| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 10/07/1999 | DE19829281C1 Hollow cylinder with reduced heat radiation for holding a substrate |
| 10/07/1999 | DE19814834A1 Gripping and holding apparatus for a flat substrate e.g. a compact disk substrate during vacuum thin film coating |
| 10/07/1999 | DE19814805A1 Beschichtungsverfahren eines Wischergummis Coating process of a rubber wiper |
| 10/07/1999 | DE19814804A1 Wischergummi mit einer Schutzschicht Wiper rubber with a protective layer |
| 10/07/1999 | DE19812850A1 Metallic fine filter medium for filtering solids from fluids |
| 10/07/1999 | DE19812670A1 Substrate transport equipment especially for transporting substrates, e.g. CDs or DVDs, between stations in a sputter coating chamber |
| 10/06/1999 | EP0947985A1 Optical recording element with an interfacial layer between the recording layer and the reflecting layer |
| 10/06/1999 | EP0947607A2 Members with multi-layer coatings |
| 10/06/1999 | EP0947603A2 Film depositing method and apparatus |
| 10/06/1999 | EP0947602A2 Method for forming thin film |
| 10/06/1999 | EP0947601A1 Organic substrate having optical layers deposited by magnetron sputtering and method for preparing it |
| 10/06/1999 | EP0947593A2 Mo-W material for formation of wiring, Mo-W target and method for production thereof, and Mo-W wiring thin film |
| 10/06/1999 | EP0946966A1 Device for cathodic sputtering |
| 10/06/1999 | EP0946965A1 Device and method for cathodic sputtering |
| 10/06/1999 | EP0946781A1 Vacuum treatment equipment |
| 10/06/1999 | EP0946780A1 Vacuum treatment equipment |
| 10/06/1999 | EP0946779A1 Process and device for coating the internal face of metal buildings components |
| 10/06/1999 | CN1230605A Metal plate heater for film producing equipment |
| 10/06/1999 | CN1230604A Method for high scan speed sputter coating to produce coated abrasion resistant press plates with reduced built-in thermal stress |
| 10/06/1999 | CN1045478C Object having rose pink covering on substrate |
| 10/05/1999 | US5963840 Methods for depositing premetal dielectric layer at sub-atmospheric and high temperature conditions |
| 10/05/1999 | US5963778 Method for producing near net shape planar sputtering targets and an intermediate therefor |
| 10/05/1999 | US5962923 In a multilayer integrated circuit |
| 10/05/1999 | US5962883 Article comprising an oxide layer on a GaAs-based semiconductor body |
| 10/05/1999 | US5962858 Method of implanting low doses of ions into a substrate |
| 10/05/1999 | US5962373 Method for producing mixed metal oxide compounds |
| 10/05/1999 | US5962138 Plasma deposited substrate structure |
| 10/05/1999 | US5962115 Pane of transparent material having a low emissivity |
| 10/05/1999 | US5962080 Deposition of insulating thin film by a plurality of ion beams |
| 10/05/1999 | US5962066 Method and device for manufacturing a thin film and magnetic recording medium |
| 10/05/1999 | US5961798 System and method for vacuum coating of articles having precise and reproducible positioning of articles |
| 10/05/1999 | US5961793 Method of reducing generation of particulate matter in a sputtering chamber |
| 10/05/1999 | US5961791 Process for fabricating a semiconductor device |
| 10/05/1999 | US5961773 Plasma processing apparatus and plasma processing method using the same |
| 10/05/1999 | US5961729 Vacuum arc evaporation method |
| 10/05/1999 | US5961269 Three chamber load lock apparatus |
| 10/05/1999 | US5960762 For internal combustion engines |
| 10/05/1999 | CA2060952C Die tooling for metal working |
| 09/30/1999 | WO1999049100A1 Method for electron beam applying leader free coating |
| 09/30/1999 | WO1999049099A1 Tungsten super fine particle and method for producing the same |
| 09/30/1999 | WO1999049098A1 Solid lubricant film |
| 09/30/1999 | WO1999049097A1 Organic substrate having optical layers deposited by magnetron sputtering and method for preparing it |
| 09/30/1999 | WO1999048620A1 Multilayer metalized composite on polymer film product and process |
| 09/30/1999 | WO1999029922A8 Apparatus for surface modification of polymer, metal and ceramic materials using ion beam |
| 09/30/1999 | DE19913123A1 Vapor phase crystal growth of bismuth-strontium-calcium-copper oxide thin film useful as a superconductor material |
| 09/30/1999 | DE19813075A1 Vorrichtung zum Beschichten eines Substrates An apparatus for coating a substrate |
| 09/29/1999 | EP0945892A2 System and method for in-process cleaning of an ion source |
| 09/29/1999 | EP0945526A1 Brass coloured coating having a coloration nitride layer |
| 09/29/1999 | EP0945525A1 Coating process and apparatus |
| 09/29/1999 | EP0945524A1 Apparatus for coating a substrate |
| 09/29/1999 | EP0945523A1 Method for forming a thin film and apparatus for carrying out the method |
| 09/29/1999 | EP0944746A1 Hot-gas exposable product fitted with a heat-insulating layer and a method for the production thereof |
| 09/29/1999 | EP0944745A1 Process and device for forming a coating on a substrate by cathode sputtering |
