Patents
Sitemap › C23 - Coating metallic material; Coating material with metallic material; Chemical surface treatment; Diffusion treatment of metallic material; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general; Inhibiting corrosion of metallic material or incrustation in general › C23C - Coating metallic material; Coating material with metallic material; Surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general › C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
11/1999
11/16/1999US5985750 Selectively etching aluminum wires, reforming surface of oxide film beneath wires, forming an organic ingterlayer film
11/16/1999US5985470 Thermal/environmental barrier coating system for silicon-based materials
11/16/1999US5985469 White decorative part and process for producing the same
11/16/1999US5985468 Nickel, nickel-palladium alloy, zirconium and/or titanium compounds; polished brass simulation; wear and corrosion resistance; door knobs, lamps
11/16/1999US5985467 Nitrogen-doped alumina anchoring layer; heat, erosion and corrosion resistance; nickel or cobalt-based alloy
11/16/1999US5985423 Cobalt oxide-containing layer; magnetic tapes, wrapping paper, capacitors
11/16/1999US5985418 Clear, resinous, protective coating; vacuum deposition; metallization
11/16/1999US5985410 Sputter textured magnetic recording medium
11/16/1999US5985356 Screening
11/16/1999US5985308 Process for producing anti-microbial effect with complex silver ions
11/16/1999US5985105 Sputtering protective overcoat on magnetic layer by: positioning disk so its major surfaces are parallel to x-y plane; impinging particles along z-axis perpendicular to x-y plane, rotating disk around y-axis, spinning in x-y plane
11/16/1999US5985103 Method for improved bottom and side wall coverage of high aspect ratio features
11/16/1999US5985102 Apparatus providing more uniform deposition and surface planarity of target material on wafer using floating collimator with floating shield structure
11/16/1999US5985036 Vacuum coating apparatus for overall coating of a substrate by rotation of the substrate in a stream of material
11/16/1999US5985033 Apparatus and method for delivering a gas
11/16/1999US5984905 Non-irritating antimicrobial coating for medical implants and a process for preparing same
11/16/1999US5984593 Cutting insert for milling titanium and titanium alloys
11/16/1999US5983906 Substrate processing apparatus with gas delivery, heaters, plasma system, vacuum and controllling
11/16/1999US5983438 Sputter load lock O-ring cleaner
11/16/1999CA2271775A1 Device for holding lenses, especially for eye glasses to be coated in a vacuum coating of sputtering machine
11/11/1999WO1999057753A1 Apparatus for improved biasing and retaining of a workpiece in a workpiece processing system
11/11/1999WO1999057746A1 Method and apparatus for ionized physical vapor deposition
11/11/1999WO1999057071A1 Material and method for coating glass forming equipment
11/11/1999WO1999034396A3 Installation with an electron-cyclotron resonance ion source for doping stents with radioactive and non-radioactive atoms
11/11/1999DE19820859A1 Apparatus for coating flat substrates, e.g. for production of solar modules on glass
11/11/1999DE19820152A1 Boundary layer containing nitrogen on components consisting of stainless steel, and method for producing such a boundary layer
11/11/1999DE19819933A1 Target für eine Kathodenzerstäubungsvorrichtung zur Herstellung dünner Schichten Target for sputtering for the production of thin films
11/11/1999DE19819902A1 Production of conducting polymer film, used in e.g. solar cell and sensor
11/11/1999DE19819785A1 Zerstäubungskathode nach dem Magnetron-Prinzip Sputtering cathode magnetron according to the principle
11/10/1999EP0955667A1 Target for a cathode sputtering apparatus for the production of thin films
11/10/1999EP0955666A1 Sputtering cathode according to the magnetron principle
11/10/1999EP0955391A2 Pattern carrier
11/10/1999EP0955390A2 Low temperature deposition of transition metal nitrides
11/10/1999EP0954948A1 Model based temperature controller for semiconductor thermal processors
11/10/1999EP0954875A1 Modulator for plasma-immersion ion implantation
11/10/1999EP0954620A1 Vapor deposition components and corresponding methods
11/10/1999EP0954400A1 Coated cutting insert or cutting insert blank and method for producing coated cutting inserts for chip-removal of metal
11/10/1999CN1234838A Sheet-form magnetron sputtering device
11/10/1999CN1234606A High-productivity Al, Cu thin-film spattering technology for producing small contact through-hole for BEOL wiring
11/10/1999CN1234453A Analog method for sputtering section
11/10/1999CN1234452A Pattern carrier of pattern-forming evaporator
11/10/1999CN1046318C Apparatus and process for a glow discharge
11/09/1999US5983011 Method of simulating a profile of sputter deposition which covers a contact hole formed on a semiconductor wafer
11/09/1999US5982986 Apparatus and method for rotationally aligning and degassing semiconductor substrate within single vacuum chamber
11/09/1999US5982034 Multilayer; strontium, calcium, ruthenium oxide
11/09/1999US5981961 Apparatus and method for improved scanning efficiency in an ion implanter
11/09/1999US5981868 Intermetallics
11/09/1999US5981389 Sputter depositing chromium layers in presence of neon gas and the working gas pressure during sputtering is less than 1 pa.
