| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 04/28/1992 | US5108778 Semiconductors |
| 04/28/1992 | US5108512 Cleaning of CVD reactor used in the production of polycrystalline silicon by impacting with carbon dioxide pellets |
| 04/28/1992 | CA1299773C Plasma processing method and apparatus |
| 04/25/1992 | WO1992007971A1 Cvd of metal films from beta-diketonate complexes |
| 04/25/1992 | CA2090038A1 Ligand stabilized +1 metal beta-diketonate coordination complexes and their use in chemical vapor deposition of metal films |
| 04/22/1992 | EP0481722A1 Process and apparatus for production of a coating film |
| 04/22/1992 | EP0481706A1 Method of producing CVD silicon oxynitride film |
| 04/22/1992 | EP0481570A2 Optical fiber and apparatus for producing same |
| 04/22/1992 | EP0481140A1 Method for preparing laminates of ZnSe and ZnS |
| 04/22/1992 | EP0173715B1 Method and apparatus for the gas jet deposition of conducting and dielectric thin solid films and products produced thereby |
| 04/22/1992 | CN1016388B Method and device for forming superconducting oxide material |
| 04/22/1992 | CN1016364B Chemical gaseous deposition process of thin diamond film by means of arc discharge |
| 04/21/1992 | US5107119 Method of evaluating characteristics of superconductors and process and apparatus for forming superconductor film by using the method |
| 04/21/1992 | US5106687 Composite material with chemically vapor deposited layer of silicon carbide formed thereon |
| 04/21/1992 | US5106674 Blade member of tungsten-carbide-based cemented carbide for cutting tools and process for producing same |
| 04/21/1992 | US5106453 MOCVD method and apparatus |
| 04/21/1992 | US5106452 Method of depositing diamond and diamond light emitting device |
| 04/21/1992 | US5106392 Multigrain abrasive particles |
| 04/21/1992 | US5105762 Support and seal structure for CCVD reactor |
| 04/21/1992 | US5105761 Diffusion plasma-assisted chemical treatment apparatus |
| 04/19/1992 | WO1992006843A1 Abrasion wear resistant polymeric substrate product |
| 04/19/1992 | CA2090110A1 Abrasion wear resistant polymeric substrate product |
| 04/17/1992 | CA2053419A1 Method of producing cvd silicon oxynitride film |
| 04/16/1992 | WO1992006488A1 Vapor supplier and its control method |
| 04/16/1992 | WO1992006224A1 Component-coating process and device |
| 04/16/1992 | WO1992005951A1 Abrasion wear resistant coated substrate product |
| 04/16/1992 | WO1992005904A1 Hard material clad with diamond, throwaway chip, and method of making said material and chip |
| 04/16/1992 | DE4129227C1 Laser induced chemical vapour deposition of solids - by using gas mixt. contg. reactive components and sensitisers with high absorption for radiation |
| 04/15/1992 | EP0480895A2 Improved diamond tools for rock drilling, metal cutting and wear part applications |
| 04/15/1992 | EP0480878A2 Cubic boron nitride (CBN) abrasive tool |
| 04/15/1992 | EP0480867A2 Process for applying gas phase diffusion aluminide coatings |
| 04/15/1992 | EP0480735A1 Differential pressure CVD chuck |
| 04/15/1992 | EP0480581A1 Recirculating high velocity convective flow reactor system |
| 04/15/1992 | EP0480394A2 Cutting tool of polycrystalline diamond and method of manufacturing the same |
| 04/15/1992 | EP0480181A2 Method and apparatus for batch processing of a semiconductor wafer |
| 04/15/1992 | CN1060316A Method and apparatus for vapor deposition of diamond |
| 04/14/1992 | US5104694 Selective chemical vapor deposition of a metallic film on the silicon surface |
| 04/14/1992 | US5104690 CVD thin film compounds |
| 04/14/1992 | US5104684 Scanning focused beam on substrate in presence of platinum-containing precursor |
| 04/14/1992 | US5104634 Expansion of glow discharge activated low-temperature gas, then rapid mixing with reactant gas, deposition on substrate |
| 04/14/1992 | US5104482 Simultaneous glass deposition and viscoelastic flow process |
| 04/12/1992 | CA2053149A1 Diamond tools for rock drilling, metal cutting and wear part applications |
| 04/09/1992 | DE4031770A1 Dust prevention appts. for CVD chamber - has process gas feed and suction openings near plasma forming electrode |
| 04/08/1992 | EP0479375A1 Method of providing a substrate with a surface layer from a vapour and device for implementing such a method |
| 04/08/1992 | EP0478984A1 Plasma enhanced chemical vapor processing system using hollow cathode effect |
| 04/08/1992 | EP0478909A1 Process and apparatus for obtaining a diamondlayer |
| 04/08/1992 | EP0478908A1 Process and apparatus for reactively treating objects by means of a glow discharge |
| 04/08/1992 | EP0478777A1 Coated dielectric material for an ozone generator. |
| 04/07/1992 | US5103102 Localized vacuum apparatus and method |
| 04/07/1992 | US5102721 Textured tin oxide |
| 04/07/1992 | US5102694 Reduction of gaseous flow rate of reactants periodically at zero, resetting it to normal flow rate, thus, continuing cycling for entire growth period of deposition |
