Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302)
06/1992
06/16/1992US5121705 Loading lock for chemical vapor deposition apparatus
06/16/1992US5121531 Refractory susceptors for epitaxial deposition apparatus
06/09/1992US5120676 Use of phosphine and arsine compounds in chemical vapor deposition and chemical doping
06/09/1992US5120394 Epitaxial growth process and growing apparatus
06/09/1992US5119761 Substrate heating apparatus for forming thin films on substrate surface
06/09/1992US5119540 Susceptor
06/08/1992CA2050649A1 Devices based on si/ge
06/03/1992EP0487897A1 CVD diamond by alternating chemical reactions
06/02/1992US5118642 Reacting organometallic compound in vapor phase
06/02/1992US5118365 Ii-iv group compound crystal article and process for producing same
06/02/1992US5118286 Closed loop method and apparatus for preventing exhausted reactant gas from mixing with ambient air and enhancing repeatability of reaction gas results on wafers
05/1992
05/27/1992CA2049673A1 Cvd diamond by alternating chemical reactions
05/26/1992US5116785 Decomposing fluorinated organometallic complex of beryllium, calcium, strontium, barium or lanthanide in vicinity of semiconductor substrate
05/26/1992US5116181 Robotically loaded epitaxial deposition apparatus
05/26/1992CA1301958C Method and apparatus for venting vacuum processing equipment
05/26/1992CA1301896C Photoelectric conversion device
05/20/1992EP0486066A1 Method for forming crystal article
05/20/1992EP0486019A1 Method for forming single crystal layer
05/20/1992EP0485454A1 Process for making cages for the vapour-deposition of thin films
05/19/1992US5114745 Method of producing a thin carbide layer on a carbon substrate, growing a diamond or diamond-like film on the carbide layer, and removing the carbon substrate
05/19/1992US5114695 Process of producing aluminum and titanium nitrides
05/19/1992CA1301035C Method of epitaxially growing compound semiconductor materials
05/14/1992WO1992007664A1 Method of treating and depositing diamonds
05/13/1992EP0485301A1 Deposition apparatus for growing a material with reduced hazard
05/13/1992EP0485141A2 Composite superconductor
05/13/1992EP0484922A1 III-V compound semiconductor device, printer and display device utilizing the same, and method for producing said semiconductor device
05/13/1992EP0484879A2 Method and apparatus for gas phase synthesis
05/12/1992US5112773 Nodules, heterogeneous
05/12/1992US5112699 Metal-metal epitaxy on substrates and method of making
05/12/1992US5112643 Gaseous phase synthesized diamond and method for synthesizing same
05/12/1992US5112432 Organometallic compounds
05/05/1992US5110579 Vapor deposition from mixture of methane and hydrogen
05/05/1992US5110577 Harder than diamond
05/05/1992US5110437 Plasma processing apparatus
05/05/1992US5110405 Method of manufacturing single-crystal diamond particles
04/1992
04/30/1992CA2050456A1 Fabrication of polycrystalline free-standing diamond films
04/29/1992EP0482648A1 Method of vapor-growing semiconductor crystal and apparatus for vapor-growing the same
04/29/1992CN1016449B Process for formation of functional deposited film containing groups ii and vi atoms as main constituent atoms by microwave plasma chemicul vapor deposition process
04/28/1992US5109264 Semiconductor wafers having a shape suitable for thermal treatment
04/28/1992US5108792 Used for chemical vapor deposition thermal annealing require high temperature treatment
04/28/1992US5108779 Diamond crystal growth process
04/28/1992US5108543 Method of surface treatment
04/28/1992US5108540 Method for epitaxial growth from the vapor phase of semiconductor materials
04/22/1992EP0481140A1 Method for preparing laminates of ZnSe and ZnS
04/21/1992US5106453 MOCVD method and apparatus
04/15/1992EP0480804A2 Process for the heteroepitaxial growth of films
04/15/1992EP0480557A2 Method of making P-type compound semiconductor
04/15/1992CN1016296B Unstrained defect-free epitaxial mismatched heterostructures and method of fabrication
04/02/1992WO1992005867A1 Device for generating microwave plasma and method of making diamond film utilizing said device
04/02/1992WO1992005577A1 Method and apparatus for growing compound semiconductor crystals
