Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
08/1999
08/24/1999CA2000171C Preparation method of amorphous superlattice alloys
08/19/1999WO1999041425A1 Cathode arc vapor deposition
08/19/1999WO1999031289A8 Sliding member having chromium nitride film formed thereon
08/19/1999DE19905518A1 Piston ring combination for use in internal combustion engines
08/19/1999CA2261403A1 Diboride coated pressing surfaces for abrasion resistant laminate and making pressing surfaces
08/18/1999EP0936281A1 Method and apparatus for three-dimensional processing of filamentary substrates
08/18/1999EP0935633A1 Acrylate coating methods
08/18/1999CN2333716Y Plasma cathode arc source magnetron sputtering coating machine
08/18/1999CN1226078A Combined ion injection method for quickly synthesized material chip
08/17/1999US5939787 Semiconductor device having a multi-layer contact structure
08/17/1999US5939361 Method of fabricating Tl or Hg-containing oxide superconductor film
08/17/1999US5939225 Multilayer element with substrate and silicon, nitrogen withmetal layer
08/17/1999US5939202 Non-magnetic base alloy containing tungsten, tantalum, hafnium, molybdenum, chromium, zirconium, niobium, nickel, and/or aluminum; direct current or radio frequency sputtering
08/17/1999US5939189 Roll coaters.
08/17/1999US5939186 Magnetic head
08/17/1999US5939149 Method of forming hydrogen-free diamond like carbon (DLC) films
08/17/1999US5939132 Alignment chips positioned in the peripheral part of the semiconductor substrate and method of manufacturing thereof
08/17/1999US5938902 Disc-handling apparatus
08/17/1999US5938897 Sputtering molybdenum silicide target in atmosphere containing nitrogen monoxide gas to form coating of molybdenum silicide oxynitride film on transparent substrate
08/12/1999WO1999040233A1 Multilayer coated tool
08/12/1999WO1999040232A1 Boride source and its use
08/12/1999WO1999039860A1 Permanent magnet ecr plasma source with magnetic field optimization
08/12/1999WO1999039746A2 Radioactive seed implants
08/12/1999DE19824310C1 Bearing surface for metal bearing
08/12/1999DE19805471A1 Method for repairing target base plates
08/12/1999CA2319248A1 Radioactive seed implants
08/12/1999CA2285460A1 Hard multilayer coated tool having increased toughness
08/11/1999EP0935012A2 Process for producing zinc sulfide
08/11/1999EP0935011A1 Method for forming film by plasma polymerization and apparatus for forming film by plasma polymerization
08/11/1999EP0934127A1 Process for making a parylene coating
08/11/1999CN1225482A Sputtering apparatus simulation method
08/10/1999US5936829 Thermally conductive chuck for vacuum processor
08/10/1999US5936481 System for impedance matching and power control for apparatus for high frequency plasma treatment
08/10/1999US5936413 Method and device for measuring an ion flow in a plasma
08/10/1999US5936346 Luminescent layer is composed of zinc sulfide with a fluoride or a luminescent center element added, wherein the x-ray diffraction spectrum thereof has only a single peak at an x-ray diffraction angle from the luminescent layer
08/10/1999US5935702 Low emissivity stack with anti-solar properties having thin layers which perform optically and thermally and which retain these properties even if subjected to thermal treatment for tempering or bending
08/10/1999US5935462 Repair of metal lines by electrostatically assisted laser ablative deposition
08/10/1999US5935397 Physical vapor deposition chamber
08/10/1999US5935396 Method for depositing metal
08/10/1999US5935395 Substrate processing apparatus with non-evaporable getter pump
08/10/1999US5935391 Disposing rod-like and ring-like electrodes in vacuum container; tube to be processed is disposed continuous to ring-like electrode and predetermined vacuum is set; electric power and magnetic field are applied to supply plasma to tube
08/10/1999US5935324 Apparatus and method for forming I-III-VI2 thin-film layers
08/10/1999US5934321 Valve unit for water mixing valve
08/05/1999WO1999039398A1 Fuel cell with a proton conducting electrolyte
08/05/1999WO1999039021A1 Process for metal plating liquid crystalline polymers and compositions related thereto
08/05/1999WO1999028519A3 Method for producing a bc(n):h layer
08/05/1999DE19804838A1 Plasma-assisted particle surface modification especially for sputter coating, activation and etching of catalyst particles
08/05/1999DE19803278A1 Workpiece carrier and installation for treatment and/or coating of workpieces
08/05/1999CA2316868A1 Process for metal plating liquid crystalline polymers and compositions related thereto
08/04/1999EP0933654A2 Anti-reflection coatings
08/04/1999EP0933444A1 Sheet-form magnetron sputtering device
08/04/1999EP0932911A2 Control mechanisms for dosimetry control in ion implantation systems
08/04/1999CN1224772A Synthesis of carbon-base film
08/04/1999CN1224771A Apparatus for sputtering or arc evaporation
08/03/1999US5932883 Ion implanter for implanting ion on wafer with low contamination
08/03/1999US5932294 This invention relates, generally, to apparatus used in the manufacture of components in the compound semiconductor and related industries.
