Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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01/05/1988 | US4717443 Mass transport of indium phosphide |
01/05/1988 | US4716852 Apparatus for thin film formation using photo-induced chemical reaction |
12/30/1987 | WO1987007848A1 Flash evaporation of monomer fluids |
12/29/1987 | US4716071 Vapor deposition of thin titanium layer, then oxidation to titanium at interface |
12/29/1987 | US4716064 Vapor deposition of exterior coating of titanium or silicon carbide, nitride or boride |
12/29/1987 | US4716050 Chemical vapor deposition of aluminum on an activated surface |
12/29/1987 | US4715940 Metallic strips with connecting bridges |
12/29/1987 | US4715927 Amorphous semiconductors; microwave-generated plasma |
12/29/1987 | US4715319 Device for coating a substrate by means of plasma-CVD or cathode sputtering |
12/29/1987 | US4715318 For processing an element |
12/29/1987 | US4715317 Method for producing of polycrystalline silicon and apparatus thereof |
12/22/1987 | US4714660 Hard coatings with multiphase microstructures |
12/22/1987 | US4714632 Method of producing silicon diffusion coatings on metal articles |
12/22/1987 | US4714627 Vaporization under high vacuum |
12/22/1987 | US4714589 Reactive vapor deposition, reflection of radiated heat |
12/22/1987 | US4714047 Method and device for forming ultrafine particle film of compound |
12/16/1987 | EP0249508A2 A masking member |
12/16/1987 | EP0248883A1 Selective deposition process. |
12/16/1987 | CN87104657A Method and system for manufacturing semiconductor device |
12/16/1987 | CN87104656A Process and system for manufacture of semiconductor device |
12/16/1987 | CN87102726A Method and apparatus for vapor deposition |
12/15/1987 | US4713260 Method of ensuring adhesion of chemically vapor deposited oxide to gold integrated circuit interconnect lines |
12/15/1987 | US4713259 Method for the glow-discharge-activated reactive deposition of electrically conductive material from a gaseous phase |
12/15/1987 | US4713258 Method of forming ultrafine patterns |
12/15/1987 | US4713123 Method of producing extra-low iron loss grain oriented silicon steel sheets |
12/10/1987 | DE3718789A1 Transparenter leitender film und verfahren zu seiner herstellung Transparent conductive film and process for its preparation |
12/09/1987 | EP0248274A2 Plasma surface treatment method and apparatus |
12/08/1987 | US4711807 With argon content |
12/08/1987 | US4711790 Optical CVD method with a strong optical intensity used during an initial period and device therefor |
12/08/1987 | US4711197 For educting gas away from semiconductor wafers |
12/03/1987 | WO1987007310A1 Deposition apparatus |
12/03/1987 | WO1987007309A1 Deposition apparatus with automatic cleaning means and method of use |
12/02/1987 | EP0247783A2 Method of refractory metal deposition |
12/02/1987 | EP0247714A2 Method and apparatus for forming a film on a substrate |
12/02/1987 | EP0247680A1 Process for producing a semiconductor device including the vapour phase deposition of layers on a substrate |
12/01/1987 | US4710428 Sintered silicon carbide porous body impregnated with metallic silicon |
12/01/1987 | US4710346 Method for manufacturing powder material and shaped products utilizing the conditions in outer space |
12/01/1987 | US4709656 Layer forming apparatus |
12/01/1987 | US4709655 Chemical vapor deposition apparatus |
11/26/1987 | DE3617428A1 Process and apparatus for preparing electrically conductive refractory building materials and use of these building materials |
11/24/1987 | US4708884 Low temperature deposition of silicon oxides for device fabrication |
11/24/1987 | US4708768 Semiconductor device fabrication process |
11/19/1987 | EP0246211A2 Sintered body for chip forming machining |
11/19/1987 | EP0245934A2 Low pressure chemical vapor deposition of metal silicide |
11/19/1987 | EP0245764A1 An electrically conductive and oxidation-stable graphite electrode coated with silicon, and process for its production |
11/19/1987 | EP0245716A1 Method and apparatus for forming doped optical preforms |
11/19/1987 | EP0245600A2 Process for the plasma synthesis of hydride compounds and apparatus for carrying out said process |
11/17/1987 | US4707586 Electro conductive film system for aircraft windows |
11/17/1987 | US4707384 Method for making a composite body coated with one or more layers of inorganic materials including CVD diamond |
