Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
12/1999
12/07/1999US5998003 Multilayer nanostructured ceramic thermal barrier coatings
12/07/1999US5997947 Airfoils and vanes for industrial turbines and jet engines.
12/07/1999US5997705 Rectangular filtered arc plasma source
12/07/1999US5997704 Sputtering target for depositing ferroelectric film, method for preparing the same, and method for preparing a DRAM using the same
12/07/1999US5997699 Insitu faceting during deposition
12/07/1999US5997698 Applied to various magnetic heads including an induction type magnetic head, a magnetoresistance type magnetic head(mr head), and an mr induction type composite head having an induction head portion and an mr head portion.
12/07/1999US5997697 Magnetron sputtering source and method of use thereof
12/07/1999US5997255 Method for pumping a chamber using an in situ getter pump
12/07/1999US5996390 Method for manufacturing vacuum chamber
12/07/1999CA2015308C Transparent barrier film and method
12/07/1999CA2007561C Method of toughening diamond coated tools
12/02/1999WO1999061679A1 Target for pvd and similar processes
12/02/1999WO1999061678A1 A substrate handling and processing system and method
12/02/1999WO1999061677A1 Thin-film processing electromagnet for low-skew magnetic orientation
12/02/1999WO1999061676A1 Method for manufacturing a multilayer film for using in a magnetic head for recording information
12/02/1999WO1999061674A1 Spraying method to form a thick coating and products obtained
12/02/1999WO1999061670A1 Tantalum sputtering target and method of manufacture
12/02/1999WO1999061170A1 Multiple-coil electromagnet for magnetically orienting thin films
12/02/1999DE19824364A1 Verfahren zum Aufbringen eines Verschleißschutz-Schichtsystems mit optischen Eigenschaften auf Oberflächen Method for applying a wear protection layer system with optical properties to surfaces
12/02/1999DE19823908A1 Elliptischer keramischer Verdampfer Elliptical ceramic vaporizer
12/02/1999DE19823203A1 Production of flexible strip useful as wrapping material, abrasive or polishing tape or functional finish
12/02/1999DE19822749A1 Metal-containing layers produced especially for diffusion barriers, contact layers and/or anti-reflection layers in CMOS circuits, DRAM memory chips or embedded DRAM chips
12/01/1999EP0960956A1 Ceramic evaporation boats
12/01/1999EP0960955A1 Method and apparatus for flame spraying to form a tough coating
12/01/1999EP0809717B1 Gas manifold for an off-axis sputter apparatus
12/01/1999CN1236826A Dual chamber ion beam sputter deposition system
12/01/1999CN1236685A Method for manufacturing In-Sn-oxide-moulded body
12/01/1999CN1046971C Evaporator having multiple coating
11/1999
11/30/1999US5994642 Method for preparing CdTe film and solar cell using the same
11/30/1999US5993980 Protective coating for protecting a component from corrosion, oxidation and excessive thermal stress, process for producing the coating and gas turbine component
11/30/1999US5993979 Skeletal columnar coatings
11/30/1999US5993908 Depositing polycrystalline aluminum film containing copper, heating to a target temperature, controlled cooling to a final temperature
11/30/1999US5993904 Gaseous material impinges on substrate while rotating it with respect to gas source and partially shielding substrate from gas by a mask between substrate and source
11/30/1999US5993734 Method for making W/Ti sputtering targets and products in an inert atmosphere
11/30/1999US5993622 Apparatus for coating a web on a rotating drum by plasma assisted vapor deposition
11/30/1999US5993621 Titanium sputtering target
11/30/1999US5993616 Method for producing a magneto-optical recording medium
11/30/1999US5993615 Method and apparatus for detecting arcs
11/30/1999US5993614 Method of manufacturing substrate with thin film, and manufacturing apparatus
11/30/1999US5993613 Method and apparatus for periodic polarity reversal during an active state
11/30/1999US5993575 Method for fabricating randomly oriented aluminum alloy sputting targets with fine grains and fine precipitates
11/30/1999US5993556 Vacuum treatment system for depositing thin coatings
11/30/1999US5993550 Photoionic microhead device for the treatment of a material surface by powder deposition
11/30/1999US5993165 In Situ getter pump system and method
11/30/1999US5992346 Apparatus for the surface treatment of workpieces
11/30/1999US5992268 Amorphous diamond coating of blades
11/30/1999CA2059046C Aluminium surfaces
11/29/1999CA2272815A1 A metallic article having a thermal barrier coating and a method of application thereof
