Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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07/08/1987 | EP0228295A2 Method for producing an electronic device having a multi-layer structure |
07/08/1987 | EP0227692A1 Thin layer consisting essentially of ruthenium salt. |
07/08/1987 | CN86106620A Microwave enhanced cvd system under magnetic field |
07/07/1987 | US4678679 Continuous deposition of activated process gases |
07/07/1987 | US4678678 Radiation of metal film with high energy ions |
07/07/1987 | US4678536 Method of photochemical surface treatment |
07/07/1987 | US4677738 Thin film silicon alloy |
07/01/1987 | EP0227388A2 Electrophotographic photosensitive member process and apparatus for the preparation thereof |
07/01/1987 | EP0226898A2 Composite powder, composite bodies and process for their production |
07/01/1987 | EP0226651A1 Apparatus for chemical vapor deposition of a coating on an optical fiber |
06/30/1987 | US4676814 Method for the continuous building of a hollow cylindrical soot body having no internal support |
06/30/1987 | US4676195 Capacitance coupled type, electrode structure |
06/30/1987 | CA1223487A1 Oxide bond for aluminum oxide coated cutting tools |
06/25/1987 | DE3633986A1 Alumina-based surface layer for hard sintered objects and a process for producing it |
06/24/1987 | EP0226130A2 Method of producing silicon diffusion coatings on metal articles |
06/24/1987 | EP0111501B1 Process for forming sulfide layers |
06/23/1987 | US4675206 Process for the production of a surface-coated article |
06/23/1987 | US4675089 Low temperature deposition method for high quality aluminum oxide films |
06/23/1987 | US4674434 Apparatus for forming deposited film |
06/18/1987 | WO1987003741A1 Selective deposition process |
06/17/1987 | CN86107009A Class coating method and resulting article |
06/16/1987 | US4673589 Photoconducting amorphous carbon |
06/16/1987 | US4673588 Device for coating a substrate by means of plasma-CVD or cathode sputtering |
06/16/1987 | US4673587 High strength |
06/16/1987 | US4672915 Gas supply device, particularly for manufacturing semiconductor elements |
06/16/1987 | EP0225342A1 Method of producing transparent, haze-free tin oxide coatings. |
06/16/1987 | CA1222912A1 Chemical vapor deposition of titanium nitride and like films |
06/10/1987 | EP0225224A2 After oxide metal alloy process |
06/10/1987 | EP0224563A1 High speed digital frequency counter |
06/10/1987 | EP0224495A1 Process for the manufacture of wear resistant binding materials |
06/10/1987 | CN86107141A Method for forming deposited film |
06/09/1987 | US4672170 Apparatus for thermochemical treatments of metals by ionic bombardment |
06/09/1987 | US4671850 Enhanced mechanical strength |
06/09/1987 | CA1222660A1 Method for producing an aerosol stream and its use |
06/03/1987 | EP0224360A2 Semiconductor device manufacturing method |
06/03/1987 | EP0223787A1 Selective chemical vapor deposition method and apparatus. |
06/02/1987 | US4670762 Plasma decomposition, photolysis |
06/02/1987 | US4670172 Process and kit for working metals |
05/27/1987 | EP0223629A1 Method and apparatus for the chemical vapour deposition of uniform thin films on many flat substrates |
05/27/1987 | EP0223585A2 A hard sintered compact for a tool |
05/27/1987 | EP0223083A1 Process for the production of a high-temperature protective coating |
05/27/1987 | EP0222960A1 Method and apparatus for the on-line coating of silica based fibers with boron-nitride |
05/27/1987 | CN86107084A Method for forming a deposited film |
05/26/1987 | US4668538 Processes for depositing metal compound coatings |
05/26/1987 | US4668530 Titanium silicide |
05/26/1987 | US4668528 Laser initiated |
05/26/1987 | US4668527 Gold into silicon substrates |
05/26/1987 | US4668365 Apparatus and method for magnetron-enhanced plasma-assisted chemical vapor deposition |
05/20/1987 | EP0222400A2 Process for protecting polished silicon surfaces |
05/20/1987 | EP0222241A1 Deposition of titanium aluminides |
05/20/1987 | EP0221906A1 $i(IN-SITU) CVD CHAMBER CLEANER |
05/20/1987 | CN86107683A Method and system for mfg. semiconductor devices |
