| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 03/12/2009 | US20090065708 Moon grid for transmission electron microscopy tomography and method of fabricating the same |
| 03/12/2009 | DE102007040209A1 Vorrichtung zum Bestrahlen eines Substrats Apparatus for irradiating a substrate |
| 03/11/2009 | EP2034490A1 High efficiency collector for laser plasma EUV source |
| 03/11/2009 | CN201207040Y Novel arm-folding mechanism for vehicle-mounted radiating imaging system |
| 03/11/2009 | CN100468019C Dose radiometer |
| 03/11/2009 | CN100467941C UV-ray irradiator |
| 03/10/2009 | US7501644 Apparatus and method for controlled particle beam manufacturing |
| 03/10/2009 | US7501642 Radiation source |
| 03/10/2009 | US7500785 X-ray shielding device |
| 03/05/2009 | WO2009026997A1 Quick regulation of the range of high-energy ion beams for precision irradiation of moving target volumes |
| 03/05/2009 | US20090057577 Optics for generation of high current density patterned charged particle beams |
| 03/05/2009 | US20090057576 Charged particle beam writing method |
| 03/05/2009 | US20090057575 Charged particle beam lithography apparatus and charged particle beam lithography method |
| 03/05/2009 | US20090057574 Methods for modifying features of a workpiece using a gas cluster ion beam |
| 03/05/2009 | US20090057570 Writing data creation method and charged particle beam writing apparatus |
| 03/05/2009 | US20090057568 Production device and production method for an optical device component having a grating structure |
| 03/04/2009 | EP2030650A2 Particle beam irradiation apparatus and treatment planning unit |
| 03/04/2009 | EP2030489A2 X-ray transparent bed and gurney extender for use with mobile computerized tomography (ct) imaging systems |
| 03/03/2009 | US7499149 Holographic mask for lithographic apparatus and device manufacturing method |
| 02/26/2009 | US20090050825 Sealing between vacuum chambers |
| 02/25/2009 | EP2027888A2 Particle beam irradiation apparatus and treatment planning unit |
| 02/25/2009 | EP2027586A2 Ion beam apparatus and method for ion implantation |
| 02/24/2009 | US7495245 Apparatus and method for controlled particle beam manufacturing |
| 02/24/2009 | US7495242 Apparatus and method for controlled particle beam manufacturing |
| 02/24/2009 | US7495241 Ion beam irradiation apparatus and insulating spacer for the same |
| 02/19/2009 | US20090045339 Charged particle beam equipment |
| 02/18/2009 | CN101366635A Radiation detecting cassette and radiation image capturing system |
| 02/17/2009 | US7493590 Process window optical proximity correction |
| 02/17/2009 | US7491945 Charged particle beam apparatus, charged particle beam control method, substrate inspection method and method of manufacturing semiconductor device |
| 02/17/2009 | US7490985 Semiconductor integrated circuit arrangement device and method |
| 02/12/2009 | WO2009000155A1 A photoneutron conversion target |
| 02/12/2009 | US20090041182 Illumination system for euv lithography |
| 02/12/2009 | US20090039293 Apparatus for forming nano pattern and method for forming the nano pattern using the same |
| 02/12/2009 | US20090039292 Exposure device |
| 02/12/2009 | US20090039285 Method and device for controlling and monitoring a position of a holding element |
| 02/12/2009 | US20090039275 Processing method, manufacturing method of semiconductor device, and processing apparatus |
| 02/11/2009 | EP1660175A4 Modular patient support system |
| 02/10/2009 | US7488962 Arrangement for the generation of intensive short-wavelength radiation based on a gas discharge plasma |
| 02/10/2009 | US7488960 Apparatus and method for controlled particle beam manufacturing |
| 02/10/2009 | US7488958 High conductance ion source |
| 02/05/2009 | US20090032739 Method and System for Charged-Particle Beam Lithography |
| 02/05/2009 | US20090032738 Charged particle beam writing apparatus and method thereof |
| 02/05/2009 | US20090032725 Apparatus and methods for treating a workpiece using a gas cluster ion beam |
| 02/04/2009 | EP2020006A2 System and method for high resolution radiation field shaping |
| 02/04/2009 | CN100459019C X-ray generating mechanism using electron field demission cathode |
| 02/04/2009 | CN100458563C Collimator, x-raying apparatus and x-ray photographing device |
| 02/03/2009 | US7486775 Tissue irradiation device with at least one electron source and numerous radiation heads |
| 02/03/2009 | US7486771 Process and apparatus for irradiating product pallets or containers |
| 02/03/2009 | US7485879 Electron beam writing apparatus and writing method |
| 02/03/2009 | US7485874 Apparatus for manufacturing semiconductor substrates |
| 02/03/2009 | US7485858 Inspection method for semiconductor wafer and apparatus for reviewing defects |
| 02/03/2009 | US7485571 Method of making an integrated circuit |
| 01/29/2009 | WO2009015154A1 Intensity modulated electron beam and application to electron beam blanker |
