174259Y Low-energy electronic accelerator beam device reactor |
| 12/31/2008 | CN101336456A Method and apparatus for scanning a workpiece through an ion beam |
| 12/31/2008 | CN100447671C Photoetching projector and reflector assembly for the same |
| 12/31/2008 | CN100447289C Plasma-assisted nitrogen surface treatment |
| 12/31/2008 | CA2691484A1 Higher pressure, modular target system for radioisotope production |
| 12/30/2008 | US7471765 Cone beam computed tomography with a flat panel imager |
| 12/30/2008 | US7470033 Reflection-type projection-optical systems, and exposure apparatus comprising same |
| 12/25/2008 | US20080318345 Plasma ion implantation process control using reflectometry |
| 12/25/2008 | US20080317207 Remote Communication Method and Device Unsing Nuclear Isomers |
| 12/25/2008 | US20080315129 Ion planting while growing a III-nitride layer |
| 12/25/2008 | US20080315126 Laser light source apparatus, exposure method, and exposure apparatus |
| 12/25/2008 | US20080315121 Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector |
| 12/25/2008 | US20080315097 Charged particle beam apparatus and specimen holder |
| 12/24/2008 | EP2006860A2 Electron beam generating apparatus |
| 12/24/2008 | EP2005993A1 Charged particle irradiation system |
| 12/24/2008 | EP2005444A2 Bench-top image-guided conformal irradiation system for laboratory animals |
| 12/24/2008 | CN100446167C Plasma focus light source with impoved pulse power system |
| 12/23/2008 | US7469058 Method and system for a maskless lithography rasterization technique based on global optimization |
| 12/23/2008 | US7469040 X-ray tube for high dose rates, method of generating high dose rates with X-ray tubes and a method of producing corresponding X-ray devices |
| 12/18/2008 | US20080311762 Semiconductor device surface roughness reduction |
| 12/18/2008 | US20080308743 Charged particle beam application apparatus |
| 12/18/2008 | US20080308731 Specimen Holder, Specimen Inspection Apparatus, Specimen Inspection Method, and Method of Fabricating Specimen Holder |
| 12/17/2008 | EP1053551B1 Wavelength dispersive x-ray spectrometer with x-ray collimator optic for increased sensitivity over a wide x-ray energy range |
| 12/16/2008 | US7466408 Measurement system |
| 12/16/2008 | US7465944 Charged particle therapy apparatus and charged particle therapy system |
| 12/16/2008 | US7465943 Controlling the flow through the collector during cleaning |
| 12/11/2008 | WO2008149600A1 Radioisotope production system and radioisotope production method |
| 12/11/2008 | WO2008149461A1 Charged particle beam inspection apparatus and method for inspecting charged particle beam |
| 12/11/2008 | US20080302980 Extreme ultra-violet lithographic apparatus and device manufacturing method |
| 12/11/2008 | US20080302974 Optical auto focusing system and method for electron beam inspection tool |
| 12/11/2008 | US20080302955 Techniques for ion beam current measurement using a scanning beam current transformer |
| 12/11/2008 | US20080302559 Flexible and elastic dielectric integrated circuit |
| 12/10/2008 | EP1419514B1 Split double gap buncher and method for ion bunching in an ion implantation system |
| 12/10/2008 | CN201163547Y Lower irradiation device for tube bundle |
| 12/10/2008 | CN100441732C Plasma-assisted reinforced coating |
| 12/09/2008 | US7462843 Apparatus and methods for ion beam implantation |
| 12/09/2008 | US7462842 Device, EUV lithographic device and method for preventing and cleaning contamination on optical elements |
| 12/04/2008 | WO2008146654A1 Electron beam sterilizer |
| 12/04/2008 | US20080299490 Writing method and charged particle beam writing apparatus |
| 12/04/2008 | US20080298553 Particle-Beam Treatment System |
| 12/04/2008 | US20080298542 Image Producing Methods and Image Producing Devices |
| 12/04/2008 | US20080296516 Method and apparatus for specimen fabrication |
| 12/03/2008 | EP1998601A1 Apparatus and method for measuring profile of electronic beam and laser beam |
| 12/02/2008 | US7460228 Fast particle generating apparatus |
| 12/02/2008 | US7460212 Collector configured of mirror shells |
| 12/02/2008 | US7459705 Charged particle beam exposure method of character projection system, charged particle beam exposure device of character projection system, program for use in charged particle beam exposure device, and manufacturing method of semiconductor device |
| 12/02/2008 | US7459704 Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms |
| 12/02/2008 | US7459703 Ion implant beam angle integrity monitoring and adjusting |
| 12/02/2008 | US7459690 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 12/02/2008 | US7459681 Scanning electron microscope |
| 12/02/2008 | CA2439330C Radiotherapeutic apparatus |
| 12/02/2008 | CA2353980C Method for treating a target volume with a particle beam and device implementing same |
| 11/27/2008 | WO2008143242A1 Ion beam control apparatus and method |
