Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
03/1988
03/29/1988US4734339 Diamond coating
03/24/1988DE3727542A1 Device for forming a functional deposition layer by means of a microwave plasma deposition method
03/23/1988EP0260718A2 An X-ray-transparent membrane and its production method
03/23/1988EP0260534A1 Metallorganic compounds
03/23/1988CN87106283A Cvd apparatus
03/23/1988CN86106364A Method and device for the preparation of protective layer by plasma deposition
03/22/1988US4732793 Method and apparatus for laser-induced CVD
03/22/1988US4732761 Applying high frequency bias voltage to gas mixture-perpendicular impingement onto substrate
03/22/1988US4732110 Inverted positive vertical flow chemical vapor deposition reactor chamber
03/16/1988EP0260097A1 CVD method and apparatus
03/16/1988EP0259825A2 Process and apparatus for edge-hardening work pieces
03/16/1988EP0259792A1 Process for the production of thermally stressed structural elements with a protective layer
03/16/1988EP0259791A1 Process for the production of work pieces with a surface layer of carbon
03/16/1988EP0259759A2 Method for low temperature, low pressure chemical vapor deposition of epitaxial silicon layers
03/16/1988EP0259418A1 Methods for applying simultaneously on a plurality of integrated circuit boards a film having a uniform thickness and consisting of arsenic or germanium selenide glass sensitized by a silver salt
03/16/1988EP0259414A1 Apparatus for thermal treatments of thin parts such as silicon wafers.
03/16/1988EP0259311A1 Deposition of materials
03/15/1988US4731462 Organotin compounds containing fluorine useful for forming fluorine-doped tin oxide coating
03/15/1988US4731302 Hard coatings for mechanically and corrosively stressed elements
03/15/1988US4731296 Diamond-coated tungsten carbide-base sintered hard alloy material for insert of a cutting tool
03/15/1988US4731255 Gas-phase growth process and an apparatus for the same
03/09/1988EP0258966A2 Multi-chamber deposition system
03/08/1988US4729341 Method and apparatus for making electrophotographic devices
03/03/1988DE3726775A1 Abscheidung duenner schichten Deposition of thin layers
03/02/1988EP0258052A2 Chemical vapor deposition reactor and method of chemical vapor deposition
03/02/1988EP0257620A2 Method and device for forming a layer by a chemical plasma process
03/02/1988EP0257439A1 Alumina coated with diamond
03/02/1988EP0257302A2 Method of producing amorphous layers
03/01/1988US4728869 Pulsewidth modulated pressure control system for chemical vapor deposition apparatus
03/01/1988US4728863 Apparatus and method for plasma treatment of substrates
03/01/1988US4728529 Plasma of hydrocarbon gas and hydrogen
03/01/1988US4728528 Irradiation of active species
03/01/1988US4728353 With metal oxide, temperature control
02/1988
02/24/1988EP0256337A1 Low pressure chemical vapor deposition method fpr forming tungsten silicide
02/24/1988EP0256073A1 Plant for the chemical infiltration in vapor phase of a refractory material other than carbon.
02/24/1988EP0256035A1 Process for forming an environmentally stable optical coating and structures formed thereby.