11/25/1999WO1999060679A1 Reliable modular production quality narrow-band high rep rate f2 laser
11/25/1999WO1999060617A1 Sputtering apparatus and magnetron unit
11/25/1999WO1999060598A1 Low work function, stable compound clusters and generation process
11/25/1999WO1999060184A1 Substrate support and lift apparatus and method
11/25/1999WO1999060183A1 Anti-adherent coating and method for the production thereof
11/25/1999WO1999059814A1 Transparent conductive film and touch panel
11/25/1999WO1999059759A2 Low work function surface layers produced by laser ablation using short-wavelength photons
11/25/1999WO1999059734A2 Generation of low work function, stable compound thin films by laser ablation
11/24/1999EP0959147A2 Lens holder
11/24/1999EP0959146A2 Dual chamber ion beam sputter deposition system
11/24/1999EP0959055A1 Process for manufacturing indium tin oxide articles
11/24/1999EP0958398A1 Methods and apparatus for sputtering with rotating magnet sputter sources
11/24/1999EP0958195A2 Method for coating surfaces using an installation with sputter electrodes
11/24/1999EP0958029A1 Method of manufacturing thin metal membranes
11/24/1999CN1236021A Ceramic evaporation boats having improved initial wetting performance
11/23/1999US5989990 Tinoxide thin film, preparation thereof, and gas detecting sensor using thereof
11/23/1999US5989733 For turbines, aircraft engines
11/23/1999US5989730 Article having a decorative and protective multi-layer coating
11/23/1999US5989722 Reduced pressure device and method of making
11/23/1999US5989673 Caromium-tantalum oxides (Cr-TaOx), sputtering targets and thin film seedlayer/sublayers for thin film magnetic recording media
11/23/1999US5989654 Method for manufacturing an optical information recording medium
11/23/1999US5989633 Process for overcoming CVD aluminum selectivity loss with warm PVD aluminum
11/23/1999US5989629 Bichromal spheres
11/23/1999US5989626 Mixed oxide high index optical coating material and method
11/23/1999US5989511 Smooth diamond films as low friction, long wear surfaces
11/23/1999US5989397 Gradient multilayer film generation process control
11/23/1999US5989395 Vacuum sputtering target to form on heated single crystal substrate a lead-lanthanum-(magnesium or manganese) titanate thin film
11/23/1999US5989346 Semiconductor processing apparatus
11/23/1999US5989345 Process-gas supply apparatus
11/23/1999US5988262 Sputtering target of single crystal aluminum alloy and method for producing the same
11/23/1999US5988103 Apparatus for plasma source ion implantation and deposition for cylindrical surfaces
11/18/1999WO1999059185A1 Structures and components thereof having a desired surface characteristic together with methods and apparatuses for producing the same
11/18/1999WO1999059172A1 Thin electret layer and corresponding production method
11/18/1999WO1999058740A1 Thin film forming method and thin film forming apparatus
11/18/1999WO1999058739A1 Oxygen-argon gas mixture for precleaning in vacuum processing system
11/18/1999WO1999058737A1 Apparatus for sputter deposition
11/18/1999WO1999058736A2 Zinc-tin alloy sputtering target
11/18/1999DE19852326A1 Method and apparatus for producing a substrate coated with a doped fluorescent material, e.g. for radiation detectors
11/18/1999DE19822064A1 Vorrichtung zum Halten von Linsen, insbesondere für in einer Vakuum-Aufdampfanlage oder Sputteranlage zu beschichtender Brillengläser Device for holding lenses, in particular for a vacuum-vapor-deposition or sputtering to be coated lenses
11/18/1999DE19821772A1 Keramische Verdampferschiffchen mit verbessertem Erstbenetzungsverhalten Ceramic vaporizer with improved Erstbenetzungsverhalten
11/18/1999CA2333296A1 Apparatus for sputter deposition
11/17/1999EP0957507A1 Apparatus for depositing thin layers on a substrate
11/17/1999EP0957184A2 Sputtering control system
11/17/1999EP0956375A1 Reactive magnetron sputtering apparatus and method
11/17/1999EP0956374A1 Method of making a pvd-coated hss drill
11/17/1999EP0956373A1 Surface alloyed high temperature alloys
11/17/1999EP0836653A4 Adhering metal to glass
11/17/1999CN1235695A Cathode arc source and graphite target
11/17/1999CN1235646A Coating for components and production thereof
11/17/1999CN1235210A Ion implantation control using optical emission spectroscopy
11/16/1999US5985759 Oxygen enhancement of ion metal plasma (IMP) sputter deposited barrier layers
11/16/1999US5985757 Heating wafer with silicon oxide film under high vacuumpresputtering under inert gas, sputtering using platinum target, stabilizing by annealing, cooling