04/02/1992CA2069942A1 Microwave plasma generating apparatus and process for preparing diamond layer by utilizing same
04/01/1992EP0477374A1 Process for growing semiconductor crystal
04/01/1992EP0324811B1 Gas inlet for a plurality of various reaction gases in reaction vessels
03/1992
03/31/1992US5100691 Forming nucleation surface on amorphous substrate, selective vapor deposition of chalcopyrite or intermetallic on this surface, integrated circuits
03/25/1992WO1992005110A1 Flame or plasma synthesis of diamond under turbulent and transition flow conditions
03/25/1992EP0476774A1 Chamber with a warm and a cold area and at least one gas inlet tube
03/25/1992EP0476713A2 Method for forming crystal and crystal article obtained by said method
03/25/1992EP0476684A2 Method for selective growth of a thin film on a patterned wafer
03/25/1992EP0476676A2 Thin film deposition method
03/25/1992EP0476336A2 Composite body, and manufacture and application thereof
03/25/1992CN1059763A Method and apparatus for treating surface
03/25/1992CA2093144A1 Flame or plasma synthesis of diamond under turbulent and transition flow conditions
03/24/1992US5099122 Method for evaluation of transition region of silicon epitaxial wafer
03/24/1992US5098857 Method of making semi-insulating gallium arsenide by oxygen doping in metal-organic vapor phase epitaxy
03/24/1992US5097890 Heat treating apparatus with cooling fluid nozzles
03/18/1992EP0474740A1 Reaction chamber with controlled radiant energy heating and distributed reactant flow
03/17/1992US5096860 Nitriding, reacting carbon and alumina in nitrogen in alkali metal oxide presence
03/17/1992US5096534 Method for improving the reactant gas flow in a reaction chamber
03/17/1992CA1297390C Method of epitaxially growing gallium arsenide on silicon
03/11/1992EP0474251A1 Thermal reactor for processing semiconductor wafers and a method of operating such a reactor
03/10/1992US5094975 Conductive crystals epitaxially grown in square holes
03/10/1992US5094711 Process for producing single crystal titanium carbide whiskers
03/04/1992EP0473067A1 Wafer processing reactor
03/04/1992EP0472666A1 Cvd grown transition metal carbide and nitride whiskers
03/03/1992US5093557 Substrate heater and heating element
03/03/1992US5092728 Substrate loading apparatus for a CVD process
02/1992
02/26/1992EP0318506A4 Laser assisted fiber growth
02/25/1992US5091765 Detector
02/25/1992US5091320 Optical method for controlling thickness of semiconductor
02/25/1992US5091208 Novel susceptor for use in chemical vapor deposition apparatus and its method of use
02/25/1992US5091044 Methods of substrate heating for vapor phase epitaxial growth
02/25/1992CA1296241C Method for epitaxial growth from the vapour phase of semiconductor materials
02/19/1992EP0471365A1 Semiconductor wafer processing apparatus
02/18/1992US5088922 Heat-treatment apparatus having exhaust system
02/18/1992US5088697 Heat treating apparatus
02/12/1992EP0470644A2 Superhard material film structure, process of making and use of same
02/11/1992US5087434 Synthesis of diamond powders in the gas phase
02/11/1992US5087433 Method and apparatus for the production of SiC whisker
02/11/1992CA1295455C Hexaamminealuminum iodide monoammoniate and process for its preparation
02/06/1992WO1992002109A1 Coreless refractory fibres
02/06/1992WO1992001828A1 Method and device for manufacturing diamond
02/06/1992WO1992001827A1 Oriented diamond crystals
02/04/1992US5085887 Wafer reactor vessel window with pressure-thermal compensation
01/1992
01/30/1992DE4106846C1 High vacuum tight drive for MBE appts. - comprising mounting head for substrate carrier pivotable between deposition position and charging position
01/29/1992EP0468377A1 Preparation of silicon carbide whiskers
01/25/1992CA2043679A1 Preparation of silicon carbide whiskers
01/23/1992WO1992001092A1 Epitaxial synthesis of diamond crystals at high growth rates
01/22/1992EP0467624A1 Apparatus for and method of backside protection during substrate processing
01/22/1992EP0467392A1 Chemical vapor depositions apparatus and method of manufacturing annealed films
01/22/1992EP0467043A2 Free standing diamond sheet and method and apparatus for making same