| 04/07/1992 | US5102691 Heating the substrate with a gas mixture containing water, a compound from the group consisting of fluorinated carboxylic acids and anhydrides, a gas |
| 04/07/1992 | US5102689 Reactive gas is excited while passing through porous heated body |
| 04/07/1992 | US5102687 Process for surface treatment by plasma of a substrate supported by an electrode |
| 04/07/1992 | US5102496 Exciting plasma with electrical power to generate an electric field in a plasma sheath just above the wafer to repel charged particles away from wafers |
| 04/02/1992 | WO1992005867A1 Device for generating microwave plasma and method of making diamond film utilizing said device |
| 04/02/1992 | EP0502128A4 Anionically polymerizable monomers, polymers thereof, and use of such polymers in photoresists. |
| 04/02/1992 | DE4030900A1 Verfahren und einrichtung zum beschichten von teilen Method and device for coating of share |
| 04/02/1992 | DE4030675A1 Vapour coating of substrates in a reactor - in which substrate protrudes through reactor wall into reaction zone and is moved w.r.t. the reaction zone |
| 04/02/1992 | CA2069942A1 Microwave plasma generating apparatus and process for preparing diamond layer by utilizing same |
| 04/01/1992 | EP0478308A2 Method of forming interlayer-insulating film |
| 04/01/1992 | EP0478233A2 Process for fabricating integrated circuits |
| 04/01/1992 | EP0478174A2 Silicon dioxide deposition method and apparatus |
| 04/01/1992 | EP0478010A2 Process for producing a continuous web of an electrically insulated metallic substrate |
| 04/01/1992 | EP0477906A2 Plasma processing apparatus using plasma produced by microwaves |
| 04/01/1992 | EP0477890A2 Processing method and apparatus |
| 04/01/1992 | EP0463079A4 Zinc oxyfluoride transparent conductor |
| 04/01/1992 | EP0324811B1 Gas inlet for a plurality of various reaction gases in reaction vessels |
| 04/01/1992 | EP0137043B1 Method of manufacturing hydrogenated amorphous silicon thin film and solar cell |
| 04/01/1992 | CN1059858A Binder enriched cvd and pvd coated cutting tool |
| 03/31/1992 | US5100868 Process for preparing superconducting films by radio-frequency-generated aerosol plasma deposition |
| 03/31/1992 | US5100703 Diamond-coated sintered body excellent in adhesion and process for preparing the same |
| 03/31/1992 | US5100599 Method for producing thin film particulates of controlled shape |
| 03/31/1992 | US5099790 Microwave plasma chemical vapor deposition apparatus |
| 03/31/1992 | US5099788 Method and apparatus for forming a diamond film |
| 03/31/1992 | CA1298175C Electrophotographic photosensitive member, process and apparatus for the preparation thereof |
| 03/26/1992 | CA2051989A1 Method of forming interlayer-insulating film |
| 03/25/1992 | WO1992005110A1 Flame or plasma synthesis of diamond under turbulent and transition flow conditions |
| 03/25/1992 | EP0476827A1 X-ray window and method of producing same |
| 03/25/1992 | EP0476825A1 A process for the synthesis of hard boron nitride |
| 03/25/1992 | EP0476676A2 Thin film deposition method |
| 03/25/1992 | EP0476480A1 Vacuum film forming apparatus |
| 03/25/1992 | EP0476307A1 Apparatus and method for substrate heating in semiconductor processes |
| 03/25/1992 | CN1059763A Method and apparatus for treating surface |
| 03/25/1992 | CA2093144A1 Flame or plasma synthesis of diamond under turbulent and transition flow conditions |
| 03/24/1992 | US5099044 Aluminum, gallium or indium compounds with fluorine containing compounds |
| 03/24/1992 | US5098812 Light sensitive element of a photoconductor film on a drum forming a carbon layer |
| 03/24/1992 | US5098741 Method and system for delivering liquid reagents to processing vessels |
| 03/24/1992 | US5098736 Oxygen gas as an ion source and a charge transport layer of aluminum oxide with a charge generating layer of of silicon |
| 03/24/1992 | US5098516 Vapor phase organometallic copper compound |
| 03/24/1992 | US5098483 Methods of treating spherical surfaces |
| 03/24/1992 | CA1297831C Apparatus and method for photochemical vapor deposition |
| 03/18/1992 | WO1992005296A1 Cvd and pvd coated cutting tools |
| 03/18/1992 | WO1992005009A1 Binder enriched cvd and pvd coated cutting tool |
| 03/18/1992 | EP0474740A1 Reaction chamber with controlled radiant energy heating and distributed reactant flow |
| 03/18/1992 | EP0265504B1 Production of semiconductor devices |
| 03/18/1992 | EP0256035B1 Process for forming an environmentally stable optical coating and structures formed thereby |
| 03/18/1992 | EP0223787B1 Selective chemical vapor deposition method and apparatus |
| 03/17/1992 | US5096856 Low pressure vapor deposition in furnace ussing silane |
| 03/17/1992 | US5096849 Process for positioning a mask within a concave semiconductor structure |