05/19/1987 | US4667076 Method and apparatus for microwave heat-treatment of a semiconductor water |
05/19/1987 | US4666734 Apparatus and process for mass production of film by vacuum deposition |
05/19/1987 | CA1221827A1 External isolation module |
05/13/1987 | EP0221812A2 Apparatus and method for producing thin films with the aid of a plasma |
05/13/1987 | EP0221515A2 Composite stiff lightweight structure and method for making same |
05/13/1987 | EP0221492A2 Article coated with a wear-resistant film of a precious metal |
05/13/1987 | EP0221429A2 Chemical vapour deposition reactor |
05/13/1987 | EP0221184A1 Mask repairing apparatus |
05/13/1987 | EP0221156A1 Method of making a device comprising a patterned aluminum layer. |
05/12/1987 | US4664951 Method provided for corrective lateral displacement of a longitudinally moving web held in a planar configuration |
05/12/1987 | US4664944 Deposition method for producing silicon carbide high-temperature semiconductors |
05/12/1987 | US4664939 Vertical semiconductor processor |
05/12/1987 | US4664938 Method for deposition of silicon |
05/12/1987 | US4664937 Method of depositing semiconductor films by free radical generation |
05/12/1987 | US4664890 Glow-discharge decomposition apparatus |
05/12/1987 | US4664747 Surface processing apparatus utilizing local thermal equilibrium plasma and method of using same |
05/12/1987 | US4664743 Growth of semi-conductors and apparatus for use therein |
05/12/1987 | US4664057 Photoprocessing apparatus including conical reflector |
05/06/1987 | EP0220685A2 Apparatus and method for registration of shadow masked thin-film patterns |
05/06/1987 | EP0220552A2 Vacuum deposition system and method |
05/05/1987 | US4663183 Glow discharge method of applying a carbon coating onto a substrate |
05/05/1987 | US4663009 System and method for depositing plural thin film layers on a substrate |
04/29/1987 | EP0219873A2 Mask for patterning electrode structures in thin film EL devices |
04/29/1987 | EP0219872A2 Mask assembly having mask stress relieving feature |
04/29/1987 | EP0219826A2 Vacuum processing system |
04/28/1987 | US4661409 Using alternating electromagnetic field to activate hydrocarbon plasma; silicone adhesion |
04/28/1987 | US4661407 Glass-surface microcarrier for anchorage-dependent cell cultivation |
04/28/1987 | US4661381 Controlling oxidation |
04/28/1987 | US4661140 Gas reaction apparatus and multi-wall pipe type burner therefor |
04/22/1987 | EP0218623A1 METHOD FOR DEPOSITING AT LEAST ONE LAYER OF AN HOMOGENEOUS COMPOUND III-V OR II-VI, PARTICULARLY Ga As, AND SUBSTRATE COATED WITH SUCH A DEPOSITION |
04/21/1987 | US4659591 Method of coating tungsten preferentially orientated in the <111> direction on a substrate |
04/21/1987 | CA1220768A1 Bubbler cylinder and dip tube device |
04/21/1987 | CA1220678A1 Method of making infrared reflecting coating |
04/14/1987 | US4657777 Vapor phase decomposition of a silicon halide with silane compound |
04/14/1987 | US4657616 In-situ CVD chamber cleaner |
04/09/1987 | WO1987002073A1 Surface treating method and apparatus |
04/09/1987 | WO1987001970A1 Continuous vapor deposition method for producing a coated glass article |
04/08/1987 | EP0216932A1 Rhombohedral polycrystalline boron nitride and process for its production |
04/08/1987 | EP0216810A1 A process for manufacturing seal disk members having a low friction coefficient. |
04/07/1987 | US4655893 Cubic boron nitride preparation utilizing a boron and nitrogen bearing gas |
04/07/1987 | US4655852 Conversion to martensite; forming iron, aluminum alloy layer |
04/07/1987 | CA1220007A1 Coated glazing material |
04/01/1987 | EP0216157A2 A method of depositing metal contact regions on a silicon substrate |
04/01/1987 | EP0215968A1 Device for the production of amorphous silicon solar cells, method for operating this device and cathode for use in this device |
03/31/1987 | US4654509 Method and apparatus for substrate heating in an axially symmetric epitaxial deposition apparatus |
03/31/1987 | US4654269 Spun glass layer |
03/31/1987 | US4654232 Method for the formation of a titanium or zirconium compound coating |
03/31/1987 | US4654228 Thermophoresis deposition, control pore size |