| 09/29/1999 | EP0944744A1 METHOD OF MANUFACTURING FERRITIC STAINLESS FeCrAl-STEEL STRIPS |
| 09/29/1999 | EP0944480A1 Security element and method for producing same |
| 09/29/1999 | EP0868405B1 Process for producing heat-reflecting laminated systems on transparent substrates |
| 09/28/1999 | US5959396 High current nova dual slit electrode enchancement |
| 09/28/1999 | US5959359 Semiconductor device with a copper wiring pattern |
| 09/28/1999 | US5959358 Oxidation resistant high conductivity copper layers for microelectronic applications and process of making same |
| 09/28/1999 | US5959305 Method and apparatus for monitoring charge neutralization operation |
| 09/28/1999 | US5958599 Structures having enhanced biaxial texture |
| 09/28/1999 | US5958575 Multilayer; stacks of cobalt, platinum and rare earth metal layers |
| 09/28/1999 | US5958566 Metal bond strength in polyolefin films |
| 09/28/1999 | US5958440 Anti-microbial materials |
| 09/28/1999 | US5958155 High speed sputter deposition of magnesium difluoride antireflection thin film onto optical substrate |
| 09/28/1999 | US5958134 Process equipment with simultaneous or sequential deposition and etching capabilities |
| 09/23/1999 | WO1999048131A1 Sputtering apparatus with a coil having overlapping ends |
| 09/23/1999 | WO1999047726A1 Process for depositing atomic to nanometer particle coatings on host particles |
| 09/23/1999 | DE19837851C1 Apparatus and method for transferring a sample from a reaction vessel into ultrahigh vacuum |
| 09/23/1999 | DE19816927A1 Metal deposition onto a substrate surface with a recess especially a sub-micron size via in semiconductor device production |
| 09/23/1999 | DE19812562A1 Beschichtungs-Verfahren und -Vorrichtung Coating method and apparatus |
| 09/23/1999 | DE19804751A1 Verfahren zum Beschichten von Folie aus Nickel oder einer Nickellegierung und beschichtete Folie aus Nickel oder einer Nickellegierung Process for coating foil comprised of nickel or a nickel alloy and coated film of nickel or a nickel alloy |
| 09/22/1999 | EP0943699A1 Load-lock device for transferring substrates in and out of a treatment chamber |
| 09/22/1999 | EP0943698A2 Method and device for the transport of cylindrical substrates |
| 09/22/1999 | CN2339589Y Flexible-winding film-plating machine |
| 09/21/1999 | US5956438 Laser-controlled photoionic microhead apparatus |
| 09/21/1999 | US5955685 Sputtering target for forming magnetic thin film and fabrication method thereof |
| 09/21/1999 | US5955673 Cathode sputtering targets selected by ultrasonic inspection for their low level of particle emission |
| 09/21/1999 | US5955213 Single crystal substrates of silicon, with ferroelectric thin film with scandium and yttrium, manganese and oxygen for computers |
| 09/21/1999 | US5955202 Dispersion alloy overlay is vapor deposited using electron beams; bearing linings for internal combustion engines |
| 09/21/1999 | US5955197 Coating for carbon--carbon composites and method for producing same |
| 09/21/1999 | US5955139 Automatic film deposition control |
| 09/21/1999 | US5954929 Deposition-preventing part for physical vapor deposition apparatuses |
| 09/16/1999 | WO1999046421A1 Ion assisted electron beam deposition of ring laser gyro mirrors |
| 09/16/1999 | WO1999046120A1 Oxygen barrier composite film structure |
| 09/16/1999 | DE19904913A1 Flexible polymer heart valve with modified surface to inhibit calcification in vivo |
| 09/16/1999 | DE19810246A1 Sputtertarget zum Abscheiden nitridischer oder oxidischer Siliziumschichten und Verfahren zu seiner Herstellung A sputtering target for depositing silicon nitride or oxide layers, and process for its preparation |
| 09/15/1999 | EP0942453A2 Monitoring of plasma constituents using optical emission spectroscopy |
| 09/15/1999 | EP0942073A1 Sputter target for deposition of oxidised or nitrided silicon layers and method for its manufacture |
| 09/15/1999 | EP0942072A2 Method for fabricating fluorinated diamond-like carbon layers |
| 09/15/1999 | EP0941372A1 Oxidation-resistant metal foil, its use and method for its production |
| 09/15/1999 | EP0822895A4 High temperature superconducting thick films |
| 09/14/1999 | US5952472 Anti-fibroblast growth factor-8 monoclonal antibody |
| 09/14/1999 | US5952271 Irradiating a laser beam to vaporize or sublime to deposit target material; moving substrate perpendicular to second laser beam and removing a portion of deposited material with second beam; making cables, electrodes without etching |
| 09/14/1999 | US5952128 Phase-shifting photomask blank and method of manufacturing the same as well as phase-shifting photomask |
| 09/14/1999 | US5952111 Article having a coating thereon |
| 09/14/1999 | US5952086 Efficieny film forming in contact hole |
| 09/14/1999 | US5952085 Multiple layer erosion resistant coating and a method for its production |
| 09/14/1999 | US5952069 Blood collection tube assembly |
| 09/14/1999 | US5952063 Crucible of pyrolytic boron nitride for molecular beam epitaxy |