11/17/1987 | US4707210 Plasma CVD apparatus |
11/17/1987 | CA1229290A1 Manufacture of cadmium mercury telluride |
11/12/1987 | DE3721254A1 Verfahren zur "in-situ" erfassung des thermochemischen randschichtwaermebehandlungszustandes waehrend des behandlungsvorganges metallischer werkstoffe Method for "in-situ" gathering of the thermochemical randschichtwaermebehandlungszustandes during the treatment process of metallic materials |
11/11/1987 | EP0244968A2 Method for the thermal treatment of sintered metal permanent magnets |
11/11/1987 | EP0244874A2 Luminescent material, process for producing it and luminescent semiconductor device using it |
11/11/1987 | EP0244842A2 Apparatus for forming thin film |
11/10/1987 | US4705913 Amorphous silicon devices and method of producing |
11/10/1987 | US4705701 Conductive tin oxide methods |
11/10/1987 | US4705700 Chemical vapor deposition method for the thin film of semiconductor |
11/10/1987 | US4705659 Film formed on carbon layer, carbon then removed by oxidation |
11/10/1987 | US4704988 Process and apparatus for obtaining a gaseous stream containing a compound in the vapor state, more particularly usable for introducing this compound into an epitaxy reactor |
11/05/1987 | WO1987006762A1 Production of semiconductor devices |
11/03/1987 | US4704339 Infra-red transparent optical components |
11/03/1987 | US4704306 Method and mask for forming thin film |
11/03/1987 | US4704300 Plasma chemical vapor deposition |
11/03/1987 | US4703718 Vapor deposition apparatus and method of using same |
10/28/1987 | EP0243074A2 Process for forming deposited film |
10/28/1987 | EP0242898A1 Apparatus comprising a plane susceptor rotating in parallel to a reference plane and arround an axis perpendicular to this plane |
10/27/1987 | US4702960 Surface treatment for carbon and product |
10/27/1987 | US4702936 Reacting silane with oxygen-containing gas to form silicon oxide, nitride or oxynitride film |
10/27/1987 | US4702791 Vapor phase reaction of bismuth, or alkylated bismuth with metal compound |
10/22/1987 | WO1987006275A1 Method for depositing materials containing tellurium |
10/22/1987 | WO1987006273A2 Coating to protect against wear and fretting corrosion of, in particular, metal mechanical components held together by frictional adherence |
10/21/1987 | EP0242207A2 Process for forming deposited film |
10/21/1987 | EP0242182A2 Process for forming deposited film |
10/21/1987 | EP0242100A2 Coated article and method of producing same |
10/21/1987 | EP0241873A2 Fabrication of semiconductor devices utilizing patterned metal layers |
10/20/1987 | US4701381 Manganese alloys, metal coatings |
10/20/1987 | US4701379 Plasma discharge of a boron hydride; uniformity; smoothness |
10/20/1987 | US4701347 Method for growing patterned metal layers |
10/20/1987 | US4701344 Film forming process |
10/20/1987 | US4701343 Method of depositing thin films using microwave energy |
10/20/1987 | US4701317 Thermal decomposition of a diethynylbenzene in an inert carrier gas; graphitization |
10/20/1987 | CA1228268A1 Vacuum deposition system with improved mass flow control |
10/14/1987 | EP0241317A2 Process for forming deposited film |
10/14/1987 | EP0241316A2 Method for forming crystalline deposited film |
10/14/1987 | EP0241311A2 Process for forming deposited film |
10/14/1987 | EP0241204A2 Method for forming crystalline deposited film |
10/14/1987 | EP0241190A2 Method and apparatus for photodeposition of films on surfaces |
10/13/1987 | US4699825 Low pressure vapor deposition; reacting a silane gas and ammonia |
10/13/1987 | US4699805 In u-shaped injector tube coupled to vacuum pump |
10/13/1987 | US4699800 Process for the production of superconducting fiber bundles |
10/13/1987 | US4699799 Method for forming a deposition film |
10/13/1987 | US4699082 Apparatus for chemical vapor deposition |
10/08/1987 | WO1987005831A1 Hermetic coatings for optical fibers |
10/07/1987 | EP0240314A1 Method for forming deposited film |
10/07/1987 | EP0240309A2 Method for forming crystal and crystal article obtained by said method |
10/07/1987 | EP0240306A1 Method for forming deposited film |
10/07/1987 | EP0240305A2 Method for forming a deposited film |
10/07/1987 | EP0239664A1 Process for producing layers containing silicon and oxide |
10/07/1987 | CN86102741A Deposition of materials |