Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
12/1999
12/29/1999EP0966756A2 Ion implantation process
12/29/1999EP0966552A1 Rotating device for plasma immersion supported treatment of substrates
12/29/1999EP0966551A1 Multilayered pvd coated cutting tool
12/29/1999EP0966409A1 Photocatalytically-activated self-cleaning article and method of making same
12/29/1999EP0966351A1 Zinc oxide stabilized zirconia
12/29/1999EP0577766B1 Apparatus and method for high throughput sputtering
12/29/1999CN2356042Y Vacuum ion film coating machine for preparing metal and ceramic composite film
12/29/1999CN1239835A 电子电路 Electronic circuit
12/28/1999US6007908 Coatings
12/28/1999US6007880 Method for generating a ceramic coating
12/28/1999US6007879 Supplying solid material in coating chamber; creating processing plasma by utilizing switch-mode power supply; establishing operating power environment; switching to second operating power environment to achieve non-arc processing
12/28/1999US6007875 Applying protective layer on reflective layer in vacuum chamber by plasma polymerization of organic silicon compound; coating reflector by plasma with hydrophilic layer composed of hydrocarbon skeleton with polar functional groups linked
12/28/1999US6007871 Method of surface treatment for a fishing tackle part made of alloy steel containing chrome
12/28/1999US6007685 Deposition of highly doped silicon dioxide films
12/28/1999US6007684 Process for forming improved titanium-containing barrier layers
12/28/1999US6007683 Hybrid deposition of thin film solid oxide fuel cells and electrolyzers
12/28/1999US6007390 Low friction metal-ceramic composite coatings for electrical contacts
12/28/1999US6006694 Plasma reactor with a deposition shield
12/23/1999WO1999066531A1 Plasma processing apparatus
12/23/1999WO1999066286A1 Ellipsometric method and control device for making a thin-layered component
12/23/1999WO1999066100A1 Metal article with fine uniform structures and textures and process of making same
12/23/1999WO1999066099A1 Target material for spattering
12/23/1999WO1999066098A1 Method for preparation of target material for spattering
12/23/1999WO1999066097A1 A composite material comprising a substrate with a barrier layer
12/23/1999WO1999066096A1 Method and device for producing a powder aerosol and use thereof
12/23/1999WO1999066089A1 Ni-BASED SINGLE CRYSTAL ALLOY HAVING COATING FILM FOR PREVENTING RECRYSTALLIZATION FRACTURE
12/23/1999WO1999065800A2 Method and device for processing components
12/23/1999WO1999065626A1 Apparatus and method for producing thermal barrier coatings
12/23/1999WO1999065618A1 Production of unsupported thin film particles
12/23/1999DE19927998A1 Guide element, particularly a piston ring for internal combustion engines
12/23/1999DE19927997A1 Glide element, particularly in the form of a piston ring for internal combustion engines
12/23/1999DE19827587A1 Double-magnetron sputtering unit for large area reactive plasma-enhanced deposition of e.g. light absorbing layers on metal strips for solar absorbers or heat reflective layers on window glass
12/23/1999DE19827461A1 Vorrichtung zum Beschichten von Substraten in einer Vakuumkammer Device for coating substrates in a vacuum chamber
12/23/1999DE19827155A1 Verfahren und Vorrichtung zum Bearbeiten von Bauteilen Method and apparatus for machining components
12/23/1999DE19827124A1 Transport of flat circular disc-shaped workpieces to and from working stations
12/23/1999DE19826550A1 Verfahren und Vorrichtung zum Erzeugen eines Pulveraerosols Method and apparatus for generating an aerosol powder
12/23/1999CA2301092A1 Ni-based single crystal alloy having coating film for preventing recrystallization fracture
12/22/1999EP0966029A1 Method of producing silicon oxide film, method of manufacturing semiconductor device, semiconductor device, display, and infrared irradiating device
12/22/1999EP0966021A2 Device for coating substrates in a vacuum chamber
12/22/1999EP0966020A2 Method and apparatus for monitoring charge neutralization operation
12/22/1999EP0965654A2 Process for manufacturing metal-containing layers
12/22/1999EP0964833A1 Bendable mirrors and method of manufacture
12/22/1999EP0964766A1 Method of making high purity copper sputtering targets
12/22/1999EP0964741A1 Arrangement and method for improving vacuum in a very high vacuum system
12/22/1999EP0857354A4 A process for fabricating semiconductor devices with shallowly doped regions using dopant compounds containing elements of high solid solubility
12/22/1999CN1239063A Device for clamping and griping a flat substrate
