| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 09/14/1999 | US5952061 Fabrication and method of producing silicon films |
| 09/14/1999 | US5952059 Forming a piezoelectric layer with improved texture |
| 09/14/1999 | US5951835 Continuous vacuum processing apparatus |
| 09/14/1999 | US5951834 Vacuum processing apparatus |
| 09/14/1999 | US5951775 Apparatus for full wafer deposition |
| 09/14/1999 | US5951769 Comprising a vacuum chamber, a feed roll disposed within the vacuum chamber, a take-up roll within the vacuum chamber, a vaporizer disposed below the feed roll and the take-up roll for vapor depositing, a heater |
| 09/14/1999 | US5951767 Molecular beam epitaxy isolation tube system |
| 09/14/1999 | US5951372 Method of roughing a metallic surface of a semiconductor deposition tool |
| 09/14/1999 | US5951273 Rotary compressor having a protective coating which is finish ground |
| 09/14/1999 | US5950723 Method of regulating substrate temperature in a low pressure environment |
| 09/14/1999 | US5950330 Vacuum processing apparatus and operating method therefor |
| 09/10/1999 | WO1999045567A1 Method and apparatus for predicting plasma-process surface profiles |
| 09/10/1999 | WO1999045415A1 Transparent substrate provided with a stack of layers reflecting thermal radiation |
| 09/10/1999 | WO1999045163A1 Sputtering target, transparent conductive film, and method for producing the same |
| 09/10/1999 | WO1999027600A9 Improved hspes membrane electrode assembly |
| 09/10/1999 | WO1999027150A9 Sputtering target |
| 09/10/1999 | WO1999022396A3 Enhanced macroparticle filter and cathode arc source |
| 09/09/1999 | DE19824308C1 Plain bearing shell especially a steel-backed bearing shell with an aluminum-tin alloy running-in layer |
| 09/09/1999 | DE19809409A1 Brass-colored coating for bath fittings, coverings or articles of daily use |
| 09/09/1999 | DE19808795A1 Wärmestrahlen reflektierendes Schichtsystem für transparente Substrate Heat ray reflective layer system for transparent substrates |
| 09/09/1999 | DE19808180A1 Kombinierte Verschleißschutzschicht, Verfahren zur Erzeugung derselben, die damit beschichteten Objekte und deren Verwendung Combination anti-abrasion layer, method of producing the same, the thus-coated objects and the use thereof |
| 09/08/1999 | EP0940839A2 Etching or coating devices |
| 09/08/1999 | EP0940838A2 In situ removal of contaminants from the interior surfaces of an ion beam implanter |
| 09/08/1999 | EP0940828A2 Method for producing foil electrodes |
| 09/08/1999 | EP0940482A2 Vacuum plasma coating apparatus and its use |
| 09/08/1999 | EP0940481A1 Method and apparatus for forming a thin film of a metal compound |
| 09/08/1999 | EP0940480A1 A metallic article having a thermal barrier coating and a method of application thereof |
| 09/08/1999 | EP0940479A1 Brass coloured coating with coloured nitride layer |
| 09/08/1999 | EP0904423A4 Diffusion bonded sputtering target assembly with precipitation hardened backing plate and method of making same |
| 09/08/1999 | EP0777760B1 Transport system for thin film sputtering system |
| 09/08/1999 | EP0759155B1 Method and device for in situ stress measurement within a thin film upon its deposition on a substrate |
| 09/08/1999 | CN1227881A Magnetic filter for ion source |
| 09/07/1999 | US5948921 Method for the selective hydrogenation of vinyl oxirane to butylene oxide |
| 09/07/1999 | US5948548 Coated article |
| 09/07/1999 | US5948541 Boron and nitrogen containing coating and method for making |
| 09/07/1999 | US5948532 Cermet adhesion layer with carbonaceous wear layer for head/disk interfaces |
| 09/07/1999 | US5948224 Method of controlling a treatment process and vacuum treatment apparatus |
| 09/07/1999 | US5948216 Method for making thin film tantalum oxide layers with enhanced dielectric properties and capacitors employing such layers |
| 09/07/1999 | US5948131 Multilayer antireflective coating with a graded base layer |
| 09/05/1999 | CA2264195A1 Brass-colored coating with color-imparting nitride layer |
| 09/05/1999 | CA2263191A1 Brass-colored coating patent |
| 09/02/1999 | WO1999044226A1 Oxygen enhancement of ion metal plasma (imp) sputter deposited barrier layers |
| 09/02/1999 | WO1999044221A1 A seal member and a vacuum chamber |
| 09/02/1999 | WO1999044220A1 Cooling system with antifreeze for cooling magnetron for process chamber of processing system |
| 09/02/1999 | WO1999043865A1 Combination antiabrasion layer |
| 09/02/1999 | WO1999043864A1 Vacuum deposition apparatus using electron beams |
| 09/02/1999 | WO1999043863A1 Distribution mask for depositing by vacuum evaporation |
| 09/02/1999 | WO1999027893A3 Carbon coatings, method and apparatus for applying them, and articles bearing such coatings |
| 09/01/1999 | EP0939422A2 Magnetic filter for ion source |
| 09/01/1999 | EP0939144A2 Surface-coated object |
| 09/01/1999 | EP0938595A1 Process and device for coating substrates by gas flow sputtering |
| 09/01/1999 | EP0871557B1 Method of producing metal quantum dots |
