| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 09/29/1992 | US5151305 Substrate of a semiconductor or conductor and forming a metal layer of aluminum and conveying |
| 09/29/1992 | US5151133 Vapor deposition apparatus |
| 09/26/1992 | CA2062024A1 Fluid containment article for hot hydrocarbon fluid and method of preventing fuel thermal decomposition deposits |
| 09/23/1992 | EP0505249A1 Apparatus for growing mixed compound semiconductor and growth method using the same |
| 09/23/1992 | EP0504959A2 Carbon-alloyed cubic boron nitride films |
| 09/23/1992 | EP0504886A1 A vapour depositing method and an apparatus therefor |
| 09/23/1992 | EP0504706A1 Heptandionate compounds of alkaline earth metals |
| 09/23/1992 | EP0504441A1 High strength composite ceramic structure and process for producing the same |
| 09/23/1992 | EP0504424A1 Hard material clad with diamond, throwaway chip, and method of making said material and chip |
| 09/23/1992 | EP0504420A1 Steam supplier |
| 09/22/1992 | US5149853 Source of metal for thin films and epitaxial layers by gas-phase deposition |
| 09/22/1992 | US5149596 Vapor deposition of thin films |
| 09/22/1992 | US5149514 Low temperature method of forming materials using one or more metal reactants and a halogen-containing reactant to form one or more reactive intermediates |
| 09/22/1992 | US5149378 Tungsten film forming apparatus |
| 09/22/1992 | US5149377 Coating apparatus |
| 09/22/1992 | US5149375 Apparatus for forming a deposited film of large area with the use of a plurality of activated gases separately formed |
| 09/22/1992 | US5148714 Rotary/linear actuator for closed chamber, and reaction chamber utilizing same |
| 09/19/1992 | WO1992016672A1 An evaporation system for gas jet deposition of thin film materials |
| 09/17/1992 | WO1992015722A1 Interfacial plasma bars for photovoltaic deposition apparatus |
| 09/17/1992 | DE4207783A1 Formation of transparent conductive zinc oxide thin film on substrate - by CVD of an organo-zinc cpd. and boron- or aluminium cpd. |
| 09/16/1992 | EP0503974A1 Multigrain abrasive particles |
| 09/16/1992 | EP0503822A2 A diamond- and/or diamond-like carbon-coated hard material |
| 09/16/1992 | EP0503820A1 Plasma enhanced chemical vapour deposition device |
| 09/16/1992 | EP0503382A1 Method and apparatus for producing highly conductive and transparent films of tin and fluorine doped indium oxide by APCVD |
| 09/16/1992 | EP0503082A1 Device for generating microwave plasma and method of making diamond film utilizing said device |
| 09/16/1992 | EP0370027B1 Apparatus for coating a substrate |
| 09/15/1992 | US5148326 Mirror for changing the geometrical form of a light beam |
| 09/15/1992 | US5148024 Ion beam processing apparatus and gas gun therefor |
| 09/15/1992 | US5147780 Immunoassay |
| 09/15/1992 | US5147688 Induim alkyl etherate and, optionally, organotin vapors; oxidation |
| 09/15/1992 | US5147687 Hot filament CVD of thick, adherent and coherent polycrystalline diamond films |
| 09/15/1992 | US5147683 Reduced pressure vapor deposition of a luminescent layer on a substrate by diffusion of source gas through screen |
| 09/15/1992 | US5147432 Methods of and apparatus for coating optical fibers |
| 09/15/1992 | US5146869 Tube and injector for preheating gases in a chemical vapor deposition reactor |
| 09/15/1992 | CA2061936A1 Multigrain abrasive particles |
| 09/13/1992 | CA2060917A1 Plasma enhanced chemical vapor deposition device |
| 09/09/1992 | EP0502790A1 Multilayer coating for a polycarbonate substrate |
| 09/09/1992 | EP0502657A1 Improved apparatus for producing diamonds by chemical vapor deposition and articles produced thereform |
| 09/09/1992 | EP0502385A1 Process for the double-sided coating of optical workpieces |
| 09/09/1992 | EP0502128A1 Anionically polymerizable monomers, polymers thereof, and use of such polymers in photoresists. |
| 09/09/1992 | EP0324812B1 Material-saving process for producing crystalline solid solutions |
| 09/08/1992 | US5146481 Diamond membranes for X-ray lithography |
| 09/08/1992 | US5145720 Chemical vapor deposition of dense and transparent zirconia films |
| 09/08/1992 | US5145716 Thermal decomposition of metal carbonyl, heating through IR transparent window, cooling to prevent fogging of window due to deposition of metal on the window, plating |
| 09/08/1992 | US5145712 Chemical deposition of diamond |
| 09/08/1992 | US5145711 Reactionof gases containing halogen and a hydrocarbon |
| 09/07/1992 | CA2062257A1 Polycarbonate substrate multiply coating |
| 09/05/1992 | CA2062005A1 Apparatus for producing diamonds by chemical vapor deposition and articles produced therefrom |
| 09/03/1992 | WO1992015116A1 Semiconductor manufacturing equipment |
| 09/03/1992 | WO1992015115A1 Semiconductor manufacturing equipment |
| 09/03/1992 | WO1992015114A1 Semiconductor manufacturing equipment |
| 09/03/1992 | WO1992015112A1 Methods and apparatus for material deposition |
