Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
01/2000
01/26/2000EP0973955A1 Method for producing a coating containing titanium boride
01/26/2000EP0791226B1 Device for coating substrates using a vapour phase material in a reduced pressure or vacuum environment
01/26/2000EP0764221A4 Apparatus for deposition of thin-film, solid state batteries
01/26/2000EP0758408A4 Rectangular vacuum-arc plasma source
01/26/2000CN1242576A Plastic card covered by gold film, and method for mfg. same
01/26/2000CN1242480A Plain bearing and method for the production thereof
01/25/2000US6018454 Metallized film, a production method thereof, and a capacitor using it
01/25/2000US6017820 Integrated vacuum and plating cluster system
01/25/2000US6017581 Using fixture for releasably retaining at least one lenticular article in a fixed orientation while the article is being subjected to one or more applications of a thin film coating process
01/25/2000US6017553 Formed by depositing an anti-microbial, biocompatible metal by vapor deposition techniques to produce atomic disorder in the coating such that a sustained release of metal ions sufficient to produce an anti-microbial effect is achieved
01/25/2000US6017401 Conductivity improvement in thin films of refractory metal
01/25/2000US6017396 Plasma film forming apparatus that prevents substantial irradiation damage to the substrate
01/25/2000US6017144 Method and apparatus for depositing highly oriented and reflective crystalline layers using a low temperature seeding layer
01/20/2000WO2000003414A1 Feedthrough overlap coil
01/20/2000WO2000003399A1 Primary target for forming fission products
01/20/2000WO2000003057A1 Multi-position load lock chamber
01/20/2000WO2000003054A1 Method for ion plating of synthetic resin and molded synthetic resin article having ion-plated coating
01/20/2000DE19933213A1 Apparatus and method for surface treatment of semiconductor substrates, involving collection, detection, analysis and evaluation of infrared (or near infrared) radiation from substrates for purposes of control of treatment conditions
01/20/2000DE19831849A1 Bedienblendeneinheit für elektrisch betriebene Haushaltsgeräte Control panel unit for electrically operated household devices
01/20/2000DE19831032A1 Base module as central transport module for work centers of cluster type for mfr. of microsystems and components on wafers etc.
01/20/2000DE19830794A1 System and method for measuring layer thickness on substrates utilize the motion of the substrates relative to a measuring head during their transport along a given track
01/19/2000EP0972853A1 Article having a thermal barrier coating based on a phase-stable solid solution of two ceramics and apparatus and method for making the article
01/19/2000EP0972851A2 Sliding member having chromium nitride film formed thereon
01/19/2000EP0972561A2 Vacuum apparatus
01/19/2000EP0972485A2 Control panel for electrical household devices
01/19/2000EP0972091A1 Multilayer coated tool
01/19/2000EP0842306B1 Improvements in and relating to methods for improving the sputter desposition of metal-sulphur coatings, e.g. molybdenum disulphide coatings and to improved coatings
01/19/2000CN1241800A Method for operation of high-power electron beam
01/19/2000CN1241646A Copper-to-sulfur atom ratio regulating technology for cuprous sulfide film
01/19/2000CN1048551C Composite article comprising oriented microstructures
01/19/2000CN1048528C Nickel base deforming alloy target material for sputtering glass coating film
01/18/2000USRE36517 Thin film magnet, cylindrical ferromagnetic thin film and production method thereof
01/18/2000US6016241 Magnetoresistive sensor utilizing a granular magnetoresistive layer
01/18/2000US6016036 Magnetic filter for ion source
01/18/2000US6015917 Precursors for liquid delivery chemical vapor deposition
01/18/2000US6015802 Synergistic fungicidal composition comprising a compound analogous to strobilurin
01/18/2000US6015594 Method and apparatus for forming a film by sputtering process
01/18/2000US6015588 Microelectronics with multilayer plates
01/18/2000US6015478 Vacuum processing method
01/18/2000US6014944 Apparatus for improving crystalline thin films with a contoured beam pulsed laser
01/18/2000CA2054916C Production of reflecting objects
01/18/2000CA2027972C Chromium-nitrogen alloy coating with improved resistance and method for producing the same
01/13/2000WO2000001867A1 Method for synthesizing n-type diamond having low resistance
01/13/2000WO1999059759A3 Low work function surface layers produced by laser ablation using short-wavelength photons
01/13/2000DE19930133A1 Carbon film is sputter deposited in a nitrogen-containing gas and then vacuum heat treated