| 09/01/1999 | CN2335977Y Radio frequency magnetic control sputtering target pair device |
| 09/01/1999 | CN1227276A Pulse glow discharge plasma surface metallurgical technology |
| 09/01/1999 | CN1227275A Sputtering apparatus capable of changing distance between substrate and deposition preventing plate used for film formation |
| 08/31/1999 | US5946587 Continuous forming method for functional deposited films |
| 08/31/1999 | US5946014 Storage of ink with tanks and injection, pressurization, hollow tubes, air holes for filling inks |
| 08/31/1999 | US5945682 Space-saving ion-implantation system installed both in and adjacent to a semiconductor manufacturing line |
| 08/31/1999 | US5945681 Ion implanting apparatus capable of preventing discharge flaw production on reverse side surface of wafer |
| 08/31/1999 | US5945214 Press plates for decorative laminates from resin impregnated paper |
| 08/31/1999 | US5945204 Multilayer film structure for soft X-ray optical elements |
| 08/31/1999 | US5945163 Apparatus and method for depositing a material on a substrate |
| 08/31/1999 | US5945155 Low dielectric constant amorphous fluorinated carbon and method of preparation |
| 08/31/1999 | US5945153 Non-irritating antimicrobial coating for medical implants and a process for preparing same |
| 08/31/1999 | US5944968 Sputtering apparatus |
| 08/31/1999 | US5944967 Dual target cathode assembly with shielding |
| 08/31/1999 | US5944964 For optical devices |
| 08/31/1999 | US5944963 Method of coating a substrate with a SiCx film |
| 08/31/1999 | US5944903 Effusion cell crucible with thermocouple |
| 08/26/1999 | WO1999042635A1 Apparatus and method for depositing a semiconductor material |
| 08/26/1999 | WO1999042634A1 Apparatus and method for depositing a material on a substrate |
| 08/26/1999 | WO1999034399B1 Plasma device including a powered non-magnetic metal member between a plasma ac excitation source and the plasma |
| 08/26/1999 | WO1999030358A3 Ion implantation process |
| 08/26/1999 | DE19904829A1 Portable vacuum installation for production of thin metal coatings |
| 08/26/1999 | DE19807331A1 Application of a metallic vapor to a clear acrylic plate under vacuum avoids the use of a coupling agent or roughening of the surface |
| 08/26/1999 | DE19807032A1 Vapor coating of cylindrical substrates e.g. silicon dioxide coating for sealing plastic carbonated drinks bottles |
| 08/26/1999 | DE19807031A1 Air lock for continuous transfer of articles between sealed chambers, especially for vacuum vapor deposition treatment of plastic bottles |
| 08/26/1999 | DE19806879A1 Production of a target for the sputter cathode of a vacuum coating installation |
| 08/25/1999 | EP0937786A2 Thermal barrier coating system having an integrated alumina layer |
| 08/25/1999 | EP0937785A2 Method and apparatus for coating the external surface of a bottle |
| 08/25/1999 | CN2334885Y Plasma beam hardened cylinder sleeve for internal combustion engine |
| 08/25/1999 | CN1226999A Semiconductor device with layer of precious metal and process for production of same |
| 08/25/1999 | CN1226973A Mechanism for placing optical lens blank in holder |
| 08/25/1999 | CN1226971A Mechanism for imparting water repellency to both sides simultaneously |
| 08/25/1999 | CN1226970A Plastic optical component having reflection prevention film and mechanism for making reflection prevention film thickness uniform |
| 08/25/1999 | CN1226936A Process for producing titanium-ceramic adhesive composite system |
| 08/24/1999 | US5943601 Depositing group 4a metal underlayer onto substrate; depositing aluminum or aluminum alloy layer which is in electrical contact with metal underlayer |
| 08/24/1999 | US5942854 Electron-beam excited plasma generator with side orifices in the discharge chamber |
| 08/24/1999 | US5942769 Low dielectric constant amorphous fluorinated carbon and method of preparation |
| 08/24/1999 | US5942338 Coated articles |
| 08/24/1999 | US5942334 Multilayer thermal barrier coating |
| 08/24/1999 | US5942328 For electronic devices |
| 08/24/1999 | US5942317 Wear resistant coating for magnetic disk drives |
| 08/24/1999 | US5942090 Sputtering oxide of zinc, tin, indium, aluminum, and/or titanium in carbon dioxide atmosphere |
| 08/24/1999 | US5942089 Sputtering while maintaining pulsed, constant, direct current power to the target, sensing voltage of target material, simultaneously rapidly sensing the partial pressure of the reactive gas, biasing the substrate to activate reactive gas |
| 08/24/1999 | US5942054 Electrically conductive amorphous aluminum alloys comprising aluminum, titanium, oxygen; for support member from which another component of the micromachine is suspended, such as a hinge; stress relaxation |
| 08/24/1999 | US5942042 Apparatus for improved power coupling through a workpiece in a semiconductor wafer processing system |
| 08/24/1999 | US5942041 Non-sticking semi-conductor wafer clamp and method of making same |
| 08/24/1999 | US5942040 Multi-target manipulator for pulsed laser deposition apparatus |
| 08/24/1999 | US5940975 Amorphous diamond coating of blades |