08/03/1999US5932078 Cathodic arc vapor deposition apparatus
08/03/1999US5931627 Wafer transport apparatus that can transfer multiple wafers in a short period of time
08/03/1999US5931368 Long life bonding tool
08/03/1999CA2149723C Reduced solvent island coating system
07/1999
07/29/1999WO1999038159A1 Method for preparing optical recording medium and preparation apparatus therefor
07/29/1999WO1999037655A1 Tantalum amide precursors for deposition of tantalum nitride on a substrate
07/29/1999WO1999027149A8 Electron beam deposition device and method of manufacturing thin film by using the deposition device
07/29/1999DE19809663C1 Vacuum plasma coating installation and its application
07/29/1999DE19802482A1 Sputter cathode target casting apparatus has a two-layer base plate
07/29/1999DE19801424A1 High melting point heat insulating material especially for coating nickel base superalloy gas turbine blades or combustion chambers
07/28/1999EP0932183A1 Linear microwave plasma source with permanent magnets
07/28/1999EP0931852A1 Vapor deposition material
07/28/1999EP0931851A1 Method for obtaining functional metallic, ceramic or ceramic/metallic layers on the internal wall of hollow bodies
07/28/1999EP0931850A1 Method for treating the surfaces of plastic substrates
07/28/1999EP0931334A1 Semiconductor device with a layer of precious metal and a process for production of same
07/28/1999EP0931333A1 PROCESS FOR THE MANUFACTURE OF A HIGHLY $g(e) DIELECTRIC OR FERROELECTRIC COATING
07/28/1999EP0931178A1 Composite body, production process and use
07/28/1999EP0931175A1 Conveyor and delivery device
07/28/1999EP0931174A1 Method and device to produce a heat insulating layer
07/28/1999EP0792572B1 An apparatus for generation of a linear arc discharge for plasma processing
07/28/1999CN1044358C Sputter coated glass products
07/27/1999US5930046 That have a low net stress, alternating layers of a high refractive index material and silica which have a net stress that is significantly lower
07/27/1999US5929456 Ion implantation system and method adapted for serial wafer processing
07/27/1999US5928771 Coatings on surfaces such as tools, wear parts, and molds that are subjected to friction or wear.
07/27/1999US5928750 Sputtered thermally cycled texture layers formed of high melting point materials
07/27/1999US5928528 Plasma treatment method and plasma treatment system
07/27/1999US5928480 Methods of sputter depositing of metals onto substrates, and methods of forming plasma
07/27/1999CA2225063A1 Pulsed plate plasma implantation system
07/27/1999CA2048642C Pyrotechnic materials
07/22/1999WO1999036968A1 Methods for manufacturing semiconductor thin films using ion beam synthesis
07/22/1999WO1999036952A1 Metallization process and apparatus
07/22/1999WO1999036276A1 Surface modification of medical implants
07/22/1999WO1999036255A1 A metal foil disk for high areal density recording in environments of high mechanical shock
07/22/1999WO1999036193A1 Method and apparatus for providing a conductive, amorphous non-stick coating
07/22/1999WO1999029435A3 Modification of surfaces in order to increase surface tension
07/22/1999WO1999027147A3 Wear-resistant, mechanically highly stressed and low-friction boundary coating construction for titanium or the alloys thereof and a method for producing the same
07/22/1999WO1999022398A3 Cathode arc source with target feeding apparatus
07/22/1999WO1999022395A3 Cathode arc source for metallic and dielectric coatings
07/22/1999CA2318290A1 A metal foil disk for high areal density recording in environments of high mechanical shock
07/22/1999CA2318266A1 Method and apparatus for providing a conductive, amorphous non-stick coating
07/22/1999CA2307612A1 Surface modification of medical implants
07/21/1999EP0761011B1 Method of manufacturing an electronic multilayer component
07/20/1999US5926736 Forming barrier layer within hole, forming metal plug, forming cap layer over plug, heating so that metal in hole flows to eliminate void
07/20/1999US5925886 Ion source and an ion implanting apparatus using it