11/09/1999US5981112 Positiong transferable colorant layer on second substrate in a preferencial relationship from first substrate and heating the second substrate to transfer the colorant from heat transferable colorant layer to first substrate
11/09/1999US5981091 Article including thermal barrier coated superalloy substrate
11/09/1999US5981088 Thermal barrier coating system
11/09/1999US5981081 Wear resistance, corrosion resistance
11/09/1999US5981075 For optical lenses, mirrors; durability
11/09/1999US5981049 Coated tool and method of manufacturing the same
11/09/1999US5981018 A multilayer comprising a sputtered sublayer chromium-vanadium alloy layer on the nonmagnetic substrate, a magnetic alloy layer comprising cobalt, chromium, platinum, tantalum, niobium and a carbon overcoatings; computers
11/09/1999US5981014 Optical recording medium and method for preparing the same
11/09/1999US5980975 Thin-film-coated substrate manufacturing methods having improved film formation monitoring and manufacturing apparatus
11/09/1999US5980974 Coated orthopaedic implant components
11/09/1999US5980815 Mixing pulverized tin oxide powder with indium oxide powder, molding mixed powder to obtain green body, and sintering green body
11/09/1999US5980702 Sputtering apparatus for improved step coverage
11/09/1999US5980687 Plasma processing apparatus comprising a compensating-process-gas supply means in synchronism with a rotating magnetic field
11/09/1999US5980684 Processing apparatus for substrates
11/09/1999US5980213 Getter pump module and system
11/09/1999CA2103241C Self-supporting zinc alloy rotating sputter target
11/04/1999WO1999056057A1 Fluid storage and dispensing system
11/04/1999WO1999055936A1 Tool coating and method for the production thereof
11/04/1999WO1999055932A1 Apparatus and method for multi-target physical vapor deposition
11/04/1999WO1999055931A1 Low pressure purging method
11/04/1999WO1999055930A1 A low friction coating for a cutting tool
11/04/1999WO1999055929A1 Tool or machine component and method for increasing the resistance to wear of said component
11/04/1999WO1999055619A1 Process for producing metal oxide, target comprising the metal oxide for forming thin metal oxide film, process for producing the same, and process for producing thin metal oxide film
11/04/1999WO1999055471A1 Process for the preparation of uv protective coatings by plasma-enhanced deposition
11/04/1999DE19830223C1 Magnetron sputtering unit for multilayer coating of substrates especially in small to medium runs or in laboratories
11/04/1999DE19819672A1 Musterträger für Pattern-Verdampfer Pattern support for Pattern evaporator
11/04/1999CA2328975A1 Process for the preparation of uv protective coatings by plasma-enhanced deposition
11/04/1999CA2328152A1 A low friction coating for a cutting tool
11/03/1999EP0954015A2 High throughput Al-Cu thin film sputtering process on small contact via
11/03/1999EP0953657A2 Vaccum coating apparatus
11/03/1999EP0953656A2 Rotatable fixture for airfoils
11/03/1999EP0953655A1 Vacuum coating apparatus
11/03/1999EP0892859B1 Process for preparing endohedral fullerenes or fullerene derivatives
11/03/1999EP0846195A4 Improved uniformly plated microsphere catalyst
11/03/1999EP0829017B1 Process for producing a probe with a coated point
11/03/1999EP0760020B1 Device having a switch comprising a chromium layer and method for depositing chromium layers by sputtering
11/03/1999CN1233668A Monitoring of plasma constitutents using optical emission spectroscopy
11/02/1999US5978207 Thin film capacitor
11/02/1999US5977553 Mechanism for preventing metallic ion contamination of a wafer in ion implantation equipment
11/02/1999US5976946 Thin film formation method for ferroelectric materials
11/02/1999US5976716 Substrate with a superhard coating containing boron and nitrogen and method of making the same
11/02/1999US5976713 Exchange-coupling film and, magneto-resistance effect element and magnetic head using thereof
11/02/1999US5976684 Organic substrate provided with a light absorptive antireflection film and process for its production
11/02/1999US5976661 Magnetic recording medium and method of fabricating the same
11/02/1999US5976641 Intermetallic target
11/02/1999US5976639 Black matrix laminated film and reactive sputtering apparatus
11/02/1999US5976637 Dielectric over metal
11/02/1999US5976636 Magnetic apparatus for arc ion plating
11/02/1999US5976634 Gold plating process for plastic substrates
11/02/1999US5976624 Process for producing bismuth compounds, and bismuth compounds
11/02/1999US5976444 Nanochannel glass replica membranes
11/02/1999US5976334 Reliable sustained self-sputtering
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