12/21/1999US6005715 Formed on a polished aluminum base which is lightly anodized as a protective coating over which is vacuum deposited a thick layerof non-porus oxide underlying an aluminum reflectance layer which supports a pair of quarter wave length
12/21/1999US6005217 Microwave plasma processing method for preventing the production of etch residue
12/21/1999US6004879 Siliciding, oxidation; doping; heat resistance
12/21/1999US6004684 Article having a protective and decorative multilayer coating
12/21/1999US6004660 Oxygen barrier composite film structure
12/21/1999US6004617 Combinatorial synthesis of novel materials
12/21/1999US6003336 Press-molding glass optical elements
12/21/1999CA2071582C Device and unit for coating cap-shaped substrates
12/16/1999WO1999065057A1 Gas distribution system
12/16/1999WO1999064854A1 Method and apparatus for quantitative sputter target cleanliness characterization
12/16/1999WO1999064645A1 A method and apparatus for the formation of dielectric layers
12/16/1999DE19848751C1 Transparent substrate coating especially a low emissivity layer system with a silver functional layer for glass panes
12/16/1999DE19825100A1 Mittel zur Herstellung von wasserabweisenden Beschichtungen auf optischen Substraten Means for preparing water-repellent coatings on optical substrates
12/15/1999EP0964453A2 Article comprising an oxide layer on a GaAs-Based semiconductor body, and method of making the article
12/15/1999EP0964426A2 Ion dosage measurement apparatus for an ion beam implanter and method
12/15/1999EP0964077A2 A metallic article having a thermal barrier coating and a method of application thereof
12/15/1999EP0964074A2 Ion implantation control using optical emission spectroscopy
12/15/1999EP0963930A2 Apparatus for grasping and holding a flat substrate
12/15/1999EP0963459A2 Wafer support system
12/15/1999EP0963457A1 Method for preparing thin films of fluorinated compounds
12/15/1999EP0963456A1 Multilayered pvd coated cutting tool
12/15/1999EP0963455A1 A coating comprising layers of diamond like carbon and diamond like nanocomposite compositions
12/15/1999EP0830708B1 Plasma processing system with reduced particle contamination
12/15/1999EP0792571B1 Method and device for measuring ion flow in a plasma
12/15/1999CN1238792A Acrylate coating methods
12/14/1999US6002101 Method of manufacturing a semiconductor device by using a homogenized rectangular laser beam
12/14/1999US6001660 Methods of forming integrated circuit capacitors using metal reflow techniques
12/14/1999US6001413 Method for producing organic electroluminescent device
12/14/1999US6001227 Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such target
12/14/1999US6001224 Enhanced reactive DC sputtering system
12/14/1999US6001184 On wafer evaporation installation
12/14/1999CA2107242C An evaporation system for gas jet deposition on thin film materials
12/14/1999CA2048470C Plasma processing apparatus having an electrode enclosing the space between cathode and anode
12/09/1999WO1999063593A1 Plasma treatment for ex-situ contact fill
12/09/1999WO1999063129A1 Method for applying a coating system to surfaces
12/09/1999WO1999063128A1 Contoured sputtering target
12/09/1999WO1999063127A2 Composition for production of a protective gradient coating on a metal substrate by electron beam evaporation and condensation under vacuum
12/09/1999WO1999062836A1 Thermochromic coating
12/09/1999DE19922161A1 Anti-adhesion coating for e.g. soldering/welding tools and electric contacts
12/09/1999DE19860026A1 Thermochrome Beschichtung Thermochromic coating
12/09/1999CA2333659A1 Thermochromic coating
12/08/1999EP0962961A2 Susceptors
12/08/1999EP0962674A2 Sliding bearing shell and method of making the same
12/08/1999EP0962673A2 Sliding bearing shell and method of making the same
12/08/1999EP0962548A2 Method for deposition of a stressed film
12/08/1999EP0962547A1 Improved ion beam sputtering
12/08/1999EP0962546A1 Elliptical ceramic evaporator
12/08/1999EP0962545A1 Ceramic coating having a low thermal conductivity
12/08/1999EP0962511A1 Method for providing water repellent coatings on optical substrates
12/08/1999EP0962260A1 Evaporation apparatus, organic material evaporation source, and method of manufacturing thin organic film
12/08/1999CN1237647A Elliptical ceramic evaporator
12/08/1999CN1047209C 高密度闪蒸器 High-density flash evaporator
12/07/1999US5999236 Active-matrix liquid crystal display unit in which gate and/or data lines are made of Cr containing Ne-atoms
12/07/1999US5998798 Ion dosage measurement apparatus for an ion beam implanter and method