02/23/1988US4726983 Alternating layers of metal and a compound of the same metal with a reactive gas
02/23/1988US4726963 Process for forming deposited film
02/23/1988US4726961 Controlling gas flow in semiconductor fabrication; first gas adjusts pressure, second gas is then introduced
02/23/1988US4726320 Laser CVD device
02/23/1988US4726319 Apparatus and method for coating optical fibers
02/17/1988CN87104355A Milti-chamber deposition system
02/16/1988US4725456 Method for preparing mixture to be used for production of composite material
02/16/1988US4725204 Vacuum manifold pumping system
02/16/1988CA1232864A1 Poly(arylene sulfide) printed circuit boards
02/11/1988WO1988000985A1 Process for photochemical vapor deposition of oxide layers at enhanced deposition rates
02/11/1988WO1987006273A3 Coating to protect against wear and fretting corrosion of, in particular, metal mechanical components held together by frictional adherence
02/09/1988US4724171 Process for protecting polished silicon surfaces
02/09/1988US4724160 Process for the production of semiconductor materials
02/09/1988US4724159 Conductive layer deposition method with a microwave enhanced CVD system
02/09/1988US4724156 Method of manufacturing magnetic recording medium
02/09/1988US4723508 Plasma CVD apparatus
02/09/1988US4723507 Isolation passageway including annular region
02/09/1988US4723363 Injection of organic halosilane
02/09/1988CA1232569A1 Manufacture of optical fibre preforms
02/04/1988DE3701691A1 Process for producing a furnace component
02/03/1988EP0255454A2 Apparatus for chemical vapor deposition
02/02/1988US4723062 Hydrogen containing silicon nitride film over area to be cut with a laser beam
02/02/1988US4722911 Vapor phase epitaxy using complex premixing system
02/02/1988US4722770 Method for making continuous and closed hollow bodies, hollow bodies so obtained and apparatus for making the hollow spheres
02/02/1988CA1232230A1 Process and device for producing metallic coatings
01/1988
01/28/1988WO1988000588A1 Organotin compounds containing fluorine useful for forming fluorine-doped tin oxide coating
01/27/1988EP0254654A1 Method of chemical vapor deposition
01/27/1988EP0254651A1 Method and apparatus for chemical vapor deposition
01/27/1988EP0254589A2 Process for preparation of semiconductor device
01/27/1988EP0254205A2 Process for preparing transparent protective silicon coatings
01/27/1988CN87104933A Apparatus for forming film
01/27/1988CN87104781A Method of surface treatment and apparatus used therefor
01/26/1988US4721877 Bubbles within metal oxide coating
01/26/1988US4721664 Silicon film deposition from mixture of silanes
01/26/1988US4721631 Method of manufacturing thin-film electroluminescent display panel
01/26/1988US4721518 Having a cermet base, intermediate metal carbide, nitride or oxide layer, group eight metal alloy mold surface
01/20/1988EP0253361A1 Thin film forming device
01/19/1988US4720560 Hybrid organometallic compounds, particularly for metal organic chemical vapor deposition
01/19/1988US4720437 Surface-coated cemented carbide article or part
01/19/1988US4720395 Low temperature silicon nitride CVD process
01/19/1988US4720300 Process for producing niobium metal of an ultrahigh purity
01/19/1988US4719873 Film forming apparatus
01/14/1988WO1988000097A1 Radiation curable temporary solder mask
01/13/1988EP0252870A2 Abrasion-resistant plasma coatings
01/13/1988EP0252755A1 Chemical vapour deposition
01/13/1988EP0252667A2 Chemical vapour deposition methods
01/13/1988EP0252548A1 Process for the production of electrically conductive moulded articles by the plasma-activated chemical gas phase precipitation
01/13/1988EP0252480A2 Method of surface treatment and apparatus used therefor
01/12/1988US4719122 Chemical vapor deposition, flat and scattered light
01/12/1988US4718976 Etching, vapor deposition
01/07/1988EP0251825A1 Gas treatment apparatus and method
01/07/1988EP0251764A2 Chemical vapour deposition methods and apparatus
01/07/1988EP0251677A2 Graphite intercalation compound electrodes for rechargeable batteries and a method for the manufacture of the same
01/07/1988EP0251650A1 Process for the formation of phosphosilicate glass coating
01/07/1988EP0251555A1 Gallium Hydride/trialkylamine adducts, and their use in deposition of III-V compound films
01/07/1988EP0251264A1 Diamond-coated Tungsten carbide base sintered hard alloy material for insert of a cutting tool
01/07/1988EP0250865A1 Cutting tool
01/05/1988US4717631 Low temperature vapor deposition
01/05/1988US4717602 Reacting silicon fluoride and ammonia or hydrazine
01/05/1988US4717597 Using a gas-impervious tube and an oxygen-exposed permeable tube vapor deposition of an active or dielectric layer respectively
01/05/1988US4717596 Method for vacuum vapor deposition with improved mass flow control
01/05/1988US4717587 Disintegration of metallo-organic composition ina glow discharge zone of a plasma reactor
01/05/1988US4717586 Decomposition, silicon-halogen compound, germanium compound, active materials
01/05/1988US4717585 Process for forming deposited film