| 01/29/2009 | WO2008145364A3 Method for the production of an optical element by means of a molding process, optical element produced according to said method, collector, and lighting system |
| 01/29/2009 | DE19648062B4 Belichtungsgerät zum Bestrahlen von Dice-Band und Verfahren zu dessen Belichtung An exposure apparatus for irradiating dicing tape and method of exposure |
| 01/28/2009 | EP1428226B1 Method of and apparatus for transmuting radioactive waste |
| 01/28/2009 | CN201188089Y Ray apparatus for human body safety-check |
| 01/28/2009 | CN201188088Y Detection system for ship radialization imaging |
| 01/28/2009 | CN101352353A Large-area individually addressable multi-beam X-ray system |
| 01/27/2009 | US7482586 Methods for sample preparation and observation, charged particle apparatus |
| 01/27/2009 | US7482102 Monitoring pattern configured to obtain information required for adjusting optical system; asymmetrical diffraction grating generates positive first order diffracted light and negative first order diffracted light; probing phase shifters |
| 01/27/2009 | CA2314039C Uv radiation system having materials for selectively attenuating radiation |
| 01/22/2009 | DE102008002459A1 Ultraviolettlampensystem sowie Verfahren zum Regeln des ausgesandten ultravioletten Lichts Ultraviolet lamp system and method for controlling the emitted ultraviolet light |
| 01/22/2009 | DE102008002458A1 Detektor für ein Ultraviolett-Lampensystem sowie entsprechendes Verfahren zum Überwachen von Mikrowellenenergie A detector for ultraviolet lamp system and corresponding method for monitoring the microwave energy |
| 01/21/2009 | CN100455144C Plasma-assisted heat treatment |
| 01/21/2009 | CN100454145C Method of charged particle beam lithography and equipment for charged particle beam lithography |
| 01/20/2009 | US7480890 Method for correcting and configuring optical mask pattern |
| 01/20/2009 | US7479694 Membrane 3D IC fabrication |
| 01/15/2009 | WO2008024463A3 Determining a target-to-surface distance and using it for real time absorbed dose calculation and compensation |
| 01/15/2009 | US20090016596 Removal of relatively unimportant shapes from a set of shapes |
| 01/15/2009 | US20090015812 Illumination system particularly for microlithography |
| 01/15/2009 | US20090014667 External cathode ion source |
| 01/15/2009 | US20090014666 Optical system having a clearning arrangement |
| 01/15/2009 | US20090014664 Specimen Holder for Electron Microscope |
| 01/15/2009 | DE102007031628A1 Radiation source for fixing UV-crosslinkable toners on a printing material comprises a low-pressure gas discharge lamp containing a gas emitting in the UV spectrum and a microwave application unit with two separate microwave applicators |
| 01/14/2009 | EP1573749A4 System and method for radioactive waste destruction |
| 01/13/2009 | US7476881 Charged beam drawing apparatus and charged beam drawing method |
| 01/13/2009 | US7476880 Writing a circuit design pattern with shaped particle beam flashes |
| 01/13/2009 | US7476871 Specimen box for electron microscope capable of observing general specimen and live cell |
| 01/08/2009 | WO2009005060A1 Device and method for adjusting collision timing between electron beam and laser light |
| 01/08/2009 | WO2009005059A1 High brightness x-ray generating device and method |
| 01/08/2009 | US20090008579 Electron beam lithography apparatus and design method of patterned beam-defining aperture |
| 01/07/2009 | EP2011127A1 Curved beam-guiding magnet with saddle- and race-track-shaped superconducting coils and irradiation unit with such a magnet |
| 01/07/2009 | CN100448499C Cone-beam computerized tomography with flat-panel image |
| 01/06/2009 | US7475383 Method of fabricating photo mask |
| 01/06/2009 | US7473917 Lithographic apparatus and method |
| 01/06/2009 | US7473913 Gantry system for a particle therapy facility |
| 01/06/2009 | US7473912 Method and apparatus for patterning micro and nano structures using a mask-less process |
| 01/06/2009 | US7473910 Electron beam lithography apparatus |
| 01/02/2009 | DE102008028533A1 Verfahren zum Trocknen von Druckfarbe auf einem Bedruckstoff Method of drying printing ink on a printing material |
| 01/02/2009 | DE102007029330A1 UV-Strahlungsanlage UV Radiation Facility |
| 01/02/2009 | DE102007029316A1 Vorrichtung zum UV-Strahlungshärten A device for UV-radiation curing |
| 01/01/2009 | US20090001293 Charged particle beam writing method |
| 01/01/2009 | US20090001292 Exposure device |
| 01/01/2009 | US20090001291 Apparatus and Method for Partial Ion Implantation |
| 12/31/2008 | WO2009000156A1 Photoneutron conversion target and photoneutron x-ray source |
| 12/31/2008 | WO2009000076A1 Higher pressure, modular target system for radioisotope production |
| 12/31/2008 | EP2008627A2 Apparatus and method for making and inspecting pre-fastened articles |
| 12/31/2008 | EP2007685A2 System, method and apparatus for treating liquids with wave energy from an electrical arc |
| 12/31/2008 | EP1556737B1 Methods for fabrication of nanometer-scale engineered structures for mask repair application |