| 09/03/1992 | WO1992014861A1 Microwave plasma cvd device, and method for synthesizing diamond by device thereof |
| 09/03/1992 | DE4127366C1 Prodn. of boron nitride surface layer - comprises gas pulse deposition with boron tri:chloride mixed with Stoichiometric excess of ammonia in nitrogen@ atmos. |
| 09/02/1992 | EP0501278A1 Method to produce masking |
| 09/01/1992 | US5144380 Diamond semiconductor device with a non-doped diamond thin film between a diamond active layer and a substrate |
| 09/01/1992 | US5144199 Microwave discharge light source device |
| 09/01/1992 | US5144196 Particle source, especially for reactive ionic etching and plasma-supported CVD processes |
| 09/01/1992 | US5144049 Volatile liquid precursors for the chemical vapor deposition of copper |
| 09/01/1992 | US5143445 Glass reflectors lpcvd coated with optical interference film |
| 09/01/1992 | US5143018 Apparatus for depositing uniform films by how-pressure chemical vapor deposition |
| 08/26/1992 | EP0500359A1 Graphite structure carbon or its intercalation compound and process for preparing the same |
| 08/26/1992 | EP0500253A1 Diamond- or diamond-like carbon coated hard materials |
| 08/26/1992 | EP0500119A1 CVD diamond coated cutting tools and method of manufacture |
| 08/25/1992 | US5141613 Silicon carbide coatings |
| 08/25/1992 | US5141595 Method and apparatus for carbon coating and boron-doped carbon coating |
| 08/25/1992 | US5141549 Method of fabricating rare earth doped planar optical waveguide for integrated optical circuit |
| 08/20/1992 | WO1992014258A1 High density plasma deposition and etching apparatus |
| 08/19/1992 | EP0499523A1 Nozzle with raised downstream toe for deposition of a coating on a sheet of glass by pyrolysis of a gas mixture |
| 08/19/1992 | EP0499004A1 Process for manufacturing fiber reinforced ceramic materials by chemical vapor infiltration |
| 08/19/1992 | EP0498887A1 Core wire connecting bridge for polycrystalline silicon manufacturing apparatuses |
| 08/18/1992 | US5140003 Method for manufacturing layers from an oxide-ceramic superconductor material on a substrate using a cvd-process |
| 08/18/1992 | US5139999 Presence of ammonia increases transport of volatilized alkaline earth precursor |
| 08/18/1992 | US5139970 Forming on a substrate polycrystalline film of diamond or boron nitride having pinholes which are filled with insulating material, thus forming electrode pattern |
| 08/18/1992 | US5139876 Ceramic article having wear resistant coating |
| 08/18/1992 | US5139825 Exposing heated substrate to mixed vapors containing ammonia and volatile transition metal amines |
| 08/18/1992 | US5139824 Method of coating complex substrates |
| 08/18/1992 | US5139537 Depositing titanium nitride on preheated cubic boron nitride wheel in arc evaporator chamber in nitrogen atmosphere at low pressure |
| 08/18/1992 | US5139372 Polycrystalline diamond tool and method for producing the polycrystalline diamond tool |
| 08/18/1992 | US5138973 Wafer processing apparatus having independently controllable energy sources |
| 08/12/1992 | EP0498622A2 Liquid vaporizer-feeder |
| 08/12/1992 | EP0498580A1 Method for depositing a metal film containing aluminium by use of alkylaluminium halide |
| 08/12/1992 | EP0498269A2 Volatile liquid precursors for the chemical vapor deposition of copper |
| 08/11/1992 | US5138520 Methods and apparatus for material deposition |
| 08/11/1992 | US5137774 Multi-oxide coated carbide body and method of producing the same |
| 08/11/1992 | US5137772 Body coated with cubic boron nitride and method for manufacturing the same |
| 08/11/1992 | US5137683 Decomposition of organometallic chromium compound; coating either cladding or fuel pellets to prevent interaction |
| 08/11/1992 | US5137047 Delivery of reactive gas from gas pad to process tool |
| 08/11/1992 | US5136978 Heat pipe susceptor for epitaxy |
| 08/11/1992 | US5136977 Apparatus for depositing dielectric films |
| 08/11/1992 | US5136976 Method and means for controlled-profile coating of glass containers |
| 08/11/1992 | US5136975 Injector and method for delivering gaseous chemicals to a surface |
| 08/06/1992 | DE4103086A1 Deposition of high purity silicon by thermal decomposition - using several microwave heating sources for even heating of substrates and reduced contamination levels |
| 08/05/1992 | EP0497541A1 Semiconductor device with a borophosphosilicate glass and method of manufacturing the same |
| 08/05/1992 | CN2111958U Constant liquid level gas evaporator |
| 08/05/1992 | CN1017726B Microwave plasma cvd method enhanced magnetic field |
| 08/04/1992 | US5136609 Method of producing finely divided particles or powder, vapor or fine droplets, and apparatus therefor |
| 08/04/1992 | US5135886 Controlling temperature, pressure and shut off of reactive gas to inhibit formation of silicon crystals |
| 08/04/1992 | US5135808 Abrasion wear resistant coated substrate product |
| 08/04/1992 | US5135807 Diamond-coated member and process for the preparation thereof |