01/13/2000DE19841012C1 Apparatus for plasma-activated vapor coating of substrates in vacuum
01/13/2000DE19830530A1 Production of titanium surfaces coated with calcium phosphate, especially for making medical prostheses or implants
01/12/2000EP0971388A2 Device and procedure for PVD coating of multiple layers on substrates
01/12/2000EP0971048A1 Amorphous carbon containing layer and process for its fabrication
01/12/2000EP0970261A1 Magnesium oxide sputtering apparatus
01/12/2000CN1241022A Method and apparatus for monitoring charge neutralization operation
01/12/2000CN1240889A Bush and its making method
01/12/2000CN1240840A Magnetic film and its making method
01/12/2000CN1048291C Method for Preparation of reinforced ion beam-deposited hydroxyl apatite coating for medical implant
01/11/2000US6013372 Method for photocatalytically rendering a surface of a substrate superhydrophilic, a substrate with superhydrophilic photocatalytic surface, and method of making thereof
01/11/2000US6013332 Ionizing decaborane, implanting ionized decaborane into silicon wafer
01/11/2000US6013162 Method of handling a substrate after sputtering and sputtering apparatus
01/11/2000US6013159 Particle trap in a magnetron sputtering chamber
01/11/2000US6012413 Electron beam source for use with varying sizes of crucibles
01/11/2000US6012235 Vacuum processing apparatus and operating method therefor
01/11/2000CA2153345C Low polarization sensitivity gold mirrors on silica
01/11/2000CA2102384C High impedance plasma ion implantation method and apparatus
01/11/2000CA2089099C Broad beam flux density control
01/06/2000WO2000001000A1 Dc sputtering process for making smooth electrodes and thin film ferroelectric capacitors having improved memory retention
01/06/2000WO2000000987A1 Light colored, electrically conductive coated particles
01/06/2000WO2000000766A1 Vacuum tight coupling for tube sections
01/06/2000WO2000000661A1 Sputter target
01/06/2000WO1999054060A3 Loading especially metallic or metal-ceramic technical surfaces with a fluoro-organic compound
01/06/2000CA2335029A1 Light colored, electrically conductive coated particles
01/05/2000EP0969457A2 Sputtering target, method of producing the target and method of fabricating an optical recording medium
01/05/2000EP0969238A1 Vacuum tight coupling for tube sections
01/05/2000EP0969122A1 Surface preparation process for deposition of ceramic coating
01/05/2000EP0969118A2 Surface hardening of resins
01/05/2000EP0969117A2 Method of forming a thermal barrier coating system
01/05/2000EP0969115A1 Method of vacuum vaporization of metals
01/05/2000EP0968318A1 Pulsed mode deposition for low rate film deposition
01/05/2000EP0968317A1 Method of forming internal passages within articles and articles formed by same
01/05/2000EP0880606B1 Method and device for control of a vacuum vaporization process
01/05/2000EP0655974B1 Antireflection coatings
01/05/2000DE4126236C2 Rotierende Magnetron-Kathode und Verwendung einer rotierenden Magnetron-Kathode Rotating magnetron cathode and using a rotating magnetron cathode
01/05/2000DE19845268C1 Coating a strip-shaped substrate with a transparent barrier layer of aluminum oxide through reactive evaporation of aluminum
01/05/2000CN1240486A Low friction coating
01/05/2000CN1240236A Dry method preparing copperous sulfide film
01/04/2000US6010761 Optical disc
01/04/2000US6010750 Vaporizing lithium; positioning lithium soluble element in lithium vapors; oxidation; vapor deposition
01/04/2000US6010749 Process for the production of volatile metal
01/04/2000US6010602 Annealed low emissivity coating
01/04/2000US6010600 Maskless deposition technique for the physical vapor deposition of thin film and multilayer coatings with subnanometer precision and accuracy
01/04/2000US6010583 Method of making unreacted metal/aluminum sputter target
01/04/2000US6009829 Apparatus for driving the arc in a cathodic arc coater
01/04/2000US6009728 Die for press-molding optical elements
01/04/2000US6009667 Hinge mechanism for supporting the open-close cover of a vacuum-process apparatus
12/1999
12/30/1999DE19929184A1 Radio frequency plasma enhanced chemical vapor deposition of diamond like films onto medical devices such as catheter wires
12/30/1999DE19828846A1 Verfahren zum Beschichten eines Substrats A method for coating a substrate
12/29/1999WO1999056057B1 Fluid storage and dispensing system
12/29/1999EP0967667A2 Apparatus and method for preparing organic el device
12/29/1999EP0967639A1 CVD/PVD method of filling structures using discontinuous CVD Al liner
12/29/1999EP0967296A2 Method for coating a substrate
12/29/1999EP0967008A2 Film of titanium dioxide containing silicon dioxide and a method of forming the same
12/29/1999EP0966910A1 Stick resistant coating for cookware