| 11/27/2008 | WO2008100330A9 Surface modification of polymer surface using ion beam irradiation |
| 11/27/2008 | US20080292058 Device for Limiting Field on Which Radiation is Irradiated |
| 11/27/2008 | US20080291417 Laser Beam Conditioning System Comprising Multiple Optical Paths Allowing for Dose Control |
| 11/27/2008 | US20080290300 Crystallization apparatus and crystallization method |
| 11/27/2008 | US20080290298 Method and system for treating an interior surface of a workpiece using a charged particle beam |
| 11/27/2008 | DE102007024027A1 Verfahren und Vorrichtung zur kombinierten Behandlung einer Oberfläche mit einem Plasma und mit elektromagnetischer Strahlung Method and apparatus for the combined treatment of a surface with a plasma and electromagnetic radiation |
| 11/26/2008 | CN101312749A Decontamination and sterilization system using large area x-ray source |
| 11/26/2008 | CN100436763C Plasma-assisted engine exhausting process |
| 11/25/2008 | US7458058 Verifying a process margin of a mask pattern using intermediate stage models |
| 11/25/2008 | US7458057 Pattern correction method, pattern correction system, mask manufacturing method, semiconductor device manufacturing method, recording medium, and designed pattern |
| 11/25/2008 | US7456408 Illumination system particularly for microlithography |
| 11/25/2008 | CA2425057C Radiotherapy apparatus and collimator set therefor |
| 11/20/2008 | US20080283777 In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (fib and sem) techniques |
| 11/20/2008 | US20080283776 Method and apparatus for EUV plasma source target delivery |
| 11/20/2008 | US20080283768 Transfer mechanism for transferring a specimen |
| 11/19/2008 | EP1991993A2 Electron beam emitter |
| 11/18/2008 | US7453077 EUV light source |
| 11/18/2008 | US7453074 Ion implanter with ionization chamber electrode design |
| 11/18/2008 | US7452637 protecting a photomask from particle defects by heating the photomask to initiate a thermophoretic force |
| 11/18/2008 | CA2328045C Device and method for treating water with ozone generated by water electrolysis |
| 11/13/2008 | WO2008064155A3 Stencil design and method for cell projection particle beam lithography |
| 11/13/2008 | US20080279331 X-ray imaging system and x-ray imaging method |
| 11/13/2008 | US20080277598 Electron beam exposure apparatus |
| 11/13/2008 | DE102004031079B4 Verfahren zur Herstellung einer Reflexionsmaske A method of manufacturing a reflection mask |
| 11/12/2008 | CN101303538A Exposure apparatus |
| 11/11/2008 | US7450301 Reflective projection lens for EUV-photolithography |
| 11/11/2008 | US7449701 Particle beam irradiation equipment and particle beam irradiation method |
| 11/11/2008 | US7449700 Electron beam exposure apparatus, electron beam exposure method and method of manufacturing semiconductor device |
| 11/11/2008 | US7449699 Method and apparatus for creating a topography at a surface |
| 11/06/2008 | US20080273661 Irradiation method and apparatus |
| 11/06/2008 | US20080272315 Material Activating Device |
| 11/06/2008 | DE202005021576U1 Vorrichtung zur Durchführung eines Verfahrens zur Modifizierung von Oberflächen strahlenhärtbarer Farben und Lacke durch photochemische Mikrofaltung mittels kurzwelliger monochromatischer UV-Strahlung unter stabilen Bestrahlungs- und Inertisierungsbedingungen Apparatus for performing a method for modifying surfaces of radiation-curable paints and varnishes by photochemical micropleat with shortwave monochromatic UV radiation under stable irradiation and Inertisierungsbedingungen |
| 11/05/2008 | CN201145674Y Radiation imaging detector |
| 11/05/2008 | CN101299901A Irradiation accelerator gathering magnetic iron and method for preparing the same |
| 11/04/2008 | US7448018 System and method for employing patterning process statistics for ground rules waivers and optimization |
| 11/04/2008 | US7446328 Patient alignment system with external measurement and object coordination for radiation therapy system |
| 11/04/2008 | US7446326 Technique for improving ion implanter productivity |
| 11/04/2008 | CA2450484C Apparatus and method for generating 18f-fluoride by ion beams |
| 10/30/2008 | WO2007133723A3 X-ray transparent bed and gurney extender for use with mobile computerized tomography (ct) imaging systems |
| 10/29/2008 | CN201142238Y Liftable conveyer |
| 10/29/2008 | CN101297376A Electron beam application method, electron beam application device, electron beam application device for opening-equipped vessel |
| 10/29/2008 | CN100429749C Neutral particle beam lithography |
| 10/29/2008 | CN100429123C Device and method for electron beam irradiation. |
| 10/28/2008 | US7443953 Structured anode X-ray source for X-ray microscopy |
| 10/28/2008 | US7443948 Illumination system particularly for microlithography |
| 10/23/2008 | US20080260100 Radiochemical Sensor for Fluids |
| 10/23/2008 | US20080258084 Charged-Particle Exposure Apparatus |